JPH07192847A - Resistor heater - Google Patents

Resistor heater

Info

Publication number
JPH07192847A
JPH07192847A JP5331527A JP33152793A JPH07192847A JP H07192847 A JPH07192847 A JP H07192847A JP 5331527 A JP5331527 A JP 5331527A JP 33152793 A JP33152793 A JP 33152793A JP H07192847 A JPH07192847 A JP H07192847A
Authority
JP
Japan
Prior art keywords
heating element
resistance heating
electrode
resistor heater
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5331527A
Other languages
Japanese (ja)
Inventor
Kazuya Taki
和也 滝
Riki Matsuda
理樹 松田
Yumiko Ohashi
弓子 大橋
Takuya Hamaguchi
▲たく▼哉 浜口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Priority to JP5331527A priority Critical patent/JPH07192847A/en
Publication of JPH07192847A publication Critical patent/JPH07192847A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a resistor heater with no breakage of a resistant heating element, low cost, and high reliability. CONSTITUTION:A resistor heater 16 consists of an insulating film 18 made of polyimide resin and the like, an electrode 19, a power supply part 20, a resistant heating element 21, and a protecting layer 22. The power supply part 20 and the resistant heating element 21 are integratively formed by screen printing. By applying voltage to the electrode 19, heat is generated in the resistant heating element 21. Since the width of a crooked part 25 where the power supply part 20 and the resistant heating element 21 are joined is widened than that in the center of the resistant heating element 21, or that of a heat generating part 26, current density in the crooked part 25 is low and heat generation is slight. Stress variation in the crooked part 25 is small, and generation of cracks or breakage is prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、はしご状に形成された
抵抗発熱体により加熱を行う抵抗体ヒータに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resistor heater for heating by a ladder-shaped resistance heating element.

【0002】[0002]

【従来の技術】圧電素子等により圧力を印加し、細いノ
ズルからインクを吐出させて印字を行うインクジェット
プリンタが安価で低騒音のプリンタとして用いられてい
る。しかし、使用していない間に固化したインクがノズ
ルに目詰まりを生じさせ印字ができなくなるという問題
があった。
2. Description of the Related Art Ink jet printers that perform printing by applying pressure by a piezoelectric element or the like and ejecting ink from thin nozzles are used as inexpensive and low noise printers. However, there is a problem in that the ink that has solidified while not in use causes clogging of the nozzles and printing cannot be performed.

【0003】これに対し、常温では固体であるワックス
に顔料等を混合したインクを用いたインクジェットプリ
ンタは、印字時にはインクを加熱溶融させてノズルから
吐出させる。すなわち、使用しない間はノズル等は常温
であり、ノズル内のインクは固化しているが使用時には
あらかじめヘッドを加熱し、ノズル内等のインクを加熱
溶融させる。このため、ノズルの目詰まりが生じず信頼
性の高い印字が可能となる。
On the other hand, an ink jet printer which uses an ink in which a pigment or the like is mixed with a wax which is solid at room temperature, heats and melts the ink during printing and ejects it from a nozzle. That is, the nozzle or the like is at room temperature when not in use, and the ink in the nozzle is solidified, but the head is heated in advance to heat and melt the ink in the nozzle or the like during use. Therefore, nozzle clogging does not occur, and highly reliable printing is possible.

【0004】従来、このようなインクジェットプリンタ
の印字ヘッド100を加熱するために、図8のような抵
抗体ヒータ112が用いられている。すなわち、圧電素
子によりノズルからインクを吐出させるインク吐出部1
01を均一に加熱するための均熱板103に抵抗体ヒー
タ112が接着されている。抵抗体ヒータ112は絶縁
フィルム105と、電極107と、給電部108と、抵
抗発熱体109と、保護層110とから成る。
Conventionally, in order to heat the print head 100 of such an ink jet printer, a resistor heater 112 as shown in FIG. 8 has been used. That is, the ink ejecting section 1 that ejects ink from the nozzle by the piezoelectric element
The resistor heater 112 is bonded to the heat equalizing plate 103 for uniformly heating 01. The resistor heater 112 includes an insulating film 105, an electrode 107, a power feeding portion 108, a resistance heating element 109, and a protective layer 110.

【0005】給電部108と抵抗発熱体109は同一材
料で一体にスクリーン印刷により作製されており、図9
に示すように、給電部108は電極107と平行に、抵
抗発熱体109は電極107間にはしご状に形成されて
いる。給電部108は電極107とほぼ同じかやや狭い
幅で形成されており、抵抗発熱体109に効率よく電流
を供給する働きをする。電極107に電圧を印加するこ
とにより抵抗発熱体109に電流が流れ発熱が生じる。
The power supply section 108 and the resistance heating element 109 are integrally made of the same material by screen printing.
As shown in FIG. 5, the power feeding portion 108 is formed in parallel with the electrodes 107, and the resistance heating element 109 is formed in a ladder shape between the electrodes 107. The power feeding portion 108 is formed with a width that is almost the same as or slightly narrower than the electrode 107, and serves to efficiently supply current to the resistance heating element 109. When a voltage is applied to the electrode 107, a current flows through the resistance heating element 109 to generate heat.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、抵抗発
熱体109には電極107と絶縁フィルム105との断
差により屈曲部120が生じており、ここには抵抗発熱
体109の発熱により大きな応力の変化が生じる。この
ため、長時間の使用や、頻繁に電圧をオン、オフするこ
とによる発熱と冷却の繰り返しにより抵抗発熱体109
の屈曲部120付近に図10のようにクラックや断線が
生じ、正常な加熱を行うことができなくなるという問題
があった。
However, the resistance heating element 109 has a bent portion 120 due to a gap between the electrode 107 and the insulating film 105, and a large change in stress occurs due to the heat generation of the resistance heating element 109. Occurs. For this reason, the resistance heating element 109 is used for a long time or by repeating heat generation and cooling by frequently turning the voltage on and off.
As shown in FIG. 10, cracks and disconnections occur near the bent portion 120, and normal heating cannot be performed.

【0007】本発明は、上述した問題点を解決するため
になされたものであり、その目的とするところは抵抗発
熱体の断線が生じず、安価で信頼性の高い抵抗体ヒータ
を提供することにある。
The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide an inexpensive and highly reliable resistor heater in which the resistance heating element is not disconnected. It is in.

【0008】[0008]

【課題を解決するための手段】この目的を達成するため
に本発明の抵抗体ヒータは、絶縁基体と、その上に設け
られた複数の電極と、電極間にはしご状に並設された抵
抗発熱体とを有し、電極と抵抗発熱体との接触部の幅が
抵抗発熱体の中央部の幅よりも広くされている。また、
抵抗発熱体は印刷により作製されていてもよい。
In order to achieve this object, a resistor heater according to the present invention comprises an insulating substrate, a plurality of electrodes provided on the insulating substrate, and resistors arranged in a ladder pattern between the electrodes. The resistance heating element has a heating element, and the width of the contact portion between the electrode and the resistance heating element is wider than the width of the central portion of the resistance heating element. Also,
The resistance heating element may be produced by printing.

【0009】[0009]

【作用】上記の構成を有する本発明の抵抗体ヒータで
は、電極と抵抗発熱体との接触部の幅が抵抗発熱体の中
央部の幅よりも広くされている。電極と絶縁基板との断
差によって電極と抵抗発熱体との接触部には屈曲が生じ
ている。しかし、電極と抵抗発熱体との接触部すなわ
ち、抵抗発熱体の屈曲部の幅は抵抗発熱体の中央部の幅
よりも広くされている。従って、抵抗発熱体の屈曲部で
は、電流密度が小さく発熱も少ないため、大きな応力変
化は生じず、断線は発生しない。さらに、給電部および
抵抗発熱体は同時に抵抗ペーストを印刷することにより
作製することもできる。
In the resistor heater of the present invention having the above structure, the width of the contact portion between the electrode and the resistance heating element is made wider than the width of the central portion of the resistance heating element. Due to the gap between the electrode and the insulating substrate, the contact portion between the electrode and the resistance heating element is bent. However, the width of the contact portion between the electrode and the resistance heating element, that is, the bent portion of the resistance heating element is made wider than the width of the central portion of the resistance heating element. Therefore, in the bent portion of the resistance heating element, since the current density is small and the heat generation is small, a large stress change does not occur and the wire breakage does not occur. Further, the power supply unit and the resistance heating element can be manufactured by printing resistance paste at the same time.

【0010】[0010]

【実施例】以下、本発明を具体化した一実施例を図面を
参照して説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0011】インクジェットプリンタヘッド10を加熱
するための本発明を好適に適用した抵抗体ヒータ16
は、図1に示すように圧電素子によりノズルからインク
を吐出させるインク吐出部12を均一に加熱するための
インバー合金等から成る均熱板14に接着されている。
抵抗体ヒータ16は絶縁基体として用いられるポリイミ
ド樹脂等の絶縁フィルム18と、銅等から成る電極19
と、給電部20と、抵抗発熱体21と、保護層22とか
ら成る。
A resistor heater 16 to which the present invention is preferably applied for heating the ink jet printer head 10.
1 is bonded to a heat equalizing plate 14 made of Invar alloy or the like for uniformly heating the ink ejecting portion 12 that ejects ink from the nozzle by the piezoelectric element as shown in FIG.
The resistor heater 16 includes an insulating film 18 such as a polyimide resin used as an insulating substrate and an electrode 19 made of copper or the like.
And a power supply unit 20, a resistance heating element 21, and a protective layer 22.

【0012】給電部20と抵抗発熱体21は同一材料す
なわち、フェノール樹脂やエポキシ樹脂等から成るバイ
ンダ中にカーボンを分散させた抵抗ペーストを用い、よ
く知られているスクリーン印刷により図2に示すように
一体に作製されている。給電部20は電極19と平行
に、抵抗発熱体21は電極19間にはしご状に形成され
ている。電極19と絶縁フィルム18との断差によっ
て、抵抗発熱体21には屈曲部25が生じており、電極
19と絶縁フィルム18とに跨るようにして位置してい
る。
The power supply section 20 and the resistance heating element 21 are made of the same material, that is, a resistance paste in which carbon is dispersed in a binder made of phenol resin, epoxy resin, or the like, and as shown in FIG. It is made in one. The power feeding portion 20 is formed in parallel with the electrodes 19, and the resistance heating element 21 is formed in a ladder shape between the electrodes 19. Due to the gap between the electrode 19 and the insulating film 18, a bent portion 25 is formed in the resistance heating element 21 and is positioned so as to straddle the electrode 19 and the insulating film 18.

【0013】そして、給電部20と抵抗発熱体21との
接続部であるところの屈曲部25の幅は、抵抗発熱体2
1の中央部すなわち、発熱部分26の幅よりも広くなっ
ている。
The width of the bent portion 25, which is the connecting portion between the power feeding portion 20 and the resistance heating element 21, is equal to that of the resistance heating element 2.
It is wider than the width of the central portion of 1, i.e., the heat generating portion 26.

【0014】電極19に電圧を印加することにより、電
流は電極19から給電部20を通り幅が狭くなっている
抵抗発熱体21を流れ、抵抗発熱体21において電流密
度が高くなり発熱が生じる。このとき、抵抗発熱体21
の屈曲部25の幅は、抵抗発熱体21の中央部すなわ
ち、発熱部分26の幅よりも広くなっているため、屈曲
部25では電流密度が低く発熱は少ないため、屈曲部2
5における応力の変化は小さく、クラックや断線は発生
しない。
By applying a voltage to the electrode 19, a current flows from the electrode 19 through the power feeding portion 20 to the resistance heating element 21 having a narrow width, and the resistance heating element 21 has a high current density to generate heat. At this time, the resistance heating element 21
Since the width of the bent portion 25 is wider than the width of the central portion of the resistance heating element 21, that is, the heating portion 26, the bent portion 25 has a low current density and little heat generation.
The change in stress in No. 5 is small, and no crack or disconnection occurs.

【0015】この抵抗体ヒータ10の製造方法は図3を
用いて説明する。電極19はよく知られているプリント
配線基板と同様な方法で作製される。すなわち、同図
(a)のようにポリイミド等の絶縁フィルム18にあら
かじめ圧延、圧着されている銅箔31の上に耐エッチン
グ材33により電極パターンを形成する。耐エッチング
材33にはフォトレジスト、マスキングフィルム等が用
いられる。次に、塩化第2鉄等のエッチング液により銅
箔31を溶かし、耐エッチング材33を除去すると電極
19が同図(b)のように作製される。その上によく知
られているスクリーン印刷により抵抗ペーストを電極1
9および絶縁フィルム18の上に印刷し、加熱焼成す
る。スクリーン印刷に用いられる版にはあらかじめ給電
部20および抵抗発熱体21のパターンが設けられてい
るため、給電部20および抵抗発熱体21は一度の印刷
で同図(c)のように形成され、従って本実施例では、
安価に製造することができる。さらにその上にエポキシ
樹脂等の保護層22をスクリーン印刷等により塗布する
ことにより抵抗体ヒータ16が製造される。
A method of manufacturing the resistor heater 10 will be described with reference to FIG. The electrode 19 is manufactured by a method similar to that of a well-known printed wiring board. That is, as shown in FIG. 3A, an electrode pattern is formed by the etching resistant material 33 on the copper foil 31 which is previously rolled and pressure-bonded to the insulating film 18 such as polyimide. As the etching resistant material 33, a photoresist, a masking film, or the like is used. Next, the copper foil 31 is melted with an etching solution such as ferric chloride and the etching resistant material 33 is removed, whereby the electrode 19 is produced as shown in FIG. Resistor paste is applied to the electrode 1 by well-known screen printing.
9 and printed on the insulating film 18 and baked by heating. Since the plate used for screen printing is provided with the pattern of the power feeding section 20 and the resistance heating element 21 in advance, the power feeding section 20 and the resistance heating element 21 are formed by one printing as shown in FIG. Therefore, in this embodiment,
It can be manufactured at low cost. Further, a protective layer 22 of epoxy resin or the like is applied thereon by screen printing or the like, whereby the resistor heater 16 is manufactured.

【0016】以上、本発明の一実施例を図1乃至図3を
用いて詳細に説明したが、本発明は以上詳述した実施例
に限定されるものではなく、その主旨を逸脱しない範囲
で種々の変更を加えることができる。
Although one embodiment of the present invention has been described in detail above with reference to FIGS. 1 to 3, the present invention is not limited to the embodiment described above in detail and does not depart from the spirit of the invention. Various changes can be made.

【0017】抵抗発熱体21の本数、幅、ピッチ、長
さ、形状は、抵抗発熱体21の屈曲部25すなわち、電
極19と接触する部分の幅が抵抗発熱体21の中央部2
6の幅よりも広くなっていれば、特に限定されない。例
えば、抵抗発熱体21の形状を図4(a)、(b)、
(c)のようにしても、いずれも発熱部26よりも屈曲
部25の幅の方が広いため、同様にクラックおよび断線
防止効果が得られる。また、図5のように、発熱部分2
6の長さを変化させて発熱分布の制御を行ってもよい。
The number, width, pitch, length and shape of the resistance heating elements 21 are such that the bent portion 25 of the resistance heating element 21, that is, the width of the portion in contact with the electrode 19 is the central portion 2 of the resistance heating element 21.
If it is wider than the width of 6, it is not particularly limited. For example, the shape of the resistance heating element 21 is shown in FIGS.
Even in the case of (c), since the bent portion 25 has a wider width than the heat generating portion 26, the same effect of preventing cracks and disconnection can be obtained. In addition, as shown in FIG.
The length of 6 may be changed to control the heat generation distribution.

【0018】また、電極19は平行である必要はなく、
例えば図6のように間隔が変化していてもよい。このと
き、抵抗発熱体21の長さ、幅等は一本毎に変化してい
てもよい。
Also, the electrodes 19 need not be parallel,
For example, the interval may change as shown in FIG. At this time, the length, width, etc. of the resistance heating element 21 may be changed for each one.

【0019】また、給電部20は必ずしも連続的に形成
されている必要はなく、また、図7のように設けなくて
もよい。
Further, the power feeding section 20 does not necessarily have to be formed continuously and need not be provided as shown in FIG.

【0020】また、抵抗発熱体21の材料として用いら
れる抵抗ペーストの材料についても特に限定されること
はない。例えば、樹脂バインダとして、耐熱性の高いポ
リイミド樹脂等を用いてもよい。また、樹脂バインダ中
に分散されるカーボンの濃度についても必要な抵抗値に
応じて変化させることができる。また、電極材料につい
ても特に限定されない。また、絶縁基体18の材料も絶
縁物であれば特に限定されない。また、導体の上に形成
された絶縁物を用いてもよい。また、電極は2本に限定
されず、例えば、3本の電極を設け各電極の間に抵抗発
熱体を形成してもよい。
The material of the resistance paste used as the material of the resistance heating element 21 is not particularly limited. For example, a polyimide resin or the like having high heat resistance may be used as the resin binder. Also, the concentration of carbon dispersed in the resin binder can be changed according to the required resistance value. Also, the electrode material is not particularly limited. The material of the insulating substrate 18 is not particularly limited as long as it is an insulating material. Moreover, you may use the insulator formed on the conductor. Further, the number of electrodes is not limited to two, and for example, three electrodes may be provided and a resistance heating element may be formed between each electrode.

【0021】[0021]

【発明の効果】以上説明したことから明かなように、本
発明の抵抗体ヒータでは電極と抵抗発熱体との接触部す
なわち、抵抗発熱体の屈曲部の幅は抵抗発熱体の中央部
の幅よりも広くされている。従って、抵抗発熱体の屈曲
部では、電流密度が小さく発熱も少ない。これにより、
屈曲部において、大きな応力変化は生じず、クラックや
断線は発生しないため、信頼性が向上する。さらに、抵
抗発熱体は抵抗ペーストの印刷により作製すれば、スパ
ッタ法等による薄膜形成とフォトリソグラフィーによる
パターン形成を組み合わせた製造方法と比べて安価とな
る。
As is apparent from the above description, in the resistor heater of the present invention, the width of the contact portion between the electrode and the resistance heating element, that is, the bent portion of the resistance heating element is the width of the central portion of the resistance heating element. Has been wider than. Therefore, in the bent portion of the resistance heating element, the current density is small and the heat generation is small. This allows
In the bent portion, a large stress change does not occur, and cracks and disconnections do not occur, so reliability is improved. Furthermore, if the resistance heating element is manufactured by printing a resistance paste, the cost is lower than that of a manufacturing method that combines thin film formation by a sputtering method and pattern formation by photolithography.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の抵抗体ヒータの一実施例を示す要部断
面図である。
FIG. 1 is a sectional view of an essential part showing an embodiment of a resistor heater according to the present invention.

【図2】本発明の抵抗体ヒータの一実施例を示す要部平
面図である。
FIG. 2 is a plan view of an essential part showing one embodiment of the resistor heater of the present invention.

【図3】本発明の抵抗体ヒータの製造方法を示す要部断
面図である。
FIG. 3 is a cross-sectional view of an essential part showing the method for manufacturing the resistor heater of the present invention.

【図4】本発明の抵抗体ヒータの他の実施例を示す要部
平面図である。
FIG. 4 is a main part plan view showing another embodiment of the resistor heater according to the present invention.

【図5】本発明の抵抗体ヒータの他の実施例を示す要部
平面図である。
FIG. 5 is a main part plan view showing another embodiment of the resistor heater of the present invention.

【図6】本発明の抵抗体ヒータの他の実施例を示す要部
平面図である。
FIG. 6 is a main part plan view showing another embodiment of the resistor heater of the present invention.

【図7】本発明の抵抗体ヒータの他の実施例を示す要部
平面図である。
FIG. 7 is a main part plan view showing another embodiment of the resistor heater of the present invention.

【図8】従来の抵抗体ヒータを示す要部断面図である。FIG. 8 is a cross-sectional view of essential parts showing a conventional resistor heater.

【図9】従来の抵抗体ヒータを示す要部平面図である。FIG. 9 is a plan view of an essential part showing a conventional resistor heater.

【図10】従来の抵抗体ヒータを示す要部平面図であ
る。
FIG. 10 is a main part plan view showing a conventional resistor heater.

【符号の説明】[Explanation of symbols]

16 抵抗体ヒータ 18 絶縁基体 19 電極 21 抵抗発熱体 25 電極と抵抗発熱体との接触部 26 抵抗発熱体の中央部 16 Resistor Heater 18 Insulating Substrate 19 Electrode 21 Resistance Heater 25 Contact Part between Electrode and Resistance Heater 26 Central Part of Resistance Heater

───────────────────────────────────────────────────── フロントページの続き (72)発明者 浜口 ▲たく▼哉 名古屋市瑞穂区苗代町15番1号ブラザー工 業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hamaguchi ▲ Taku ▼ ya 15-1 Naeshiro-cho, Mizuho-ku, Nagoya-shi Brother Industrial Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 絶縁基体と、その上に設けられた複数の
電極と、前記電極間にはしご状に並設された抵抗発熱体
とを有し、前記電極と前記抵抗発熱体との接続部の幅を
前記抵抗発熱体の他の部分の幅よりも広くしたことを特
徴とする抵抗体ヒータ。
1. An insulating substrate, a plurality of electrodes provided on the insulating substrate, and a resistance heating element arranged in a ladder shape between the electrodes, and a connecting portion between the electrode and the resistance heating element. Is wider than the width of the other part of the resistance heating element.
【請求項2】 請求項1に記載の抵抗体ヒータにおい
て、前記電極と前記抵抗発熱体との接続部の幅を抵抗発
熱体の中央部分の幅よりも広く形成すると共にその幅の
広い部分が電極と絶縁基体とに跨って位置することを特
徴とする抵抗体ヒータ。
2. The resistor heater according to claim 1, wherein a width of a connecting portion between the electrode and the resistance heating element is formed wider than a width of a central portion of the resistance heating element, and a wide portion is formed. A resistor heater which is located across an electrode and an insulating substrate.
【請求項3】 請求項1または2に記載の抵抗体ヒータ
において、前記抵抗発熱体が印刷により作製されている
ことを特徴とする抵抗体ヒータ。
3. The resistor heater according to claim 1, wherein the resistance heating element is produced by printing.
JP5331527A 1993-12-27 1993-12-27 Resistor heater Pending JPH07192847A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5331527A JPH07192847A (en) 1993-12-27 1993-12-27 Resistor heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5331527A JPH07192847A (en) 1993-12-27 1993-12-27 Resistor heater

Publications (1)

Publication Number Publication Date
JPH07192847A true JPH07192847A (en) 1995-07-28

Family

ID=18244657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5331527A Pending JPH07192847A (en) 1993-12-27 1993-12-27 Resistor heater

Country Status (1)

Country Link
JP (1) JPH07192847A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004320014A (en) * 2003-04-14 2004-11-11 Agilent Technol Inc Thin-film resistor element
JP2006294604A (en) * 2005-03-17 2006-10-26 Ist Corp Planar heater, its manufacturing method, and image fixing device
JP2019207891A (en) * 2019-09-03 2019-12-05 日本碍子株式会社 Ceramic heater, sensor element, and gas sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004320014A (en) * 2003-04-14 2004-11-11 Agilent Technol Inc Thin-film resistor element
JP2006294604A (en) * 2005-03-17 2006-10-26 Ist Corp Planar heater, its manufacturing method, and image fixing device
JP2019207891A (en) * 2019-09-03 2019-12-05 日本碍子株式会社 Ceramic heater, sensor element, and gas sensor

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