JPH08141966A - Handling mechanism of glass base plate - Google Patents

Handling mechanism of glass base plate

Info

Publication number
JPH08141966A
JPH08141966A JP6304259A JP30425994A JPH08141966A JP H08141966 A JPH08141966 A JP H08141966A JP 6304259 A JP6304259 A JP 6304259A JP 30425994 A JP30425994 A JP 30425994A JP H08141966 A JPH08141966 A JP H08141966A
Authority
JP
Japan
Prior art keywords
glass substrate
chuck
sides
handling mechanism
air cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6304259A
Other languages
Japanese (ja)
Inventor
Tsutomu Nakadai
勉 中台
Tomio Kakimoto
富生 柿本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP6304259A priority Critical patent/JPH08141966A/en
Publication of JPH08141966A publication Critical patent/JPH08141966A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/066—Transporting devices for sheet glass being suspended; Suspending devices, e.g. clamps, supporting tongs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces

Landscapes

  • Feeding Of Workpieces (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE: To provide a handling mechanism applicable to glass base plates having various sizes, for chucking the center parts of respective four sides. CONSTITUTION: A handling mechanism 5 is constituted of a rising and lowering mechanism 51, a positioning part 52, and four chuck parts 53, and the rising and lowering mechanism 51 is composed of an air cylinder 511 fixed on the moving part 33 of a conveying mechanism 3, and rising and lowering arms 512 to be raised and lowered by the air cylinder.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】この発明は、方形のガラス基板用
のハンドリング機構に関する。FIELD OF THE INVENTION This invention relates to a handling mechanism for rectangular glass substrates.

【０００２】[0002]

【従来の技術】液晶パネルのカラーフィルタは方形のガ
ラス基板を素材として製作される。ガラス基板は、表面
に異物が付着するとカラーフィルタの特性が劣化するの
で、素材またはカラーフィルタが形成された段階で、異
物の有無が検査装置により検査される。なお、最近にお
いては液晶パネルの大型化に伴って、ガラス基板も大型
のものが使用されている。2. Description of the Related Art A color filter of a liquid crystal panel is manufactured by using a rectangular glass substrate as a material. When a foreign material adheres to the surface of the glass substrate, the characteristics of the color filter deteriorate. Therefore, the presence or absence of the foreign material is inspected by an inspection device when the material or the color filter is formed. In addition, recently, as the size of the liquid crystal panel is increased, a large glass substrate is also used.

【０００３】図５により、最近における大型のガラス基
板１のサイズを説明すると、その縦幅ＷH と横幅ＷL
は、例えば、３１９×３８６ｍｍ2 ，３３９×３９６ｍ
ｍ2 ，４８４×４０６ｍｍ2 ，４８９×４３６ｍｍ2 な
どの各種があり、これらの厚さｔは０．７ｍｍまたは
１．２ｍｍである。このような厚さｔに比べて縦横の幅
が大きいため、ガラス基板１はあたかも紙のように湾曲
し易く、また破損し易い性質がある。The size of a recent large-sized glass substrate 1 will be described with reference to FIG. 5, and its vertical width W H and horizontal width W L are shown.
Is, for example, 319 × 386 mm 2 , 339 × 396 m
m 2, there are 484 × 406mm 2, 489 × variety such as 436mm 2, these thicknesses t is 0.7mm or 1.2 mm. Since the vertical and horizontal widths are larger than the thickness t, the glass substrate 1 has a property of being easily curved like paper and easily broken.

【０００４】図６により、検査装置４に対するガラス基
板１の搬送の概念を説明する。未検査用カセット２Ａに
収容されたガラス基板１は、搬送機構３のチャック部３
a にチャックされて検査装置４まで搬送され、検査ステ
ージ４a に載置されて検査光学系３b により検査され
る。検査が終了すると、ふたたびチャックされて検査済
みカセット２Ｂに搬送されて収容される。The concept of carrying the glass substrate 1 to the inspection device 4 will be described with reference to FIG. The glass substrate 1 housed in the uninspected cassette 2A is the chuck portion 3 of the transport mechanism 3.
It is chucked by a and conveyed to the inspection device 4, mounted on the inspection stage 4a, and inspected by the inspection optical system 3b. When the inspection is completed, it is chucked again and is transported to and housed in the inspected cassette 2B.

【０００５】[0005]

【発明が解決しようとする課題】当初においては、ガラ
ス基板１はサイズが小さく、また検査数量も少なかった
ので、チャック部３a は１種類のサイズに適合する簡易
な構造のものが使用されていた。しかし、上記のように
各種のサイズのガラス基板１のそれぞれに対して、チャ
ック部３a を交換することは非能率であるので、これら
のいずれにも適用できるフレキシブルなチャック部を有
するハンドリング機構が要請されている。また、ガラス
基板１が小さいときは、そのチャック位置には問題が無
いが、上記のような大型サイズの場合は、チャック位置
が不適当であるとガラス基板１は湾曲して搬送に支障す
る問題がある。図７は、大型のガラス基板１を、異なる
チャック位置で支持した場合の湾曲状態の説明図で、
(a) はガラス基板１の４隅Ａ1 〜Ａ4 をチャック爪３b
により支持した場合を示し、ガラス基板１の４辺１a,１
b,１c,１d はそれぞれ下方に湾曲し、これが限度を越え
ると４隅Ａ1 〜Ａ4 がチャック爪３b から外れ、ガラス
基板１は落下して破損する恐れがある。この場合の各辺
１a 〜１d の湾曲は、ガラス基板１の中心をＯとする
と、２隅Ａ1,Ａ2 と中心Ｏのなす３角形（Ａ1 Ａ2 Ｏ）
の自重により辺１a が湾曲すると考えてよい。他の各辺
１b 〜１d も同様である。これに対して(b) は、４辺１
a 〜１d のそれぞれの中点Ｂ1 〜Ｂ4 を支持した場合
で、この場合の湾曲は(a) に比べてかなり小さい。その
理由を説明すると、隣接する中点Ｂ1,Ｂ2 を結ぶ直線を
Ｃ1 、中点Ｂ3,Ｂ4 を結ぶ直線をＣ2 とし、直線Ｃ1 の
両側は、３角形（Ａ2 Ｂ1 Ｂ2)と、３角形（Ｂ1 Ｂ2
Ｏ）の自重により下方に湾曲するが、これらの自重は、
(a) における３角形（Ａ1 Ａ2 Ｏ）の２分の１であるか
ら、それぞれの湾曲は小さい。また直線Ｃ1 の部分の湾
曲はさらに小さい。直線Ｃ2 の両側も同様であり、従っ
て、対応する２隅Ａ2 とＡ4 とを結ぶＡ2 −Ａ4 断面の
湾曲は、(c) に示すように小さい。Ａ1 −Ａ3 断面にお
いても同様である。以上により(b) の支持方法は、(a)
に比べて湾曲がかなり小さいことが理解される。上記の
フレキシブルなチャック部には、このような４辺の中点
または中央部分をチャックするものが適切である。この
発明は上記の問題点を考慮してなされたもので、各種の
サイズのガラス基板のいずれにもフレキシブルに適用で
き、各ガラス基板の４辺の中央部分をチャックするチャ
ック部を有するハンドリング機構を提供することを目的
とする。Initially, since the glass substrate 1 was small in size and the inspection quantity was small, the chuck portion 3a had a simple structure suitable for one size. . However, as described above, it is inefficient to replace the chuck part 3a with respect to each of the glass substrates 1 of various sizes, and thus a handling mechanism having a flexible chuck part applicable to any of these is required. Has been done. Further, when the glass substrate 1 is small, there is no problem in the chuck position, but in the case of the above-mentioned large size, the problem is that the glass substrate 1 bends and interferes with conveyance when the chuck position is inappropriate. There is. FIG. 7 is an explanatory view of a curved state when the large glass substrate 1 is supported at different chuck positions,
(a) shows the four corners A 1 to A 4 of the glass substrate 1 as chuck claws 3 b
The case where the glass substrate 1 is supported by four sides 1a, 1 of the glass substrate 1 is shown.
b, 1c and 1d are respectively curved downward, and if these are exceeded, the four corners A 1 to A 4 may come off the chuck claws 3b and the glass substrate 1 may drop and be damaged. The curvature of each side 1a-1d in this case is a triangle (A 1 A 2 O) formed by the two corners A 1 and A 2 and the center O when the center of the glass substrate 1 is O.
It can be considered that the side 1a is curved due to its own weight. The same applies to the other sides 1b to 1d. On the other hand, (b) has 4 sides 1
In case of supporting the respective midpoints B 1 .about.B 4 of a through 1d, the curvature of this case is much smaller than the (a). Explaining the reason, the straight line connecting the adjacent midpoints B 1 and B 2 is C 1 , the straight line connecting the midpoints B 3 and B 4 is C 2, and both sides of the straight line C 1 are triangular (A 2 B 1 B 2 ) and a triangle (B 1 B 2
O) will bend downward due to its own weight.
Since it is one half of the triangle (A 1 A 2 O) in (a), each curve is small. The curvature of the straight line C 1 is even smaller. The same applies to both sides of the straight line C 2 , and therefore the curvature of the A 2 -A 4 cross section connecting the corresponding two corners A 2 and A 4 is small as shown in (c). The same applies to the A 1 -A 3 cross section. From the above, the support method of (b) is
It is understood that the curvature is much smaller than As the above-mentioned flexible chuck portion, one that chucks the midpoint or central portion of such four sides is suitable. The present invention has been made in consideration of the above problems, and can be flexibly applied to any of glass substrates of various sizes, and a handling mechanism having a chuck portion for chucking the central portion of the four sides of each glass substrate is provided. The purpose is to provide.

【０００６】[0006]

【課題を解決するための手段】この発明は、上記の目的
を達成したガラス基板のハンドリング機構であって、前
記の搬送機構の移動部に結合され、昇降機構により昇降
する中空の＋形フレームと、＋形フレームの内部に配設
され、直交する２本のボールねじおよび２本のスライド
棒と、各ボールねじに歯合し、それぞれの回転により各
スライド棒に沿って、互いに離間または接近して、ガラ
ス基板の４辺に対して位置合せされる２個１組の移動ブ
ロックを２組有する位置合せ部、および各移動ブロック
にそれぞれ固定され、エアシリンダにより回動して、ガ
ラス基板の４辺の中央部分を、それぞれチャックするチ
ャック爪を有する４個のチャック部、とにより構成され
る。DISCLOSURE OF THE INVENTION The present invention is a glass substrate handling mechanism that achieves the above-mentioned object, and is a hollow + type frame which is coupled to the moving part of the above-mentioned transport mechanism and which is moved up and down by an elevating mechanism. , + Type frame is arranged inside, and two ball screws and two slide rods orthogonal to each other are meshed with each ball screw, and each rotation causes them to move away from or close to each other along each slide rod. Then, the position of the glass substrate is fixed to each of the alignment portions having two sets of two moving blocks aligned with the four sides of the glass substrate, and each moving block is rotated by the air cylinder to move the glass substrate to the four sides. The central part of the side is composed of four chuck parts each having a chuck claw for chucking.

【０００７】[0007]

【作用】上記のハンドリング機構においては、位置合せ
部の各組の２個の移動ブロックは、中空の＋形フレーム
の内部に配設された、直交する２本のボールねじにそれ
ぞれ歯合し、これらの回転により各スライド棒に沿っ
て、互いに離間または接近して、サイズの異なるガラス
基板の４辺に対して位置合せされる。これとともに、各
移動ブロックに固定された各チャック部のチャック爪
も、４辺に対して位置合せされる。搬送機構の移動部に
結合された＋形フレームは、未検査のガラス基板を収容
したカセットの位置に移動して、昇降機構の動作により
下降し、各チャック部のチャック爪がエアシリンダの動
作により回動して、ガラス基板の４辺の中央部分をそれ
ぞれチャックし、ついで上昇して検査ステージに搬送さ
れ、ふたたび下降して、各チャック爪を解放してガラス
基板は検査ステージに載置される。検査済みのガラス基
板も同様のチャックと昇降により、検査ステージから検
査済みカセットに搬送されて収容される。上記におい
て、各チャック爪はガラス基板の４辺の中央部分をそれ
ぞれチャックするので、前記したように大型のガラス基
板でも湾曲が小さくて、落下などの恐れなく安定に搬送
される。In the above-mentioned handling mechanism, the two moving blocks of each set of the alignment portion are respectively meshed with the two orthogonal ball screws arranged inside the hollow + -shaped frame, By these rotations, the slide bars are aligned with each other with respect to the four sides of the glass substrates having different sizes, being spaced apart from or close to each other. Along with this, the chuck claws of each chuck portion fixed to each moving block are also aligned with the four sides. The + -shaped frame, which is connected to the moving part of the transfer mechanism, moves to the position of the cassette containing the uninspected glass substrate and moves down by the operation of the lifting mechanism, and the chuck claws of each chuck part move by the operation of the air cylinder. The glass substrate is rotated to chuck the central portions of the four sides of the glass substrate, and then is moved up to be conveyed to the inspection stage, and is moved down again to release the chuck claws and the glass substrate is placed on the inspection stage. . The inspected glass substrate is transported from the inspection stage to the inspected cassette and housed by the same chuck and lift. In the above description, since each chuck claw chucks the central portion of each of the four sides of the glass substrate, as described above, even a large glass substrate has a small curvature and is stably transported without fear of dropping.

【０００８】[0008]

【実施例】図１〜図４はこの発明の一実施例を示し、図
１は、搬送機構３とこの発明のハンドリング機構５の構
成図、図２は位置合せ部52の構成を示す平面図、図３は
チャック部53の構成を示し、(a) は正面図、(b) は側面
図、図４はガラス基板１のチャック状態の説明図であ
る。図１において、搬送機構３は、支持台31に設けた２
条のガイドレール32と、これに沿って移動する移動部33
を有し、適当な場所に、検査ステージ４a と未検査用カ
セット２Ａ、および検査済み用カセット２Ｂが配置され
る。ハンドリング機構５は、昇降機構51と、位置合せ部
52、４個のチャック部53とにより構成される。昇降機構
51は、搬送機構３の移動部33に固定されたエアシリンダ
511 と、これにより昇降する昇降アーム512 よりなる。
図２において、位置合せ部52は、昇降アーム512 の先端
に軸支された中空の＋形フレーム521 と、＋形フレーム
521 の内部にそれぞれ配設され、互いに直交し、中央部
の左右が右ねじと左ねじとされた２本のボールねじ522
、および２本のスライド棒523 、各ボールねじ522 の
左右に歯合した４個の移動ブロック524 、各ボールねじ
522 を回転する２個のノブ525 、ならびに、各移動ブロ
ック524 の位置を示す４個のスケール526 よりなる。図
３(a),(b) において、４個のチャック部53は同一構成
で、移動ブロック524に適当な間隔で固定された２枚の
固定板532 と、両固定板532 の点ｐ1 の位置に軸支さ
れ、両端に逆Ｌ形アーム534 を有する回転シャフト533
、両固定板532 の点ｐ2 の位置にそれぞれ軸支された
２個の直線形アーム535 、直線形アーム535と逆Ｌ形ア
ーム534 を、点ｐ3,ｐ4 で連結する２個の「ヘ」形アー
ム536 、両「ヘ」形アーム535 の下端を接続する接続板
537 とを有し、接続板537 に対して２個のチャック爪53
1 が適当な間隔で固定される。また、両直線形アーム53
5 の上端に結合された２個のエアシリンダ538 と、回転
シャフト533 に固定された回動板539 、これに対する２
個のストッパＳＴ1,ＳＴ2 とが設けられる。1 to 4 show an embodiment of the present invention, FIG. 1 is a structural view of a transport mechanism 3 and a handling mechanism 5 of the present invention, and FIG. 2 is a plan view showing the structure of an alignment section 52. 3, FIG. 3 shows the structure of the chuck portion 53, (a) is a front view, (b) is a side view, and FIG. 4 is an explanatory view of the chucked state of the glass substrate 1. In FIG. 1, the transfer mechanism 3 is provided on the support base 31.
Guide rail 32 and moving part 33 that moves along the guide rail 32
In addition, the inspection stage 4a, the uninspected cassette 2A, and the inspected cassette 2B are arranged at appropriate positions. The handling mechanism 5 includes an elevating mechanism 51 and an alignment section.
52 and four chuck portions 53. Lifting mechanism
51 is an air cylinder fixed to the moving part 33 of the transport mechanism 3.
It consists of 511 and a lifting arm 512 that moves up and down by this.
In FIG. 2, the alignment section 52 includes a hollow + -shaped frame 521 and a + -shaped frame 521 that are axially supported at the tip of the lifting arm 512.
Two ball screws 522 that are respectively arranged inside the 521, are orthogonal to each other, and the left and right of the central part are left and right threads
, And two slide rods 523, four moving blocks 524 meshed with the left and right sides of each ball screw 522, each ball screw
It consists of two knobs 525 that rotate 522, and four scales 526 that indicate the position of each moving block 524. In FIGS. 3 (a) and 3 (b), the four chuck portions 53 have the same structure and are composed of two fixed plates 532 fixed to the moving block 524 at appropriate intervals, and a point p 1 of both fixed plates 532. Rotating shaft 533 pivotally supported in position and having inverted L-shaped arms 534 at both ends
, Two linear arms 535 pivotally supported at the positions of the points p 2 of both fixing plates 532, and the two "" connecting the linear arm 535 and the inverted L-shaped arm 534 at the points p 3 and p 4. Connecting plate that connects the lower ends of the F-shaped arms 536 and both F-shaped arms 535
537 and two chuck claws 53 for the connection plate 537.
1 is fixed at an appropriate interval. Also, both straight arm 53
Two air cylinders 538, which are connected to the upper end of 5, and a rotating plate 539, which is fixed to the rotating shaft 533.
Individual stoppers ST 1 and ST 2 are provided.

【０００９】以下各図により、ガラス基板１のチャック
手順を説明する。まず、各スケール526 を参照しながら
各ノブ525 を回転して、各組の２個の移動ブロック524
を互いに離隔または接近し、チャック対象のガラス基板
１のサイズに対して位置合せする。また、各チャック爪
531 を、図３(b) の(イ) に示す待避状態とすると、回動
板539 とストッパＳＴ1 により、各アームは安定する。
ここで昇降機構51を動作して、位置合せ部52とともに各
チャック部53を下降し、待避している各チャック爪531
をガラス基板１の４辺に対応させる。ついで各エアシリ
ンダ538 を動作して、直線形アーム535 の上端を矢印Ｃ
5 の方向に押圧すると、点ｐ3 が矢印Ｃ2 の方向に移動
し、点ｐ2 とｐ3 の間隔が大きくなり、さらに押圧する
と、逆Ｌ形アーム534 が矢印Ｃ3 の方向に回転する。こ
のような各アームの動作により、チャック爪531 は矢印
Ｃ4 のように、はじめは下回りしながら漸次に上向きに
回動して、(ロ) に示すようにガラス基板１の底面に侵入
し、ストッパＳＴ2 により停止する。４個のチャック部
53はこのような動作を同時に行い、ガラス基板１は４辺
の中央部分がチャックされる。図４において、ガラス基
板１の４辺１a 〜１ｄの中央部分は、４個のチャック部
53のチャック爪531 によりチャックされており、前記し
たように、ガラス基板１が大型であっても湾曲が小さい
ので、落下などの恐れなく安定に保持されて、両カセッ
ト２Ａ，２Ｂと検査ステージ４a の相互間を搬送され
る。The procedure for chucking the glass substrate 1 will be described below with reference to the drawings. First, each knob 525 is rotated while referring to each scale 526, and each set of two moving blocks 524 is rotated.
Are separated from each other or close to each other and aligned with the size of the glass substrate 1 to be chucked. Also, each chuck claw
When 531 is placed in the retracted state shown in (a) of FIG. 3B, each arm is stabilized by the rotating plate 539 and the stopper ST 1 .
Here, the lifting mechanism 51 is operated to lower each chuck portion 53 together with the alignment portion 52, and each chuck claw 531 is retracted.
Correspond to the four sides of the glass substrate 1. Then, operate each air cylinder 538 to move the upper end of the linear arm 535 to the arrow C
When pressed in the direction of 5 , the point p 3 moves in the direction of the arrow C 2 and the distance between the points p 2 and p 3 increases, and when further pressed, the inverted L-shaped arm 534 rotates in the direction of the arrow C 3. . By the operation of each arm as described above, the chuck claw 531 is gradually rotated upward while being initially lowered as shown by an arrow C 4 , and enters the bottom surface of the glass substrate 1 as shown in (b). Stopped by stopper ST 2 . 4 chucks
53 simultaneously performs such an operation, and the glass substrate 1 is chucked at the central portions of the four sides. In FIG. 4, the central portion of the four sides 1a to 1d of the glass substrate 1 has four chuck portions.
Since the glass substrate 1 is chucked by the chuck claws 531 of 53 and has a small curvature even if the glass substrate 1 is large, as described above, the glass substrate 1 can be stably held without fear of falling, and both cassettes 2A and 2B and the inspection stage 4a. Are transported between each other.

【００１０】[0010]

【発明の効果】以上の説明のとおり、この発明のハンド
リング機構においては、位置合せ部により、各チャック
部のチャック爪は、異なるサイズのガラス基板に位置合
せされて、それぞれが確実にチャックされ、またガラス
基板はその４辺の中央部分がチャックされるので、大型
のガラス基板でも湾曲が小さくて、落下などの危険が無
く安定に搬送できるもので、大型化された各種のサイズ
のガラス基板にフレキシブルに適用でき、かつその搬送
の安定化に寄与する効果には大きいものがある。As described above, in the handling mechanism of the present invention, the chuck claws of each chuck part are aligned with the glass substrates of different sizes by the alignment part, and each is securely chucked. Also, since the central portion of the four sides of the glass substrate is chucked, even a large glass substrate can be stably transported without the risk of falling, and it can be used for glass substrates of various sizes. It can be applied flexibly and has a great effect in stabilizing the transportation.

【図面の簡単な説明】[Brief description of drawings]

【図１】図１は、この発明のハンドリング機構の一実施
例における構成図である。FIG. 1 is a configuration diagram of an embodiment of a handling mechanism of the present invention.

【図２】図２は位置合せ部の構成を示す平面図である。FIG. 2 is a plan view showing a configuration of an alignment unit.

【図３】図３はチャック部の構成を示し、(a) は正面
図、(b) は側面図である。3A and 3B show a configuration of a chuck portion, where FIG. 3A is a front view and FIG. 3B is a side view.

【図４】図４はガラス基板のチャック状態の説明図であ
る。FIG. 4 is an explanatory diagram of a chucked state of a glass substrate.

【図５】図５は、大型のガラス基板のサイズの説明図で
ある。FIG. 5 is an explanatory diagram of the size of a large glass substrate.

【図６】図６は、検査装置に対するガラス基板の搬送概
念の説明図である。FIG. 6 is an explanatory diagram of a concept of transporting a glass substrate to an inspection device.

【図７】図７は、大型のガラス基板に生ずる湾曲の説明
図であって、(a) は、コーナで支持した場合の説明図、
(b) は、中点で支持した場合の説明図である。FIG. 7 is an explanatory view of a curve generated in a large-sized glass substrate, (a) is an explanatory view of a case of being supported by a corner,
(b) is an explanatory view of the case of supporting at a midpoint.

【符号の説明】[Explanation of symbols]

１…ガラス基板、１a 〜１d …ガラス基板の４辺、２
Ａ，２Ｂ…カセット、３…搬送機構、31…支持台、32…
ガイドレール、33…移動部、４…検査装置、４a …検査
ステージ、４b …検査光学系、５…この発明のハンドリ
ング機構、51…昇降機構、511 …エアシリンダ、512 …
昇降アーム、52…位置合せ部、521 …中空の＋形フレー
ム、522 …ボールねじ、523 …スライド棒、524 …移動
ブロック、525 …ノブ、526 …スケール、53…チャック
部、531 …チャック爪、532 …固定板、533 …回転シャ
フト、534 …逆Ｌ形アーム、535 …直線形アーム、536
…ヘ形アーム、537 …接続板、538 …エアシリンダ 539 …回動板、ＳＴ1,ＳＴ2 …ストッパ。1 ... Glass substrate, 1a to 1d ... 4 sides of glass substrate, 2
A, 2B ... cassette, 3 ... transport mechanism, 31 ... support base, 32 ...
Guide rail, 33 ... Moving part, 4 ... Inspection device, 4a ... Inspection stage, 4b ... Inspection optical system, 5 ... Handling mechanism of this invention, 51 ... Lifting mechanism, 511 ... Air cylinder, 512 ...
Lifting arm, 52 ... Alignment part, 521 ... Hollow + frame, 522 ... Ball screw, 523 ... Slide rod, 524 ... Moving block, 525 ... Knob, 526 ... Scale, 53 ... Chuck part, 531 ... Chuck claw, 532 ... Fixed plate, 533 ... Rotating shaft, 534 ... Inverted L-shaped arm, 535 ... Linear arm, 536
... F-shaped arm, 537 ... Connection plate, 538 ... Air cylinder 539 ... Rotating plate, ST 1 , ST 2 ... Stopper.

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】各種のサイズの方形のガラス基板を対象と
し、該ガラス基板をチャックして、カセットと検査ステ
ージの間を搬送する搬送機構において、該搬送機構の移
動部に結合され、昇降機構により昇降する中空の＋形フ
レームと、該＋形フレームの内部にそれぞれ配設され、
直交する２本のボールねじ、および２本のスライド棒
と、該各ボールねじに歯合し、それぞれの回転により該
各スライド棒に沿って、互いに離間または接近して、前
記ガラス基板の４辺に対して位置合せされる２個１組の
移動ブロックを２組有する位置合せ部、および該各移動
ブロックに固定され、エアシリンダにより回動して、該
ガラス基板の４辺の中央部分を、それぞれチャックする
チャック爪を有する４個のチャック部、とにより構成さ
れたことを特徴とする、ガラス基板のハンドリング機
構。1. A transport mechanism for rectangular glass substrates of various sizes, which chucks the glass substrate and transports the glass substrate between a cassette and an inspection stage. And a hollow + -shaped frame that moves up and down by
Two ball screws and two slide rods that are orthogonal to each other are meshed with the respective ball screws, and each rotation causes the slide rods to be spaced apart from or close to each other along the respective slide rods to form four sides of the glass substrate. An alignment section having two sets of two moving blocks aligned with respect to each other, and fixed to each of the moving blocks and rotated by an air cylinder to move the central portion of the four sides of the glass substrate, A glass substrate handling mechanism comprising: four chuck portions each having a chuck claw for chucking.
JP6304259A 1994-11-14 1994-11-14 Handling mechanism of glass base plate Pending JPH08141966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6304259A JPH08141966A (en) 1994-11-14 1994-11-14 Handling mechanism of glass base plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6304259A JPH08141966A (en) 1994-11-14 1994-11-14 Handling mechanism of glass base plate

Publications (1)

Publication Number Publication Date
JPH08141966A true JPH08141966A (en) 1996-06-04

Family

ID=17930907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6304259A Pending JPH08141966A (en) 1994-11-14 1994-11-14 Handling mechanism of glass base plate

Country Status (1)

Country Link
JP (1) JPH08141966A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100648468B1 (en) * 2004-07-28 2006-11-24 주식회사 디이엔티 Tester Inspecting Many Kinds of Glass and The Method thereof
KR100889009B1 (en) * 2007-03-06 2009-03-19 장대환 Transferring and loading apparatus for possess low tolerance and multiple centering ability
KR101405055B1 (en) * 2012-10-30 2014-06-10 장대환 Car brake module for assembly robot hand
WO2022118544A1 (en) * 2020-12-02 2022-06-09 村田機械株式会社 Transport system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100648468B1 (en) * 2004-07-28 2006-11-24 주식회사 디이엔티 Tester Inspecting Many Kinds of Glass and The Method thereof
KR100889009B1 (en) * 2007-03-06 2009-03-19 장대환 Transferring and loading apparatus for possess low tolerance and multiple centering ability
KR101405055B1 (en) * 2012-10-30 2014-06-10 장대환 Car brake module for assembly robot hand
WO2022118544A1 (en) * 2020-12-02 2022-06-09 村田機械株式会社 Transport system

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