JPH083755B2 - Fine positioning device - Google Patents
Fine positioning deviceInfo
- Publication number
- JPH083755B2 JPH083755B2 JP6008887A JP6008887A JPH083755B2 JP H083755 B2 JPH083755 B2 JP H083755B2 JP 6008887 A JP6008887 A JP 6008887A JP 6008887 A JP6008887 A JP 6008887A JP H083755 B2 JPH083755 B2 JP H083755B2
- Authority
- JP
- Japan
- Prior art keywords
- positioning device
- movement table
- fine movement
- actuator
- cylindrical hinge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Control Of Position Or Direction (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体製造装置，電子顕微鏡等の微細な変
位調節を必要とする装置に使用される微細位置決め装置
のうち、回転変位を行なう微細位置決め装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a fine positioning device used in a device such as a semiconductor manufacturing device or an electron microscope that requires fine displacement adjustment, and a fine positioning device that performs rotational displacement. The present invention relates to a positioning device.
近年、各種技術分野においては、サブμｍのオーダー
の微細な変位調節が可能である装置が要望されている。
その典型的な例がLSI（大規模集積回路），超LSIの製造
工程において使用されるマスクアライナ，電子線描画装
置等の半導体製造装置である。これらの装置において
は、サブμｍオーダーの微細な位置決めが必要であり、
位置決めの精度が向上するにしたがってその集積度も増
大し、高性能の製品を製造することができる。このよう
な微細な位置決めは上記半導体装置に限らず、電子顕微
鏡をはじめとする各種の高倍率光学装置等においても必
要であり、その精度向上により、バイオテクノロジ，宇
宙開発等の先端技術においてもそれらの発展に大きく寄
与するものである。In recent years, in various technical fields, a device capable of fine displacement adjustment on the order of sub-μm has been demanded.
Typical examples are semiconductor manufacturing equipment such as mask aligners used in LSI (large-scale integrated circuit) and VLSI manufacturing processes, and electron beam lithography equipment. These devices require fine positioning on the order of sub-μm,
As the positioning accuracy improves, the degree of integration increases, and high-performance products can be manufactured. Such fine positioning is necessary not only in the above-mentioned semiconductor device but also in various high-magnification optical devices such as electron microscopes. Will greatly contribute to the development of.
ところで、上記微細位置決めを行なう微細位置決め装
置は、固定部と、位置決めの対象となる物体が載置され
る微動テーブルとを備え、両者間に設けられたアクチユ
エータを駆動して微動テーブルを所望の量だけ変位させ
る構成となつている。このような微動テーブルの変位に
おいては、直線的な変位（並進変位）のみならず回転変
位が要求される場合がある。By the way, the fine positioning device for performing the fine positioning includes a fixing portion and a fine movement table on which an object to be positioned is placed, and an actuator provided between the two is driven to move the fine movement table to a desired amount. It is designed to be displaced only. In such displacement of the fine movement table, not only linear displacement (translational displacement) but also rotational displacement may be required.
従来、上記回転変位を行なう微細位置決め装置とし
て、微動テーブルをばね性を有する３本以上の支持線に
より固定部に支持した構成のものが提案されていた。こ
れを図により説明する。第３図（ａ），（ｂ）は従来の
微細位置決め装置の平面図および側面図である。図で、
１は固定部であり、上方に突出する突出部1aを有する。
２は円形の微動テーブルであり、円周上に２つの切欠き
部2a,2bが形成されている。3a,3b,3cはばね性を有する
３本の支持線であり、固定部１と微動テーブル２とに連
結され、微動テーブル２を固定部１に支持している。4
a,4bは積層形の圧電アクチユエータであり、微動テーブ
ル２の切欠き部2a,2bに固定されている。Conventionally, as a fine positioning device for performing the rotational displacement, there has been proposed a structure in which a fine movement table is supported by a fixed portion by three or more support wires having a spring property. This will be described with reference to the drawings. FIGS. 3A and 3B are a plan view and a side view of a conventional fine positioning device. In the figure,
Reference numeral 1 denotes a fixed portion, which has a protruding portion 1a protruding upward.
Reference numeral 2 denotes a circular fine movement table having two notches 2a and 2b formed on the circumference thereof. Reference numerals 3a, 3b, 3c denote three support wires having a spring property, which are connected to the fixed portion 1 and the fine movement table 2 and support the fine movement table 2 on the fixed portion 1. Four
Reference numerals a and 4b denote laminated piezoelectric actuators, which are fixed to the notches 2a and 2b of the fine movement table 2.
上記微細位置決め装置において、圧電アクチユエータ
4aが伸長し、圧電アクチユエータ4bが同量だけ縮むよう
に電圧を印加すると、微動テーブル２は支持線3a,3b,3c
のばね性により第３図（ａ）で時計方向に微小回転す
る。又、圧電アクチユエータ4a,4bの伸長と縮みの関係
を逆にすると微動テーブル２は反時計方向に微小回転す
る。このように究めて簡単な構造により微動テーブル２
に回転変位を発生させることができる。In the above fine positioning device, a piezoelectric actuator
When the voltage is applied so that the piezoelectric actuator 4b contracts by the same amount as the piezoelectric actuator 4b expands, the fine movement table 2 causes the supporting wires 3a, 3b, 3c to move.
Due to the springiness of, a minute rotation is made in the clockwise direction in FIG. 3 (a). Further, when the relationship between the expansion and contraction of the piezoelectric actuators 4a, 4b is reversed, the fine movement table 2 slightly rotates counterclockwise. With such a simple structure, the fine movement table 2
It is possible to generate a rotational displacement in.
ところで、上記従来の微細位置決め装置における微動
テーブル２の回転変位は、その構造から明らかなように
定まつた回転中心をもたない。したがつて、微動テーブ
ル２上に載置された変位対象物体をある軸まわりに回転
変位させることが要求されたとき、回転中心軸の存在位
置が不明確なため要求されたとおりの正確な回転変位を
行なうことができず、又、正確な回転変位角を得ること
もできないという問題があつた。By the way, the rotational displacement of the fine movement table 2 in the above-mentioned conventional fine positioning apparatus does not have a fixed rotation center as is clear from its structure. Therefore, when it is required to rotationally displace the displacement target object placed on the fine movement table 2 around a certain axis, the exact position of the rotation center axis is not clear because the position is not clear. There has been a problem that the displacement cannot be performed and an accurate rotational displacement angle cannot be obtained.
なお、回転中心軸を有する微細位置決め装置も種々提
案されているが、いずれも第３図（ａ），（ｂ）に示す
微細位置決め装置に比較して遥かに構造が複雑であり、
又は回転軸に摺動やガタを生じる構造であつて満足すべ
きものではない。Various fine positioning devices having a central axis of rotation have been proposed, but each has a much more complicated structure than the fine positioning devices shown in FIGS. 3 (a) and 3 (b).
Or, it is not a satisfactory structure because it has a structure that causes sliding and backlash on the rotary shaft.
本発明は、このような事情に鑑みてなされたものであ
り、その目的は、上記従来技術の問題点を解決し、摺動
やガタを生じさせることなく回転中心をもつことがで
き、しかも構造簡素な微細位置決め装置を提供するにあ
る。The present invention has been made in view of the above circumstances, and an object thereof is to solve the above-mentioned problems of the prior art and to have a rotation center without causing sliding or backlash, and having a structure. An object is to provide a simple fine positioning device.
上記の目的を達成するため、本発明は、固定部材と回
転部材とに圧電アクチユエータを係合するとともに、固
定部材と回転部材とを捩り部材により連結し、この連結
は、捩り部材の捩り中心軸を回転部材に定められた回転
中心軸に一致させる連結であることを特徴とする。To achieve the above object, the present invention engages a piezoelectric actuator with a fixed member and a rotary member, and connects the fixed member and the rotary member with a torsion member, and this connection includes a torsion center axis of the torsion member. Is a connection that matches the rotation center axis defined by the rotating member.
圧電アクチユエータに電圧を印加すると、これに応じ
て圧電アクチユエータが伸長し（または縮み）、回転部
材に力が作用する。これにより、捩り部材にその捩り中
心軸まわりのモーメントが発生し、捩り部材は捩り中心
軸まわりに回転する。したがつて、回転部材はその回転
中心軸まわりに回転する。When a voltage is applied to the piezoelectric actuator, the piezoelectric actuator expands (or contracts) accordingly, and a force acts on the rotary member. As a result, a moment is generated in the torsion member about the torsion center axis, and the torsion member rotates about the torsion center axis. Therefore, the rotating member rotates about its central axis of rotation.
以下、本発明を図示の実施例に基づいて説明する。 Hereinafter, the present invention will be described based on the illustrated embodiments.
第１図（ａ），（ｂ）は本発明の実施例に係る微細位
置決め装置の平面図および側面図である。図で、第３図
（ａ），（ｂ）に示す部分と同一又は等価な部分には同
一符号が付してある。固定部１の円周部分に突出部1aが
設けられ、また円柱状の微動テーブル２の円周部分に前
記突出部1aと対向して垂下部2cが設けられている。積層
形の圧電アクチユエータ４が、突出部1aと垂下部2cとの
間に固定されている。５は固定部１と微動テーブル２と
に連結された円柱ヒンジであり、この円柱ヒンジ５によ
り微動テーブル２が固定部１に支持される。ここで、円
柱ヒンジ５の構成を第２図により説明する。1 (a) and 1 (b) are a plan view and a side view of a fine positioning device according to an embodiment of the present invention. In the figure, the same or equivalent parts as those shown in FIGS. 3 (a) and 3 (b) are designated by the same reference numerals. A projecting portion 1a is provided on the circumferential portion of the fixed portion 1, and a hanging portion 2c is provided on the circumferential portion of the cylindrical fine movement table 2 so as to face the projecting portion 1a. A laminated piezoelectric actuator 4 is fixed between the projecting portion 1a and the hanging portion 2c. Reference numeral 5 denotes a cylindrical hinge connected to the fixed portion 1 and the fine movement table 2, and the fine movement table 2 is supported by the fixed portion 1 by the cylindrical hinge 5. Here, the configuration of the cylindrical hinge 5 will be described with reference to FIG.
第２図は円柱ヒンジの斜視図である。図で、５は円柱
ヒンジを示す。円柱ヒンジ５は高い剛性を有する円柱部
材より成り、そのほぼ中央円周部分に、断面Ｖ字状（又
はＵ字状）の切欠き部5bを形成することにより構成され
る。5a1，5a2は切欠き部5bの両側の剛体部、5cは切欠き
部5bにより形成された極小径部である。5Aは極小径部5c
および剛体部5a1，5a2の中心を通る捩り中心軸を示す。FIG. 2 is a perspective view of a cylindrical hinge. In the figure, 5 indicates a cylindrical hinge. The columnar hinge 5 is made of a columnar member having high rigidity, and is formed by forming a notch portion 5b having a V-shaped (or U-shaped) cross section in a substantially central circumferential portion thereof. 5a 1 and 5a 2 are rigid portions on both sides of the cutout portion 5b, and 5c is a very small diameter portion formed by the cutout portion 5b. 5A is a very small diameter part 5c
And the center axis of torsion passing through the centers of the rigid body parts 5a 1 and 5a 2 .
この円柱ヒンジ５の剛体部5a2を固定し、剛体部5a1に
軸5Aまわりのモーメントを作用させると、極小径部5cが
捩れることにより剛体部5a1は軸5Aを中心として回動す
る。しかし、軸Ａ方向に作用する荷重に対しては高い剛
性を示す。The rigid portion 5a 2 of the cylindrical hinge 5 is fixed, when the action of moment around the axis 5A to the rigid portion 5a 1, pivots about the rigid portion 5a 1 is an axial 5A by very small diameter portion 5c is twisted . However, it exhibits high rigidity with respect to the load acting in the direction of the axis A.
本実施例では、このような円柱ヒンジ５の剛体部5
a1，5a2をそれぞれ固定部１および微動テーブル２に固
定するものであり、円柱ヒンジ５が軸5A方向の荷重に高
い剛性を有することから、微動テーブル２は円柱ヒンジ
５により固定部１に確実に支持されることになる。円柱
ヒンジ５を微動テーブル２に連結するに際し、第１図
（ｂ）に示す微動テーブル２に定められた回転中心軸2A
と円柱ヒンジ５の捩り中心軸5Aとが一致せしめられる。
さらに、圧電アクチユエータ４が駆動されたとき、その
力が作用する垂下部2c上の点（圧電アクチユエータ４が
固定されている個所）は、円柱ヒンジ５の極小径部5cを
通り、軸2A,5Aに垂直な面（図で２点鎖線により示され
ている）内に存在するように設計されている。In the present embodiment, such a rigid body portion 5 of the cylindrical hinge 5 is used.
a 1 and 5a 2 are fixed to the fixed portion 1 and the fine movement table 2, respectively, and since the cylindrical hinge 5 has high rigidity against the load in the direction of the axis 5A, the fine movement table 2 is fixed to the fixed portion 1 by the cylindrical hinge 5. It will certainly be supported. When connecting the cylindrical hinge 5 to the fine movement table 2, the rotation center axis 2A defined on the fine movement table 2 shown in FIG. 1 (b).
And the central axis 5A of torsion of the cylindrical hinge 5 are made to coincide with each other.
Furthermore, when the piezoelectric actuator 4 is driven, the point on the drooping portion 2c on which the force acts (the point where the piezoelectric actuator 4 is fixed) passes through the extremely small diameter portion 5c of the cylindrical hinge 5 and passes through the shafts 2A, 5A. It is designed to lie in a plane perpendicular to the plane (indicated by a chain double-dashed line in the figure).
次に、本実施例の動作を説明する。圧電アクチユエー
タ４に電圧を印加して伸長せしめると、微動テーブル２
には接線方向の力成分が作用し、これにより微動テーブ
ル２に連結された円柱ヒンジ５に軸5Aまわりの反時計方
向のモーメントが発生する。このため、極小径部5cは軸
5Aを中心に捩れ、したがつて微動テーブル２は軸2Aを中
心に、圧電アクチユエータ４に印加された電圧に応じた
角度だけ反時計方向に回動する。このとき、圧電アクチ
ユエータ４の垂下部2c上の固定個所は上述の位置にある
ので、軸5Aに垂直な方向の力成分が存在しても円柱ヒン
ジ５の極小径部5cしかたわむことはない。圧電アクチユ
エータ４を縮めると、円柱ヒンジ５は逆方向に捩れ、微
動テーブル２は時計方向に回動する。Next, the operation of this embodiment will be described. When a voltage is applied to the piezoelectric actuator 4 to extend it, the fine movement table 2
A force component in the tangential direction acts on the cylinder hinge 5, which causes a counterclockwise moment about the axis 5A in the cylindrical hinge 5 connected to the fine movement table 2. Therefore, the extremely small diameter part 5c is
Twisting around 5A, the fine movement table 2 rotates about the shaft 2A in the counterclockwise direction by an angle corresponding to the voltage applied to the piezoelectric actuator 4. At this time, since the fixed portion on the hanging portion 2c of the piezoelectric actuator 4 is at the above-mentioned position, even if there is a force component in the direction perpendicular to the axis 5A, only the minimum diameter portion 5c of the cylindrical hinge 5 is deflected. When the piezoelectric actuator 4 is contracted, the cylindrical hinge 5 is twisted in the opposite direction, and the fine movement table 2 is rotated clockwise.
このように、本実施例では、固定部と微動テーブルを
円柱ヒンジで連結し、円柱ヒンジの捩り中心軸と微動テ
ーブルの回転中心軸とが一致するようにしたので、円柱
ヒンジにより微動テーブルの回転中心軸が確立され、正
確な角度で所望の回転変位を発生させることができ、ひ
いては変位制御が容易となる。又、円柱ヒンジであるの
で構造は極めて簡素であり、さらに摺動部はなく、か
つ、ガタを生じるおそれもないので、これらによる精度
低下の悪影響は全くない。又、圧電アクチユエータを固
定部に設けられた突出部と微動テーブルに設けられた垂
下部との間に固定し、この固定個所が円柱ヒンジの中心
を通りその捩り中心軸に垂直な面内にあるようにしたの
で、円柱ヒンジにたわみを生じることはなく、正確な回
転変位を得ることができる。As described above, in this embodiment, since the fixed portion and the fine movement table are connected by the cylindrical hinge so that the torsion center axis of the cylindrical hinge and the rotation center axis of the fine movement table coincide with each other, the rotation of the fine movement table is rotated by the cylindrical hinge. A central axis is established, a desired rotational displacement can be generated at an accurate angle, and displacement control becomes easy. Further, since it is a cylindrical hinge, the structure is extremely simple, there is no sliding portion, and there is no risk of rattling, so there is no adverse effect of accuracy deterioration due to these. Further, the piezoelectric actuator is fixed between the protruding portion provided on the fixed portion and the hanging portion provided on the fine movement table, and this fixed portion passes through the center of the cylindrical hinge and is in a plane perpendicular to the torsion center axis. Since this is done, the cylindrical hinge is not bent, and accurate rotational displacement can be obtained.
なお、上記実施例の説明では、アクチユエータとして
積層径の圧電アクチユエータを例示して説明したが、こ
れに限ることはなく、他の種々のアクチユエータを用い
ることができる。又、円柱ヒンジの極小径部を適切に設
計すれば、たわみに対する剛性を大きくすることがで
き、その場合、アクチユエータの設置位置は自由に選択
することができる。さらに、アクチユエータと微動テー
ブルとは固定される必要はなく、端に当接するだけでも
よい。In the description of the above embodiment, the piezoelectric actuator having the laminated diameter is illustrated as the actuator, but the actuator is not limited to this, and various other actuators can be used. Further, by appropriately designing the extremely small diameter portion of the cylindrical hinge, it is possible to increase the rigidity against bending, and in that case, the installation position of the actuator can be freely selected. Further, the actuator and the fine movement table do not have to be fixed, but may just contact the ends.
以上述べたように、本発明では、固定部材と回転部材
とを捩り部材で連結し、回転部材の回転中心軸と捩り部
材の捩り中心軸とが一致するようにしたので、回転部材
の回転中心が定まり、正確な角度で所望の回転変位を発
生させることができ、ひいては変位制御も容易となる。
又、摺動部やガタの発生がないので、高精度の変位が可
能である。さらに、構造は極めて簡素であるので、安価
かつ容易に製造することができる。As described above, in the present invention, the fixed member and the rotating member are connected by the twisting member, and the rotation center axis of the rotating member and the twisting center axis of the twisting member coincide with each other. Is set, a desired rotational displacement can be generated at an accurate angle, and displacement control becomes easy.
Further, since there is no occurrence of a sliding portion or backlash, highly accurate displacement is possible. Furthermore, since the structure is extremely simple, it can be manufactured inexpensively and easily.
第１図（ａ），（ｂ）は本発明の実施例に係る微細位置
決め装置の平面図および側面図、第２図は第１図に示す
円柱ヒンジの斜視図、第３図（ａ），（ｂ）は従来の微
細位置決め装置の平面図および側面図である。 １……固定部、２……微動テーブル、４……圧電アクチ
ユエータ、５……円柱ヒンジ、5c……極小径部。1 (a) and 1 (b) are a plan view and a side view of a fine positioning device according to an embodiment of the present invention, FIG. 2 is a perspective view of a cylindrical hinge shown in FIG. 1, FIG. 3 (a), (B) is the top view and side view of the conventional fine positioning device. 1 ... Fixed part, 2 ... Fine movement table, 4 ... Piezoactuator, 5 ... Cylindrical hinge, 5c ... Ultra-small diameter part.
Claims (4)
る回転部材と、一端が前記固定部材に固定され他端が前
記回転部材に係合されたアクチユエータとを備え、この
アクチユエータの駆動により前記回転部材に回転変位を
発生させる微細位置決め装置において、前記固定部材と
前記回転部材とを、前記回転部材の回転中心軸と一致す
る捩り中心軸を有する捩り部材により連結したことを特
徴とする微細位置決め装置。1. A fixing member, a rotating member that rotates with respect to the fixing member, and an actuator having one end fixed to the fixing member and the other end engaged with the rotating member. The actuator is driven by the actuator. In the fine positioning device for generating a rotational displacement in the rotary member, the fixed member and the rotary member are connected by a twisting member having a twisting central axis that matches a central axis of rotation of the rotating member. Positioning device.
捩り部材は、円柱ヒンジであることを特徴とする微細位
置決め装置。2. A fine positioning device according to claim 1, wherein the torsion member is a cylindrical hinge.
アクチユエータは、圧電アクチユエータであることを特
徴とする微細位置決め装置。3. A fine positioning device according to claim 1, wherein the actuator is a piezoelectric actuator.
圧電アクチユエータは、前記捩り部材の捩り部中心を通
り前記捩り中心軸と直交する平面内に設けられているこ
とを特徴とする微細位置決め装置。4. The microactuator according to claim 3, wherein the piezoelectric actuator is provided in a plane that passes through the center of the twisting portion of the twisting member and is orthogonal to the twisting center axis. Positioning device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6008887A JPH083755B2 (en) | 1987-03-17 | 1987-03-17 | Fine positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6008887A JPH083755B2 (en) | 1987-03-17 | 1987-03-17 | Fine positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63226710A JPS63226710A (en) | 1988-09-21 |
| JPH083755B2 true JPH083755B2 (en) | 1996-01-17 |
Family
ID=13131984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6008887A Expired - Lifetime JPH083755B2 (en) | 1987-03-17 | 1987-03-17 | Fine positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH083755B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02217630A (en) * | 1989-02-15 | 1990-08-30 | Okuma Mach Works Ltd | Rotating machine |
-
1987
- 1987-03-17 JP JP6008887A patent/JPH083755B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63226710A (en) | 1988-09-21 |
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