JPH07311302A - Luminous flux splitting element - Google Patents
Luminous flux splitting elementInfo
- Publication number
- JPH07311302A JPH07311302A JP10262294A JP10262294A JPH07311302A JP H07311302 A JPH07311302 A JP H07311302A JP 10262294 A JP10262294 A JP 10262294A JP 10262294 A JP10262294 A JP 10262294A JP H07311302 A JPH07311302 A JP H07311302A
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- Japan
- Prior art keywords
- light
- light beam
- light flux
- incident
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【技術分野】本発明は、ビームスプリッタ等の光束分割
素子に関する。TECHNICAL FIELD The present invention relates to a beam splitting element such as a beam splitter.
【０００２】[0002]
【従来技術及びその問題点】ビームスプリッタとして、
例えば、平行平面板からなる複数の光学部品の表面に所
要の光束分割膜を形成した後、この複数の光学部品を光
束分割膜を挟んで接着剤等で接合し、該接合された複数
の光学部品を所要の角度で切断し、この切断面を入射面
及び出射面として構成したものが知られている。2. Description of the Related Art As a beam splitter,
For example, after forming a required light beam splitting film on the surfaces of a plurality of optical components made of plane parallel plates, the plurality of optical components are joined with an adhesive agent etc. with the light beam splitting film sandwiched therebetween, and the plurality of joined optical components are joined together. It is known that a component is cut at a required angle and the cut surfaces are configured as an incident surface and an output surface.
【０００３】しかし、このような構造のビームスプリッ
タは、製造時に多くの部品が必要で、多数の光学部材を
接着して切断する等作業に手間が掛かり、接合された光
学部材同士の角度がずれている場合には、出射光同士の
方向にずれが生じることがあった。However, the beam splitter having such a structure requires many parts at the time of manufacture, and it takes a lot of work such as bonding and cutting many optical members, and the angles of the joined optical members are deviated. In this case, there is a case where the emitted lights are displaced from each other in the direction.
【０００４】[0004]
【発明の目的】本発明は、構造及び製造が簡単で、製造
時の部品点数を削減でき、出射光同士の方向にずれを生
じさせることのない光束分割素子を提供することを目的
とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide a light beam splitting element which is simple in structure and manufacturing, can reduce the number of parts at the time of manufacturing, and does not cause deviation in the directions of emitted lights.
【０００５】[0005]
【発明の概要】上記目的を達成するための本発明は、平
行平面板の一面に、光束を入射させる光束透過部と；こ
の光束透過部から該平行平面板内に入射した光束を全部
または一部反射させる光束反射部とを設け、上記平行平
面板の他面に、光束透過部から入射し該他面と上記光束
反射部との間で繰り返し反射する光束の到達位置にそれ
ぞれ位置させて、反射率の異なる光束分割膜を設けたこ
とに特徴を有する。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention is directed to a plane-parallel plate on one surface of which a light-beam transmitting portion is made to enter a light beam; and all or one of the light-beams entering from the light-beam transmitting portion into the plane-parallel plate. A light flux reflecting portion for partially reflecting is provided, and on the other surface of the parallel flat plate, the light flux is incident on the light flux transmitting portion and is positioned at each arrival position of the light flux repeatedly reflected between the other surface and the light flux reflecting portion, The feature is that a light beam splitting film having different reflectance is provided.
【０００６】また本発明は、平行平面板の一面に、該平
行平面板内に入射した光束を全部または一部反射させる
光束反射部を設け、上記平行平面板の他面に、光束反射
部に向けて光束を入射させる光束透過部と；この光束透
過部から入射し上記光束反射部と該他面との間で繰り返
し反射する光束の到達位置にそれぞれ位置させて、反射
率の異なる光束分割膜を設けたことに特徴を有する。Further, according to the present invention, a light flux reflecting portion for totally or partially reflecting a light flux incident on the parallel flat plate is provided on one surface of the parallel flat plate, and the light flux reflecting portion is provided on the other surface of the parallel flat plate. A light beam transmitting portion for making a light beam incident toward it; and a light beam splitting film having different reflectances, which are respectively positioned at the arrival positions of the light beams which are incident from the light beam transmitting portion and repeatedly reflected between the light beam reflecting portion and the other surface. It is characterized by the provision of.
【０００７】さらに本発明は、平行平面板の一方の端面
に、光束を入射させる光束透過部を設け；上記平行平面
板の一面に、上記光束透過部から該平行平面板内に入射
した光束を全部または一部反射させる光束反射部を設
け、上記平行平面板の他面に、光束透過部から入射し
て、上記一面の光束反射部と該他面との間で繰り返し反
射する光束の到達位置にそれぞれ位置させて、反射率の
異なる光束分割膜を設けたことに特徴を有する。Further, according to the present invention, a light flux transmitting portion for allowing a light flux to enter is provided on one end surface of the plane-parallel plate; the light flux entering the parallel plane plate from the light flux transmitting portion is provided on one surface of the parallel plane plate. A light beam reflecting portion that totally or partially reflects the light beam is incident on the other surface of the plane-parallel plate from the light beam transmitting portion, and the light beam reflecting position is repeatedly reflected between the one surface light beam reflecting portion and the other surface. It is characterized in that a light beam splitting film having a different reflectance is provided at each position.
【０００８】[0008]
【発明の実施例】以下図示実施例に基づいて本発明を説
明する。図１は、本発明に係る光束分割素子を示す側面
図である。光束分割素子１１は、各部の屈折率が一定な
ガラス等の透明材料からなる平行平面板１１ａを有して
いる。この平行平面板１１ａの一面１２には、該平行平
面板１１ａと直交する方向に対して傾斜した方向から光
束Ｌを入射させる光束透過部１２ａが形成されている。
上記一面１２においての光束透過部１２ａの同図下方に
は、該光束透過部１２ａから平行平面板１１ａ内に入射
した光束Ｌを全部または一部反射させるための光束反射
部１２ｂが設けられている。この光束反射部１２ｂは、
誘電体多層膜や金属膜等で形成することができる。また
平行平面板１１ａの屈折率、光束の入射角、及び偏向方
向を適切に選択すれば、誘電体多層膜や金属膜等を形成
せずに、硝子材と空気間のフレネル反射を利用した光束
反射部１２ｂとすることが可能である。また、上記一面
１２と平行な他面１３には、光束透過部１２ａから入射
した光束Ｌの到達位置、及び該他面１３と光束反射部１
２ｂとの間で繰り返し反射する反射光束Ｌ1'、Ｌ2'、Ｌ
3'、Ｌ4'、Ｌ5'、Ｌ6'、Ｌ7'の到達位置にそれぞれ位置
させて、反射率の異なる光束分割膜１３ａ、１３ｂ、１
３ｃ、１３ｄ、１３ｅ、１３ｆ、１３ｇ、１３ｈが形成
されている。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below with reference to illustrated embodiments. FIG. 1 is a side view showing a light beam splitting element according to the present invention. The light beam splitting element 11 has a plane-parallel plate 11a made of a transparent material such as glass having a constant refractive index in each part. On one surface 12 of the plane-parallel plate 11a, there is formed a beam-transmitting portion 12a which allows the beam L to enter from a direction inclined with respect to a direction orthogonal to the plane-parallel plate 11a.
Below the light flux transmitting portion 12a on the one surface 12, a light flux reflecting portion 12b for reflecting all or a part of the light flux L incident from the light flux transmitting portion 12a into the plane parallel plate 11a is provided. . This light flux reflecting portion 12b is
It can be formed of a dielectric multilayer film or a metal film. Also, if the refractive index of the plane-parallel plate 11a, the incident angle of the light flux, and the deflection direction are appropriately selected, the light flux utilizing Fresnel reflection between the glass material and the air without forming a dielectric multilayer film or a metal film. It can be the reflecting portion 12b. On the other surface 13 parallel to the one surface 12, the arrival position of the light flux L incident from the light flux transmitting portion 12a, and the other surface 13 and the light flux reflecting portion 1 are provided.
2b, reflected light beams L 1 ', L 2 ', L
3 ′, L 4 ′, L 5 ′, L 6 ′, and L 7 ′ are respectively positioned to reach the light beam splitting films 13a, 13b, 1 having different reflectances.
3c, 13d, 13e, 13f, 13g, 13h are formed.
【０００９】図２に示すように、光束分割膜１３ａ、１
３ｂ、１３ｃ、１３ｄ、１３ｅ、１３ｆ、１３ｇ、１３
ｈは、反射光束Ｌ1'、Ｌ2'、Ｌ3'、Ｌ4'、Ｌ5'、Ｌ6'、
Ｌ7'の到達位置にそれぞれ対応させて、同図上方から下
方に向けて、即ち光束が到達する順に反射率が順次低く
なるように設けられている。逆に、光束分割膜１３ａ、
１３ｂ、１３ｃ、１３ｄ、１３ｅ、１３ｆ、１３ｇ、１
３ｈにおいての光束の透過率は、光束が到達する順に順
次高くなる。例えば、光束分割膜１３ａにおいて、透過
率１００％で入射した光束Ｌの１２．５％を出射光束Ｌ
1 として透過しかつ残り８７．５％を反射光束Ｌ1'とし
て反射し、以下順次所定％ずつ透過率を高めていき、光
束分割膜１３ｇにおいて反射光束Ｌ6'の５０％を出射光
束Ｌ7 として透過しかつ残り５０％を反射光束Ｌ7'とし
て反射し、光束分割膜１３ｈにおいて反射光束Ｌ7'の１
００％を出射光束Ｌ8 として透過するように構成するこ
とができる。As shown in FIG. 2, the light beam splitting films 13a, 1 are formed.
3b, 13c, 13d, 13e, 13f, 13g, 13
h is a reflected light flux L 1 ′, L 2 ′, L 3 ′, L 4 ′, L 5 ′, L 6 ′,
It is provided so as to correspond to the arrival position of L 7 ′, from the upper side to the lower side of FIG. On the contrary, the light beam splitting film 13a,
13b, 13c, 13d, 13e, 13f, 13g, 1
The transmittance of the light flux at 3h gradually increases in the order in which the light flux arrives. For example, in the light beam splitting film 13a, 12.5% of the light beam L that is incident with a transmittance of 100% is emitted as a light beam L.
The transmitted and 87.5% remaining as a reflected light beam L 1 'and reflected as the following sequence will raise a predetermined percentage by transmittance, beam splitting the reflected light beam L 6 in the membrane 13 g' emitted beam 50 percent L 7 And the remaining 50% is reflected as a reflected light beam L 7 ′, and 1 of the reflected light beam L 7 ′ is reflected by the light beam splitting film 13 h.
It is possible to configure so that 00% is transmitted as the outgoing light flux L 8 .
【００１０】このようにして、光束分割素子１１の他面
１３の各光束分割膜１３ａ、１３ｂ、１３ｃ、１３ｄ、
１３ｅ、１３ｆ、１３ｇ、１３ｈから、光束Ｌと平行か
つ相互に平行でそれぞれの光量を略等しくされた出射光
束Ｌ1 、Ｌ2 、Ｌ3 、Ｌ4 、Ｌ5 、Ｌ6 、Ｌ7 、Ｌ8 が
出射される。また図１に示す光束分割素子１１に対する
光束Ｌの傾きを変えることにより、つまり光束分割素子
１１を動かして光束Ｌに対する傾斜を変化させることに
より、出射光束Ｌ1 、Ｌ2 、Ｌ3 、Ｌ4 、Ｌ5、Ｌ6 、
Ｌ7 、Ｌ8 間の間隔（ピッチ）を適宜設定調節すること
ができる。In this way, the light beam splitting films 13a, 13b, 13c, 13d on the other surface 13 of the light beam splitting element 11 are formed.
From 13e, 13f, 13g, and 13h, outgoing light fluxes L 1 , L 2 , L 3 , L 4 , L 5 , L 6 , L 7 , and L that are parallel to the light flux L and mutually parallel and have substantially equal light amounts. 8 is emitted. Further, by changing the inclination of the light beam L with respect to the light beam dividing element 11 shown in FIG. 1, that is, by changing the inclination with respect to the light beam L by moving the light beam dividing element 11, the outgoing light beams L 1 , L 2 , L 3 , L 4 are changed. , L 5 , L 6 ,
The interval (pitch) between L 7 and L 8 can be set and adjusted as appropriate.
【００１１】図１に示す第１実施例の場合、光束分割素
子１１の入射面である光束透過部１２ａに対して、光束
Ｌは斜めに入射するが、図３に示す第２実施例のよう
に、平行平面板１１ａの入射側に、光束Ｌに対して直角
をなす入射面１５ａを有するプリズム１５を接着すれ
ば、この入射面１５ａに対して光束Ｌを直角に入射する
ことができる。さらに同図において、平行平面板１１の
出射側に、出射光束Ｌ1 、Ｌ2 、Ｌ3 、Ｌ4 、Ｌ5 、Ｌ
6 、Ｌ7 、Ｌ8 に対して直角をなす出射面１６ａを有す
るプリズム１６を接着することができる。これにより、
非点収差の発生を防止することが可能となる。In the case of the first embodiment shown in FIG. 1, the light beam L is obliquely incident on the light beam transmitting portion 12a which is the incident surface of the light beam splitting element 11, but as in the second embodiment shown in FIG. Then, if the prism 15 having the incident surface 15a that is perpendicular to the light beam L is attached to the incident side of the plane parallel plate 11a, the light beam L can be incident on the incident surface 15a at a right angle. Further, in the figure, on the exit side of the plane-parallel plate 11, outgoing light fluxes L 1 , L 2 , L 3 , L 4 , L 5 , and L.
It is possible to bond the prism 16 having the emission surface 16a that is at right angles to 6 , L 7 , and L 8 . This allows
It becomes possible to prevent the generation of astigmatism.
【００１２】図４は、本発明の第３実施例の光束分割素
子を示す側面図である。この光束分割素子２１は、各部
の屈折率が一定なガラス等の透明材料からなる平行平面
板２１ａを有している。この平行平面板２１ａの一面２
２には、該平行平面板２１ａ内に入射した光束Ｌを全部
または一部反射させる光束反射部２２ａが設けられてい
る。上記一面２２と平行な他面２３には、平行平面板２
１ａと直交する方向に対して傾斜した方向から光束反射
部２２ａに向けて光束Ｌを入射させる光束透過部２３ａ
が形成されている。上記他面２３においての該光束透過
部２３ａの同図下方には、この光束透過部２３ａから入
射し光束反射部２２ａで反射した光束Ｌ、及び他面２３
ａと光束反射部２２ａとの間で繰り返し反射する反射光
束Ｌ11'、Ｌ12' 、Ｌ13' 、Ｌ14' 、Ｌ15' 、Ｌ16' の
到達位置にそれぞれ位置させて、反射率の異なる光束分
割膜２３ｂ、２３ｃ、２３ｄ、２３ｅ、２３ｆ、２３
ｇ、２３ｈが形成されている。FIG. 4 is a side view showing a light beam splitting element according to the third embodiment of the present invention. The light beam splitting element 21 has a plane-parallel plate 21a made of a transparent material such as glass having a constant refractive index in each part. One side 2 of this plane-parallel plate 21a
2 is provided with a light flux reflecting portion 22a that totally or partially reflects the light flux L incident on the plane-parallel plate 21a. On the other surface 23 parallel to the one surface 22, the parallel flat plate 2
The light flux transmitting portion 23a that allows the light flux L to enter the light flux reflecting portion 22a from the direction inclined with respect to the direction orthogonal to 1a.
Are formed. Below the light flux transmitting portion 23a on the other surface 23, the light flux L which is incident from the light flux transmitting portion 23a and reflected by the light flux reflecting portion 22a and the other surface 23 are shown.
a and the light flux reflecting portion 22a are repeatedly reflected by the reflected light fluxes L 11 ′, L 12 ′, L 13 ′, L 14 ′, L 15 ′ and L 16 ′, respectively. Different luminous flux splitting films 23b, 23c, 23d, 23e, 23f, 23
g and 23h are formed.
【００１３】図５に示すように、光束分割膜２３ｂ、２
３ｃ、２３ｄ、２３ｅ、２３ｆ、２３ｇ、２３ｈは、光
束Ｌ、及び反射光束Ｌ11' 、Ｌ12' 、Ｌ13' 、Ｌ14' 、
Ｌ15' 、Ｌ16' の到達位置にそれぞれ対応させて、同図
上方から下方に向けて、即ち光束が到達する順に反射率
が順次低くなるように設けられている。逆に、光束分割
膜２３ｂ、２３ｃ、２３ｄ、２３ｅ、２３ｆ、２３ｇ、
２３ｈにおいての光束の透過率は、光束が到達する順に
順次高くなる。例えば上記第１実施例と同様に、光束分
割膜２３ｂにおいて、透過率１００％で入射して光束反
射部２２ａで全反射した光束Ｌの１２．５％を、出射光
束Ｌ11として透過しかつ残り８７．５％を反射光束
Ｌ11' として反射し、以下順次所定％ずつ透過率を高め
ていき、光束分割膜２３ｇにおいて反射光束Ｌ15' の５
０％を出射光束Ｌ16として透過しかつ残り５０％を反射
光束Ｌ16' として反射し、光束分割膜２３ｈにおいて反
射光束Ｌ16' の１００％を出射光束Ｌ17として透過する
ように構成することができる。As shown in FIG. 5, the light beam splitting films 23b and 2b
3c, 23d, 23e, 23f, 23g, and 23h are the luminous flux L and the reflected luminous fluxes L 11 ′, L 12 ′, L 13 ′, L 14 ′,
It is provided so as to correspond to the arrival positions of L 15 ′ and L 16 ′, respectively, from the upper side to the lower side of FIG. On the contrary, the light beam splitting films 23b, 23c, 23d, 23e, 23f, 23g,
The transmittance of the light flux at 23h sequentially increases in the order in which the light flux arrives. For example, similar to the first embodiment, 12.5% of the light beam L that is incident on the light beam splitting film 23b with a transmittance of 100% and is totally reflected by the light beam reflecting portion 22a is transmitted as the outgoing light beam L 11 and remains. 87.5% is reflected as a reflected light beam L 11 ′, and thereafter, the transmittance is sequentially increased by a predetermined percentage, and 5% of the reflected light beam L 15 ′ is reflected by the light beam splitting film 23 g.
0% the transmitted and the remaining 50% 'reflected as the reflected light beam L 16 in beam splitting film 23h' reflected light beam L 16 as the emitted light beam L 16 is configured to transmit 100% of the emitted light beam L 17 that You can
【００１４】このようにして、光束分割素子２１の他面
２３の各光束分割膜２３ｂ、２３ｃ、２３ｄ、２３ｅ、
２３ｆ、２３ｇ、２３ｈから、光束Ｌと直角方向にかつ
相互に平行でそれぞれの光量を略等しくされた出射光束
Ｌ11、Ｌ12、Ｌ13、Ｌ14、Ｌ15、Ｌ16、Ｌ17が出射され
る。図４に示す光束分割素子２１に対する光束Ｌの傾き
を変えることにより、つまり光束分割素子２１を動かし
て光束Ｌに対する傾斜を変化させることにより、出射光
束Ｌ11、Ｌ12、Ｌ13、Ｌ14、Ｌ15、Ｌ16、Ｌ17間の間隔
（ピッチ）を適宜設定調節することができる。In this way, the respective light beam splitting films 23b, 23c, 23d, 23e on the other surface 23 of the light beam splitting element 21.
Emitted light beams L 11 , L 12 , L 13 , L 14 , L 15 , L 16 , and L 17 are emitted from 23f, 23g, and 23h in a direction perpendicular to the light beam L and parallel to each other and have substantially equal amounts of light. To be done. By changing the inclination of the light beam L with respect to the light beam dividing element 21 shown in FIG. 4, that is, by changing the inclination with respect to the light beam L by moving the light beam dividing element 21, the outgoing light beams L 11 , L 12 , L 13 , L 14 , The interval (pitch) between L 15 , L 16 and L 17 can be set and adjusted as appropriate.
【００１５】図４に示す第３実施例の場合、光束分割素
子２１の入射面である光束透過部２３ａに対して、光束
Ｌは斜めに入射するが、図６に示す第４実施例のよう
に、平行平面板２１ａの入射側に、光束Ｌに対して直角
をなす入射面２５ａを有するプリズム２５を接着すれ
ば、この入射面２５ａに光束Ｌを直角に入射することが
できる。この場合、入射面２５ａに対して平行平面板２
１ａが４５゜をなすように設定すれば、平行平面板２１
ａの光束Ｌに対してなす角度を４５゜として、全反射を
利用することができる。よって、一面２２に、反射膜を
形成することなく光束反射部を設けることができる。ま
た、入射側のプリズムと出射側のプリズムを同一のプリ
ズム２５とすることができるため、第２実施例に比して
部品点数を減少させ、コストダウンを図ることができ
る。In the case of the third embodiment shown in FIG. 4, the light beam L is obliquely incident on the light beam transmitting portion 23a which is the incident surface of the light beam splitting element 21, but as in the fourth embodiment shown in FIG. Then, if the prism 25 having the incident surface 25a forming a right angle to the light beam L is attached to the incident side of the plane parallel plate 21a, the light beam L can be incident on the incident surface 25a at a right angle. In this case, the plane-parallel plate 2 is parallel to the incident surface 25a.
If 1a is set to form 45 °, the parallel flat plate 21
Total reflection can be utilized by setting the angle of the light beam a of the light beam a to 45 °. Therefore, the light flux reflecting portion can be provided on the one surface 22 without forming a reflecting film. Further, since the prism on the incident side and the prism on the emitting side can be the same prism 25, the number of parts can be reduced and the cost can be reduced as compared with the second embodiment.
【００１６】このように上記第１〜第４実施例におい
て、一面１２、２２と他面１３、２３の平行度を確保
し、かつ各光束分割膜１３ａ、１３ｂ、１３ｃ、１３
ｄ、１３ｅ、１３ｆ、１３ｇ、１３ｈ、及び２３ｂ、２
３ｃ、２３ｄ、２３ｅ、２３ｆ、２３ｇ、２３ｈを、光
束Ｌ、及び各反射光束Ｌ1'、Ｌ2'、Ｌ3'、Ｌ4'、Ｌ5'、
Ｌ6'、Ｌ7'、Ｌ11' 、Ｌ12' 、Ｌ13' 、Ｌ14' 、Ｌ15'
、Ｌ16' の各到達位置に対応させて形成するだけで、
出射光束Ｌ1 、Ｌ2 、Ｌ3 、Ｌ4 、Ｌ5 、Ｌ6 、Ｌ7 、
Ｌ8 、及びＬ11、Ｌ12、Ｌ13、Ｌ14、Ｌ15、Ｌ16、Ｌ17
の平行度及び各光束間の正確なピッチを確保することが
できる。従って、多くの部品点数を必要とせず、多数の
光学部材を接着して切断する等の面倒な作業が要らな
い、光束分割素子１１、２１を得ることができる。As described above, in the above-described first to fourth embodiments, the parallelism between the one surface 12, 22 and the other surface 13, 23 is ensured, and each light beam splitting film 13a, 13b, 13c, 13 is formed.
d, 13e, 13f, 13g, 13h, and 23b, 2
3c, 23d, 23e, 23f, 23g, and 23h, the luminous flux L and each reflected luminous flux L 1 ′, L 2 ′, L 3 ′, L 4 ′, L 5 ′,
L 6 ', L 7', L 11 ', L 12', L 13 ', L 14', L 15 '
, L 16 ', corresponding to each reaching position,
Output luminous fluxes L 1 , L 2 , L 3 , L 4 , L 5 , L 6 , L 7 ,
L 8, and L 11, L 12, L 13 , L 14, L 15, L 16, L 17
It is possible to secure the parallelism and the accurate pitch between the light beams. Therefore, it is possible to obtain the light beam splitting elements 11 and 21 that do not require a large number of components and do not require a troublesome work such as bonding and cutting a large number of optical members.
【００１７】上記第１〜第４の実施例において、光束Ｌ
を入射させる光束透過部１２ａ、２３ａは、平行平面板
１１ａ、２１ａの一面１２と他面２３にそれぞれ設けら
れていたが、例えば図７に示す第５実施例のように、平
行平面板１１ａの出射側に、平行平面板１１ａを出射面
１６ａに対して４５゜で保持するプリズム１６を接着
し、さらに平行平面板１１ａの一方の端面に、出射面１
６ａと直角をなす光束透過部１２ｃを設けることができ
る。この場合、光束透過部１２ａに対して直交する方向
から光束Ｌを入射させることにより、この光束Ｌを一面
１２で全反射させ、図３の第２実施例と同様に、互いに
平行な出射光束Ｌ1 、Ｌ2 、Ｌ3 、Ｌ4 、Ｌ5 、Ｌ6 、
Ｌ7 、Ｌ8 を出射面１６ａから出射させることができ
る。In the above-mentioned first to fourth embodiments, the luminous flux L
The light beam transmitting portions 12a and 23a for making the incident light are provided on the one surface 12 and the other surface 23 of the plane-parallel plates 11a and 21a, respectively. However, as in the fifth embodiment shown in FIG. A prism 16 for holding the plane-parallel plate 11a at 45 ° with respect to the plane-of-emission 16a is adhered to the plane of emission, and the plane-of-emission 1 is attached to one end face of the plane-parallel plate 11a.
A light flux transmitting portion 12c forming a right angle with 6a can be provided. In this case, the light flux L is made incident on the light flux transmitting portion 12a in a direction orthogonal to the light flux L, so that the light flux L is totally reflected by the one surface 12, and the emitted light fluxes L which are parallel to each other, as in the second embodiment of FIG. 1 , L 2 , L 3 , L 4 , L 5 , L 6 ,
L 7 and L 8 can be emitted from the emission surface 16a.
【００１８】本第５実施例において、光束透過部１２ａ
は出射面１６ａと直角をなすと説明したが、この光束透
過部１２ａの角度は、入射する光束Ｌの角度に対応して
変更される。すなわち、光束Ｌの入射角度は、平行平面
板１１ａをどの程度傾斜させて用いるかによって変わる
から、光束透過部１２ａの角度は、平行平面板１１ａを
ある角度に傾けたときに光束Ｌを垂直に入射させ得る角
度に設定されればよい。In the fifth embodiment, the light flux transmitting portion 12a
Has been described as forming a right angle with the emission surface 16a, the angle of the light flux transmitting portion 12a is changed according to the angle of the incident light beam L. That is, since the incident angle of the light flux L changes depending on how much the plane-parallel plate 11a is tilted and used, the angle of the light-beam transmissive portion 12a causes the light flux L to be vertical when the plane-parallel plate 11a is tilted to a certain angle. The angle may be set so that it can be incident.
【００１９】また第２実施例では、入射側に、一面１２
の全域を覆うプリズム１５を接着したが、図８に示すよ
うに、入射側の光束透過部１２ａと対応する部分のみ
に、プリズム１５と相似形の小型のプリズム２６を接着
することができる。この場合、一面１２のプリズム２６
を接着した部分以外で全反射させることができるから、
図７の第５実施例と同様に、光束透過部１２ａから入射
した光束を、一面１２で全反射させ、互いに平行な出射
光束Ｌ1 、Ｌ2 、Ｌ3 、Ｌ4 、Ｌ5 、Ｌ6 、Ｌ7、Ｌ8
として出射面１６ａから出射させることができる。In addition, in the second embodiment, one surface 12 is provided on the incident side.
Although the prism 15 covering the entire area is adhered, as shown in FIG. 8, a small prism 26 having a similar shape to the prism 15 can be adhered only to a portion corresponding to the incident side light flux transmitting portion 12a. In this case, the prism 26 on one surface 12
Since it can be totally reflected except the part where the
Similar to the fifth embodiment of FIG. 7, the light flux incident from the light flux transmitting portion 12a is totally reflected by the one surface 12, and the outgoing light fluxes L 1 , L 2 , L 3 , L 4 , L 5 , and L 6 are parallel to each other. , L 7 , L 8
Can be emitted from the emission surface 16a.
【００２０】このように、第５及び第６実施例では、全
反射を利用するため、一面１２に反射膜を形成せずに光
束反射部を設けることができる。As described above, in the fifth and sixth embodiments, since the total reflection is utilized, the light flux reflecting portion can be provided without forming the reflection film on the one surface 12.
【００２１】[0021]
【発明の効果】以上のように本発明によれば、構造及び
製造が簡単で、製造時の部品点数を削減でき、出射光同
士の方向にずれを生じさせることのない光束分割素子を
提供することができる。As described above, according to the present invention, there is provided a light beam splitting element which is simple in structure and manufacturing, can reduce the number of parts at the time of manufacturing, and does not cause deviation in the directions of emitted lights. be able to.
【図１】本発明に係る光束分割素子の第１実施例を示す
側面図である。FIG. 1 is a side view showing a first embodiment of a light beam splitting element according to the present invention.
【図２】同光束分割素子の図１のＡ方向から視た図であ
る。FIG. 2 is a view of the light beam splitting element viewed from the direction A in FIG.
【図３】本発明に係る光束分割素子の第２実施例を示す
側面図である。FIG. 3 is a side view showing a second embodiment of the light beam splitting element according to the present invention.
【図４】同光束分割素子の第３実施例を示す側面図であ
る。FIG. 4 is a side view showing a third embodiment of the same beam splitting element.
【図５】同光束分割素子の図４のＢ方向から視た図であ
る。5 is a view of the light beam splitting element viewed from the direction B in FIG. 4;
【図６】同光束分割素子の第４実施例を示す側面図であ
る。FIG. 6 is a side view showing a fourth embodiment of the same beam splitting element.
【図７】同光束分割素子の第５実施例を示す側面図であ
る。FIG. 7 is a side view showing a fifth embodiment of the same beam splitting element.
【図８】同光束分割素子の第６実施例を示す側面図であ
る。FIG. 8 is a side view showing a sixth embodiment of the same beam splitting element.
１１ ２１ 光束分割素子 １１ａ ２１ａ 平行平面板 １２ ２２ 一面 １２ａ １２ｃ ２３ａ 光束透過部 １２ｂ ２２ａ 光束反射部 １３ ２３ 他面 １５ １６ ２５ ２６ プリズム １５ａ ２５ａ 入射面 １６ａ ２５ｂ 出射面 １３ａ １３ｂ １３ｃ １３ｄ 光束分割膜 １３ｅ １３ｆ １３ｇ １３ｈ 光束分割膜 ２３ｂ ２３ｃ ２３ｄ ２３ｅ 光束分割膜 ２３ｆ ２３ｇ ２３ｈ 光束分割膜 Ｌ 光束 11 21 Light flux splitting element 11a 21a Parallel plane plate 12 22 One surface 12a 12c 23a Light flux transmitting portion 12b 22a Light flux reflecting portion 13 23 Other surface 15 16 25 26 Prism 15a 25a Incident surface 16a 25b Emitting surface 13a 13b 13c 13e 13d 13 Light splitting film 13g 13h luminous flux splitting film 23b 23c 23d 23e luminous flux splitting film 23f 23g 23h luminous flux splitting film L luminous flux
Claims (8)
光束透過部と；この光束透過部から該平行平面板内に入
射した光束を全部または一部反射させる光束反射部と；
を設け、 上記平行平面板の他面に、上記光束透過部から入射し該
他面と上記光束反射部との間で繰り返し反射する光束の
到達位置にそれぞれ位置させて、反射率の異なる光束分
割膜を設けたことを特徴とする光束分割素子。1. A light flux transmitting portion for making a light flux incident on one surface of a plane parallel plate; and a light flux reflecting portion for totally or partially reflecting the light flux incident on the plane parallel plate from the light flux transmitting portion;
Is provided on the other surface of the plane-parallel plate, and is positioned at the arrival position of the light flux that is incident from the light flux transmission section and is repeatedly reflected between the other surface and the light flux reflection section, and the light splitting with different reflectances is performed. A light beam splitting element characterized in that a film is provided.
入射した光束を全部または一部反射させる光束反射部を
設け、 上記平行平面板の他面に、上記光束反射部に向けて光束
を入射させる光束透過部と；この光束透過部から入射し
上記光束反射部と該他面との間で繰り返し反射する光束
の到達位置にそれぞれ位置させて、反射率の異なる光束
分割膜を設けたことを特徴とする光束分割素子。2. A light flux reflecting portion for totally or partially reflecting a light flux incident on the parallel flat plate is provided on one surface of the parallel flat plate, and the light flux reflecting portion is provided on the other surface of the parallel flat plate toward the light flux reflecting portion. A light beam transmitting portion that allows a light beam to enter; a light beam dividing film having different reflectances is provided at respective arrival positions of light beams that are incident from the light beam transmitting portion and repeatedly reflected between the light beam reflecting portion and the other surface. A light beam splitting element characterized in that
させる光束透過部を設け；上記平行平面板の一面に、上
記光束透過部から該平行平面板内に入射した光束を全部
または一部反射させる光束反射部を設け、 上記平行平面板の他面に、光束透過部から入射して、上
記一面の光束反射部と該他面との間で繰り返し反射する
光束の到達位置にそれぞれ位置させて、反射率の異なる
光束分割膜を設けたことを特徴とする光束分割素子。3. A light flux transmitting portion for allowing a light flux to enter is provided on one end surface of the plane-parallel plate; all or one of the light rays entering the parallel plane plate from the light-beam transmitting portion is provided on one surface of the plane parallel plate. A light flux reflecting portion for partially reflecting light is provided, and the light flux is incident on the other surface of the parallel plane plate from the light flux transmitting portion, and is positioned at the arrival position of the light flux repeatedly reflected between the one light flux reflecting portion and the other surface. A light beam splitting element having a light beam splitting film having different reflectance.
て、光束透過部には、平行平面板と直交する方向に対し
て傾斜した方向から光束が入射される光束分割素子。4. The light beam splitting element according to claim 1, wherein the light beam is incident on the light beam transmitting portion from a direction inclined with respect to a direction orthogonal to the plane-parallel plate.
には、入射する光束に対して直角をなす入射面を有する
プリズムが接着されている光束分割素子。5. The light beam splitting element according to claim 1, wherein a prism having an incident surface that is at a right angle to an incident light beam is attached to the plane-parallel plate.
には、出射する光束に対して直角をなす出射面を有する
プリズムが接着されている光束分割素子。6. The light beam splitting element according to claim 1 or 3, wherein a prism having an exit surface that is at a right angle to the outgoing light beam is attached to the plane-parallel plate.
する光束を垂直に入射させ得る角度に形成されている光
束分割素子。7. The light beam splitting element according to claim 3, wherein the light flux transmitting portion is formed at an angle that allows an incident light beam to be vertically incident.
て、光束分割膜の異なる反射率は、光束が到達する順
に、順次低くなるように設定されている光束分割素子。8. The light beam splitting element according to claim 1, wherein the different reflectances of the light beam splitting films are set to be sequentially lowered in the order of arrival of the light beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10262294A JPH07311302A (en) | 1994-05-17 | 1994-05-17 | Luminous flux splitting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10262294A JPH07311302A (en) | 1994-05-17 | 1994-05-17 | Luminous flux splitting element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07311302A true JPH07311302A (en) | 1995-11-28 |
Family
ID=14332352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10262294A Pending JPH07311302A (en) | 1994-05-17 | 1994-05-17 | Luminous flux splitting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07311302A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8767200B2 (en) | 2012-01-11 | 2014-07-01 | Nuflare Technology, Inc. | Luminous flux branching element and mask defect inspection apparatus |
| JP2015506098A (en) * | 2011-12-05 | 2015-02-26 | エーエスエムエル ネザーランズ ビー．ブイ． | Lithographic apparatus and device manufacturing method |
| CN110023819A (en) * | 2016-11-30 | 2019-07-16 | 奇跃公司 | The method and system shown for high-resolution digital |
-
1994
- 1994-05-17 JP JP10262294A patent/JPH07311302A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015506098A (en) * | 2011-12-05 | 2015-02-26 | エーエスエムエル ネザーランズ ビー．ブイ． | Lithographic apparatus and device manufacturing method |
| US9341960B2 (en) | 2011-12-05 | 2016-05-17 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US8767200B2 (en) | 2012-01-11 | 2014-07-01 | Nuflare Technology, Inc. | Luminous flux branching element and mask defect inspection apparatus |
| CN110023819A (en) * | 2016-11-30 | 2019-07-16 | 奇跃公司 | The method and system shown for high-resolution digital |
| EP4152077A1 (en) * | 2016-11-30 | 2023-03-22 | Magic Leap, Inc. | Method and system for high resolution digitized display |
| US11686944B2 (en) | 2016-11-30 | 2023-06-27 | Magic Leap, Inc. | Method and system for high resolution digitized display |
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