JP2670627B2 - Metallized alumina ceramics - Google Patents
Metallized alumina ceramicsInfo
- Publication number
- JP2670627B2 JP2670627B2 JP1405789A JP1405789A JP2670627B2 JP 2670627 B2 JP2670627 B2 JP 2670627B2 JP 1405789 A JP1405789 A JP 1405789A JP 1405789 A JP1405789 A JP 1405789A JP 2670627 B2 JP2670627 B2 JP 2670627B2
- Authority
- JP
- Japan
- Prior art keywords
- metallized
- alumina ceramics
- powder
- metallized layer
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Ceramic Products (AREA)
Description
【発明の詳細な説明】 イ．産業上の利用分野 本発明は、メタライズドアルミナセラミックスに関す
る。DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD The present invention relates to metallized alumina ceramics.
ロ．従来の技術 MoとMnとを主成分とするメタライズ層を施されたアル
ミナセラミックスは、構造材料その他に広く応用されて
いる。このメタライズ層は、一般にMoとMnとを主成分と
し、その他SiO2質のガラス成分やTi,Nb,Zrなどの活性金
属成分を添加したものである。通常、このメタライズ表
面にNiメッキ等を施したのち、金属部材やメタライズド
セラミックス同士を銀ろう付けすることにより実用に供
される。B. Conventional Technology Alumina ceramics with a metallized layer containing Mo and Mn as main components have been widely applied to structural materials and others. This metallized layer generally contains Mo and Mn as main components, and also has a SiO 2 glass component and an active metal component such as Ti, Nb, and Zr added thereto. Usually, the metallized surface is plated with Ni or the like, and then a metal member or metallized ceramics is silver brazed for practical use.
ハ．発明が解決しようとする問題点 しかしながら、従来のメタライズドアルミナセラミッ
クスは、メタライズ層の引張強度が約6kg/mm2程度と低
く、強度が特に必要とされるような接合部分のある構造
材料には用いることが困難であった。C. Problems to be Solved by the Invention However, the conventional metallized alumina ceramics has a low tensile strength of the metallized layer of about 6 kg / mm 2, and is used for a structural material having a joint portion where strength is particularly required. Was difficult.
ニ．問題を解決するための手段 本発明者らは、この問題点を解決するため研究を重ね
た結果、メタライズ層の引張強度を向上させるには、メ
タライズ層中にAl2O3,TiO2およびガラスの微粒子を分散
させればよいとの知見を得て、本発明を完成するにいた
った。D. Means for Solving the Problem The inventors of the present invention have conducted research to solve this problem, and as a result, in order to improve the tensile strength of the metallized layer, Al 2 O 3 , TiO 2 and glass are contained in the metallized layer. The present inventors have found that it suffices to disperse the fine particles of (3) and have completed the present invention.
すなわち、本発明の要旨は、MoとMnとを主成分とし、
その中に平均粒径２μｍ以下のAl2O3,TiO2およびガラス
が各々１〜５重量％分散したメタライズ層がアルミナセ
ラミックスに施されてなるメタライズドアルミナセラミ
ックスにある。That is, the gist of the present invention is mainly composed of Mo and Mn,
In the metallized alumina ceramics, a metallized layer in which Al 2 O 3 , TiO 2 having an average particle size of 2 μm or less and glass are dispersed in an amount of 1 to 5% by weight is applied to the alumina ceramics.
メタライズ層を施すアルミナセラミックスのアルミナ
純度は、必要とする特性により任意に選択するが、一般
には88〜96重量％の純度のものが使い易い。The alumina purity of the alumina ceramic to be provided with the metallized layer is arbitrarily selected according to the required characteristics, but generally, the purity of 88 to 96% by weight is easy to use.
メタライズ層はMoとMnとが主成分であるが、その重量
比は通常通りでよく、Mo/Mn＝75/25〜95/5程度のもので
あれば、効果に差はない。メタライズ層に分散したAl2O
3,TiO2およびガラスの量は、いずれの成分も１〜５重量
％である。Al2O3,TiO2およびガラスのうち、どれかの成
分が１重量％よりも少ないと、メタライズ層の引張強度
の向上は少ない。またどれかの成分が５重量％よりも多
いと、セラミックスの金属との接合の際に用いるNiメッ
キや銀ろうとのぬれ性が悪くなり、接合強度は向上しな
い。The metallized layer is mainly composed of Mo and Mn, but the weight ratio thereof may be the same as usual, and if Mo / Mn = 75/25 to 95/5, there is no difference in effect. Al 2 O dispersed in metallized layer
The amounts of 3 , TiO 2 and glass are 1 to 5% by weight for all the components. If the content of any one of Al 2 O 3 , TiO 2 and glass is less than 1% by weight, the improvement in tensile strength of the metallized layer is small. On the other hand, if any of the components exceeds 5% by weight, the wettability with Ni plating or silver brazing used for joining the ceramic to the metal is deteriorated and the joining strength is not improved.
メタライズ層に分散したAl2O3,TiO2およびガラスの平
均粒径は２μｍ以下、好ましくは1.5μｍ以下がよい。
平均粒径が２μｍより大きいと、メタライズ層の引張強
度は低下する。The average particle size of Al 2 O 3 , TiO 2 and glass dispersed in the metallized layer is 2 μm or less, preferably 1.5 μm or less.
When the average particle size is larger than 2 μm, the tensile strength of the metallized layer is lowered.
MoとMnとを主成分とし、その中に平均粒径２μｍ以下
のAl2O3,TiO2およびガラスが各々１〜５重量％分散した
メタライズ層をアルミナセラミックスに施す方法として
は、平均粒径２μｍ以下のAl2O3,TiO2およびガラスを各
々１〜５重量％分散させたMo−Mn系粉末を有機質バイン
ダなどと混合してペーストとし、このペーストをアルミ
ナセラミックの表面に塗布したのち、加湿水素中1500℃
前後で焼き付ける方法が最もオーソドックスな方法であ
る。As a method of applying a metallized layer containing Mo and Mn as main components, in which Al 2 O 3 , TiO 2 having an average particle diameter of 2 μm or less and glass are dispersed in an amount of 1 to 5% by weight to alumina ceramics, the average particle diameter is Mo-Mn-based powder in which Al 2 O 3 , TiO 2 of 2 μm or less and glass are dispersed in an amount of 1 to 5 wt% is mixed with an organic binder to form a paste, and the paste is applied to the surface of an alumina ceramic, 1500 ℃ in humidified hydrogen
The most orthodox method is the method of baking before and after.
別法としては、２μｍ以上のAl2O3,TiO2およびガラス
の粉末をMo−Mn系粉末に添加し、この粉末をボールミル
等で粉砕して２μｍ以下に粉砕してもよい。また時間は
かかるがCVD、PVD等の方法を用いてもよい。Alternatively, powders of Al 2 O 3 , TiO 2 and glass having a particle size of 2 μm or more may be added to the Mo—Mn-based powder, and the powder may be crushed with a ball mill or the like to a particle size of 2 μm or less. Although it takes time, a method such as CVD or PVD may be used.
メタライズ層の厚さは５〜40μｍ程度が好ましく、こ
の範囲からばすれると引張強度の向上の効果はない。The thickness of the metallized layer is preferably about 5 to 40 μm, and if it is out of this range, there is no effect of improving the tensile strength.
ホ．実施例 実験１ 各々平均粒径約２μｍ程度の市販のα−Al2O3粉末、T
iO2粉末、SiO2質ガラス粉末、Mo粉末およびMn粉末を表
１に示す量になるように秤取し、ボールミルを用いて５
日間粉砕して平均粒径1.4μｍの微粉末を得た。この微
粉末にバインダ成分を加え、三本ロール混練機を用いて
メタライズ用ペーストを作製した。E. Example Experiment 1 Commercially available α-Al 2 O 3 powder having an average particle size of about 2 μm, T
The iO 2 powder, the SiO 2 glass powder, the Mo powder and the Mn powder were weighed so as to have the amounts shown in Table 1, and were weighed using a ball mill.
The powder was pulverized for a day to obtain a fine powder having an average particle size of 1.4 μm. A binder component was added to this fine powder, and a metallizing paste was prepared using a three-roll kneader.
アルミナ純度92％、形状10×10×3mmのアルミナセラ
ミックスの10×10の面全体にこのペーストを塗布し、乾
燥後露点40℃の水素雰囲気中、1500℃で１時間焼き付け
て、メタライズ層が30μｍのメタライズドアルミナセラ
ミックスを得た。This paste is applied to the entire 10 × 10 surface of alumina ceramics with an alumina purity of 92% and a shape of 10 × 10 × 3 mm, and after drying, it is baked at 1500 ° C. for 1 hour in a hydrogen atmosphere with a dew point of 40 ° C., and the metallization layer is 30 μm. The metallized alumina ceramic of was obtained.
これにNiメッキを施したのち、銀ろう（BAg−８）を
用いて直径3mmのコバール棒をろう付し、引張強度を測
定した。その結果を表１に示す。After this was plated with Ni, a Kovar rod having a diameter of 3 mm was brazed using silver solder (BAg-8), and the tensile strength was measured. Table 1 shows the results.
実験２ 各々平均粒径４〜５μｍの市販のα−Al2O3粉末、TiO
2粉末およびSiO2質ガラス粉末をそれぞれ単独に粉砕し
て平均粒径が1,2および３μｍの微粉末を得た。これら
の微粉末を表２に示す組合せでそれぞれ３重量％をMo粉
末82重量％、Mn粉末９重量％に加えメタライズ用ペース
トを作製した。 Experiment 2 Commercially available α-Al 2 O 3 powder and TiO 3 each having an average particle size of 4 to 5 μm
2 powder and SiO 2 glass powder were crushed independently to obtain fine powders having average particle diameters of 1, 2 and 3 μm. 3% by weight of each of these fine powders in the combinations shown in Table 2 was added to 82% by weight of Mo powder and 9% by weight of Mn powder to prepare a metallizing paste.
このペーストを用いて、実験１に準じてメタライズド
アルミナセラミックスを作製し、引張強度試験を行なっ
た。その結果を表２に示す。Using this paste, metallized alumina ceramics were produced according to Experiment 1, and a tensile strength test was conducted. Table 2 shows the results.
ヘ．発明の効果 本発明によれば、メタライズ層の引張強度が向上し、
金属とアルミナセラミックとの接合部分のある構造材料
の応用分野が拡大した。 F. According to the present invention, the tensile strength of the metallized layer is improved,
The field of application of structural materials with joints between metals and alumina ceramics has expanded.
Claims (1)
２μｍ以下のAl2O3,TiO2およびガラスが各々１〜５重量
％分散したメタライズ層がアルミナセラミックスに施さ
れてなるメタライズドアルミナセラミックス。1. A metallized layer containing Mo and Mn as main components, in which Al 2 O 3 , TiO 2 having an average particle diameter of 2 μm or less and glass are dispersed in an amount of 1 to 5% by weight, respectively, is applied to alumina ceramics. Become a metallized alumina ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1405789A JP2670627B2 (en) | 1989-01-25 | 1989-01-25 | Metallized alumina ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1405789A JP2670627B2 (en) | 1989-01-25 | 1989-01-25 | Metallized alumina ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02196078A JPH02196078A (en) | 1990-08-02 |
| JP2670627B2 true JP2670627B2 (en) | 1997-10-29 |
Family
ID=11850461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1405789A Expired - Lifetime JP2670627B2 (en) | 1989-01-25 | 1989-01-25 | Metallized alumina ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2670627B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100613254B1 (en) * | 2001-12-22 | 2006-09-25 | 재단법인 포항산업과학연구원 | Composition of metallizing paste and metallizing method |
| JP5285868B2 (en) * | 2007-04-25 | 2013-09-11 | 株式会社東芝 | Magnetron stem manufacturing method |
-
1989
- 1989-01-25 JP JP1405789A patent/JP2670627B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02196078A (en) | 1990-08-02 |
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