JPH0730165A - Laminated piezoelectric substance element - Google Patents
Laminated piezoelectric substance elementInfo
- Publication number
- JPH0730165A JPH0730165A JP5195516A JP19551693A JPH0730165A JP H0730165 A JPH0730165 A JP H0730165A JP 5195516 A JP5195516 A JP 5195516A JP 19551693 A JP19551693 A JP 19551693A JP H0730165 A JPH0730165 A JP H0730165A
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- layer
- internal electrodes
- piezoelectric
- inactive
- electrodes
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、積層型圧電体素子に
関し、詳しくは、圧電体層と内部電極との積層体を構成
する最上層及び最下層の圧電体層が、圧電的に不活性な
層（不活性層）となっている積層型圧電体素子に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated piezoelectric element, and more specifically, the uppermost and lowermost piezoelectric layers constituting a laminated body of a piezoelectric layer and internal electrodes are piezoelectrically inactive. The present invention relates to a laminated piezoelectric element having various layers (inactive layer).
【０００２】[0002]
【従来の技術】積層型圧電アクチュエータなどに用いら
れる積層型圧電体素子としては、例えば、図７に示すよ
うに、複数の圧電体層５１の間に部分電極構造を有する
内部電極５２を配設するとともに、圧電体層５１が積層
された積層体５３の、内部電極５２が引き出された側面
に外部電極５４を配設してなる積層型圧電体素子５５が
提案されている。2. Description of the Related Art As a laminated piezoelectric element used in a laminated piezoelectric actuator or the like, for example, as shown in FIG. 7, an internal electrode 52 having a partial electrode structure is provided between a plurality of piezoelectric layers 51. In addition, there is proposed a laminated piezoelectric element 55 in which an external electrode 54 is arranged on the side surface of the laminated body 53 in which the piezoelectric layer 51 is laminated, from which the internal electrode 52 is extracted.
【０００３】この積層型圧電体素子５５においては、内
部電極５２は、一層おきに絶縁されながら対向する側面
に引き出され、側面に形成された外部電極５４に導通さ
れている。なお、この積層型圧電体素子５５を積層型圧
電アクチュエータとして使用する場合には、外部電極５
４に所定の電圧を印加することによって、圧電効果によ
る変位を得ることができる。In this laminated piezoelectric element 55, the internal electrodes 52 are drawn out to opposite side surfaces while being insulated every other layer, and are electrically connected to the external electrodes 54 formed on the side surfaces. When the laminated piezoelectric element 55 is used as a laminated piezoelectric actuator, the external electrode 5
By applying a predetermined voltage to 4, the displacement due to the piezoelectric effect can be obtained.
【０００４】[0004]
【発明が解決しようとする課題】しかし、上記従来の積
層型圧電体素子においては、上・下面に電極が形成され
ておらず、最上層及び最下層の圧電体層５１ａ，５１ｂ
には、内部電極５２による電界が印加されないため、最
上層及び最下層の圧電体層５１ａ，５１ｂは圧電的に不
活性な層（不活性層）となっている。However, in the above-mentioned conventional laminated piezoelectric element, electrodes are not formed on the upper and lower surfaces, and the uppermost and lowermost piezoelectric layers 51a and 51b are formed.
Since no electric field is applied by the internal electrode 52, the uppermost and lowermost piezoelectric layers 51a and 51b are piezoelectrically inactive layers (inactive layers).
【００５】そのため、外部電極５４を介して各内部電極
５２に電圧を印加した場合、重なり合う２つの内部電極
５２により挟まれた圧電的に活性な圧電体層（活性層、
すなわち、最上層及び最下層の圧電体層５１ａ，５１ｂ
以外の圧電体層）５１は圧電効果により変位するが、不
活性層である最上層及び最下層の圧電体層５１ａ，５１
ｂには圧電効果による変位が生じない。Therefore, when a voltage is applied to each internal electrode 52 via the external electrode 54, a piezoelectrically active piezoelectric layer (active layer, which is sandwiched between two overlapping internal electrodes 52).
That is, the uppermost and lowermost piezoelectric layers 51a and 51b
Piezoelectric layers other than 51) are displaced by the piezoelectric effect, but the uppermost and lowermost piezoelectric layers 51a, 51 which are inactive layers
The displacement due to the piezoelectric effect does not occur in b.
【０００６】したがって、活性層５１と不活性層５１
ａ，５１ｂの境界部近傍に応力が集中し、破壊が生じる
という問題点がある。Therefore, the active layer 51 and the inactive layer 51
There is a problem in that stress concentrates near the boundary between a and 51b, causing breakage.
【０００７】この発明は、上記問題点を解決するもので
あり、活性層と不活性層の境界部に応力が集中すること
を緩和して、活性層と不活性層の境界部における応力破
壊を防止することが可能で、耐久性に優れ、信頼性の高
い積層型圧電体素子を提供することを目的とする。The present invention solves the above-mentioned problems by alleviating the concentration of stress on the boundary between the active layer and the inactive layer to prevent stress fracture at the boundary between the active layer and the inactive layer. An object of the present invention is to provide a laminated piezoelectric element that can be prevented, has excellent durability, and has high reliability.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成するため
に、この発明の積層型圧電体素子は、複数の圧電体層
と、圧電体層間に配設された内部電極と、内部電極と導
通する外部電極とを備えてなる積層型圧電体素子におい
て、最上層及び最下層の圧電的に不活性な圧電体層の近
傍における内部電極の重なり面積を、他の圧電的に活性
な部分における内部電極の重なり面積よりも小さくした
ことを特徴とする。In order to achieve the above object, a laminated piezoelectric element of the present invention has a plurality of piezoelectric layers, internal electrodes arranged between the piezoelectric layers, and electrical connection with the internal electrodes. In a laminated piezoelectric element including an external electrode for forming a piezoelectric element, the overlapping area of the internal electrodes in the vicinity of the piezoelectrically inactive piezoelectric layers of the uppermost layer and the lowermost layer is It is characterized in that it is smaller than the overlapping area of the electrodes.
【０００９】また、前記最上層及び最下層の圧電的に不
活性な圧電体層の近傍における内部電極の重なり面積
を、他の圧電的に活性な部分における内部電極の重なり
面積の５０％以下にしたことを特徴とする。Further, the overlapping area of the internal electrodes in the vicinity of the piezoelectrically inactive piezoelectric layers of the uppermost layer and the lowermost layer is 50% or less of the overlapping area of the internal electrodes in other piezoelectrically active portions. It is characterized by having done.
【００１０】さらに、前記最上層及び最下層の圧電的に
不活性な圧電体層の近傍の内部電極のパターンを、電極
が形成されていない孔を有するパターンとしたことを特
徴とする。Furthermore, the pattern of the internal electrodes in the vicinity of the piezoelectrically inactive piezoelectric layers of the uppermost layer and the lowermost layer is a pattern having holes in which electrodes are not formed.
【００１１】また、前記最上層及び最下層の圧電的に不
活性な圧電体層の近傍の、圧電体層を介して対向する内
部電極の、前記電極が形成されていない孔の位置を互に
ずらせることにより、該内部電極の重なり面積を調節し
たことを特徴とする。In addition, in the vicinity of the piezoelectrically inactive piezoelectric layers of the uppermost layer and the lowermost layer, the positions of the holes, in which the electrodes are not formed, of the internal electrodes facing each other with the piezoelectric layer interposed therebetween are set to each other. It is characterized in that the overlapping area of the internal electrodes is adjusted by shifting.
【００１２】[0012]
【作用】この発明の積層型圧電体素子においては、最上
層及び最下層の圧電的に不活性な圧電体層の近傍におけ
る内部電極の重なり面積が、他の圧電的に活性な部分に
おける内部電極の重なり面積よりも小さくなっているた
め、その部分の変位量が小さくなり、活性層と不活性層
の境界部に、活性層よりも変位の小さい層（応力緩和
層）が形成される。In the laminated piezoelectric element of the present invention, the overlapping area of the internal electrodes in the vicinity of the piezoelectrically inactive piezoelectric layers of the uppermost layer and the lowermost layer is such that the internal electrodes in other piezoelectrically active portions are the same. Since the area is smaller than the overlapping area, the amount of displacement in that portion is small, and a layer having a smaller displacement than the active layer (stress relaxation layer) is formed at the boundary between the active layer and the inactive layer.
【００１３】したがって、活性層と不活性層の境界部に
おける応力破壊を防止することが可能になり、積層型圧
電体素子の耐久性を向上させることができるようにな
る。Therefore, it becomes possible to prevent the stress destruction at the boundary between the active layer and the inactive layer, and it becomes possible to improve the durability of the laminated piezoelectric element.
【００１４】なお、圧電的に不活性な圧電体層の近傍に
おける内部電極の重なり面積を、他の圧電的に活性な部
分における内部電極の重なり面積の５０％以下にするこ
とによって、境界部における応力を十分に緩和すること
ができるようになり、耐久性を大幅に向上させることが
可能になる。By setting the overlapping area of the internal electrodes in the vicinity of the piezoelectrically inactive piezoelectric layer to be 50% or less of the overlapping area of the internal electrodes in other piezoelectrically active portions, the boundary area is reduced. The stress can be sufficiently relieved, and the durability can be significantly improved.
【００１５】さらに、圧電的に不活性な圧電体層の近傍
の内部電極のパターンを、電極が形成されていない孔を
有するパターンとすることにより、容易に内部電極の重
なり面積を減少させることが可能になる。Furthermore, by making the pattern of the internal electrodes near the piezoelectrically inactive piezoelectric layer a pattern having holes in which no electrodes are formed, the overlapping area of the internal electrodes can be easily reduced. It will be possible.
【００１６】また、圧電的に不活性な圧電体層の近傍
の、圧電体層を介して対向する内部電極の、電極が形成
されていない孔の位置を互にずらせることにより、該内
部電極の重なり面積を容易に調節することが可能にな
る。Further, the positions of the internal electrodes opposed to each other in the vicinity of the piezoelectrically inactive piezoelectric layer via the piezoelectric layer are shifted from each other, so that the internal electrodes are displaced from each other. It is possible to easily adjust the overlapping area of the.
【００１７】[0017]
【実施例】以下、この発明の実施例を示してその特徴と
するところをさらに詳しく説明する。図１は、この発明
の一実施例にかかる積層型圧電体素子を示す断面図であ
る。EXAMPLES The features of the present invention will be described below in more detail with reference to examples. FIG. 1 is a sectional view showing a laminated piezoelectric element according to an embodiment of the present invention.
【００１８】この実施例の積層型圧電体素子５は、複数
の圧電体層（チタン酸ジルコン酸鉛系材料からなる圧電
体層）１と、圧電体層１間に一層ごとに異なる側面に引
き出されるように配設された内部電極２ａ，２ｂとを備
えてなる積層体３の、上記内部電極２ａ，２ｂが引き出
された側面に、外部電極４ａ，４ｂを配設することによ
り形成されている。In the laminated piezoelectric element 5 of this embodiment, a plurality of piezoelectric layers (piezoelectric layers made of lead zirconate titanate-based material) 1 and piezoelectric layers 1 are drawn out on different side faces. It is formed by disposing external electrodes 4a and 4b on the side surface from which the internal electrodes 2a and 2b are drawn out of the laminated body 3 including the internal electrodes 2a and 2b that are disposed as described above. .
【００１９】そして、この積層型圧電体素子５において
は、積層体３の上・下面に電極が配設されていないた
め、最上層の圧電体層１ａ及び最下層の圧電体層１ｂは
圧電的に不活性な層（不活性層）となっている。In this laminated piezoelectric element 5, since electrodes are not provided on the upper and lower surfaces of the laminated body 3, the uppermost piezoelectric layer 1a and the lowermost piezoelectric layer 1b are piezoelectric. Is an inactive layer (inactive layer).
【００２０】また、この積層型圧電体素子５において
は、圧電的に活性な圧電体層（活性層）１間に配設され
た内部電極２ａ，２ｂは、図２（ａ），（ｂ）に示すよ
うなパターンに形成されているが、不活性層（積層体３
の最上層及び最下層の圧電体層）１ａ，１ｂの近傍の内
部電極（この実施例では、最上層及びその次の層の内部
電極１２ａ，１３ａ及び最下層及びその次の層の内部電
極１２ｂ，１３ｂ）が、図３（ａ），（ｂ）に示すよう
に、電極の形成されていない複数の孔６を有するパター
ンに形成されているとともに、隣接（対向）する内部電
極１２ａと１３ａ、及び１２ｂと１３ｂにおいて、孔６
が完全には重ならないように構成されており、その重な
り面積は、活性層の内部電極２ａ，２ｂの重なり面積の
５０％以下になっている。In this laminated piezoelectric element 5, the internal electrodes 2a and 2b disposed between the piezoelectrically active piezoelectric layers (active layers) 1 are the same as those shown in FIGS. Although the pattern is formed as shown in FIG.
Inner electrodes (in this embodiment, inner electrodes 12a, 13a of the uppermost layer and the next layer and inner electrodes 12b of the lowermost layer and the next layer) in the vicinity of the uppermost and lowermost piezoelectric layers 1a, 1b. , 13b) are formed in a pattern having a plurality of holes 6 in which no electrodes are formed, as shown in FIGS. 3A and 3B, and adjacent (opposed) internal electrodes 12a and 13a, And holes 12b and 13b at hole 6
Are not completely overlapped with each other, and the overlapping area is 50% or less of the overlapping area of the internal electrodes 2a and 2b of the active layer.
【００２１】なお、上記実施例において、図２（ａ），
（ｂ）の内部電極の寸法は４×４．５mm（内部電極２
ａ，２ｂの重なり部分は４×４mm）であり、また、図３
（ａ），（ｂ）の内部電極の寸法も図２（ａ），（ｂ）
の内部電極２ａ，２ｂとほぼ同一の寸法であり、孔６の
直径は０．５mmとなっている。In the above embodiment, as shown in FIG.
The size of the internal electrode in (b) is 4 x 4.5 mm (internal electrode 2
The overlapping portion of a and 2b is 4 × 4 mm), and FIG.
The dimensions of the internal electrodes in (a) and (b) are also shown in FIGS. 2 (a) and (b).
The internal electrodes 2a and 2b have substantially the same size, and the hole 6 has a diameter of 0.5 mm.
【００２２】次に、この実施例の積層型圧電体素子の製
造方法について説明する。上記積層型圧電体素子を製造
するにあたっては、まず、圧電体層（グリーンシート）
を製造するために、原料を秤量し、粉砕してバインダと
ともに混合し、脱泡した後、シート状に成形し、所定の
形状に打抜く。Next, a method of manufacturing the laminated piezoelectric element of this embodiment will be described. In manufacturing the laminated piezoelectric element, first, the piezoelectric layer (green sheet)
In order to manufacture, the raw materials are weighed, crushed, mixed with a binder, defoamed, molded into a sheet, and punched into a predetermined shape.
【００２３】それから、これに所定のパターンの内部電
極を印刷する。このとき、活性層となる圧電体層（グリ
ーンシート）には、図２（ａ），（ｂ）に示すようなパ
ターンで内部電極を印刷し、不活性層に近い位置に配設
され、応力緩和層となる圧電体層（グリーンシート）に
は、図３（ａ），（ｂ）に示すような、電極が形成され
ていない孔６を有するパターンになるように内部電極を
印刷する。Then, an internal electrode having a predetermined pattern is printed on it. At this time, internal electrodes are printed on the piezoelectric layer (green sheet) to be the active layer in a pattern as shown in FIGS. Internal electrodes are printed on the piezoelectric layer (green sheet) serving as a relaxation layer so as to have a pattern having holes 6 in which electrodes are not formed, as shown in FIGS. 3A and 3B.
【００２４】また、不活性層となる圧電体層（グリーン
シート）として、内部電極が印刷されていない圧電体層
（グリーンシート）を用意する。A piezoelectric layer (green sheet) on which internal electrodes are not printed is prepared as the piezoelectric layer (green sheet) to be an inactive layer.
【００２５】それから、図４に示すように、活性層用グ
リーンシート２１の上・下面側に応力緩和層用グリーン
シート２２が配設され、かつ、その上・下面側に不活性
層用グリーンシート２３が配設されるような順に各グリ
ーンシートを積層圧着した後、所定の温度で焼成するこ
とにより積層体３（図１）を得る。Then, as shown in FIG. 4, the stress relaxation layer green sheets 22 are provided on the upper and lower surfaces of the active layer green sheet 21, and the inactive layer green sheets are provided on the upper and lower surfaces thereof. The green sheets are laminated and pressure-bonded in such an order that 23 is arranged, and then the green sheets are fired at a predetermined temperature to obtain a laminate 3 (FIG. 1).
【００２６】それから、積層体３の、内部電極２ａ，２
ｂが引き出された側面に外部電極４ａ，４ｂを形成する
ことにより、図１に示すような積層型圧電体素子５が得
られる。Then, the internal electrodes 2a, 2 of the laminate 3 are
By forming the external electrodes 4a and 4b on the side surface from which b is extracted, the laminated piezoelectric element 5 as shown in FIG. 1 is obtained.
【００２７】このようにして得られた、図１の積層型圧
電体素子５においては、各内部電極に電圧を印加した場
合に、活性層１と不活性層１ａ，１ｂの境界部（すなわ
ち、圧電体層１ａ1，１ａ2、及び圧電体層１ｂ1，１ｂ2
の変位量が他の活性層（圧電体層１）に比べて小さくな
り、境界部が応力緩和層としての機能を果すようにな
る。In the thus obtained laminated piezoelectric element 5 of FIG. 1, when a voltage is applied to each internal electrode, the boundary portion between the active layer 1 and the inactive layers 1a and 1b (that is, Piezoelectric layers 1a 1 and 1a 2 and piezoelectric layers 1b 1 and 1b 2
Becomes smaller than that of the other active layer (piezoelectric layer 1), and the boundary portion functions as a stress relaxation layer.
【００２８】その結果、活性層と不活性層の境界部にお
ける応力破壊を防止することが可能になり、耐久性に優
れ、信頼性の高い積層型圧電体素子を得ることができる
ようになる。As a result, it becomes possible to prevent stress breakdown at the boundary between the active layer and the inactive layer, and it is possible to obtain a laminated piezoelectric element having excellent durability and high reliability.
【００２９】また、上記実施例の積層型圧電体素子５に
ついて、湿中で駆動試験を行い、その寿命について評価
した結果を図５に示す。なお、図５において、横軸の電
極重なり面積比は、応力緩和層の重なり面積の、活性層
の内部電極の重なり面積に対する比率（％）を示す。ま
た、ここで評価した積層型圧電体素子（サンプル）の構
成や寸法などは次の通りである。 圧電体層１の厚み ：５０μm 不活性層の層数（上・下） ： ３層 応力緩和層の層数（上・下）： ３層 活性層の層数 ：５０層 積層型圧電体素子寸法 ：５mm×５mm×３．２mm
(t)Further, the laminated piezoelectric element 5 of the above-mentioned example was subjected to a drive test in a wet condition, and its life was evaluated. The results are shown in FIG. In FIG. 5, the electrode overlapping area ratio on the horizontal axis indicates the ratio (%) of the overlapping area of the stress relaxation layer to the overlapping area of the internal electrode of the active layer. The configuration and dimensions of the laminated piezoelectric element (sample) evaluated here are as follows. Thickness of piezoelectric layer 1: 50 μm Number of inactive layers (upper / lower): 3 layers Number of stress relaxation layers (upper / lower): 3 layers Number of active layers: 50 layers Piezoelectric element dimensions : 5mm x 5mm x 3.2mm
(t)
【００３０】図５に示すように、電極重なり面積比が５
０％以下になると、電極重なり面積比が１００％の場合
（すなわち従来の積層型圧電体素子）に比べて、寿命が
１０倍以上に長くなっていることがわかる。As shown in FIG. 5, the electrode overlap area ratio is 5
It can be seen that when the ratio is 0% or less, the life is 10 times or more longer than when the electrode overlapping area ratio is 100% (that is, the conventional laminated piezoelectric element).
【００３１】なお、上記実施例では、内部電極の重なり
面積を減少させる方法として、孔６を形成した場合につ
いて説明したが、さらに、図６に示すように、孔６ａを
規則的に配設した内部電極１２ａと、孔６ｂを規則的に
配設した内部電極１２ｂを形成し、対向する内部電極１
２ａ，１２ｂ間でその位置をずらせることにより、内部
電極の重なり面積を高精度に制御することができる。な
お、図６においては、内部電極１２ａと１２ｂの重なり
部分を斜線で示す。In the above embodiment, the case where the holes 6 are formed has been described as a method of reducing the overlapping area of the internal electrodes. Further, as shown in FIG. 6, holes 6a are regularly arranged. The internal electrode 12a and the internal electrode 12b in which the holes 6b are regularly arranged are formed to face each other.
By shifting the position between 2a and 12b, the overlapping area of the internal electrodes can be controlled with high accuracy. Note that, in FIG. 6, the overlapping portion of the internal electrodes 12a and 12b is shown by hatching.
【００３２】また、内部電極の重なり面積を減少させる
方法は、これらの方法に限らず、さらに他の方法を用い
ることも可能である。Further, the method of reducing the overlapping area of the internal electrodes is not limited to these methods, and it is also possible to use other methods.
【００３３】なお、この発明は、上記実施例に限定され
るものではなく、圧電体層を構成する材料の種類や組
成、あるいは圧電体層の具体的な形状や積層数、内部電
極及び外部電極の構成材料やそのパターン、応力緩和層
の層数や厚み、内部電極のパターン（例えば、電極が形
成されていない孔の形状）などに関し、発明の要旨の範
囲内において、種々の応用、変形を加えることが可能で
ある。The present invention is not limited to the above embodiment, but the kind and composition of the material forming the piezoelectric layer, the specific shape and the number of laminated layers of the piezoelectric layer, the internal electrode and the external electrode. Within the scope of the gist of the invention, various applications and modifications may be made regarding the constituent materials and patterns thereof, the number and thickness of the stress relaxation layer, the pattern of the internal electrodes (for example, the shape of the holes in which no electrodes are formed), and the like. It is possible to add.
【００３４】[0034]
【発明の効果】上述のように、この発明の積層型圧電体
素子は、最上層及び最下層の圧電的に不活性な圧電体層
の近傍における内部電極の重なり面積を、他の圧電的に
活性な部分における内部電極の重なり面積よりも小さく
しているので、活性層と不活性層の境界部における変位
量を小さくして、応力の集中を緩和し、活性層と不活性
層の境界部における応力破壊を防止することができる。
その結果、耐久性に優れ、信頼性の高い積層型圧電体素
子を得ることが可能になる。As described above, according to the laminated piezoelectric element of the present invention, the overlapping area of the internal electrodes in the vicinity of the piezoelectrically inactive piezoelectric layers of the uppermost layer and the lowermost layer is set to another piezoelectric element. Since it is smaller than the overlapping area of the internal electrodes in the active part, the displacement amount at the boundary part between the active layer and the inactive layer is made small to relax the concentration of stress, and the boundary part between the active layer and the inactive layer is reduced. It is possible to prevent stress fracture in the.
As a result, it becomes possible to obtain a laminated piezoelectric element having excellent durability and high reliability.
【００３５】また、不活性層の近傍における内部電極の
重なり面積を、活性層における内部電極の重なり面積の
５０％以下にすることによって、境界部における応力を
確実に緩和して、耐久性を大幅に向上させることが可能
になる。Further, by setting the overlapping area of the internal electrodes in the vicinity of the inactive layer to be 50% or less of the overlapping area of the internal electrodes in the active layer, the stress at the boundary is surely relieved, and the durability is greatly increased. Can be improved.
【００３６】さらに、不活性層の近傍の内部電極のパタ
ーンを、電極が形成されていない孔を有するパターンと
することにより、容易に内部電極の重なり面積を減少さ
せることができる。Furthermore, by forming the pattern of the internal electrodes near the inactive layer as a pattern having holes in which no electrodes are formed, the overlapping area of the internal electrodes can be easily reduced.
【００３７】また、不活性層の近傍の、圧電体層を介し
て対向する内部電極の、電極が形成されていない孔の位
置を互にずらせることにより、その重なり面積を容易か
つ確実に調節することができる。Further, by arranging the positions of the internal electrodes facing each other through the piezoelectric layer in the vicinity of the inactive layer, the positions of the holes in which the electrodes are not formed are shifted from each other, the overlapping area can be easily and surely adjusted. can do.
【図１】この発明の一実施例にかかる積層型圧電体素子
を示す断面図である。FIG. 1 is a sectional view showing a laminated piezoelectric element according to an embodiment of the present invention.
【図２】この発明の一実施例にかかる積層型圧電体素子
における、活性層の内部電極のパターンを示す図であ
り、（ａ）は圧電体層を介して対向する２つの内部電極
の一方を示す平面図、（ｂ）は他方を示す平面図であ
る。FIG. 2 is a diagram showing a pattern of internal electrodes of an active layer in a laminated piezoelectric element according to an embodiment of the present invention, (a) of one of two internal electrodes facing each other with a piezoelectric layer interposed therebetween. And (b) is a plan view showing the other.
【図３】この発明の一実施例にかかる積層型圧電体素子
における、不活性層近傍の内部電極のパターンを示す図
であり、（ａ）は圧電体層を介して対向する２つの内部
電極の一方を示す平面図、（ｂ）は他方を示す平面図で
ある。FIG. 3 is a diagram showing a pattern of internal electrodes in the vicinity of the inactive layer in the laminated piezoelectric element according to the embodiment of the present invention, and FIG. 1 is a plan view showing one side, and FIG. 3B is a plan view showing the other side.
【図４】この発明の一実施例にかかる積層型圧電体素子
の製造工程を示す斜視図である。FIG. 4 is a perspective view showing a manufacturing process of a laminated piezoelectric element according to an embodiment of the present invention.
【図５】この発明の一実施例にかかる積層型圧電体素子
について測定した、電極重なり面積比と寿命との関係を
示す線図である。FIG. 5 is a diagram showing the relationship between the electrode overlapping area ratio and the service life measured for the laminated piezoelectric element according to the example of the present invention.
【図６】この発明の一実施例にかかる積層型圧電体素子
における、不活性層近傍の内部電極のパターンを示す図
である。FIG. 6 is a diagram showing a pattern of internal electrodes in the vicinity of the inactive layer in the laminated piezoelectric element according to the example of the present invention.
【図７】従来の積層型圧電体素子を示す断面図である。FIG. 7 is a cross-sectional view showing a conventional laminated piezoelectric element.
１ 圧電体層 １ａ 最上層の圧電体層
（不活性層） １ａ1，１ａ2 不活性層近傍の圧電
体層 １ｂ 最下層の圧電体層
（不活性層） １ｂ1，１ｂ2 不活性層近傍の圧電
体層 ２ａ，２ｂ 活性層の内部電極 ３ 積層体 ４ａ，４ｂ 側面に形成された外
部電極 ５ 積層型圧電体素子 ６ 電極が形成されてい
ない孔 １２ａ，１２ｂ，１３ａ，１３ｂ 不活性層近傍の内部
電極First piezoelectric layer 1a uppermost piezoelectric layer (inactive layer) 1a 1, 1a 2 inactive layer piezoelectric layers 1b lowermost piezoelectric layer near (inactive layer) 1b 1, 1b 2 inactive layer near Piezoelectric layers 2a, 2b Internal electrode 3 of active layer 3 Laminated bodies 4a, 4b External electrode 5 formed on the side surface 5 Laminated piezoelectric element 6 Holes in which electrodes are not formed 12a, 12b, 13a, 13b Near inactive layer Internal electrode of
Claims (4)
れた内部電極と、内部電極と導通する外部電極とを備え
てなる積層型圧電体素子において、 最上層及び最下層の圧電的に不活性な圧電体層の近傍に
おける内部電極の重なり面積を、他の圧電的に活性な部
分における内部電極の重なり面積よりも小さくしたこと
を特徴とする積層型圧電体素子。1. A laminated piezoelectric element comprising a plurality of piezoelectric layers, internal electrodes arranged between the piezoelectric layers, and external electrodes electrically connected to the internal electrodes, wherein the uppermost layer and the lowermost layer are piezoelectric. A laminated piezoelectric element, characterized in that the overlapping area of the internal electrodes in the vicinity of the electrically inactive piezoelectric layer is smaller than the overlapping area of the internal electrodes in other piezoelectrically active portions.
な圧電体層の近傍における内部電極の重なり面積を、他
の圧電的に活性な部分における内部電極の重なり面積の
５０％以下にしたことを特徴とする請求項１記載の積層
型圧電体素子。2. The overlapping area of the internal electrodes in the vicinity of the piezoelectrically inactive piezoelectric layers of the uppermost layer and the lowermost layer is 50% or less of the overlapping area of the internal electrodes in other piezoelectrically active portions. The laminated piezoelectric element according to claim 1, wherein the laminated piezoelectric element is formed.
な圧電体層の近傍の内部電極のパターンを、電極が形成
されていない孔を有するパターンとしたことを特徴とす
る請求項１または請求項２記載の積層型圧電体素子。3. The pattern of internal electrodes in the vicinity of the piezoelectrically inactive piezoelectric layers of the uppermost layer and the lowermost layer is a pattern having holes in which electrodes are not formed. Alternatively, the laminated piezoelectric element according to claim 2.
な圧電体層の近傍の、圧電体層を介して対向する内部電
極の、前記電極が形成されていない孔の位置を互にずら
せることにより、該内部電極の重なり面積を調節したこ
とを特徴とする請求項３記載の積層型圧電体素子。4. The positions of the holes, in which the electrodes are not formed, of the internal electrodes facing each other with the piezoelectric layer in the vicinity of the piezoelectrically inactive piezoelectric layers of the uppermost layer and the lowermost layer are mutually located. 4. The laminated piezoelectric element according to claim 3, wherein the overlapping area of the internal electrodes is adjusted by shifting the internal electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5195516A JPH0730165A (en) | 1993-07-12 | 1993-07-12 | Laminated piezoelectric substance element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5195516A JPH0730165A (en) | 1993-07-12 | 1993-07-12 | Laminated piezoelectric substance element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0730165A true JPH0730165A (en) | 1995-01-31 |
Family
ID=16342388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5195516A Withdrawn JPH0730165A (en) | 1993-07-12 | 1993-07-12 | Laminated piezoelectric substance element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0730165A (en) |
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