JPS613933A - Controlling system of air conditioning of special working room - Google Patents
Controlling system of air conditioning of special working roomInfo
- Publication number
- JPS613933A JPS613933A JP12489784A JP12489784A JPS613933A JP S613933 A JPS613933 A JP S613933A JP 12489784 A JP12489784 A JP 12489784A JP 12489784 A JP12489784 A JP 12489784A JP S613933 A JPS613933 A JP S613933A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- damper
- door
- control
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
本発明は、超LSI製造や精密機械の組立、若しくは未
知の微生物等を取扱うバイオテクノロジーの実験などの
特殊作業を行なういわゆるクリンルームの空調制御方式
に関する。[Detailed description of the invention] [Technical field to which the invention pertains] The present invention relates to air conditioning control of so-called clean rooms where special operations such as ultra-LSI manufacturing, precision machinery assembly, or biotechnology experiments involving unknown microorganisms are performed. Regarding the method.
外界からの塵埃の侵入を防ぎ超清浄な環境を保゛つため
には室内を陽圧に制御する必要があり、菌や有害物質を
外界へ漏洩するのを防止するには室内を陰圧に制御する
必要がある。In order to prevent dust from entering from the outside world and maintain an ultra-clean environment, it is necessary to maintain positive pressure indoors, and to prevent bacteria and harmful substances from leaking to the outside world, it is necessary to maintain negative pressure indoors. need to be controlled.
このような要請から室内を定風量、定室圧に維持し、か
つファンの可変風量運転を採用することにより給排気空
間用ファンの省動力化を実現する制御方式が提案されて
いるが、まずかかる方式の従来例について説明し、よっ
て本発明の目的を明らかにする。In response to these demands, a control method has been proposed that maintains a constant air volume and room pressure indoors, and uses variable air volume operation of the fan to save power for fans in air supply and exhaust spaces. A conventional example of such a system will be explained, thereby clarifying the object of the present invention.
第3図は従来例を示すブロック図で、タリンルーム1,
1′にはそれぞれ室内を所望圧力に保つべく循環ファン
2,2“を有する循環ダクト3゜3′が備えつけられ、
各ダクl−3,3’の吹出口には超高性能フィルタ (
HEPAフィルタ)4.4’が配設されている。
・
そして、前記循環ファン2,2′にはダンパ5゜5′を
設けた給気ダクト6が連結され、その流入側には給気フ
ァン7が設けられ、一方、クリソルーム1.11内に設
置した微差圧計8.8′の検知結果に応じて、調節計9
,9°を介して前記ダンパ5,5′は開閉制御される。Figure 3 is a block diagram showing a conventional example.
1' is equipped with a circulation duct 3゜3' having circulation fans 2, 2'' to maintain the desired pressure inside the room, respectively.
An ultra-high performance filter (
A HEPA filter) 4.4' is installed.
- An air supply duct 6 provided with a damper 5°5' is connected to the circulation fans 2 and 2', and an air supply fan 7 is provided on the inflow side of the air supply duct 6. Depending on the detection result of the installed differential pressure gauge 8.8', the controller 9
, 9 degrees, the dampers 5 and 5' are controlled to open and close.
また、クリソルーム1,11内には複数台のドラフトチ
ャンバ10.10’が置かれ、該ドラフトチャンバ10
,10°に連結される排気ダクト11には排気ファン1
2が設けられている。Further, a plurality of draft chambers 10, 10' are placed in the chrysorooms 1 and 11, and the draft chambers 10 and 10'
, an exhaust fan 1 is connected to the exhaust duct 11 connected to the
2 is provided.
図中13は制御用のマイクロコンピュータで、該コンピ
ュータ13はドラフトチャンバ10゜10’より出力を
受けて使用台数を検出し、この検出結果にもとづいて排
気ファン12の回転数を制御する。そしてクリンルーム
1,1′の室内の変動を生じた場合は、微差圧計8.8
′がこれを検知して調節計9,9“によりダンパ5,5
゛を開閉制御する。ところで、ダンパ5,5”が全開に
なっても所望の圧力が得られない場合、該ダンパ5,5
′はこれに設けられているリミットスイッチ(図示せず
)を介してコンピュータ13に全開信号を入力し、コン
ピュータ13はこの全開信号を受けて給気ファン7の回
転数を上昇させるように制御する。In the figure, reference numeral 13 denotes a control microcomputer. The computer 13 receives output from the draft chamber 10.degree. 10', detects the number of devices in use, and controls the rotational speed of the exhaust fan 12 based on the detection result. If fluctuations occur in the clean room 1, 1', use a differential pressure gauge 8.8.
' detects this and the dampers 5, 5 are activated by the controllers 9, 9''.
゛Control opening and closing. By the way, if the desired pressure cannot be obtained even if the dampers 5, 5'' are fully opened, the dampers 5, 5''
' inputs a full open signal to the computer 13 via a limit switch (not shown) provided therein, and the computer 13 receives this full open signal and controls the air supply fan 7 to increase its rotational speed. .
このようにダンパ5,5′の開閉制御と給気ファン7の
回転数制御という2段階の制御を行なうことで、きめの
細かな制御が実施でき、また不用意に給気ファン7の回
転数を上昇させることなく省動力運転を実現できるもの
である。(以上の定風量定室圧制御システムについては
雑誌「計装」の1983年6月号参照)
ところで、前記クリンルーム1.1′は例えば゛ 1が
高圧室、1゛が低圧室として構成され相互に扉14を介
して連続している場合には、該扉14を開いた際にルー
ム1から1′へと空気の流れ、いわゆるスルーパスが生
じ、各室毎に設定された定風量、定置圧制御の目標値か
ら大きく外れたものとなってしまう。また、扉14が閉
じたとしても元の状態にもどすまでの事後の復旧に長時
間を必要としたものであった。By performing the two-step control of opening/closing the dampers 5 and 5' and controlling the rotation speed of the air supply fan 7 in this way, fine-grained control can be carried out, and the rotation speed of the air supply fan 7 can be controlled inadvertently. This makes it possible to realize power-saving operation without increasing the (For the above constant air volume constant room pressure control system, see the June 1983 issue of the magazine "Kinsou") By the way, the clean room 1.1' is configured such that 1 is a high pressure room and 1 is a low pressure room. If they are connected to each other through a door 14, when the door 14 is opened, air flows from room 1 to room 1', a so-called through path, and the constant air volume and stationary air flow set for each room occur. This results in a value that deviates significantly from the target value of pressure control. Further, even if the door 14 is closed, it takes a long time to restore the door to its original state.
本発明の目的は前記従来例の不都合を解消し、室相互に
スルーパスが形成されてもこれによる変動を最少限にと
どめ、またスルーパスがなくなった事後の復旧も短時間
で行なえるようにして、制御性能の低下を防止できる特
殊作業室の空調制御方式を提供することにある。The purpose of the present invention is to eliminate the disadvantages of the conventional example, to minimize fluctuations caused by the formation of through paths between rooms, and to enable recovery in a short time after the through path is lost. An object of the present invention is to provide an air conditioning control method for a special work room that can prevent a decline in control performance.
しかしてこの目的は本発明によれば、ドラフトチャンバ
の使用台数を検出してコンピュータが排気ファンの回転
数を制御し、室圧変動を検出してダンパの開閉と給気フ
ァンの回転数制御という2段階の給気制御を行なう定風
量定室圧制御システムにおいて、ダンパはコンピュータ
により開閉制御可能なものとし、連続する高圧室、低圧
室間の扉に開閉検知器を設け、該検知器から扉の開信号
を受けた場合はコンビエータは周囲との差圧が許容値で
あるか否かを判断し、許容値以下であれば給気ファンの
回転数を増加し、一方、許容値内であれば高圧室のダン
パの追従性を同上させ、低圧室のダンパの追従性を低下
させることにより達成される。However, according to the present invention, the purpose of the lever is to detect the number of draft chambers in use and have the computer control the rotation speed of the exhaust fan, and to detect room pressure fluctuations to open and close the damper and control the rotation speed of the supply air fan. In a constant air volume constant room pressure control system that performs two-stage air supply control, the damper can be opened and closed by a computer, and an open/close detector is installed on the door between the consecutive high-pressure chambers and low-pressure chambers. If the open signal is received, the combiator determines whether the differential pressure with the surroundings is within the allowable value, and if it is below the allowable value, increases the rotation speed of the air supply fan; For example, this can be achieved by increasing the followability of the damper in the high pressure chamber and reducing the followability of the damper in the low pressure chamber.
以下、図面について本発明の実施例を詳細に説明する。 Embodiments of the present invention will be described in detail below with reference to the drawings.
第1図は本発明の実施例を示すブロック図、第2図はフ
ローチャートで、第1図において前記従来例を示す第3
図と開−構成要素には同一参照番号を付した。FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a flowchart, and FIG.
Figures and illustrations - Components have been given the same reference numerals.
すなわち、高圧室と低圧室のクリンルーム1゜11内の
ドラフトチャンバ10.10’は駆動信号をマイクロコ
ンピュータ13に送す、コンピュータ13はこの信号を
受けてドラフトチャンバ10゜10’の使用台数を検出
しそれに応じて排気ファン12の回転数を制御する。本
発明では、ルーム1.1°内に配設した微差圧計8,8
′の圧力検知信号をコンピュータ13に導入し、循環フ
ァン2.2′への流入側に設けられるダンパ5,5′へ
コンピュータ13からの開閉制御信号を導入し、該コン
ピュータ13でダンパ5,51を開閉制御するようにし
た。これにより、従来必要とされた調節針9,9° (
第3図参照)が不要となり、また、ダンパ5,5′の開
閉状態はコンピユータ13自体が発する開閉制御信号(
デジタル値)をそのままダンパ開度に換算することによ
り検゛知できるので、ダンパ5,51に設けるリミット
スイッチや配線も省略できる。That is, the draft chambers 10.10' in the clean room 1.11 of the high-pressure room and the low-pressure room send drive signals to the microcomputer 13. Upon receiving this signal, the computer 13 determines the number of draft chambers 10.10' to be used. The rotation speed of the exhaust fan 12 is controlled accordingly. In the present invention, the differential pressure gauges 8, 8 disposed within the room 1.1°
' is introduced into the computer 13, an opening/closing control signal from the computer 13 is introduced into the dampers 5, 5' provided on the inflow side to the circulation fan 2.2', and the computer 13 controls the dampers 5, 51. Controlled opening/closing. As a result, the adjustment needle 9.9° (
(see Fig. 3) is no longer required, and the opening/closing state of the dampers 5, 5' is determined by the opening/closing control signal (see Fig. 3) generated by the computer 13 itself.
Since the detection can be made by directly converting the digital value) into the damper opening degree, limit switches and wiring provided on the dampers 5 and 51 can be omitted.
一方、給気フアンマに回転制御信号を与えてコンピュー
タ13で回転数を制御する点は従来と同じであり、該コ
ンピュータ13はこの回転制御信号を出すことにより同
時に給気ファン7の風量を検知できることになる。On the other hand, it is the same as before that the rotation speed is controlled by the computer 13 by giving a rotation control signal to the air supply fan, and the computer 13 can simultaneously detect the air volume of the air supply fan 7 by issuing this rotation control signal. become.
このようにして、ダンパ5,5′の開閉と給気フプン7
との2段階の制御を行なうわけであるが、高圧室のクリ
ンルーム1と低圧室のクリンルーム11とを連続する5
fl14にリミットスイッチを用いた開閉検知器15を
設け、該開閉検知器15の出力信号をコンピュータ13
に導入するようにした。In this way, the dampers 5 and 5' are opened and closed, and the air supply hood 7 is opened and closed.
Two-stage control is performed, and the high-pressure room clean room 1 and the low-pressure room clean room 11 are connected to
An open/close detector 15 using a limit switch is provided in the fl14, and the output signal of the open/close detector 15 is sent to the computer 13.
I decided to introduce it to .
(“°1゛″″ゞ″゛゛゛””6”“″“′″扉の開信
号がコンピュータ13に入力される(ステップイ)、そ
してコンピュータ13は今まで行なっていた制御プログ
ラムの実行を停止し、クリンルーム1,11の両方を一
体として扱い、室内と周囲との差圧が許容値内であるか
、それ以下であるかを判断する。そして、許容値以下で
あれば、給気ファン7の回転数を増加させ周囲に対して
必要な差圧を確保する(ステップハ)。("°1゛""ゞ"゛゛゛""6""""'''The door open signal is input to the computer 13 (step), and the computer 13 stops executing the control program that has been running so far. Then, treat both clean rooms 1 and 11 as one unit and determine whether the differential pressure between the room and the surroundings is within or below the allowable value.If it is below the allowable value, turn on the air supply fan. 7 to ensure the necessary differential pressure with respect to the surroundings (Step C).
また、許容値内であれば、高圧室であるクリソルーム1
側のダンパ5の追従性を向上させ、低圧室であるクリソ
ルーム1°側のダンパ51の追従性を低下させる(ステ
ップニ)。なお、追従性を向上させるとは、ダンパの比
例定数を上げる、つまり動作感度を上げることである。In addition, if it is within the allowable value, chrysoroom 1, which is a hyperbaric chamber,
The followability of the damper 5 on the side is improved, and the followability of the damper 51 on the 1° side of the chrysoroom, which is a low pressure chamber, is decreased (Step 2). Note that improving followability means increasing the proportionality constant of the damper, that is, increasing the operating sensitivity.
扉14が開くとスルーパスが形成され、クリンルーム1
は圧力低下によりダンパ5が開いていくがそれに従って
ルーム1への空気量を増してルーム1からルーム1′へ
、すなわち高圧室から低圧室への気流を確保することに
なる。一方、低圧室としてのクリンルーム11ではダン
パ5′は閉まろうとしたが、圧力が高くなるのはダンパ
5”が全閉に近くなる時であり、無意味にこのダンパ5
1を閉じてやる必要はない。むしろ、前記のごとく追従
性を低下させて、扉14が閉ってスルーパスがなくなっ
た後の復旧速度が向上するように配慮した。When the door 14 opens, a through path is formed and the clean room 1
The damper 5 opens as the pressure decreases, and the amount of air flowing into the room 1 is accordingly increased to ensure air flow from the room 1 to the room 1', that is, from the high pressure chamber to the low pressure chamber. On the other hand, in the clean room 11 as a low-pressure room, the damper 5' tried to close, but the pressure increases when the damper 5'' is close to being fully closed, so this damper 5'
There is no need to close 1. Rather, consideration was given to reducing the followability as described above so as to improve the recovery speed after the door 14 is closed and there is no through path.
ところで、扉14が閉まっている場合、開閉検知器15
からの扉開信号が送られた時点により今まで扉14が開
いていたか否かをコンピュータ13は判断する(スナッ
プホ)。そして、扉14が閉じた直後であれば、スルー
パスがなくなった事後の復旧を一層早めるためにダンパ
5,5°の追従性を向上させる(ステップへ)。また、
扉14が長い開閉っていたものであれば、通常の定態量
定室圧制御を行なうようにダンパ5,5′の開度を制御
する(ステンプト)。By the way, when the door 14 is closed, the opening/closing detector 15
The computer 13 determines whether the door 14 has been open until now based on the time when the door open signal is sent from the computer 13 (Snapshot). Then, immediately after the door 14 is closed, the followability of the dampers 5, 5° is improved in order to further speed up the recovery after the through path disappears (go to step). Also,
If the door 14 has been open/closed for a long time, the opening degree of the dampers 5, 5' is controlled so as to perform normal constant volume constant room pressure control (step).
以上述べたように本発明の特殊作業室の空調制御方式は
、ドラフトチャンバの使用台数を検出してコンピュータ
が排気ファンの回転数を制御し、室圧変動を検出してダ
ンパの開閉と給気ファンの回転数制御という2段階の給
気制御を行なう定態量定室圧制御システムにおいて、ク
リンルーム間が扉で連続し、その開閉によりスルーパス
が生じる場合でもこれによる変動を最少限にとどめるこ
とができ、また扉が閉じられてスルーパスがなくなった
後の復旧も短時間で行なえるようになり、その結果制御
性能の低下を防止できるものである。As described above, in the air conditioning control system for a special work room of the present invention, the computer detects the number of draft chambers in use and controls the rotation speed of the exhaust fan, and detects room pressure fluctuations to open and close the damper and air supply. In a constant volume, constant room pressure control system that performs two-stage air supply control of fan rotation speed control, even if the clean rooms are connected by doors and through-passes occur due to the opening and closing of the doors, the fluctuations caused by this can be kept to a minimum. This also makes it possible to recover quickly after the door is closed and the through path disappears, and as a result, it is possible to prevent a decline in control performance.
第1図は本発明の特殊作業室の空調制御方式の実施例を
示すブロック図、第2図は実施例を示すフローチャート
、第3図は従来方式を示すブロック図である。
1.1′・・・クリンルーム 2,21・・・循環ファ
ン3.3′・・・循環ダクト
4.4′・・・超高性能フィルタ
5.5゛・・・ダンパ 6・・・給気ダクト7・
・・給気ファン 8,8“・・・微差圧計9.
91・・・調節針
10.10 ’・・・ドラフトチャンバ11・・・排気
ダクト 12・・・排気ファン13・・・マイ
クロコンピュータ
14・・・扉 15・・・開閉検知器
比L Rあ建設、i社FIG. 1 is a block diagram showing an embodiment of the air conditioning control method for a special work room of the present invention, FIG. 2 is a flowchart showing the embodiment, and FIG. 3 is a block diagram showing a conventional method. 1.1'...Clean room 2,21...Circulation fan 3.3'...Circulation duct 4.4'...Ultra high performance filter 5.5'...Damper 6...Supply air duct 7・
...Air supply fan 8,8"...Slight differential pressure gauge9.
91...Adjusting needle 10.10'...Draft chamber 11...Exhaust duct 12...Exhaust fan 13...Microcomputer 14...Door 15...Opening/closing detector ratio L R A construction , company i
Claims (1)
排気ファンの回転数を制御し、室圧変動を検出してダン
パの開閉と給気ファンの回転数制御という2段階の給気
制御を行なう定風量定室圧制御システムにおいて、ダン
パはコンピュータにより開閉制御可能なものとし、連続
する高圧室、低圧室間の扉に開閉検知器を設け、該検知
器から扉の開信号を受けた場合はコンピュータは周囲と
の差圧が許容値であるか否かを判断し、許容値以下であ
れば給気ファンの回転数を増加し、一方、許容値内であ
れば高圧室のダンパの追従性を向上させ、低圧室のダン
パの追従性を低下させることを特徴とした特殊作業室の
空調制御方式。The computer detects the number of draft chambers in use and controls the rotation speed of the exhaust fan, and detects room pressure fluctuations to perform two-step air supply control: opening and closing the damper and controlling the rotation speed of the air supply fan. In the room pressure control system, the damper can be controlled to open and close by a computer, and an open/close detector is installed on the door between the consecutive high-pressure and low-pressure chambers.When a door open signal is received from the detector, the computer If the differential pressure is within the allowable value, the rotation speed of the air supply fan is increased, and if it is within the allowable value, the follow-up performance of the damper in the high pressure chamber is improved. , an air conditioning control system for special work rooms that is characterized by reducing the followability of dampers in low-pressure rooms.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12489784A JPS613933A (en) | 1984-06-18 | 1984-06-18 | Controlling system of air conditioning of special working room |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12489784A JPS613933A (en) | 1984-06-18 | 1984-06-18 | Controlling system of air conditioning of special working room |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS613933A true JPS613933A (en) | 1986-01-09 |
JPH0252775B2 JPH0252775B2 (en) | 1990-11-14 |
Family
ID=14896807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12489784A Granted JPS613933A (en) | 1984-06-18 | 1984-06-18 | Controlling system of air conditioning of special working room |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS613933A (en) |
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JP4714517B2 (en) * | 2005-07-12 | 2011-06-29 | ダイダン株式会社 | Air conditioning system |
CN113179656A (en) * | 2019-11-26 | 2021-07-27 | 东芝三菱电机产业***株式会社 | SCADA webpage HMI system |
-
1984
- 1984-06-18 JP JP12489784A patent/JPS613933A/en active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996006314A1 (en) * | 1994-08-18 | 1996-02-29 | Phoenix Controls Corporation | Air flow control for pressurized room facility |
US5545086A (en) * | 1994-08-18 | 1996-08-13 | Phoenix Controls Corporation | Air flow control for pressurized room facility |
US5538471A (en) * | 1994-11-15 | 1996-07-23 | Innovative Air Systems, Inc. | Dynamic particulate control system and method of operation |
JP2002039580A (en) * | 2000-07-27 | 2002-02-06 | Okumura Corp | Method of controlling indoor pressure in high-purity clean facility |
JP4558152B2 (en) * | 2000-07-27 | 2010-10-06 | 株式会社奥村組 | Room pressure control method in advanced clean facility |
JP2006292280A (en) * | 2005-04-11 | 2006-10-26 | Dai-Dan Co Ltd | Air conditioning system |
JP2011133221A (en) * | 2011-02-09 | 2011-07-07 | Dai-Dan Co Ltd | Air conditioning system |
JP2015001360A (en) * | 2013-06-18 | 2015-01-05 | アズビル株式会社 | Automatic air capacity control method in central air conditioning system |
JP2018009713A (en) * | 2016-07-11 | 2018-01-18 | 株式会社日立製作所 | Air conditioning system for clean room |
Also Published As
Publication number | Publication date |
---|---|
JPH0252775B2 (en) | 1990-11-14 |
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