JPH0716840B2 - Fine movement mechanism - Google Patents
Fine movement mechanismInfo
- Publication number
- JPH0716840B2 JPH0716840B2 JP63203275A JP20327588A JPH0716840B2 JP H0716840 B2 JPH0716840 B2 JP H0716840B2 JP 63203275 A JP63203275 A JP 63203275A JP 20327588 A JP20327588 A JP 20327588A JP H0716840 B2 JPH0716840 B2 JP H0716840B2
- Authority
- JP
- Japan
- Prior art keywords
- rigid body
- fine movement
- movement mechanism
- actuator
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 title claims description 53
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 description 24
- 230000000694 effects Effects 0.000 description 9
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Machine Tool Units (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、超精密加工、半導体製造装置、電子顕微鏡等
のサブμｍオーダーの調節を必要とする装置に使用され
微動機構に関する。TECHNICAL FIELD The present invention relates to a fine movement mechanism used in an apparatus requiring sub-μm order adjustment such as ultra-precision processing, a semiconductor manufacturing apparatus, and an electron microscope.
近年、各種技術分野においては、サブμｍのオーダの微
細な変位調節が可能である装置が要望されている。その
典型的な例がLSI（大規模集積回路）、超LSIの製造工程
において使用されるマスクアライナ、電子線描画装置等
の半導体製造装置である。これらの装置においては、サ
ブμｍオーダーの微細な位置決めが必要であり、位置決
めの精度が向上するにしたがつてその集積度も増大し、
高性能の製品を製造することができる。このような微細
な位置決めは上記半導体装置に限らず、電子顕微鏡をは
じめとする各種の高倍率光学装置や超精密加工装置等に
おいても必要であり、その精度向上により、バイオテク
ノロジ、宇宙開発等の先端技術においてもそれらの発展
に大きく寄与するものである。以下、このような微細な
位置決めを行なう微動機構のいくつかを図により説明す
る。In recent years, in various technical fields, there is a demand for a device capable of fine displacement adjustment on the order of sub-μm. A typical example thereof is a semiconductor manufacturing apparatus such as an LSI (Large Scale Integrated Circuit), a mask aligner used in a manufacturing process of a VLSI, an electron beam drawing apparatus and the like. In these devices, fine positioning on the order of sub-μm is necessary, and as the positioning accuracy improves, the degree of integration increases,
High-performance products can be manufactured. Such fine positioning is necessary not only in the above-mentioned semiconductor device but also in various high-magnification optical devices such as electron microscopes and ultra-precision processing devices. By improving the precision, biotechnology, space development, etc. Even in advanced technology, it will greatly contribute to their development. Hereinafter, some of the fine movement mechanisms that perform such fine positioning will be described with reference to the drawings.
第８図は従来の微動機構の側面図である。図で、１は固
定側剛体、２は移動側剛体、３は剛体１と剛体２との間
に装架された圧電アクチユエータである。なお、X,Y,Z
は座標軸、dpは圧電アクチユエータ３のＺ軸方向の寸
法、dzはこの微動機構のＺ軸方向の寸法を示す。圧電ア
クチユエータ３に電圧を印加すると、圧電アクチユエー
タ３はＺ軸方向に伸長し、剛体２は破線に示すようにuz
だけ並進変位する。FIG. 8 is a side view of a conventional fine movement mechanism. In the figure, 1 is a fixed side rigid body, 2 is a moving side rigid body, and 3 is a piezoelectric actuator mounted between the rigid body 1 and the rigid body 2. In addition, X, Y, Z
Is the coordinate axis, dp is the Z-axis dimension of the piezoelectric actuator 3, and dz is the Z-axis dimension of this fine movement mechanism. When a voltage is applied to the piezoelectric actuator 3, the piezoelectric actuator 3 expands in the Z-axis direction, and the rigid body 2 moves to the uz direction as shown by the broken line.
Translational displacement.
第９図は従来の他の微動機構の側面図である。図で、11
は適宜な手段で固定された固定側剛体、11aは剛体11の
突起、12は剛体11と対向する移動側剛体、12aは剛体12
の突起、13は突起11a,12a間に装架された圧電アクチユ
エータ、14,15はそれぞれ剛体11,12をそれらの上，下で
連結する弾性を有する平板である。圧電アクチユエータ
13に電圧を印加すると、圧電アクチユエータ13が伸長し
て突起12aを押圧し、これにより平板14,15が変形し、剛
体12は剛体11に対して破線に示すようにＺ軸方向にuzだ
け並進変位する。FIG. 9 is a side view of another conventional fine movement mechanism. In the figure, 11
Is a fixed side rigid body fixed by an appropriate means, 11a is a protrusion of the rigid body 11, 12 is a moving side rigid body facing the rigid body 11, 12a is a rigid body 12
, 13 is a piezoelectric actuator mounted between the protrusions 11a and 12a, and 14 and 15 are elastic flat plates that connect the rigid bodies 11 and 12 above and below them, respectively. Piezo actuator
When a voltage is applied to 13, the piezoelectric actuator 13 expands and presses the protrusion 12a, which deforms the flat plates 14 and 15, and the rigid body 12 translates relative to the rigid body 11 by uz in the Z-axis direction as shown by the broken line. Displace.
第10図は従来のさらに他の微動機構の側面図である。図
で、21は固定側剛体、22は移動側剛体、23は圧電アクチ
ユエータである。圧電アクチユエータ23は剛体21,22間
に鋼球24を介して装架されている。25は剛体21と剛体22
との間を連結する剛体、26は剛体25に形成された弾性ヒ
ンジである。剛体25と弾性ヒンジ26とによりリンク機構
が構成される。圧電アクチユエータ23に電圧を印加する
と、圧電アクチユエータ23が伸長し、鋼球24を介して剛
体22を押圧する。これにより各弾性ヒンジ26に回動を生
じてリンク機構が変形し、剛体22は破線に示すようにＺ
軸方向にuzだけ並進変位する。FIG. 10 is a side view of still another conventional fine movement mechanism. In the figure, 21 is a fixed side rigid body, 22 is a moving side rigid body, and 23 is a piezoelectric actuator. The piezoelectric actuator 23 is mounted between the rigid bodies 21 and 22 via a steel ball 24. 25 is a rigid body 21 and a rigid body 22
Reference numeral 26 is a rigid body that connects between and, and 26 is an elastic hinge formed on the rigid body 25. The rigid body 25 and the elastic hinge 26 constitute a link mechanism. When a voltage is applied to the piezoelectric actuator 23, the piezoelectric actuator 23 expands and presses the rigid body 22 via the steel ball 24. As a result, each elastic hinge 26 is rotated and the link mechanism is deformed.
Translational displacement by uz in the axial direction.
第11図は第10図に示す微動機構を３つ配置して構成され
る３軸微動機構の平面図である。図に破線で示されてい
る30A,30B,30Cはそれぞれ第10図に示すものと同じ構成
の微動機構、24は鋼球（第10図に示す鋼球24と同じ鋼
球）である。22′は各微動機構30A,30B,30Cの共通の移
動側剛体であり、第10図に示す移動側剛体22に相当す
る。各微動機構30A,30B,30Cは互いに120゜の間隔を置い
て配置されている。FIG. 11 is a plan view of a triaxial fine movement mechanism configured by arranging three fine movement mechanisms shown in FIG. Reference numerals 30A, 30B, and 30C indicated by broken lines in the figure each denote a fine movement mechanism having the same structure as that shown in FIG. 10, and 24 denotes a steel ball (the same steel ball as the steel ball 24 shown in FIG. 10). Reference numeral 22 'is a moving side rigid body common to the fine movement mechanisms 30A, 30B, 30C, and corresponds to the moving side rigid body 22 shown in FIG. The fine movement mechanisms 30A, 30B and 30C are arranged at 120 ° intervals from each other.
今、各微動機構30A、30B、30Cの圧電アクチユエータ23
を同一量伸長させると、移動側剛体22'はＺ軸方向に並
進変位する。又、微動機能30A,30Cの圧電アクチユエー
タ23を駆動してこれらを等量に伸長すると移動側剛体2
2′はＸ軸まわりに回転変位する。さらに、微動機構30
A,30Cの圧電アクチユエータをその伸長量をそれぞれ調
整して駆動すると移動側剛体22′はＹ軸まわりに回転変
位する。このように、第11図に示す微動機構は３軸の変
位を行なう微動機構を構成する。Now, the piezoelectric actuator 23 of each fine movement mechanism 30A, 30B, 30C
Is extended by the same amount, the moving-side rigid body 22 'is translationally displaced in the Z-axis direction. In addition, when the piezoelectric actuators 23 having the fine movement functions 30A and 30C are driven to extend them to an equal amount, the moving side rigid body 2
2'is rotationally displaced around the X axis. In addition, the fine movement mechanism 30
When the piezoelectric actuators of A and 30C are driven by adjusting their respective extension amounts, the moving side rigid body 22 'is rotationally displaced around the Y axis. As described above, the fine movement mechanism shown in FIG. 11 constitutes a fine movement mechanism for performing displacement of three axes.
なお、第8,9,10図に示す１軸の並進変位を生じる微動機
構を複数用いることにより６軸（３軸の並進変位と３軸
まわりの回転変位）の微動機構を構成し得るのは明らか
である。It should be noted that it is possible to configure a 6-axis (three-axis translational displacement and three-axis rotational displacement) fine-movement mechanism by using a plurality of one-axis translational displacement mechanisms shown in FIGS. it is obvious.
上記従来の微動機構を用いて１軸〜６軸の微動機構を構
成する場合、Ｘ軸方向,Y軸方向の並進変位及びＺ軸まわ
りの回転変位を得る微動機構は、その高さ方向の寸法を
小さくすることができる。これに反して、Ｚ軸方向の並
進変位、Ｘ軸まわりの回転変位およびＹ軸まわりの回転
変位を得る微動機構は第８〜11図に示すように高さ方向
の寸法が大きくなる。これは、圧電アクチユエータの特
性に起因する。即ち、圧電アクチユエータの伸長方向の
寸法をdp、伸長分をΔｄ、印加電圧をＶとすると、伸長
分Δｄは、Δｄ∝Ｖ・dpとなり、必要な伸長分Δｄを得
るためには寸法dpが相当程度大きくなければならず、Ｚ
軸方向の並進変位を行なうには高さ方向であるＺ軸方向
の寸法dpを大きくする必要があるからである。そして、
このように高さ方向の寸法が大きいと、微動機構を種々
の製造装置や加工装置、電子顕微鏡等に組込む場合、障
害となることがしばしば生じ、又、これを組込む相手方
の構造に大きな変更を加える必要が生じる等の問題があ
つた。When a 1-axis to 6-axis fine movement mechanism is configured using the above-described conventional fine movement mechanism, the fine movement mechanism that obtains translational displacement in the X-axis direction, Y-axis direction, and rotational displacement about the Z-axis has a dimension in the height direction. Can be made smaller. On the contrary, the fine movement mechanism which obtains the translational displacement in the Z-axis direction, the rotational displacement around the X-axis, and the rotational displacement around the Y-axis has a large dimension in the height direction as shown in FIGS. This is due to the characteristics of the piezoelectric actuator. That is, assuming that the dimension of the piezoelectric actuator in the extension direction is dp, the extension is Δd, and the applied voltage is V, the extension Δd becomes Δd∝V · dp, and the dimension dp is equivalent to obtain the required extension Δd. Must be large, Z
This is because it is necessary to increase the dimension dp in the Z-axis direction, which is the height direction, in order to perform the translational displacement in the axial direction. And
Such a large dimension in the height direction often causes obstacles when the fine movement mechanism is incorporated into various manufacturing equipment, processing equipment, electron microscopes, etc., and also requires major changes to the structure of the other party to which it is incorporated. There was a problem such as the need to add.
本発明の目的は、上記従来技術の課題を解決し、高さ方
向の寸法を極力小さくすることができる微動機構を提供
するにある。An object of the present invention is to solve the above-mentioned problems of the prior art and to provide a fine movement mechanism capable of minimizing the size in the height direction.
上記の目的を達成するため、本発明は。中央部剛体と、
その外側に位置する周辺部剛体と、前記中央部剛体と前
記周辺部剛体とを結合する弾性部材と、前記中央部剛体
と前記周辺部剛体との間に装架されたアクチユエータと
を備えた微動機構において、前記弾性部材の結合方向と
前記アクチユエータの作動方向との間に僅かな角度をも
たせたことを特徴とする。In order to achieve the above-mentioned object, the present invention is. A rigid body in the center,
Fine movement provided with a peripheral rigid body located outside thereof, an elastic member connecting the central rigid body and the peripheral rigid body, and an actuator mounted between the central rigid body and the peripheral rigid body. In the mechanism, a slight angle is provided between the connecting direction of the elastic member and the operating direction of the actuator.
アクチユエータを駆動すると、アクチユエータの作動方
向と弾性部材の結合方向との間に僅かな角度があるた
め、アクチユエータの伸びにより、中央部剛体は弾性部
材を変形させてＺ軸方向に変位する。When the actuator is driven, since there is a slight angle between the operating direction of the actuator and the connecting direction of the elastic member, the central rigid body deforms the elastic member and displaces in the Z-axis direction due to the extension of the actuator.
以下、本発明を図示の実施例に基づいて説明する。 Hereinafter, the present invention will be described based on the illustrated embodiments.
第１図は本発明の第１の実施例に係る微動機構の側面図
である。図で、41a,41bは固定側剛体、42は移動側剛
体、43a,43bは剛体41a,41bと剛体42との間に装架された
圧電アクチユエータ、44a,44bは剛体41a,41bと剛体42と
の間を結合する平板、45は各剛体41a,41b,42に設けられ
て圧電アクチユエータを装架する球座である。この微動
機構は、剛体42の中心線Ｏ−Ｏ′に関して対称に構成さ
れている。又、圧電アクチユエータ43a,43bは、それぞ
れ平板44a,44bの結合方向に対して僅かな角度傾けて装
架されている。FIG. 1 is a side view of the fine movement mechanism according to the first embodiment of the present invention. In the figure, 41a and 41b are fixed side rigid bodies, 42 is a moving side rigid body, 43a and 43b are piezoelectric actuators mounted between the rigid bodies 41a and 41b and the rigid body 42, and 44a and 44b are rigid bodies 41a and 41b and the rigid body 42. Reference numeral 45 denotes a flat plate for connecting the piezoelectric element to each of the rigid bodies 41a, 41b and 42, and a ball seat for mounting the piezoelectric actuator. This fine movement mechanism is constructed symmetrically with respect to the center line OO ′ of the rigid body 42. Further, the piezoelectric actuators 43a and 43b are mounted at a slight angle with respect to the connecting direction of the flat plates 44a and 44b.
次に、本実施例の動作を第２図に示す動作の線図を参照
しながら説明する。第２図で剛体42と平板44aとの結合
点をＢ、剛体41aと平板44aとの結合点をＣ、点C,Bの長
さ（平板44aの長さ）をdBとする。又、理解を容易にす
るため圧電アクチユエータ43aの一端が点Ｂに結合され
ており、圧電アクチユエータ43aの長さをdP、点Ｃと圧
電アクチユエータ43aの他端との距離をｄ、平板44aと圧
電アクチユエータ43aの流さ方向との角度をθＯとす
る。Next, the operation of this embodiment will be described with reference to the operation diagram shown in FIG. B the point of attachment to the rigid body 42 and the flat plate 44a in Figure 2, the point of attachment to the rigid body 41a and the flat plate 44a C, point C, the length of B (the length of the flat plate 44a) and d B. In order to facilitate understanding, one end of the piezoelectric actuator 43a is coupled to the point B, the length of the piezoelectric actuator 43a is d P , the distance between the point C and the other end of the piezoelectric actuator 43a is d, and the flat plate 44a is The angle with the flow direction of the piezoelectric actuator 43a is θ O.
圧電アクチユエータ43a,43bに電圧を印加すると、圧電
アクチユエータ43a,43bは伸長し、球座45を介して剛体4
2に力を作用させる。ここで、この力の方向は平板44a,4
4bおよびＺ軸方向に対して角度を有するので、Ｚ軸方向
の力成分が生じ、この力成分により平板44a,44bは第１
図に破線で示されるように変形せしめられる。この場
合、微動機構は対称に構成され、かつ、剛体41a,41b,42
には変形を生じないので、剛体42はＺ軸方向に並進変位
する。この並進変位量がuzで示されている。When a voltage is applied to the piezoelectric actuators 43a and 43b, the piezoelectric actuators 43a and 43b extend and the rigid body 4 is passed through the ball seat 45.
Apply force to 2. Here, the direction of this force is flat plates 44a, 4
Since it has an angle with respect to 4b and the Z-axis direction, a force component in the Z-axis direction is generated, which causes the flat plates 44a and 44b to move to the first position.
It is deformed as shown by the broken line in the figure. In this case, the fine movement mechanism is configured symmetrically and the rigid bodies 41a, 41b, 42
Since no deformation occurs in the rigid body 42, the rigid body 42 is translationally displaced in the Z-axis direction. This translational displacement amount is indicated by uz.
次に、第２図に基づき変位量uzを算出する。圧電アクチ
ユエータ43aの長さdpは圧電印加によりΔdpだけ伸長
し、点Ｂは点Ｂ′に移行する。このとき、各寸法の間に
は次式の関係が成立する。Next, the displacement amount uz is calculated based on FIG. The length dp of the piezoelectric actuator 43a is expanded by Δdp by the piezoelectric application, and the point B moves to the point B '. At this time, the relationship of the following formula is established between the respective dimensions.
（dp＋ΔdP）２＝（ｄ＋uz）２＋dB 2 ……（１） 値Δdp,uzは他の値に比較して極端に小さく、その２乗
項を無視すると（１）式は次のように表される。(Dp + Δd P ) 2 = (d + uz) 2 + d B 2 (1) The value Δdp, uz is extremely small compared to other values, and if the square term is ignored, equation (1) becomes expressed.
dP 2＋2dp・Δdp＝d2＋2d・uz＋dB 2 ……（２） （２）式に、d2＋dB 2＝dp2,d＝dpsinθＯを代入すると dp2＋2dp・Δdp＝dp2＋２（dp・sinθＯ）・uz ……
（３） （３）式から となる。一例を挙げると、圧電素子の長さdpを15mm、そ
の伸長量Δdpを10μｍ、平板長さdBを14.9mmとすると、
角度θＯは約５゜となり、この場合の並進変位uzは約10
0μｍとなる。d P 2 ＋ 2dp ・ Δdp ＝ d 2 ＋ 2d ・ uz ＋ d B 2 …… (2) Substituting d 2 ＋ d B 2 ＝ dp 2 , d ＝ dpsinθ O into equation (2), dp 2 ＋ 2dp ＝ dp ＝ dp 2 ＋2 (Dp ・ sin θ O ) ・ uz ……
(3) From equation (3) Becomes As an example, 15 mm length dp of the piezoelectric element, 10 [mu] m and the amount of extension Derutadp, the flat length d B and 14.9 mm,
The angle θ O is about 5 °, and the translational displacement uz in this case is about 10
It becomes 0 μm.
このように、本実施例では、微動機構を移動側剛体の中
心線に関して対称構造とし、圧電アクチユエータを平板
に対して僅かな角度傾けて装架したので、従来の微動機
構に比較してその高さ方向の寸法daを遥かに小さくする
ことができる。又、固定側剛体と移動側剛体を平板で連
結したので、圧電素子の破損のおそれなく移動側剛体の
変位を正確に案内することができる。As described above, in this embodiment, the fine movement mechanism has a symmetrical structure with respect to the center line of the moving side rigid body, and the piezoelectric actuator is mounted at a slight angle with respect to the flat plate. The dimension da in the depth direction can be made much smaller. Further, since the fixed side rigid body and the movable side rigid body are connected by the flat plate, the displacement of the movable side rigid body can be accurately guided without fear of damage to the piezoelectric element.
第３図は本発明の第２の実施例に係る微動機構の側面図
である。図で、第１図に示す部分と同一部分には同一符
号を付して説明を省略する。44a1,44a2,44b1,44b2は第
１図に示す平板44a,44bと同じく荷重が作用すると変形
する平板である。平板44a1,44a2は互いに平行であり、
かつ、平板44b1,44b2も互いに平行である。平板44a1,44
a2および平板44b1,44b2は第９図に示す平行な平板14,15
に相当する。なお、圧電アクチユエータ43a,43bは各平
板44a1〜44b2に対して第１図に示す実施例と同じく所定
の角度をもつて装架されている。FIG. 3 is a side view of the fine movement mechanism according to the second embodiment of the present invention. In the figure, the same parts as those shown in FIG. 44a 1 , 44a 2 , 44b 1 and 44b 2 are flat plates that deform when a load is applied, like the flat plates 44a and 44b shown in FIG. The flat plates 44a 1 and 44a 2 are parallel to each other,
Moreover, the flat plates 44b 1 and 44b 2 are also parallel to each other. Flat plate 44a 1 , 44
a 2 and flat plates 44b 1 and 44b 2 are parallel flat plates 14 and 15 shown in FIG.
Equivalent to. The piezoelectric actuator 43a, 43b is also mounted by a predetermined angle with the embodiment shown in Figure 1 for each flat 44a 1 ~44b 2.
圧電アクチユエータ43a,43bに電圧を印加するとそれら
が伸長し、剛体42に対してＺ軸方向の力成分が作用し、
平板44a1,44a2および平板44b1,44b2が破線に示すように
変形し、この結果、剛体42はＺ軸方向に並進変位する。
本実施例も第１の実施例と同じ効果を奏し、さらに、平
板を１枚でなく平行平板で構成したので、Ｚ軸方向以外
の方向の剛性が大となり、Ｚ軸方向の並進変位をそれ以
外の方向の変位の干渉なく実施することができる。When a voltage is applied to the piezoelectric actuators 43a and 43b, they expand and a force component in the Z-axis direction acts on the rigid body 42,
The flat plates 44a 1 and 44a 2 and the flat plates 44b 1 and 44b 2 are deformed as shown by the broken lines, and as a result, the rigid body 42 is translationally displaced in the Z-axis direction.
This embodiment has the same effect as that of the first embodiment, and since the flat plate is not a single plate but a parallel flat plate, the rigidity in the directions other than the Z-axis direction becomes large, and the translational displacement in the Z-axis direction is reduced. It can be implemented without interference of displacement in directions other than.
第４図は本発明の第３の実施例に係る微動機構の側面図
である。図で、第１図に示す部分と同一部分には同一符
号を付して説明を省略する。46は圧電アクチユエータ4
a,43bを装架する弾性ヒンジである。本実施例が第１の
実施例と異なるのは、第１の実施例においては圧電アク
チユエータ43a,43bが球座45を介して装架されているの
に対して、本実施例では弾性ヒンジ46を介して装架され
る点のみであり、他の構成は同じである。なお、圧電ア
クチユエータ43a,43bは平板44a,44bに対して第１の実施
例と同じく所定の角度をもつて装架されている。FIG. 4 is a side view of the fine movement mechanism according to the third embodiment of the present invention. In the figure, the same parts as those shown in FIG. 46 is a piezoelectric actuator 4
An elastic hinge that mounts a and 43b. The present embodiment is different from the first embodiment in that in the first embodiment, the piezoelectric actuators 43a and 43b are mounted via a ball seat 45, whereas in the present embodiment, an elastic hinge 46 is used. The other configurations are the same. The piezoelectric actuators 43a and 43b are mounted on the flat plates 44a and 44b at a predetermined angle as in the first embodiment.
本実施例の動作は第１の実施例の動作と同じである。
又、その効果は、第１の実施例の効果に加え、圧電アク
チユエータの装架に弾性ヒンジを用いたので、圧電アク
チユエータの接合面の力を弾性ヒンジを介して微動機構
に均一に伝達することができるという効果も有する。The operation of this embodiment is the same as the operation of the first embodiment.
In addition to the effect of the first embodiment, the effect is that the elastic hinge is used for mounting the piezoelectric actuator, so that the force of the joint surface of the piezoelectric actuator can be evenly transmitted to the fine movement mechanism via the elastic hinge. It also has the effect that
なお、本実施例においても、平板を平行平板で構成する
ことができるのは明らかである。It should be noted that, also in this embodiment, it is clear that the flat plate can be formed by a parallel flat plate.
第５図は本発明の第４の実施例に係る微動機構の側面図
である。図で、第１図に示す部分と同一部分には同一符
号を付して説明を省略する。41aSは剛体41aの圧電アク
チユエータ43aの装架側の面を示し、この面41aSは垂直
面に対して所定角度θＯだけ傾けられている。42aS,42b
Sは剛体42における圧電アクチユエータ43a,43bの装架側
の面、41bSは剛体41bにおける圧電アクチユエータ43bの
装架側面を示し、これらの面42aS,42bS,41bSはいずれも
面41aSと同様、垂直面に対して所定角度θＯだけ傾けら
れている。圧電アクチユエータ43a,43bは図示のように
それぞれ面41aS,42aS間および面42bS,41bS間に直接装架
されている。したがつて、圧電アクチユエータ43a,43b
は必然的に平板44a,44bに対して所定の角度をもつて装
架されることになる。FIG. 5 is a side view of the fine movement mechanism according to the fourth embodiment of the present invention. In the figure, the same parts as those shown in FIG. 41aS indicates a surface of the rigid body 41a on the mounting side of the piezoelectric actuator 43a, and this surface 41aS is inclined by a predetermined angle θ O with respect to the vertical surface. 42aS, 42b
S is a surface of the rigid body 42 on which the piezoelectric actuators 43a and 43b are mounted, and 41bS is a side surface of the rigid body 41b on which the piezoelectric actuator 43b is mounted.These surfaces 42aS, 42bS, and 41bS are vertical surfaces similar to the surface 41aS. Is inclined by a predetermined angle θ O. The piezoelectric actuators 43a and 43b are directly mounted between the surfaces 41aS and 42aS and between the surfaces 42bS and 41bS as shown in the figure. Therefore, the piezoelectric actuators 43a and 43b
Will inevitably be mounted at a predetermined angle with respect to the flat plates 44a and 44b.
本実施例の動作は第１の実施例の動作と同じである。
又、その効果は、第１の実施例の効果に加え、圧電アク
チユエータを装架する面を予め傾斜させて形成したの
で、弾性ヒンジや球座を用いる場合に比べて構造が簡素
となり、かつ、機構全体の剛性を高くすることができる
という効果も有する。The operation of this embodiment is the same as the operation of the first embodiment.
Further, in addition to the effect of the first embodiment, the effect is that the surface on which the piezoelectric actuator is mounted is formed by inclining in advance, so that the structure is simple as compared with the case of using the elastic hinge or the ball seat, and There is also an effect that the rigidity of the entire mechanism can be increased.
なお、本実施例においても、平板を平行平板で構成する
ことができる。Note that, also in this embodiment, the flat plate may be a parallel flat plate.
第６図は本発明の第５の実施例に係る微動機構の側面図
である。図で、第１図に示す部分と同一部分には同一符
号付して説明を省略する。44a′,44b′は、第１の実施
例の平板44a,44bに相当する平板であるが、これらの平
板44a′,44b′の面は紙面に垂直な面（Ｘ−Ｙ平面）に
対して所定の角度θＯだけ傾斜して形成されている。
又、本実施例の圧電アクチユエータ43a,43bは、その伸
長方向がほぼＸ軸方向と一致する（完全には一致しな
い）ように装架されている。圧電アクチユエータ43a,43
bに電圧を印加すると剛体42にはＺ軸方向の僅かな力成
分が作用し、これにより平板44a′,44b′は容易に変形
し、剛体42はＺ軸方向に並進変位する。本実施例も第１
の実施例と同じ効果を奏する。FIG. 6 is a side view of the fine movement mechanism according to the fifth embodiment of the present invention. In the figure, the same parts as those shown in FIG. Reference numerals 44a ', 44b' are flat plates corresponding to the flat plates 44a, 44b of the first embodiment. The planes of these flat plates 44a ', 44b' are different from the plane perpendicular to the plane of the paper (XY plane). It is formed to be inclined by a predetermined angle θ O.
Further, the piezoelectric actuators 43a and 43b of the present embodiment are mounted so that their extension directions substantially coincide with the X axis direction (not completely coincide with each other). Piezo actuator 43a, 43
When a voltage is applied to b, a slight force component in the Z-axis direction acts on the rigid body 42, whereby the flat plates 44a ', 44b' are easily deformed and the rigid body 42 is translationally displaced in the Z-axis direction. This embodiment is also the first
The same effect as the embodiment of
第７図（ａ）は本発明の第６の実施例に係る３軸微動機
構の平面図、第７図（ｂ）は第７図（ａ）に示す線VII
b−VII Bに沿う断面図である。各図で、51はリング状の
固定側剛体、52は剛体51の内側に配置された円板状の移
動側剛体である。剛体51および剛体52の中心軸が符号Ｏ
で示されている。53a,53b,53cは剛体51,52間に球座を介
して装架された圧電アクチユエータであり、互いに120
゜の間隔で配置されている。54a,54b,54cは剛体51,52を
結合する平板であり、圧電アクチユエータ53a,53b,53c
とほぼ同一位置に互いに120゜の間隔で設けられてい
る。圧電アクチユエータ53a〜53cは平板54a〜54cに対し
て所定の角度で装架されている。FIG. 7 (a) is a plan view of a triaxial fine movement mechanism according to a sixth embodiment of the present invention, and FIG. 7 (b) is a line VII shown in FIG. 7 (a).
FIG. 7 is a sectional view taken along line b-VII B. In each drawing, 51 is a ring-shaped rigid body on the fixed side, and 52 is a rigid body on the movable side, which is a disc-shaped member, arranged inside the rigid body 51. The central axes of the rigid bodies 51 and 52 are denoted by O.
Indicated by. Reference numerals 53a, 53b and 53c are piezoelectric actuators mounted between the rigid bodies 51 and 52 via a spherical seat, and are 120
They are arranged at intervals of °. 54a, 54b, 54c are flat plates that connect the rigid bodies 51, 52, and are piezoelectric actuators 53a, 53b, 53c.
Are provided at approximately the same positions as and at intervals of 120 °. The piezoelectric actuators 53a to 53c are mounted on the flat plates 54a to 54c at a predetermined angle.
次に、本実施例の動作を説明する。圧電アクチユエータ
53a,53b,53cに電圧を印加し、これらを等しい量だけ伸
長させると、剛体52はＺ軸方向に並進変位する。又、電
圧アクチユエータ53a,53cに電圧印加して両者を等しい
量だけ伸長すると、剛体52は、中心軸Ｏと直交するＹ軸
まわりに回転変位する、さらに、圧電アクチユエータ53
a,53cに電圧を印加し、それらの伸長量を適宜調節する
ことにより、剛体52は中心軸Ｏと直交するＸ軸まわりに
回転変位する。Next, the operation of this embodiment will be described. Piezo actuator
When a voltage is applied to 53a, 53b, 53c and they are extended by an equal amount, the rigid body 52 is translationally displaced in the Z-axis direction. Further, when a voltage is applied to the voltage actuators 53a and 53c and both are extended by an equal amount, the rigid body 52 is rotationally displaced around the Y axis orthogonal to the central axis O. Furthermore, the piezoelectric actuator 53
The rigid body 52 is rotationally displaced about the X axis orthogonal to the central axis O by applying a voltage to the a and 53c and adjusting the expansion amounts thereof appropriately.
なお、平板と圧電アクチユエータの位置は必ずしも等し
い位置でなくてもよく、例えば、各圧電アクチユエータ
の位置を軸Ｏに対して各平板と対称位置とすることもで
きる。The positions of the flat plate and the piezoelectric actuator do not necessarily have to be the same position. For example, the positions of the respective piezoelectric actuators can be symmetrical with respect to the flat plate with respect to the axis O.
このように、本実施例では、リング状の剛体およびその
リング内に配置された剛体間を等間隔を置いて平板で結
合し、かつ、両剛体間に圧電アクチユエータを各平板に
対して所定の角度で装架したので、高さ方向の寸法の極
めて小さい３軸（Ｚ軸の並進変位およびX,Y軸まわりの
回転変位）の微動機構を得ることができる。又、両剛性
体間を平板で連結したので、圧電素子の破損のおそれな
く移動側剛体の変位を正確に案内することができる。As described above, in the present embodiment, the ring-shaped rigid bodies and the rigid bodies arranged in the ring are connected by the flat plate at equal intervals, and the piezoelectric actuators are fixed between the rigid bodies with respect to each flat plate. Since it is mounted at an angle, it is possible to obtain a fine movement mechanism of three axes (translational displacement of the Z axis and rotational displacement around the X and Y axes) having extremely small dimensions in the height direction. Further, since the two rigid bodies are connected by the flat plate, the displacement of the moving side rigid body can be accurately guided without fear of damage to the piezoelectric element.
なお、上記各実施例において、平板の所定個所にひずみ
ゲージを貼着し、ひずみゲージの出力に基づいてフイー
ドバツク制御を行なえば、より一層精度の高い変位を得
ることができる。In each of the above embodiments, if a strain gauge is attached to a predetermined portion of the flat plate and feed back control is performed based on the output of the strain gauge, it is possible to obtain a more accurate displacement.
以上述べたように、本発明では、中央部剛体と周辺部剛
体とを弾性部材で結合し、アクチユエータの作動方向と
弾性部材の結合方向との間に僅かな角度をもたせるよう
にしたので、微動機構の高さ方向の寸法を極めて小さく
することができる。又、中央部剛体と周辺部剛体とを弾
性部材で連結したので、アクチュエータの破損のおそれ
なく中央部剛体の変位を正確に案内することができる。As described above, in the present invention, the central rigid body and the peripheral rigid body are coupled by the elastic member so that a slight angle is formed between the actuating direction of the actuator and the coupling direction of the elastic member. The height dimension of the mechanism can be made extremely small. Further, since the central rigid body and the peripheral rigid body are connected by the elastic member, the displacement of the central rigid body can be accurately guided without fear of damage to the actuator.
第１図は本発明の第１の実施例に係る微動機構の側面
図、第２図は第１図に示す微動機構の動作を示す線図、
第３図，第４図，第５図および第６図はそれぞれ本発明
の第2,3,4,5の実施例に係る微動機構の側面図、第７図
（ａ），（ｂ）は本発明の第６の実施例に係る３軸の微
動機構の平面図および断面図、第８図，第９図および第
10図は従来の微動機構の側面図、第11図は従来の３軸の
微動機構の平面図である。 41a,41b,42,51,52……剛体、43a,43b,53a,53b,53c……
圧電アクチユエータ、44a,44b,44a1,44a2,44b1,44b2,44
a′,44b′,54a,54b,54c……平板。1 is a side view of the fine movement mechanism according to the first embodiment of the present invention, FIG. 2 is a diagram showing the operation of the fine movement mechanism shown in FIG. 1,
FIGS. 3, 4, 5, and 6 are side views of the fine movement mechanism according to the second, third, fourth, and fifth embodiments of the present invention, and FIGS. 7 (a) and 7 (b) are A plan view and a sectional view of a triaxial fine movement mechanism according to a sixth embodiment of the present invention, FIG. 8, FIG. 9 and FIG.
FIG. 10 is a side view of a conventional fine movement mechanism, and FIG. 11 is a plan view of a conventional three-axis fine movement mechanism. 41a, 41b, 42, 51, 52 …… rigid body, 43a, 43b, 53a, 53b, 53c ……
Piezoelectric actuator, 44a, 44b, 44a 1 , 44a 2 , 44b 1 , 44b 2 , 44
a ', 44b', 54a, 54b, 54c ... flat plate.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 星野 ▲吉▼弘 茨城県土浦市神立町650番地 日立建機株 式会社土浦工場内 (56)参考文献 特開 昭61−209846（ＪＰ，Ａ) 特開 平１−238759（ＪＰ，Ａ) 特開 昭63−70437（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hoshino ▲ Yoshihiro Hiroshi, 650 Jinrachicho, Tsuchiura City, Ibaraki Prefecture Tsuchiura Plant, Hitachi Construction Machinery Co., Ltd. (56) References JP-A-61-209846 (JP, A) JP-A-1-238759 (JP, A) JP-A-63-70437 (JP, A)
Claims (7)
剛体と、前記中央部剛体と前記周辺部剛体とを結合する
弾性部材と、前記中央部剛体と前記周辺部剛体との間に
装架されたアクチユエータとを備えた微動機構におい
て、前記弾性部材の結合方向と前記アクチュエータの作
動方向との間に僅かな角度をもたせたことを特徴とする
微動機構。1. A central rigid body, a peripheral rigid body located outside the central rigid body, an elastic member connecting the central rigid body and the peripheral rigid body, and between the central rigid body and the peripheral rigid body. A fine movement mechanism including a mounted actuator, wherein a slight angle is provided between a coupling direction of the elastic member and an operation direction of the actuator.
タの装架は、球座による結合であることを特徴とする微
動機構。2. The fine movement mechanism according to claim 1, wherein the mounting of the actuator is a connection by a ball seat.
タの装架は、弾性ヒンジによる結合であることを特徴と
する微動機構。3. The fine movement mechanism according to claim 1, wherein the mounting of the actuator is a connection by an elastic hinge.
タの装架は、前記中央部剛体および前記周辺部剛体の傾
斜面に直接固着する結合であることを特徴とする微動機
構。4. The fine movement mechanism according to claim 1, wherein the mounting of the actuator is a connection that is directly fixed to the inclined surfaces of the central rigid body and the peripheral rigid body.
互いに平行な平板で構成されていることを特徴とする微
動機構。5. The elastic member according to claim 1,
A fine movement mechanism characterized by being composed of flat plates parallel to each other.
は、前記中央部剛体に対して対称位置に２つ配置されて
いることを特徴とする微動機構。6. The fine movement mechanism according to claim 1, wherein two of the peripheral rigid bodies are arranged symmetrically with respect to the central rigid body.
は、前記中央部剛体を囲むリング状に構成されているこ
とを特徴とする微動機構。7. The fine movement mechanism according to claim 1, wherein the peripheral rigid body is formed in a ring shape surrounding the central rigid body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63203275A JPH0716840B2 (en) | 1988-08-17 | 1988-08-17 | Fine movement mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63203275A JPH0716840B2 (en) | 1988-08-17 | 1988-08-17 | Fine movement mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0253544A JPH0253544A (en) | 1990-02-22 |
| JPH0716840B2 true JPH0716840B2 (en) | 1995-03-01 |
Family
ID=16471352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63203275A Expired - Lifetime JPH0716840B2 (en) | 1988-08-17 | 1988-08-17 | Fine movement mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0716840B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2712556T3 (en) * | 2010-10-21 | 2019-05-13 | Thorlabs Inc | Parallelism conservation mechanism for nanoposicionadores |
| JP7313478B2 (en) | 2019-05-05 | 2023-07-24 | 華為技術有限公司 | Compact camera module, terminal device, imaging method, and imaging apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01238759A (en) * | 1988-03-16 | 1989-09-22 | Nec Corp | Precisely fine movement base with six degrees of freedom |
-
1988
- 1988-08-17 JP JP63203275A patent/JPH0716840B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0253544A (en) | 1990-02-22 |
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