JPH07195045A - Purifying-deacidifying device for washing liquid for ultrasonic washing - Google Patents
Purifying-deacidifying device for washing liquid for ultrasonic washingInfo
- Publication number
- JPH07195045A JPH07195045A JP35232293A JP35232293A JPH07195045A JP H07195045 A JPH07195045 A JP H07195045A JP 35232293 A JP35232293 A JP 35232293A JP 35232293 A JP35232293 A JP 35232293A JP H07195045 A JPH07195045 A JP H07195045A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- deoxidizing
- cleaning
- treated
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、超音波洗浄用洗浄液の
浄化・脱酸装置に関するものである。本発明は、超音波
洗浄装置に用いられている各種洗浄液、特に引火性洗浄
液の再使用時における浄化・脱酸（脱気）に適した浄化
・脱酸装置を提供するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning / deoxidizing apparatus for cleaning liquid for ultrasonic cleaning. The present invention provides a cleaning / deoxidizing apparatus suitable for cleaning / deoxidizing (degassing) when reusing various cleaning solutions used in ultrasonic cleaning apparatuses, particularly flammable cleaning solutions.
【０００２】[0002]
【従来の技術】周知の通り、電子部品や精密機械部品の
洗浄にはフロンを洗浄液として用いる超音波洗浄装置が
汎用されており、フロン洗浄液の再使用時における浄化
・脱酸手段についても、例えば、特公平３−４９６３６
号公報や特公平４−３７７５４号公報をはじめとして多
くの先行文献に各種の手段が開示されている。しかし、
近年、フロンが大気中のオゾン層破壊の原因となってい
ることが明らかになって以来、全世界的にフロンの使用
規制が強化され、超音波洗浄装置に用いられているフロ
ン洗浄液についても、その代替物として炭化水素系溶剤
を採用するケースが増加している。従来、フロン洗浄液
の再使用時における浄化・脱酸は、前掲各公報にも見ら
れる通り、超音波洗浄装置自体に組み込まれ、或いは、
付設された浄化・脱酸装置によって行われているが、当
該浄化・脱酸装置は開放式のものであった。2. Description of the Related Art As is well known, an ultrasonic cleaning device using Freon as a cleaning liquid is widely used for cleaning electronic parts and precision machine parts, and for cleaning and deoxidizing means when reusing the Freon cleaning liquid, for example, , Tokuhei 3-49636
Various means are disclosed in many prior art documents including Japanese Patent Publication No. 4-37754 and Japanese Patent Publication No. 4-37754. But,
In recent years, since it has become clear that CFCs cause ozone depletion in the atmosphere, the restrictions on CFC use have been tightened worldwide, and the CFC cleaning liquid used in ultrasonic cleaning equipment has also been An increasing number of cases have adopted hydrocarbon-based solvents as alternatives. Conventionally, purification and deoxidation when reusing a CFC cleaning liquid is incorporated in the ultrasonic cleaning device itself as seen in the above-mentioned publications, or
Although it is carried out by an attached purifying / deoxidizing device, the purifying / deoxidizing device was an open type.
【０００３】[0003]
【発明が解決しようとする課題】フロン洗浄液の代替物
として超音波洗浄装置に用いられている各種洗浄液の
内、特に引火性洗浄液、例えば炭化水素系洗浄液につい
ては、その再使用時における浄化・脱酸には、フロン洗
浄液の浄化・脱酸に使用されていた前記の開放式浄化・
脱酸装置を適用することはできない。何故なら、例えば
炭化水素系洗浄液は、引火点が約４０℃〜７０℃前後で
沸点が約１５０℃〜１９０℃前後のものであるため、大
気中で温度を上げると引火して爆発する危険があり、ま
た、炭化水素系洗浄液の種類によっては、その性質に変
化をもたらす場合もあるので、密閉式装置において減圧
下に浄化・脱酸を行うことが必須となるからである。Among various cleaning liquids used in the ultrasonic cleaning apparatus as an alternative to the CFC cleaning liquid, particularly flammable cleaning liquids such as hydrocarbon-based cleaning liquids are cleaned and removed when they are reused. As for acid, the above-mentioned open type purification that was used for purification and deoxidation of CFC cleaning liquid
No deoxidizer can be applied. This is because, for example, a hydrocarbon-based cleaning liquid has a flash point of about 40 ° C. to 70 ° C. and a boiling point of about 150 ° C. to 190 ° C. Therefore, there is a risk of ignition and explosion when the temperature is raised in the atmosphere. This is because, depending on the type of the hydrocarbon-based cleaning liquid, its properties may be changed, so that it is essential to perform purification / deoxidation under reduced pressure in a closed-type apparatus.
【０００４】なお、特公平１−３１９２１号公報に見ら
れる如き多孔質膜材を用いた気泡分離装置を利用するこ
とは、当該多孔質膜材が炭化水素系洗浄液によって侵さ
れてしまう場合がある。[0004] By using a bubble separation device using a porous membrane material as disclosed in Japanese Patent Publication No. 1-39211, the porous membrane material may be attacked by a hydrocarbon-based cleaning liquid. .
【０００５】そこで、本発明者は、フロン洗浄液の代替
物として用いられている各種洗浄液、特に引火性洗浄液
の再使用時における浄化・脱酸を、安全且つ効率よく行
える装置を提供することを技術的課題として、研究・試
作・実験を重ねた結果、本発明を完成したものである。
また、本発明者は、上記研究・試作・実験の過程におい
て、浄化・脱酸された被処理液と脱酸のみがなされた被
処理液とを必要に応じて別個に取り出せる装置を提供す
ることをも技術的課題とし、本発明を完成したものであ
る。Therefore, the inventor of the present invention aims to provide a device capable of safely and efficiently purifying and deoxidizing various cleaning liquids used as substitutes for CFC cleaning liquids, particularly flammable cleaning liquids when they are reused. The present invention has been completed as a result of repeated research, trial manufacture, and experiments.
In addition, the present inventor provides a device capable of separately taking out the liquid to be treated which has been purified and deoxidized and the liquid to be treated which is only deoxidized in the course of the above research, trial production and experiment. This is also a technical subject, and the present invention has been completed.
【０００６】[0006]
【課題を解決するための手段】前記技術的課題は、次の
通りの本発明によって達成できる。即ち、本発明は、図
１に示す通り、下半部に垂直状の仕切板３を介して、ヒ
ータ４を内蔵した高水位の蒸留槽１と、これに隣接する
低水位の貯留槽２を備え、蒸留槽１の上方には貯留槽２
に向って下方に傾斜する傾斜板６を設けると共に、上半
部にも仕切板３に向って垂下し、且つ傾斜板６に到らな
い仕切壁８を設け、さらに、傾斜板６の上方には浄化・
脱酸の対象とする被処理液を水滴状にて内部に導入する
シャワー７を設け、また、貯留槽２の下側部には内部液
の取出口Ｔ４を、その底部にはスラッジ排出口Ｔ３をそ
れぞれ設けると共に、蒸留槽１の底部にもスラッジ排出
口Ｔ２を設けた密閉式の脱酸・蒸留塔Ａと、脱酸・蒸留
塔Ａ内に発生する前記被処理液の蒸気が上方から導入さ
れ該蒸気を冷却して液化する内部に冷却水循環機構９を
備えた密閉式の脱酸・冷却コンデンサＢと、脱酸・冷却
コンデンサＢ内で液化された前記浄化・脱酸された被処
理液が上方から導入され該液を貯える下側部又は底部に
内部液の取出口Ｔ５を設けた密閉式の脱酸・貯蔵タンク
Ｃと、脱酸・蒸留塔Ａ、脱酸・冷却コンデンサＢおよび
脱酸・貯蔵タンクＣの各内部を吸引して減圧する真空ポ
ンプＤと、真空ポンプＤからの排気ガスが下方から導入
され該排気ガス中の前記被処理液の蒸気を液化して回収
し残部ガスを上方から大気中に排出する内部に前記被処
理液と同種の液を充填すると共に側部に内部液取出口Ｔ
６を設けたガス−液置換ユニットＥとを、吸引・排気路
系パイプ群Ｐ９、Ｐ１０と被処理液路系パイプ群Ｐ１、
Ｐ２、Ｐ３、Ｐ１３とによって連結したことを特徴とす
る超音波洗浄用洗浄液の浄化・脱酸装置である。The above technical problems can be achieved by the present invention as follows. That is, according to the present invention, as shown in FIG. 1, a high water level distillation tank 1 having a built-in heater 4 and a low water level storage tank 2 adjacent thereto are provided via a vertical partition plate 3 in the lower half part. A storage tank 2 is provided above the distillation tank 1.
A tilting plate 6 that tilts downward toward the tilt plate 6 is provided, and a partition wall 8 that hangs toward the partition plate 3 and that does not reach the tilt plate 6 is provided in the upper half portion. Is purification
A shower 7 for introducing the liquid to be treated to be deoxidized into the inside in the form of water droplets is provided, an internal liquid take-out port T4 is provided at the lower side of the storage tank 2, and a sludge discharge port T3 is provided at the bottom thereof. Each of which is provided with a sludge discharge port T2 at the bottom of the distillation tank 1, and a vapor of the liquid to be treated which is generated in the deoxidation / distillation column A is introduced from above. The closed deoxidizing / cooling condenser B provided with a cooling water circulation mechanism 9 inside which cools and liquefies the steam thus treated, and the purified / deoxidized treatment liquid liquefied in the deoxidizing / cooling condenser B And a closed type deoxidation / storage tank C provided with an internal liquid outlet T5 at the lower side or the bottom for introducing the liquid, and a deoxidation / distillation tower A, a deoxidation / cooling condenser B and a desorption unit. A vacuum pump D for sucking and depressurizing the inside of the acid / storage tank C and a vacuum pump The exhaust gas from the pump D is introduced from below, the vapor of the liquid to be treated in the exhaust gas is liquefied and recovered, and the remaining gas is discharged into the atmosphere from above, and the inside of the exhaust gas is filled with the same liquid as the liquid to be treated. And the internal liquid outlet T on the side
6, the gas-liquid replacement unit E is provided with a suction / exhaust path pipe group P9, P10 and a liquid path pipe group P1 to be treated.
A cleaning / deoxidizing apparatus for cleaning liquid for ultrasonic cleaning, wherein the cleaning / deoxidizing device is connected by P2, P3, and P13.
【０００７】なお、上記の通りの本発明装置における各
構成要素自体の材料、構造、製作手段等は、いずれも、
当業者にとって周知のものである。The material, structure, manufacturing means, etc. of each constituent element of the device of the present invention as described above are
It is well known to those skilled in the art.
【０００８】[0008]
【作用】前記構成を採る本発明の作用は次の通りであ
る。本発明装置においては、真空ポンプＤによって脱酸
・蒸留塔Ａ、脱酸・冷却コンデンサＢ、脱酸・貯蔵タン
クＣ内を吸引して減圧しつつ、浄化・脱酸の対象とする
被処理液を、脱酸・蒸留塔Ａの傾斜板６の上方かシャワ
ー７により水滴状にして注ぐか、あるいは、蒸留槽１内
に注入口Ｔ１から直接注入し、ヒータ４による加熱によ
って脱酸・蒸留塔Ａ内に発生した蒸気を上方のパイプ１
０を介して脱酸・貯蔵コンデンサＢに送り、冷却して液
化し、脱酸・貯蔵タンクＣに貯め、この脱酸・貯蔵タン
クＣから、浄化・脱酸された被処理液を必要量取り出せ
るようにし、一方、真空ポンプＤにより脱酸・蒸留塔
Ａ、脱酸・冷却コンデンサＢおよび脱酸・貯蔵タンクＣ
から吸引した排気ガスをガス−液置換ユニットＥの下部
から注入してガス−液置換し、排ガスを大気に放出させ
るようにすると共に、ガス−液置換ユニットＥ内の被処
理液を取出口Ｔ６から取り出して、上記の浄化・脱酸の
対象とする被処理液の場合と同様に、脱酸・蒸留塔Ａ内
に注入するようにしており、さらに、蒸留槽１と貯留槽
２の底部に溜るスラッジを手動弁Ｓ５の操作によりそれ
ぞれ取出口Ｔ２、Ｔ３からパイプＰ４、Ｐ５を介して取
り出すようにしている。The operation of the present invention having the above construction is as follows. In the apparatus of the present invention, the vacuum pump D sucks the inside of the deoxidizing / distilling tower A, the deoxidizing / cooling condenser B, and the deoxidizing / storage tank C to reduce the pressure, and the liquid to be treated to be purified / deoxidized. Is poured over the inclined plate 6 of the deoxidation / distillation tower A or in the form of water droplets by the shower 7, or is directly injected into the distillation tank 1 through the injection port T1 and heated by the heater 4 to deoxidize / distillate the tower. The steam generated in A is the upper pipe 1
It is sent to the deoxidizing / storage condenser B via 0, cooled and liquefied, stored in the deoxidizing / storage tank C, and from this deoxidizing / storage tank C, the required amount of the purified / deoxidized liquid to be treated can be taken out. On the other hand, by the vacuum pump D, the deoxidizing / distilling column A, the deoxidizing / cooling condenser B and the deoxidizing / storage tank C
The exhaust gas sucked from the gas-liquid replacement unit E is injected from the lower part to perform gas-liquid replacement so that the exhaust gas is released to the atmosphere, and the liquid to be treated in the gas-liquid replacement unit E is taken out from the outlet T6. As in the case of the liquid to be treated which is to be purified and deoxidized, it is injected into the deoxidation / distillation column A, and further at the bottom of the distillation tank 1 and the storage tank 2. The accumulated sludge is taken out from the outlets T2, T3 via the pipes P4, P5 by operating the manual valve S5.
【０００９】本発明装置においては、脱酸・蒸留塔Ａを
はじめ脱酸・冷却コンデンサＢ、脱酸・貯蔵タンクＣ等
を密閉式としているから約７６０mmHg程度までの減圧が
可能で、例えば炭化水素系洗浄液の場合には、その沸点
の３〜４割程度低い温度によって沸騰させることが可能
となり、また、炭化水素系洗浄液が蒸留槽１内にて引火
点以上の温度に達しても、火元がなく、オーバーフロー
して隣接する貯留槽２に入って急冷・液化されるので引
火の危険性はない。従って本発明装置は、加温や減圧に
より物質の変化を起さないものであれば、不燃性洗浄液
はもとより引火性洗浄液も対象とすることができるので
ある。In the apparatus of the present invention, the deoxidation / distillation column A, deoxidation / cooling condenser B, deoxidation / storage tank C, etc. are of a hermetically sealed type, so that the pressure can be reduced to about 760 mmHg, for example, hydrocarbons. In the case of the system cleaning liquid, it becomes possible to boil at a temperature lower by about 30 to 40% of its boiling point, and even if the hydrocarbon cleaning liquid reaches a temperature above the flash point in the distillation tank 1, There is no danger, and there is no danger of ignition because it overflows and enters the adjacent storage tank 2 and is rapidly cooled and liquefied. Therefore, the device of the present invention can be applied not only to non-flammable cleaning liquids but also to flammable cleaning liquids as long as the substance does not change due to heating or pressure reduction.
【００１０】また、本発明装置においては、脱酸・蒸留
塔Ａ、脱酸・冷却コンデンサＢおよび脱酸・貯蔵タンク
Ｃの各内部を吸引して減圧しているから被処理液中の酸
素（空気）を脱酸することが可能となり、特に脱酸・蒸
留塔Ａにおいては、シャワー７から水滴状にて被処理液
を導入するので、内部での接触面積が大きくなるから効
果的に脱酸を行うことができる。また、脱酸・蒸留塔Ａ
内と脱酸・冷却コンデンサＢ内は被処理液の種類に応じ
て最適の減圧度に調節できる。なお、未浄化で脱酸のみ
を行った被処理液を必要とする場合には、貯留槽２の取
出口Ｔ４から取り出すようにしている。In the apparatus of the present invention, the inside of the deoxidizing / distilling tower A, the deoxidizing / cooling condenser B and the deoxidizing / storage tank C is sucked and decompressed, so that the oxygen in the liquid to be treated ( Air), and particularly in the deoxidizing / distilling tower A, since the liquid to be treated is introduced from the shower 7 in the form of water droplets, the contact area inside becomes large and the deoxidizing is effective. It can be performed. Also, deoxidation / distillation tower A
The inside of the condenser and the inside of the deoxidizing / cooling condenser B can be adjusted to the optimum pressure reduction degree according to the type of the liquid to be treated. When the untreated liquid that has been deoxidized only is required, it is taken out from the outlet T4 of the storage tank 2.
【００１１】[0011]
【実施例】以下に、浄化・脱酸の対象とする被処理液を
炭化水素系洗浄液とした場合の実施例を挙げて、本発明
の構成と作用をより詳しく説明する。図中Ａは密閉式の
脱酸・蒸留塔で、下半部に垂直状の仕切板３を介して右
方にヒータ４と温度計５を備えた高水位の蒸留槽１を形
成すると共に、仕切板３の左方には前記蒸留槽１より低
水位の貯留槽２が形成されており、前記両槽の水位はフ
ロートスイッチ（図示せず）により一定の水位の範囲に
制御されるようになっている。６は蒸留槽１の上部に貯
留槽２に向って下り傾斜を有する傾斜板で、その上部に
シャワー７が設けられ、このシャワー７からシャワリン
グされた被処理液を貯留槽２に注入する役割を果たすも
のである。８は脱酸・蒸留塔Ａ内の上半部に設けられた
仕切壁で、前記下半部の仕切板３の上方に位置し、その
下端は前記傾斜板６の上面には接しない状態に設けら
れ、前記シャワリング部と貯留槽上部とを区画してい
る。図中Ｂは、内部に冷却水循環機構９を設けた脱酸・
冷却コンデンサ（以下単に「コンデンサ」という）で、
脱酸・蒸留塔Ａの左方上部と該コンデンサＢの上部とは
太いパイプ１０にて連結されている。図中Ｃは、コンデ
ンサＢにて冷却・液化される浄化・脱酸された被処理液
（蒸留液）を貯える脱酸・貯蔵タンク（以下単に「貯蔵
タンク」という）で、コンデンサＢの下部に配置され、
三方弁Ｓ２を備えた連通パイプ１１にて連結されてい
る。そしてこの貯蔵タンクＣ内の浄化・脱酸された被処
理液の水位についてもフロートスイッチ（図示せず）に
より一定の水位の範囲に制御されるようになっている。
図中Ｄは真空ポンプ、Ｅは、内部に邪魔板１２を多段か
つジグザグ状に設けたガス−液置換ユニット、Ｆはスラ
ッジタンクであり、ガス−液置換ユニットＦ内の被処理
液の水位についてもフロートスイッチ（図示せず）によ
り一定の水位の範囲に制御されるようになっている。EXAMPLES Hereinafter, the constitution and action of the present invention will be described in more detail with reference to an example in which the liquid to be treated to be purified and deoxidized is a hydrocarbon-based cleaning liquid. In the figure, A is a closed-type deoxidizing / distilling tower, which forms a high water level distillation tank 1 equipped with a heater 4 and a thermometer 5 on the right side through a vertical partition plate 3 in the lower half, A storage tank 2 having a water level lower than that of the distillation tank 1 is formed on the left side of the partition plate 3, and the water levels of both tanks are controlled by a float switch (not shown) within a certain water level range. Has become. Reference numeral 6 denotes an inclined plate having a downward inclination toward the storage tank 2 in the upper portion of the distillation tank 1, a shower 7 is provided in the upper portion thereof, and a role of injecting the treated liquid showered from the shower 7 into the storage tank 2 To fulfill. Reference numeral 8 denotes a partition wall provided in the upper half of the deoxidizing / distilling column A, which is located above the partition plate 3 in the lower half and whose lower end is not in contact with the upper surface of the inclined plate 6. It is provided and separates the showering part and the upper part of the storage tank. In the figure, B indicates deoxidation / cooling water circulation mechanism 9 provided inside.
A cooling condenser (hereinafter simply referred to as "condenser"),
The left upper portion of the deoxidizing / distilling column A and the upper portion of the condenser B are connected by a thick pipe 10. In the figure, C is a deoxidizing / storage tank (hereinafter simply referred to as "storage tank") for storing the purified / deoxidized liquid to be treated (distillate) that is cooled / liquefied in the capacitor B, and is located below the capacitor B. Placed,
They are connected by a communication pipe 11 equipped with a three-way valve S2. The water level of the liquid to be treated, which has been purified and deoxidized in the storage tank C, is also controlled within a fixed water level range by a float switch (not shown).
In the figure, D is a vacuum pump, E is a gas-liquid replacement unit in which baffle plates 12 are provided in multiple stages and in a zigzag shape, F is a sludge tank, and the water level of the liquid to be treated in the gas-liquid replacement unit F is shown. Is also controlled by a float switch (not shown) within a certain water level range.
【００１２】本発明装置においては、上記各部間が以下
に説明するように配管され連結されている。超音波洗浄
装置において使用された結果、その再使用に当って浄化
・脱酸を必要とする炭化水素系洗浄液（ソルベントＸＲ
・商品名・引火点７１℃，沸点１９０℃・アクア化学株
式会社 製）を被処理液とし、該被処理液は、図中点線
で示すように被処理液路系パイプＰ１から三方弁Ｓ１に
より分岐されたパイプＰ２を介して前記脱酸・蒸留塔Ａ
の右側上部にシャワー７によりシャワリングされる。な
お、三方弁Ｓ１により分岐されたパイプＰ３を介して蒸
留槽１下方側部の注入口Ｔ１から蒸留槽１内に直接注入
することもできる。蒸留槽１と貯留槽２の底部にはそれ
ぞれスラッジタンクＦに通じるパイプＰ４とＰ５が排出
口Ｔ２とＴ３を介して設けられ、これらのパイプＰ４と
Ｐ５はパイプＰ６にて合流され手動弁Ｓ５の操作にて必
要により、両槽の底部に溜ったスラッジをスラッジタン
クＦ内に取り出せるようになっている。コンデンサＢ内
の冷却水循環機構９には、図中実線で示すパイプＰ７に
より上部から冷却水を注入し、コンデンサＢ内の冷却水
循環機構９内を通って下部からパイプＰ８を介して取り
出せるようになっている。また、貯蔵タンクＣの上部と
コンデンサＢの中間部には図中二点鎖線で示すように三
方弁Ｓ３を介して真空ポンプＤの吸引側に連らなる吸引
パイプＰ９が配管され、貯蔵タンクＣ内とコンデンサＢ
内を減圧状態（約７００mmHg）に維持している。なお、
脱酸・蒸留塔Ａは貯蔵タンクＣやコンデンサＢと密閉状
態にて連結されており、貯蔵タンクＣ内を減圧すること
によりコンデンサＢや脱酸・蒸留塔Ａ内も上記減圧状態
となる。真空ポンプＤにて吸引した排気ガスは、ガス−
液置換ユニットＥの底部に送られ、該置換ユニットＥ内
の被処理液中でのバブリングによるガス−液置換後に大
気中に排出させると共に、ガス−液置換ユニットＥ内の
被処理液も前記点線にて示したパイプＰ１の被処理液と
パイプＰ１３を介して合流させ、脱酸・蒸留塔Ａに送り
込まれる。貯蔵タンクＣ内に貯蔵された浄化・脱酸済み
の被処理液は底部の取出口Ｔ５を介して、図中一点鎖線
にて示す処理済液用パイプＰ１１により三方弁Ｓ４を介
し排出ポンプ１３により取り出し、再度洗浄液として使
用する。一方、貯留槽２内の脱酸液についても貯留槽２
の下方側部の取出口Ｔ４を介してパイプＰ１２により、
前記三方弁Ｓ４の切換えにより独立して取り出すことが
できる。なお、図示しないが、被処理液を脱酸・蒸留塔
Ａ内へ送り込む途中において、水分離フィルター、水分
吸着フィルター、被処理液用コンデンサ等を通してもよ
い。In the device of the present invention, the above-mentioned respective parts are connected by piping as described below. As a result of being used in an ultrasonic cleaning device, a hydrocarbon-based cleaning liquid that requires purification and deoxidation for its reuse (Solvent XR
-Product name-Flash point 71 ° C, Boiling point 190 ° C-Aqua Chemical Co., Ltd.) is used as the liquid to be treated, and the liquid to be treated is a three-way valve S1 from the liquid pipe P1 to be treated as shown by the dotted line The deoxidizing / distilling tower A is branched via a branched pipe P2.
Shower 7 is showered on the upper right side of the. It is also possible to directly inject into the distillation tank 1 from the injection port T1 on the lower side of the distillation tank 1 via the pipe P3 branched by the three-way valve S1. Pipes P4 and P5 leading to the sludge tank F are provided at the bottoms of the distillation tank 1 and the storage tank 2 via discharge ports T2 and T3, respectively, and these pipes P4 and P5 are joined by a pipe P6 to connect the manual valve S5. If necessary during operation, the sludge accumulated at the bottom of both tanks can be taken out into the sludge tank F. The cooling water circulation mechanism 9 in the condenser B can be injected with cooling water from the upper portion by a pipe P7 shown by a solid line in the figure, and can be taken out through the cooling water circulation mechanism 9 in the condenser B from the lower portion through a pipe P8. ing. A suction pipe P9 connected to the suction side of the vacuum pump D via a three-way valve S3 is provided between the upper portion of the storage tank C and the intermediate portion of the condenser B, as shown by the two-dot chain line in the figure. Inside and capacitor B
The inside is maintained at a reduced pressure (about 700 mmHg). In addition,
The deoxidizing / distilling tower A is hermetically connected to the storage tank C and the condenser B. By depressurizing the inside of the storage tank C, the condenser B and the deoxidizing / distilling tower A are also in the depressurized state. The exhaust gas sucked by the vacuum pump D is gas-
The liquid is sent to the bottom of the liquid replacement unit E and is discharged into the atmosphere after gas-liquid replacement by bubbling in the liquid to be processed in the replacement unit E, and the liquid to be processed in the gas-liquid replacement unit E is also the dotted line. The liquid to be treated in the pipe P1 shown in (1) is joined via the pipe P13, and is fed to the deoxidizing / distilling column A. The purified / deoxidized liquid to be treated stored in the storage tank C is discharged through the three-way valve S4 through the three-way valve S4 by the treated liquid pipe P11 shown by the alternate long and short dash line in the figure through the outlet T5 at the bottom. Remove and use again as a cleaning solution. On the other hand, the deoxidizing liquid in the storage tank 2 is also stored in the storage tank 2
Through the pipe P12 through the outlet T4 on the lower side of
It can be taken out independently by switching the three-way valve S4. Although not shown, while the liquid to be treated is being fed into the deoxidizing / distilling column A, it may be passed through a water separation filter, a water adsorption filter, a condenser for the liquid to be treated, or the like.
【００１３】従って、被処理液を点線にて示すパイプＰ
２によって、脱酸・蒸留塔Ａの上部左方からシャワリン
グすると、脱酸・蒸留塔Ａ内は減圧状態にあるため脱酸
され、傾斜板６を伝って貯留槽２に入る。一方、蒸留槽
１内でヒータ４により約１４０℃に加熱された被処理液
は、蒸発して右側上部から太いパイプ１０を通ってコン
デンサＢに入る。蒸留槽１をオーバーフローした被処理
液は隣の貯留槽２に入る。コンデンサＢ内には冷却水循
環機構９が設けられているため、蒸発して送られてきた
蒸気は冷却され液状となってコンデンサＢを通過して連
通パイプ１１を介して下部の貯蔵タンクＣ内に貯えられ
る。貯蔵タンクＣ内の浄化・脱酸された被処理液は、三
方弁Ｓ４を経て排出ポンプ１３により取り出され再使用
される。一方、脱酸のみを行った被処理液を取り出す場
合には前記三方弁Ｓ４を切り替え、貯留槽２と連結され
ているパイプＰ１２を介して排出ポンプ１３により取り
出せる。Therefore, the liquid P to be treated is shown by the dotted line.
When showering from the upper left side of the deoxidizing / distilling column A by 2, the inside of the deoxidizing / distilling column A is deoxidized because it is in a depressurized state, and enters the storage tank 2 along the inclined plate 6. On the other hand, the liquid to be treated heated to about 140 ° C. by the heater 4 in the distillation tank 1 evaporates and enters the condenser B from the upper right side portion through the thick pipe 10. The liquid to be treated that has overflowed from the distillation tank 1 enters the adjacent storage tank 2. Since the cooling water circulation mechanism 9 is provided in the condenser B, the vapor that has been evaporated and sent is cooled to become a liquid, passes through the condenser B, and passes through the communication pipe 11 into the lower storage tank C. Can be stored. The purified and deoxidized liquid to be treated in the storage tank C is taken out by the discharge pump 13 through the three-way valve S4 and reused. On the other hand, in the case of taking out the liquid to be treated which has been only deoxidized, the three-way valve S4 is switched and can be taken out by the discharge pump 13 via the pipe P12 connected to the storage tank 2.
【００１４】なお、三方弁Ｓ１の切替により被処理液を
蒸留槽１内に直接入れる場合は、貯留槽２の水位が最上
位で蒸留槽１の水位がオーバーフローに達していない場
合にオーバーフローするまで直接注入される。また、各
槽から真空ポンプＤにて真空引きされた酸素（空気）を
含む排気ガスは二点鎖線にて示すパイプＰ１０を介して
ガス−液置換ユニットＥ内に送られ、前記の通り、この
置換ユニット内にてバブリングを行い、ほぼ完全にガス
−液置換されて大気中に排出される。ガス−液置換ユニ
ットＥ内の被処理液は上方側部に設けた取出口Ｔ６より
パイプＰ１３を介して前記点線にて示すパイプＰ１に新
しく送られてくる被処理液と合流させ、以下前記と同じ
経過をたどって脱酸・蒸留塔Ａ内に送られ、以後このサ
イクルが継続的に繰り返して行なわれる。When the liquid to be treated is directly put into the distillation tank 1 by switching the three-way valve S1, when the water level in the storage tank 2 is the highest and the water level in the distillation tank 1 has not reached the overflow, the overflow occurs. Injected directly. In addition, the exhaust gas containing oxygen (air) that is evacuated by the vacuum pump D from each tank is sent into the gas-liquid replacement unit E through the pipe P10 shown by the chain double-dashed line. Bubbling is performed in the replacement unit, and the gas-liquid replacement is performed almost completely and the gas is discharged into the atmosphere. The liquid to be treated in the gas-liquid replacement unit E is merged with the liquid to be treated newly sent to the pipe P1 shown by the dotted line from the outlet T6 provided on the upper side through the pipe P13. The same process is followed and the product is sent into the deoxidizing / distilling column A, and thereafter, this cycle is continuously repeated.
【００１５】[0015]
【発明の効果】本発明においては、脱酸・蒸留塔Ａ、脱
酸・冷却コンデンサＢおよび脱酸・貯蔵タンクＣをそれ
ぞれ完全密閉型として連結すると共に、脱酸・蒸留塔Ａ
の内部に蒸留槽１と貯留槽２を独立状に設け、各槽を減
圧状態において作動させるようにしたため、引火性の高
い被処理液でも低温度で沸騰・蒸発させることが可能と
なり、引火の危険がなくなる。また、浄化・脱酸された
被処理液と脱酸のみがなされた被処理液とを一つの装置
から別々に取り出して利用することができる。従って、
本発明装置は、超音波洗浄用洗浄液、特に引火性洗浄液
の再使用時における浄化・脱酸装置として最適のものと
いえる。In the present invention, the deoxidizing / distilling column A, the deoxidizing / cooling condenser B and the deoxidizing / storage tank C are connected as a completely closed type, and the deoxidizing / distilling column A is connected.
Since the distillation tank 1 and the storage tank 2 are independently provided inside the container and each tank is operated in a depressurized state, even the liquid to be treated having high flammability can be boiled and evaporated at a low temperature, and There is no danger. Further, the liquid to be treated that has been purified and deoxidized and the liquid to be treated that has been only deoxidized can be separately taken out from one device and used. Therefore,
It can be said that the device of the present invention is most suitable as a cleaning / deoxidizing device when a cleaning liquid for ultrasonic cleaning, especially a flammable cleaning liquid is reused.
【図１】本発明装置の回路図FIG. 1 is a circuit diagram of the device of the present invention.
Ａ 脱酸・蒸留塔 Ｂ 脱酸・冷却コン
デンサ Ｃ 脱酸・貯蔵タンク Ｄ 真空ポンプ Ｅ ガス−液置換ユニット Ｆ スラッジタンク １ 蒸留槽 ２ 貯留槽 ３ 仕切板
４ ヒータ ５ 温度計 ６ 傾斜板 ７ シャワー
８ 仕切壁 ９ 冷却水循環機構 １０ 太いパイプ １
１ 連通パイプ １２ 邪魔板 １３ 排出ポンプA Deoxidizing / Distilling Tower B Deoxidizing / Cooling Condenser C Deoxidizing / Storage Tank D Vacuum Pump E Gas-Liquid Replacement Unit F Sludge Tank 1 Distillation Tank 2 Storage Tank 3 Partition Plate
4 Heater 5 Thermometer 6 Inclined plate 7 Shower 8 Partition wall 9 Cooling water circulation mechanism 10 Thick pipe 1
1 Communication pipe 12 Baffle plate 13 Discharge pump
Claims (5)
ータ４を内蔵した高水位の蒸留槽１と、これに隣接する
低水位の貯留槽２を備え、蒸留槽１の上方には貯留槽２
に向って下方に傾斜する傾斜板６を設けると共に、上半
部にも仕切板３に向って垂下し、且つ傾斜板６に到らな
い仕切壁８を設け、さらに、傾斜板６の上方には浄化・
脱酸の対象とする被処理液を水滴状にて内部に導入する
シャワー７を設け、また、貯留槽２の下側部には内部液
の取出口Ｔ４を、その底部にはスラッジ排出口Ｔ３を、
それぞれ設けると共に、蒸留槽１の底部にもスラッジ排
出口Ｔ２を設けた密閉式の脱酸・蒸留塔Ａと、 脱酸・蒸留塔Ａ内に発生する前記被処理液の蒸気が上方
から導入され該蒸気を冷却して液化する内部に冷却水循
環機構９を備えた密閉式の脱酸・冷却コンデンサＢと、 脱酸・冷却コンデンサＢ内で液化された前記被処理液が
上方から導入され該液を貯える下側部又は底部に内部液
の取出口Ｔ５を設けた密閉式の脱酸・貯蔵タンクＣと、 脱酸・蒸留塔Ａ、脱酸・冷却コンデンサＢおよび脱酸・
貯蔵タンクＣの各内部を吸引して減圧する真空ポンプＤ
と、 真空ポンプＤからの排気ガスが下方から導入され該排気
ガス中の前記被処理液の蒸気を液化して回収し残部ガス
を上方から大気中に排出する内部に前記被処理液と同種
の液を充填すると共に側部に内部液取出口Ｔ６を設けた
ガス−液置換ユニットＥとを、 吸引・排気路系パイプ群Ｐ９、Ｐ１０と被処理液路系パ
イプ群Ｐ１、Ｐ２、Ｐ３、Ｐ１３とによって連結したこ
とを特徴とする超音波洗浄用洗浄液の浄化・脱酸装置。1. A distilling tank 1 having a high water level with a built-in heater 4 and a storage tank 2 having a low water level adjacent to the distilling tank 1 are provided in the lower half portion of the distilling tank 1 above the distilling tank 1 with a vertical partition plate 3 interposed therebetween. Storage tank 2
A tilting plate 6 that tilts downward toward the tilt plate 6 is provided, and a partition wall 8 that hangs toward the partition plate 3 and that does not reach the tilt plate 6 is provided in the upper half portion. Is purification
A shower 7 for introducing the liquid to be treated to be deoxidized into the inside in the form of water droplets is provided, an internal liquid take-out port T4 is provided at the lower side of the storage tank 2, and a sludge discharge port T3 is provided at the bottom thereof. To
A closed type deoxidizing / distilling tower A in which a sludge discharge port T2 is also provided at the bottom of the distilling tank 1 and vapor of the liquid to be treated generated in the deoxidizing / distilling tower A are introduced from above. A closed deoxidizing / cooling condenser B equipped with a cooling water circulation mechanism 9 for cooling and liquefying the vapor, and the liquid to be treated liquefied in the deoxidizing / cooling condenser B are introduced from above. A closed type deoxidizing / storage tank C provided with an internal liquid outlet T5 at the bottom or bottom for storing the deoxidizing / distilling column A, deoxidizing / cooling condenser B and deoxidizing /
Vacuum pump D for sucking and depressurizing each inside of storage tank C
The exhaust gas from the vacuum pump D is introduced from below, the vapor of the liquid to be treated in the exhaust gas is liquefied and collected, and the remaining gas is discharged into the atmosphere from above. A gas-liquid replacement unit E, which is filled with liquid and provided with an internal liquid outlet T6 on its side, is provided with a suction / exhaust passage system pipe group P9, P10 and a treated liquid passage system pipe group P1, P2, P3, P13. A cleaning liquid cleaning / deoxidizing device for ultrasonic cleaning, characterized by being connected by.
する被処理液を該槽内に導入する注入口Ｔ１が設けられ
ている請求項１記載の超音波洗浄用洗浄液の浄化・脱酸
装置。2. The cleaning liquid for ultrasonic cleaning according to claim 1, wherein an injection port T1 for introducing a liquid to be treated, which is an object of purification and deoxidation, is provided in a lower portion of the distillation tank 1. Purification / deoxidation equipment.
Ｔ６から脱酸・蒸留塔Ａのシャワー７に到る被処理液路
系パイプＰ１３、Ｐ１、Ｐ２が設けられている請求項１
記載の超音波洗浄用洗浄液の浄化・脱酸装置。3. The liquid path pipes P13, P1, P2 to be treated, which extend from the internal liquid outlet T6 of the gas-liquid replacement unit E to the shower 7 of the deoxidizing / distilling column A, are provided.
Cleaning / deoxidizing device for the cleaning liquid for ultrasonic cleaning described.
Ｔ６から蒸留槽１の下側部の注入口Ｔ１に到る被処理液
路系パイプＰ１３、Ｐ１、Ｐ３が設けられている請求項
２記載の超音波洗浄用洗浄液の浄化・脱酸装置。4. Processed liquid path pipes P13, P1, P3 from the internal liquid outlet T6 of the gas-liquid replacement unit E to the inlet T1 at the lower side of the distillation tank 1 are provided. 2. A cleaning liquid cleaning / deoxidizing device for ultrasonic cleaning according to 2.
蒸留塔Ａ内が吸引され減圧されるように吸引・排気路系
パイプＰ９が配管されている請求項１乃至４のいずれか
に記載の超音波洗浄用洗浄液の浄化・脱酸装置。5. A deoxidizing / cooling condenser C is used for deoxidizing / cooling.
The cleaning / deoxidizing apparatus for cleaning liquid for ultrasonic cleaning according to any one of claims 1 to 4, wherein a suction / exhaust passage system pipe P9 is arranged so that the inside of the distillation column A is sucked and decompressed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35232293A JPH07195045A (en) | 1993-12-28 | 1993-12-28 | Purifying-deacidifying device for washing liquid for ultrasonic washing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35232293A JPH07195045A (en) | 1993-12-28 | 1993-12-28 | Purifying-deacidifying device for washing liquid for ultrasonic washing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07195045A true JPH07195045A (en) | 1995-08-01 |
Family
ID=18423272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35232293A Withdrawn JPH07195045A (en) | 1993-12-28 | 1993-12-28 | Purifying-deacidifying device for washing liquid for ultrasonic washing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07195045A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104690033A (en) * | 2015-03-17 | 2015-06-10 | 山东大学 | Ultrasonic salt bath combined cleaning machine for mechanical parts for test |
| JP2016538111A (en) * | 2013-10-10 | 2016-12-08 | ドリーム ヒート トリーティング カンパニー，リミテッド | Waste water recycling device and waste water recycling and cleaning equipment including the same |
| JP6242032B1 (en) * | 2017-06-15 | 2017-12-06 | ジャパン・フィールド株式会社 | Vacuum distillation recovery equipment for cleaning solvent |
| CN111851143A (en) * | 2020-08-25 | 2020-10-30 | 南京博物院 | Process and equipment for deacidifying whole paper document |
-
1993
- 1993-12-28 JP JP35232293A patent/JPH07195045A/en not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016538111A (en) * | 2013-10-10 | 2016-12-08 | ドリーム ヒート トリーティング カンパニー，リミテッド | Waste water recycling device and waste water recycling and cleaning equipment including the same |
| JP2017192941A (en) * | 2013-10-10 | 2017-10-26 | ドリーム ヒート トリーティング カンパニー，リミテッド | Waste water recycling and cleaning apparatus |
| CN104690033A (en) * | 2015-03-17 | 2015-06-10 | 山东大学 | Ultrasonic salt bath combined cleaning machine for mechanical parts for test |
| JP6242032B1 (en) * | 2017-06-15 | 2017-12-06 | ジャパン・フィールド株式会社 | Vacuum distillation recovery equipment for cleaning solvent |
| JP2019000803A (en) * | 2017-06-15 | 2019-01-10 | ジャパン・フィールド株式会社 | Vacuum distillation recovery system for cleaning solvent |
| CN111851143A (en) * | 2020-08-25 | 2020-10-30 | 南京博物院 | Process and equipment for deacidifying whole paper document |
| CN111851143B (en) * | 2020-08-25 | 2024-01-16 | 南京博物院 | Process and equipment for deacidifying whole paper literature |
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| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20010306 |