JPH0761873A - Method for metallizing ceramics and silver solder material used therefor - Google Patents
Method for metallizing ceramics and silver solder material used thereforInfo
- Publication number
- JPH0761873A JPH0761873A JP23103693A JP23103693A JPH0761873A JP H0761873 A JPH0761873 A JP H0761873A JP 23103693 A JP23103693 A JP 23103693A JP 23103693 A JP23103693 A JP 23103693A JP H0761873 A JPH0761873 A JP H0761873A
- Authority
- JP
- Japan
- Prior art keywords
- ceramics
- silver solder
- brazing material
- solder material
- metallizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は各種セラミックス表面に
金属材料を接合した場合に極めて高い強度を得ることが
でき、しかも工程の簡単なメタライジング方法、及びそ
れに用いるための銀ロー材料に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metallizing method which can obtain extremely high strength when a metal material is bonded to the surface of various ceramics and has a simple process, and a silver brazing material used for the method.
【０００２】[0002]
【従来の技術およびその問題点】従来、セラミックスの
メタライジング法としては、活性金属法あるいはＭｏ・
Ｍｎ法等が知られている。Ｍｏ・Ｍｎ法は、ＭｏとＭｎ
微粉末をペースト状として、セラミックスの表面に塗布
し、高温焼結したのち、Ｎｉメッキを施すものである。
この方法によれば、高い真空封止性が得られるが、製造
工程が長く、かつ高価であるという問題点を有する。一
方、活性金属法は、比較的簡単にセラミックスをメタラ
イジングできるが、活性金属としてＴｉ，Ｚｒ，Ｈｆ等
を用いるため、ロー材が高価であり、さらに高真空（１
／１０5Torr）を必要とし、極めて大がかりな専用の設
備を要する等の問題点を有する。2. Description of the Related Art Conventionally, as a metallizing method for ceramics, an active metal method or Mo.
The Mn method and the like are known. The Mo / Mn method uses Mo and Mn.
The fine powder is applied in the form of paste on the surface of the ceramic, sintered at high temperature, and then plated with Ni.
According to this method, a high vacuum sealing property can be obtained, but there is a problem that the manufacturing process is long and expensive. On the other hand, the active metal method can relatively easily metallize ceramics, but since Ti, Zr, Hf, etc. are used as the active metal, the brazing material is expensive and the high vacuum (1
/ 10 5 Torr), which requires extremely large-scale dedicated equipment.
【０００３】本発明は安価なセラミックスのメタライジ
ング用のロー材を提供し、併せてこのロー材を用いるこ
とにより簡単な設備で容易にセラミックスのメタライジ
ングが可能な方法を提供することを目的とするものであ
る。It is an object of the present invention to provide an inexpensive brazing material for metallizing ceramics, and at the same time to provide a method capable of easily metallizing ceramics with a simple equipment by using this brazing material. To do.
【０００４】[0004]
【問題点を解決するための手段】上記課題を達成するた
め、本発明者らは従来濡れ性が劣るためセラミックスの
メタライジングには不適とされている銀ロー材に着目
し、これら銀ロー材をベースとするロー材がセラミック
スのメタライジングに適用できないかを種々検討した結
果、本発明をなすに至ったものである。すなわち、本発
明に係るロー材料は、従来の銀ロー材にＡｌ2Ｏ3または
ＺｒＯ2のいずれか１種または２種を５〜２０重量％含
有させてなり、これにより前記課題を達成したものであ
る。また、本発明に係るセラミックスのメタライジング
方法は、上記本発明の銀ロー材料をセラミックス表面に
塗布し、１Torr以下の真空中またはＡｒ雰囲気中で焼き
付けることからなるものである。In order to achieve the above object, the present inventors have focused their attention on silver brazing materials which are conventionally unsuitable for metallizing ceramics due to their poor wettability. As a result of various studies as to whether or not the brazing material based on the above can be applied to the metallizing of ceramics, the present invention has been accomplished. That is, the brazing material according to the present invention contains 5 to 20% by weight of any one or two of Al 2 O 3 and ZrO 2 in a conventional silver brazing material, thereby achieving the above object. Is. The ceramic metallizing method according to the present invention comprises coating the silver brazing material of the present invention on the surface of the ceramic and baking it in a vacuum of 1 Torr or less or in an Ar atmosphere.
【０００５】[0005]
【作用】上記のような本発明では、銀ロー材中に含有さ
れたＡｌ2Ｏ3またはＺｒＯ2のいずれか１種または２種
の粉末が、銀ロー材が溶融する温度、通常６００〜９０
０℃で融けずに粉末のままロー材中に分散され、これが
銀ロー材の凝集を抑え、セラミックス表面へのロー材の
濡れ性を改善するものと思われる。In the present invention as described above, one or two powders of Al 2 O 3 or ZrO 2 contained in the silver brazing material are melted at a temperature at which the silver brazing material melts, usually 600 to 90.
It is considered that the powder does not melt at 0 ° C. and is dispersed as a powder in the brazing material, which suppresses the aggregation of the silver brazing material and improves the wettability of the brazing material on the ceramic surface.
【０００６】本発明において銀ロー材に含有させるＡｌ
2Ｏ3またはＺｒＯ2のいずれか１種または２種は、その
量が５〜２０重量％の範囲内となるよう添加混合する。
添加量が５重量％未満の場合にはセラミックス表面を均
一にメタライジングすることができず、２０重量％を越
えると銀ローがセラミックス表面に濡れず、メタライジ
ングすることができなくなる。なお、添加量の好ましい
範囲は１０〜１５重量％である。これら添加材は粉末と
して用いるのが好ましく、その粒径は０．５〜５μｍが
好ましい。Al contained in the silver brazing material in the present invention
Any one or two of 2 O 3 and ZrO 2 is added and mixed so that the amount thereof is within the range of 5 to 20% by weight.
If the addition amount is less than 5% by weight, the ceramic surface cannot be uniformly metallized, and if it exceeds 20% by weight, the silver brazing does not wet the ceramic surface and metalization cannot be performed. In addition, the preferable range of the addition amount is 10 to 15% by weight. These additives are preferably used as powder, and the particle size thereof is preferably 0.5 to 5 μm.
【０００７】本発明に係る銀ロー材料のベースとなる銀
ロー材は市販の銀ロー材がそのまま適用できる。例え
ば、ＪＩＳ（Z3261）あるいはＡＷＳ（A5.8）等で規定
されている銀ろう規格に合致する材料が挙げられる。ま
た、その形状は粉末、箔あるいはロッド等如何なるもの
でもよいが、粉末が最も好ましい。A commercially available silver brazing material can be used as it is as a silver brazing material which is a base of the silver brazing material according to the present invention. For example, a material conforming to the silver brazing standard defined by JIS (Z3261) or AWS (A5.8) can be used. Further, the shape thereof may be any one such as powder, foil or rod, but powder is most preferable.
【０００８】また、本発明で適用できるセラミックスは
酸化物系のもの以外であれば如何なるものにでも適用可
能であるが、好ましくはホウ化物系セラミックスであ
る。The ceramics applicable in the present invention may be any ceramics other than oxide-based ceramics, but boride-based ceramics are preferable.
【０００９】本発明の銀ロー材をセラミックスのメタラ
イジングに供する場合、前記のような適宜の銀ロー材に
Ａｌ2Ｏ3またはＺｒＯ2のいずれか１種または２種の粉
末をその量が５〜２０重量％の範囲内となるよう添加混
合する。次いで、これらを適宜のフラックスとともに混
練し、ペースト状にし、セラミックス表面に塗布する。
そして、真空中（１Torr以下）またはＡｒ雰囲気中で焼
き付ける。焼付け温度は使用するベースの銀ロー材およ
び添加材の量等にもよるが、７００以上９５０℃以下の
範囲とすることが好ましい。７００℃未満では銀ローが
十分に融け切れず、メタライジングが均一になされず、
逆に９５０℃を越えると銀ローの蒸発が著しくなり、均
一なメタライジングは難しく炉内をも汚すことになる。When the silver brazing material of the present invention is subjected to metallization of ceramics, the amount of the one or two kinds of powder of Al 2 O 3 or ZrO 2 is 5 in the appropriate silver brazing material as described above. Add and mix so as to be in the range of 20 wt%. Next, these are kneaded together with an appropriate flux to form a paste, which is applied to the ceramic surface.
Then, baking is performed in a vacuum (1 Torr or less) or an Ar atmosphere. Although the baking temperature depends on the amounts of the base silver brazing material and the additive used, etc., it is preferably in the range of 700 to 950 ° C. If the temperature is less than 700 ° C., the silver brazing does not completely melt, and the metallizing is not uniform,
On the contrary, if the temperature exceeds 950 ° C, the evaporation of silver brazing becomes remarkable, and uniform metallizing is difficult, and the inside of the furnace is also polluted.
【００１０】[0010]
【発明の効果】以上のような本発明によれば、安価なセ
ラミックスのメタライジング用のロー材料が得られ、ま
た、簡単にして工業的利用価値の高いセラミックスのメ
タライジング方法が得られ、その効果は大きい。As described above, according to the present invention, an inexpensive raw material for metallizing ceramics can be obtained, and a metallizing method for ceramics having a high industrial utility value can be easily obtained. The effect is great.
【００１１】[0011]
【実施例１】市販のＢＡｇ−１系の銀ロー９．２ｇにＡ
ｌ2Ｏ3を０．８ｇ混合した粉末にフラックス（ホウ酸
系）を混練してペースト状にし、これをＴｉＢ2系セラ
ミックス（ＴｉＢ2含有量９５％）表面に塗布し、Ａｒ
雰囲気中で８００℃×５ｍｉｎ熱処理した。得られたセ
ラミックスをＣｄ系はんだにて、ステンレス鋼と接合し
た。この時の接合温度は３００℃であった。接合強度を
測定したところ、平均８０ＭＰａの強度が得られた。Example 1 A was added to 9.2 g of commercially available BAg-1 type silver rho.
Flux (boric acid type) was kneaded into a powder obtained by mixing 0.8 g of 1 2 O 3 to form a paste, which was applied on the surface of TiB 2 type ceramics (TiB 2 content 95%), and Ar was added.
Heat treatment was performed at 800 ° C. for 5 minutes in the atmosphere. The obtained ceramics were joined to stainless steel with Cd solder. The bonding temperature at this time was 300 ° C. When the bonding strength was measured, an average strength of 80 MPa was obtained.
Claims (2)
いるための銀ロー材料であって、銀ローにＡｌ2Ｏ3また
はＺｒＯ2のいずれか１種または２種を５〜２０重量％
含有させたことを特徴とする銀ロー材料。1. A silver brazing material for use in metallizing a ceramic surface, comprising 5 to 20% by weight of one or two of Al 2 O 3 and ZrO 2 in the silver brazing material.
A silver raw material characterized by being contained.
ス表面に塗布し、１Torr以下の真空中またはＡｒ雰囲気
中で焼き付けることを特徴とするセラミックスのメタラ
イジング方法。2. A method of metallizing ceramics, which comprises applying the silver brazing material according to claim 1 to a surface of a ceramic and baking it in a vacuum of 1 Torr or less or in an Ar atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23103693A JPH0761873A (en) | 1993-08-24 | 1993-08-24 | Method for metallizing ceramics and silver solder material used therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23103693A JPH0761873A (en) | 1993-08-24 | 1993-08-24 | Method for metallizing ceramics and silver solder material used therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0761873A true JPH0761873A (en) | 1995-03-07 |
Family
ID=16917273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23103693A Pending JPH0761873A (en) | 1993-08-24 | 1993-08-24 | Method for metallizing ceramics and silver solder material used therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0761873A (en) |
-
1993
- 1993-08-24 JP JP23103693A patent/JPH0761873A/en active Pending
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