JPH071455B2 - Fine positioning device - Google Patents
Fine positioning deviceInfo
- Publication number
- JPH071455B2 JPH071455B2 JP62141324A JP14132487A JPH071455B2 JP H071455 B2 JPH071455 B2 JP H071455B2 JP 62141324 A JP62141324 A JP 62141324A JP 14132487 A JP14132487 A JP 14132487A JP H071455 B2 JPH071455 B2 JP H071455B2
- Authority
- JP
- Japan
- Prior art keywords
- fine
- fine movement
- positioning device
- hinge
- fine positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 description 28
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 241000196324 Embryophyta Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Position Or Direction (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体製造装置，電子顕微鏡等のサブμｍオ
ーダの調節を必要とする装着に使用される微細位置決め
装置に関する。Description: TECHNICAL FIELD The present invention relates to a fine positioning apparatus used for mounting in a semiconductor manufacturing apparatus, an electron microscope or the like which requires adjustment on the order of sub μm.
近年、各種技術分野においては、サブμｍのオーダーの
微細な変位調節が可能である装置が要望されている。そ
の典型的な例がLSI（大規模集積回路），超LSIの製造工
程において使用されるマスクアライナ，電子線描画装置
等の半導体製造装置である。これらの装置においては、
サブμｍオーダーの微細な位置決めが必要であり、位置
決めの精度が向上するにしたがつてその集積度も増大
し、高性能の製品を製造することができる。このような
微細な位置決めは上記半導体装置に限らず、電子顕微鏡
をはじめとする各種の高倍率光学装置等においても必要
であり、その精度向上により、バイオテクノロジ，宇宙
開発等の先端技術においてもそれらの発展に大きく寄与
するものである。In recent years, in various technical fields, a device capable of fine displacement adjustment on the order of sub-μm has been demanded. Typical examples are semiconductor manufacturing equipment such as mask aligners used in LSI (large-scale integrated circuit) and VLSI manufacturing processes, and electron beam lithography equipment. In these devices,
Submicron-order fine positioning is required, and as the positioning accuracy improves, the degree of integration increases, and high-performance products can be manufactured. Such fine positioning is necessary not only in the above-mentioned semiconductor device but also in various high-magnification optical devices such as electron microscopes. Will greatly contribute to the development of.
ところで、上記変位においては、直線的な変位（並進変
位）のみならず回転変位を必要とする場合もある。この
回転変位を行なう従来の微細位置決め装置を第４図によ
り説明する。Incidentally, in the above displacement, not only linear displacement (translational displacement) but also rotational displacement may be required. A conventional fine positioning device for performing this rotational displacement will be described with reference to FIG.
第４図は回転変位に用いられる従来の微細位置決め装置
の側面図である。図で、１は固定部、２は微動テーブル
である。微動テーブル２上には、微細位置決めされる対
象物体が載置固定される。３は適宜構成の回転ヒンジで
あり、固定部１に連結された２つの回転ヒンジおよび微
動テーブル２に連結された２つの回転ヒンジを有する。
４は剛体のロツドであり、対向する回転ヒンジ３間に連
結されている。なお、Ｏは微動テーブル２上の回転中心
点であり、対象物体はこの点Ｏを中心として回転変位せ
しめられる。ｒは点Ｏと、微動テーブル２に連結された
回転ヒンジ３の回転中心との間の距離、ｌは両回転ヒン
ジ３の回転中心間の距離を示す。FIG. 4 is a side view of a conventional fine positioning device used for rotational displacement. In the figure, 1 is a fixed part, and 2 is a fine movement table. A target object to be finely positioned is placed and fixed on the fine movement table 2. Reference numeral 3 denotes a rotary hinge having an appropriate structure, which has two rotary hinges connected to the fixed portion 1 and two rotary hinges connected to the fine movement table 2.
Reference numeral 4 denotes a rigid rod, which is connected between the rotary hinges 3 facing each other. In addition, O is a rotation center point on the fine movement table 2, and the target object is rotationally displaced about this point O. r represents the distance between the point O and the center of rotation of the rotary hinge 3 connected to the fine movement table 2, and l represents the distance between the centers of rotation of both rotary hinges 3.
上記構成において、適宜手段によりロツド４に矢印Ｆで
示す力を加えると、各回転ヒンジ３は回動し、各ロツド
４は角度θ1,θ２だけ回動し、これにより微動テーブル
２は第４図に破線で示すように角度θだけ回動し回転変
位が得られる。なお、図では回転角度θを理解を容易に
するため大きく描いてあるが、実際の回転角度θはμra
dのオーダの微細回転である。In the above structure, when a force indicated by an arrow F is applied to the rod 4 by an appropriate means, the rotary hinges 3 are rotated, and the rods 4 are rotated by the angles θ 1 and θ 2 , whereby the fine movement table 2 is moved. As shown by the broken line in FIG. 4, a rotational displacement is obtained by rotating by an angle θ. In the figure, the rotation angle θ is drawn large to facilitate understanding, but the actual rotation angle θ is μra.
It is a fine rotation on the order of d.
上記微細位置決め装置においては、２つのロツド４自体
の長さは固定されている。したがつて、力Ｆが加えられ
て回転変位が行なわれたとき、上方の各回転ヒンジ３は
一点鎖線で示す軌跡（下方の回転ヒンジ３を中心とした
円弧）上を移動する。このため、微動テーブル上の点Ｏ
は回転変位により点Ｏ′に移動する。これは回転変位に
おける回転中心が移動し、回転変位中に並進変位が含ま
ることを意味し、位置決め誤差となり位置決め精度を著
るしく損う。例えば、ロツド４の角度θ０＝45゜,l＝30
mm,r＝40mmであるとき、微動テーブル２が、θ＝1000μ
rad（≒200秒）回転すると、点Ｏは0.1μｍ移動し、θ
＝10000μradになると点Ｏは約７μｍもの移動となる。In the above fine positioning device, the lengths of the two rods 4 themselves are fixed. Therefore, when the force F is applied and rotational displacement is performed, the upper rotary hinges 3 move on a locus indicated by the alternate long and short dash line (an arc centered on the lower rotary hinge 3). Therefore, the point O on the fine movement table
Moves to point O'due to the rotational displacement. This means that the center of rotation in the rotational displacement moves, and translational displacement is included in the rotational displacement, which results in a positioning error and significantly impairs the positioning accuracy. For example, the angle of rod 4 θ 0 = 45 °, l = 30
When mm, r = 40 mm, the fine movement table 2 has θ = 1000 μ
Rotating rad (≈200 seconds), point O moves 0.1 μm and θ
At = 10000 μrad, the point O moves about 7 μm.
本発明の目的は、上記従来技術の課題を解決し、高精度
の回転変位を行なうことができる微細位置決め装置を提
供するにある。An object of the present invention is to solve the above-mentioned problems of the prior art and to provide a fine positioning device capable of performing highly accurate rotational displacement.
［課題を解決するための手段］ 上記の目的を達成するため、本発明は、固定部と、この
固定部に対向して配置された微動部とを備え、前記微動
部を前記固定部に対して回転変位させる微細位置決め装
置において、変形中心を有し特定方向に高い剛性を有す
る２つのヒンジ機構と、これら各ヒンジ機構の間に装着
され前記特定方向に伸縮するアクチユエータとで構成さ
れた駆動リンク部材を、前記固定部と前記微動部との間
に複数連結するとともに、前記アクチユエータを、前記
微動部に連結されている前記ヒンジ機構の変形中心が、
予め前記微動部に定められている点を中心とする半径軌
跡上を移動するように伸縮駆動することを特徴とする。[Means for Solving the Problems] In order to achieve the above object, the present invention includes a fixing portion and a fine moving portion arranged to face the fixing portion, and the fine moving portion is provided with respect to the fixing portion. In a fine positioning device for rotationally displacing the drive link, a drive link including two hinge mechanisms having a deformation center and having high rigidity in a specific direction, and an actuator mounted between the hinge mechanisms and extending / contracting in the specific direction. A plurality of members are connected between the fixed portion and the fine movement portion, and the actuator is the deformation center of the hinge mechanism connected to the fine movement portion.
It is characterized in that the expansion / contraction drive is performed so as to move on a radial locus centered on a point previously set in the fine movement part.
［作用］ 各駆動リンク部材のアクチユエータを、微動部に連結さ
れている側の各ヒンジ機構の変形中心が予め微動部に定
められている点を中心とする半径軌跡上を移動するよう
に伸縮駆動すると、微動部は上記予め定められている点
を中心として回転変位する。これにより、この回転変位
は並進変位を含まない高い精度の回転変位となる。[Operation] The actuator of each drive link member is expanded / contracted so that the center of deformation of each hinge mechanism on the side connected to the fine movement part moves on a radial locus around a point previously set in the fine movement part. Then, the fine movement part is rotationally displaced about the above-mentioned predetermined point. As a result, this rotational displacement becomes a highly accurate rotational displacement that does not include translational displacement.
以下、本発明を図示の実施例に基づいて説明する。 Hereinafter, the present invention will be described based on the illustrated embodiments.
第１図は本発明の実施例に係る微細位置決め装置の側面
図である。図で、１、２はそれぞれ第４図に示すものと
同様の固定部および微動テーブルである。５は固定部１
と微動テーブル２との間に連結される駆動リンク部材で
あり、微動テーブル２に連結された円柱ヒンジ5a、固定
部１に連結された円柱ヒンジ5b、および円柱ヒンジ5a,5
b間に装架された積層形の圧電アクチユエータ5cで構成
されている。本実施例では駆動リンク部材５は３つ設け
られている。ここで、円柱ヒンジ5aの構造を第２図によ
り説明する。なお、円柱ヒンジ5bの構造は円柱ヒンジ5a
の構造と同じである。FIG. 1 is a side view of a fine positioning device according to an embodiment of the present invention. In the figure, reference numerals 1 and 2 respectively denote a fixed portion and a fine movement table similar to those shown in FIG. 5 is a fixed part 1
Is a drive link member connected between the fine movement table 2 and the fine movement table 2, and is a cylindrical hinge 5a connected to the fine movement table 2, a cylindrical hinge 5b connected to the fixed portion 1, and cylindrical hinges 5a, 5
It is composed of a laminated piezoelectric actuator 5c mounted between b. In this embodiment, three drive link members 5 are provided. Here, the structure of the cylindrical hinge 5a will be described with reference to FIG. The structure of the cylindrical hinge 5b is the cylindrical hinge 5a.
Is the same as the structure of.
第２図は円柱ヒンジ5aの斜視図である。この円柱ヒンジ
5aは、剛性の高い円柱のほぼ中央部周囲に断面Ｖ字状の
切欠き部5a3を作ることにより構成される。5a1,5a2は切
欠き部5a3の両側の剛体部、5a4は切欠き部5a3により形
成される極小径部である。Ａは各剛体部5a1,5a2および
極小径部5a4の中心を通る軸を示す。FIG. 2 is a perspective view of the cylindrical hinge 5a. This cylindrical hinge
5a is constructed by making a V-shaped notch 5a 3 around a substantially central portion of the rigid cylinder. Reference numerals 5a 1 and 5a 2 are rigid portions on both sides of the cutout portion 5a 3 , and 5a 4 is an extremely small diameter portion formed by the cutout portion 5a 3 . A indicates an axis passing through the centers of the rigid body portions 5a 1 and 5a 2 and the minimum diameter portion 5a 4 .
この円柱ヒンジ5aにおいては、剛体部5a1,5a2の一方、
例えば剛体部5a1を固定し、他方の剛体部5b2に軸Ａまわ
りのモーメント成分を作用させると、剛体部5a2は軸Ａ
を中心として回動する。又、剛体部5a2に軸Ａと直交す
る方向の力成分を作用させると、極小径部5a4はたわみ
を生じる。しかしながら、他のモーメント成分および軸
Ａ方向の力成分に対しては高い剛性を有する。In this cylindrical hinge 5a, one of the rigid body portions 5a 1 and 5a 2 ,
For example, if the rigid body portion 5a 1 is fixed and a moment component about the axis A is applied to the other rigid body portion 5b 2 , the rigid body portion 5a 2 will move to the axis A.
Rotate around. Further, when exerting a force component perpendicular to the axis A to the rigid portion 5a 2, it produces a very small diameter portion 5a 4 bends. However, it has high rigidity with respect to other moment components and force components in the axis A direction.
第１図に示されるように、各円柱ヒンジ5aの極小径部は
点Ｏを中心とする第１の円周上に配置され、又、各円柱
ヒンジ5bの極小径部は点Ｏを中心とする第２の円周上に
配置されている。As shown in FIG. 1, the minimum diameter part of each cylindrical hinge 5a is arranged on the first circumference centered on the point O, and the minimum diameter part of each cylindrical hinge 5b is centered on the point O. Are arranged on the second circumference.
次に、本実施例の動作を第３図を参照しながら説明す
る。第３図は、第１図に示す構造のリンク機構の模式図
である。図で、各駆動リンク部材５の円柱ヒンジ5a,5b
は丸印で示されている。微動テーブル２は剛体であるか
ら３つのヒンジ5aの相互位置関係は固定されている。同
様に固定部１も剛体であるから３つのヒンジ5bの相互位
置関係は固定されている。このような関係の中で、ヒン
ジ5aとヒンジ5bとの間の３つの距離ｌがそれぞれ定まる
と微動テーブル２の固定部に対する位置は一義的に確定
する。従つて、３つの駆動リンク部材５のそれぞれの長
さｌを任意に定めることによつて（本実施例では各長さ
ｌは等しい）微動テーブル２を任意の位置（並進位置）
と姿勢（回転角度）に保つことができる。そこで本発明
の目的とするＯ点を移動させないで微動テーブル２を点
Ｏを中心としてそのまわりに理想的に回転変位を行なわ
せるには、各円柱ヒンジ5aが半径ｒの円上を移動するよ
うにすればよい。このため、本実施例では微動テーブル
２を回転変位させる際、圧電アクチユエータ5cを伸長す
るように駆動する。ここで、 r:点Ｏと円柱ヒンジ極小径部5a4間の距離 l:各円柱ヒンジ極小径部間の距離 θ：微動テーブル２の回転変位量（理解を容易にするた
めに極端に大きい値が採用されている。） δu:圧電アクチユエータ5cの変位量 とすると、回転変位θを得るための変位量δｕは次式に
より表わされる。Next, the operation of this embodiment will be described with reference to FIG. FIG. 3 is a schematic view of the link mechanism having the structure shown in FIG. In the figure, the cylindrical hinges 5a, 5b of each drive link member 5 are shown.
Are indicated by circles. Since the fine movement table 2 is a rigid body, the mutual positional relationship of the three hinges 5a is fixed. Similarly, since the fixed portion 1 is also a rigid body, the mutual positional relationship of the three hinges 5b is fixed. In such a relationship, when the three distances 1 between the hinges 5a and 5b are determined, the position of the fine movement table 2 with respect to the fixed portion is uniquely determined. Therefore, the length l of each of the three drive link members 5 is arbitrarily set (in this embodiment, the lengths l are equal), so that the fine movement table 2 is set at an arbitrary position (translation position).
And can be kept in the posture (rotation angle). Therefore, in order to ideally perform the rotational displacement around the point O about the point O without moving the point O, which is the object of the present invention, each cylindrical hinge 5a moves on a circle having a radius r. You can do this. For this reason, in this embodiment, when the fine movement table 2 is rotationally displaced, the piezoelectric actuator 5c is driven so as to extend. Here, r: distance between the point O and the small diameter portion 5a 4 of the cylindrical hinge l: distance between the small diameter portions of the cylindrical hinges θ: rotational displacement of the fine motion table 2 (an extremely large value for easy understanding) Is adopted.) Δu: Assuming the displacement amount of the piezoelectric actuator 5c, the displacement amount δu for obtaining the rotational displacement θ is expressed by the following equation.
ただし、 即ち、各駆動リンク部材５の圧電アクチユエータ5cを値
δｕだけ伸長駆動させれば、微動テーブル２を、並進変
位を含むことなく点Ｏを中心として回転変位せしめるこ
とができる。したがつて、高精度の回転変位を得ること
ができる。 However, That is, when the piezoelectric actuator 5c of each drive link member 5 is extended and driven by the value δu, the fine movement table 2 can be rotationally displaced about the point O without including translational displacement. Therefore, highly accurate rotational displacement can be obtained.
なお、第３図は回転中心点Ｏとヒンジ5a、5bとがそれぞ
れ一直線上に配置されている状態を示しており、上記δ
ｕの計算式もこの状態を前提として説明したが、ヒンジ
5a、5bと回転中心点Ｏとが一直線上に配置されていない
とき又は既にある角度だけ微動テーブルが回転した状態
から更に回転を与えるときは、上式において回転前のθ
と回転後のθとのδｕの差分値だけ駆動リンク５を伸縮
すればよいことは上式より明らかである。又、上記実施
例の説明では、駆動リンク部材を３つ設ける例について
説明したが、３つ以上設けることも可能である。又、固
定部および微動部に連結される各円柱ヒンジの極小径部
が同一円周上に配置される例について説明したが、これ
に限ることはなく同一円周上に配置される必要はない。
ただし、その場合には各駆動リンク部材の圧電アクチユ
エータの変位量は異なる値となる。さらに、ヒンジ機構
としては円柱ヒンジ以外に角柱ヒンジその他の適宜のた
わみ部材を用いることもできる。It should be noted that FIG. 3 shows a state in which the center of rotation O and the hinges 5a and 5b are respectively arranged on a straight line.
The calculation formula of u has been explained on the premise of this state, but the hinge
When 5a, 5b and the rotation center point O are not arranged on a straight line or when the fine movement table is further rotated from the state already rotated by a certain angle, in the above equation, θ before rotation is used.
It is clear from the above equation that the drive link 5 needs to be expanded and contracted by the difference value of δu between the rotation angle θ and the rotated angle θ. Further, in the above description of the embodiment, an example in which three drive link members are provided has been described, but it is also possible to provide three or more drive link members. Also, an example has been described in which the extremely small diameter portions of the cylindrical hinges connected to the fixed portion and the fine movement portion are arranged on the same circumference, but the invention is not limited to this, and it is not necessary to arrange them on the same circumference. .
However, in that case, the displacement amount of the piezoelectric actuator of each drive link member becomes a different value. Further, as the hinge mechanism, other than the cylindrical hinge, a prismatic hinge or other appropriate bending member may be used.
以上述べたように、本発明では、固定部と微動部との間
に連結された複数の駆動リンク部材の各アクチユエータ
を、移動部に連結されている各ヒンジ機構の変形中心
が、予め微動部に定められている点を中心とする半径軌
跡上を移動するように伸縮駆動させる構成としたので、
並進変位を含まない理想的な回転変位を行なうことがで
き、高精度の回転変位を得ることができる。As described above, in the present invention, the actuators of the plurality of drive link members connected between the fixed portion and the fine moving portion are arranged such that the deformation center of each hinge mechanism connected to the moving portion is the fine moving portion in advance. Since it is configured to expand and contract so as to move on a radius locus centered on the point defined in
It is possible to perform ideal rotational displacement that does not include translational displacement, and it is possible to obtain highly accurate rotational displacement.
第１図は本発明の実施例に係る微細位置決め装置の側面
図、第２図は第１図に示す駆動リンク部材の斜視図、第
３図は第１図に示す装置のリンク機構の模式図、第４図
は従来の微細位置決め装置の側面図である。 １……固定部、２……微動テーブル、５……駆動リンク
部材、5a,5b……円柱ヒンジ、5c……圧電アクチユエー
タ1 is a side view of a fine positioning device according to an embodiment of the present invention, FIG. 2 is a perspective view of a drive link member shown in FIG. 1, and FIG. 3 is a schematic view of a link mechanism of the device shown in FIG. FIG. 4 is a side view of a conventional fine positioning device. 1 ... Fixed part, 2 ... Fine movement table, 5 ... Drive link member, 5a, 5b ... Cylindrical hinge, 5c ... Piezoactuator
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小野 耕三 茨城県土浦市神立町650番地 日立建機株 式会社土浦工場内 (56)参考文献 特開 昭62−88008（ＪＰ，Ａ) 特開 昭61−121109（ＪＰ，Ａ) 特開 昭60−52230（ＪＰ，Ａ) 特開 昭61−168025（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kozo Ono 650 Jinritsucho, Tsuchiura City, Ibaraki Prefecture Tsuchiura Plant, Hitachi Construction Machinery Co., Ltd. (56) Reference JP 62-88008 (JP, A) JP Sho 61-121109 (JP, A) JP-A-60-52230 (JP, A) JP-A-61-168025 (JP, A)
Claims (3)
た微動部とを備え、前記微動部を前記固定部に対して回
転変位させる微細位置決め装置において、変形中心を有
し特定方向に高い剛性を有する２つのヒンジ機構と、こ
れら各ヒンジ機構の間に装着され前記特定方向に伸縮す
るアクチユエータとで構成された駆動リンク部材を、前
記固定部と前記微動部との間に複数連結するとともに、
前記アクチユエータを、前記微動部に連結されている前
記ヒンジ機構の変形中心が、予め前記微動部に定められ
ている点を中心とする半径軌跡上を移動するように伸縮
駆動することを特徴とする微細位置決め装置。1. A fine positioning device comprising a fixed portion and a fine movement portion arranged to face the fixed portion, wherein the fine movement portion is rotationally displaced with respect to the fixed portion. A plurality of drive link members, each of which is composed of two hinge mechanisms having high rigidity and an actuator mounted between these hinge mechanisms and extending and contracting in the specific direction, are connected between the fixing portion and the fine moving portion. Along with
The actuator is expanded / contracted so that the deformation center of the hinge mechanism connected to the fine movement unit moves on a radial locus centered on a point previously set in the fine movement unit. Fine positioning device.
ヒンジ機構は、円柱ヒンジであることを特徴とする微細
位置決め装置。2. A fine positioning device according to claim 1, wherein the hinge mechanism is a cylindrical hinge.
アクチユエータは、積層形圧電体であることを特徴とす
る微細位置決め装置。3. The fine positioning device according to claim 1, wherein the actuator is a laminated piezoelectric material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62141324A JPH071455B2 (en) | 1987-06-08 | 1987-06-08 | Fine positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62141324A JPH071455B2 (en) | 1987-06-08 | 1987-06-08 | Fine positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63305410A JPS63305410A (en) | 1988-12-13 |
| JPH071455B2 true JPH071455B2 (en) | 1995-01-11 |
Family
ID=15289277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62141324A Expired - Lifetime JPH071455B2 (en) | 1987-06-08 | 1987-06-08 | Fine positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071455B2 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6052230A (en) * | 1983-09-02 | 1985-03-25 | Omron Tateisi Electronics Co | Minutely moving stage mechanism |
| JPS60155394A (en) * | 1984-01-25 | 1985-08-15 | 住友電気工業株式会社 | Wrist mechanism of robot |
| JPS61168025A (en) * | 1985-01-21 | 1986-07-29 | Hitachi Ltd | Driving device |
| JPS61121109A (en) * | 1984-11-19 | 1986-06-09 | Canon Inc | Fine movement table device |
| JPH06105416B2 (en) * | 1985-10-14 | 1994-12-21 | 株式会社日立製作所 | Multi-DOF space fine movement mechanism |
-
1987
- 1987-06-08 JP JP62141324A patent/JPH071455B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63305410A (en) | 1988-12-13 |
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