JPH0711444A - Carbon film-coated member, its production and tool using the member - Google Patents
Carbon film-coated member, its production and tool using the memberInfo
- Publication number
- JPH0711444A JPH0711444A JP15742293A JP15742293A JPH0711444A JP H0711444 A JPH0711444 A JP H0711444A JP 15742293 A JP15742293 A JP 15742293A JP 15742293 A JP15742293 A JP 15742293A JP H0711444 A JPH0711444 A JP H0711444A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- diamond
- film
- tool
- hard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、超硬合金、サーメット
またはセラミックス等を母材とし、該母材表面にダイヤ
モンドや非晶質ダイヤモンド等の炭素膜を被覆した炭素
膜被覆部材、およびその様な炭素膜被覆部材を製造する
ための方法、並びに炭素膜被覆部材を応用した工具等に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carbon film-coated member having a base material made of cemented carbide, cermet, ceramics or the like, the surface of which is coated with a carbon film such as diamond or amorphous diamond, and the like. The present invention relates to a method for producing a carbon film-coated member, a tool to which the carbon film-coated member is applied, and the like.
【０００２】[0002]
【従来の技術】近年、切削加工の分野では、被削材の難
削化傾向に加えて、加工の高速度化や高精密化の傾向が
急速に進んでいる。この様な近年の傾向に対応する手段
の１つとして、切削工具表面に硬質膜を被覆することが
一般に行なれている。例えば、特公昭５９−４３２４６
号公報には、周期律表第ＩＶａ，Ｖａ，ＶＩａ族の金属
元素の炭化物、窒化物或は炭窒化物等の単層膜や複合膜
を、気相合成法によって工具表面に形成することによ
り、耐摩耗性を改善する方法が開示されている。しかし
ながら、この様な化合物膜被覆工具では、ある程度の耐
摩耗性向上効果が認められるけれども、近年の傾向に対
処しきれず、その適用範囲は極く限られていた。2. Description of the Related Art In recent years, in the field of cutting work, in addition to the tendency toward difficult-to-cut work materials, there is a rapid trend toward higher processing speed and higher precision. As one of the measures to cope with such recent trends, it has been generally practiced to coat the surface of a cutting tool with a hard film. For example, Japanese Patent Publication No. 59-43246
In the publication, a single layer film or a composite film of a carbide, nitride or carbonitride of a metal element of group IVa, Va or VIa of the periodic table is formed on the tool surface by a vapor phase synthesis method. , A method of improving wear resistance is disclosed. However, although such a compound film-coated tool has some effect of improving the wear resistance, it has not been able to cope with the recent trends and its application range has been extremely limited.
【０００３】一方、ここ数年来、ダイヤモンドの気相合
成の研究、および気相合成ダイヤモンドの切削工具や耐
摩摺動工具への応用開発も活発化している。ダイヤモン
ドは、上述した様な化合物系硬質被覆工具に比べて極め
て高い硬度を有し、また熱伝導率も高く、切削時の耐摩
耗性と放熱性に優れていることから、従来の硬質膜被覆
切削工具では対応しきれない様な難削材加工、高速加工
および精密加工が可能になるばかりでなく、通常の非鉄
系切削加工に用いた場合であっても、著しい長寿命化が
達成できるので、新たな被覆物質として注目されてい
る。On the other hand, in recent years, research on vapor phase synthesis of diamond and application development of vapor phase synthetic diamond to cutting tools and abrasion resistant sliding tools have been activated. Diamond has extremely high hardness as compared with the compound-based hard coated tools as described above, has high thermal conductivity, and is excellent in wear resistance and heat dissipation during cutting. Not only is it possible to perform difficult-to-cut materials, high-speed machining, and precision machining that cutting tools cannot handle, but even when used for ordinary non-ferrous cutting, it can achieve a significantly longer life. , Is attracting attention as a new coating material.
【０００４】しかしながら、気相合成されたダイヤモン
ド膜は、母材との密着性が低いことに加え、膜自体の靭
性が低いので、切削時に一瞬にして膜が剥離または破壊
されてしまうという欠点があった。この様な事態が生じ
る原因は、次の様に考えることができる。即ち、ダイヤ
モンド膜と母材との熱膨張率の違いに基づく膜応力の発
生、特にダイヤモンド膜の場合は、圧縮応力が大きいこ
とに原因しているものと考えられる。また母材として、
特にＮｉやＣｏ等の鉄族元素を含む超硬合金を用いた場
合には、ダイヤモンド合成時に脆弱なグラファイトが生
成されるので、母材との密着性が更に低下するものと考
えられる。However, the vapor-phase-synthesized diamond film has a low adhesion to the base material and a low toughness of the film itself, so that the film may be peeled or broken in an instant during cutting. there were. The cause of such a situation can be considered as follows. That is, it is considered that this is because the film stress is generated due to the difference in the coefficient of thermal expansion between the diamond film and the base material, and particularly in the case of the diamond film, the compressive stress is large. Also as a base material,
In particular, when a cemented carbide containing an iron group element such as Ni or Co is used, brittle graphite is generated during diamond synthesis, and it is considered that the adhesion to the base material is further reduced.
【０００５】こうしたことから、ダイヤモンド膜と母材
との密着性を向上させるための様々な技術が提案されて
いる。この様な技術としては、（１）母材とダイヤモン
ド膜との間に中間層を形成する方法（例えば、特公昭６
１−５０７２４号公報等）、（２）母材表面を硝酸や塩
酸でエッチング処理することによって改質する方法（例
えば、特公昭６３−２０９１１号公報等）、（３）ダイ
ヤモンドまたはダイヤモンド状相と、鉄族金属または無
機超硬金属加工物との混合物からなる膜によって被覆す
る方法（例えば、特開昭５９−９３８６９号公報等）、
更には（４）ダイヤモンド粒を超硬合金等の結合相によ
って予め固着させる方法（例えば、特開平５−４４０３
６号公報等）等が提案されている。For these reasons, various techniques have been proposed for improving the adhesion between the diamond film and the base material. Such techniques include (1) a method of forming an intermediate layer between a base material and a diamond film (see, for example, Japanese Patent Publication No.
1-50724, etc.), (2) a method of modifying the surface of the base material by etching with nitric acid or hydrochloric acid (for example, Japanese Patent Publication No. 63-20911, etc.), and (3) diamond or diamond-like phase A method of coating with a film made of a mixture of an iron group metal or an inorganic cemented carbide processed product (for example, JP-A-59-93869).
Furthermore, (4) a method of preliminarily fixing diamond grains with a binder phase such as cemented carbide (for example, JP-A-5-4403).
No. 6, etc.) has been proposed.
【０００６】しかしながらこれらの技術においても、夫
々下記に示す様な欠点を有しており、十分な効果が得ら
れているとは言えない。まず上記（１）および（３）の
方法では、ダイヤモンド膜が有する高熱伝導性を工具性
能として発揮させることができないばかりでなく、製造
工程も煩雑になるという欠点があり、実用的な観点から
も問題がある。また上記（２）の方法では、超硬合金母
材の結合相であるＮｉやＣｏを酸によって溶出するもの
であるので、母材表面層の強度が大幅に低下し、切削時
に膜を保持することが困難になる。更に、上記（４）の
方法では、母材表面にＮｉやＣｏ等の鉄族元素が存在し
ているので、ダイヤモンド膜合成時に、またはダイヤモ
ンド粒子固着時に、母材との界面にグラファイトが生成
され、密着性向上効果は全く得られない。However, even these techniques have the following drawbacks, respectively, and it cannot be said that sufficient effects are obtained. First, in the methods (1) and (3), not only the high thermal conductivity of the diamond film cannot be exhibited as tool performance, but also the manufacturing process becomes complicated, which is a practical viewpoint. There's a problem. Further, in the above method (2), since Ni or Co, which is the binder phase of the cemented carbide base material, is eluted with an acid, the strength of the base material surface layer is significantly reduced and the film is retained during cutting. Becomes difficult. Further, in the above method (4), since iron group elements such as Ni and Co are present on the surface of the base material, graphite is generated at the interface with the base material during the synthesis of the diamond film or when the diamond particles are fixed. However, the effect of improving adhesion cannot be obtained at all.
【０００７】[0007]
【発明が解決しようとする課題】本発明は上述した様な
技術的課題を解決するためになされたものであって、そ
の目的は、母材に対して密着性が優れた炭素膜を被覆
し、各種工具の素材として最適な機械的性質を有する炭
素膜被覆部材、およびその様な炭素膜被覆部材を応用し
た高性能な工具、並びに上記の様な炭素膜被覆部材を製
造する為の有用な方法等を提供することにある。The present invention has been made in order to solve the above-mentioned technical problems, and its purpose is to coat a carbon film having excellent adhesion to a base material. , A carbon film-coated member having optimum mechanical properties as a material for various tools, a high-performance tool to which such a carbon film-coated member is applied, and useful for producing the carbon film-coated member as described above It is to provide a method.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成し得た本
発明とは、母材の表面にダイヤモンドを主成分とする粉
体を吸着させた後、該母材表面に気相合成によって炭素
を主成分とする膜を被覆する点に要旨を有する硬質炭素
膜被覆部材の製造方法である。またこの方法によって得
られた炭素膜被覆部材は、各種工具の素材として最適な
機械的性質を有し、この炭素膜被覆部材を工具の作用部
分として構成することによって、希望する高性能な工具
が得られる。Means for Solving the Problems According to the present invention which has achieved the above object, carbon powder is adsorbed on the surface of a base material by gas phase synthesis after adsorption of a powder containing diamond as a main component. Is a method for manufacturing a hard carbon film-coated member, which is characterized in that a film containing as a main component is coated. Further, the carbon film-coated member obtained by this method has optimum mechanical properties as a material for various tools, and by constructing this carbon film-coated member as the working portion of the tool, a desired high-performance tool can be obtained. can get.
【０００９】[0009]
【作用】ダイヤモンド膜と母材との結合力は、基本的に
は両者の分子間力によるものであって、母材からダイヤ
モンド膜への連続的もしくは傾斜的な組成変化や、構造
変化はないと考えられる。従って、ダイヤモンド膜と母
材との密着性を更に高めようとする場合、ダイヤモンド
膜と母材との接触面積を増大させることが有効な手段で
あると考えられる。そこで本発明者らは、ダイヤモンド
膜と母材との接触面積を最大限に高める方法について様
々な角度から検討した。その結果、ダイヤモンド膜の初
期析出形態を核生成に始まってそれを成長させることに
よって膜を形成するという過程を経るのではなく、初期
から実質的に膜状に析出させ、母材との膜との接触面積
を増大させることによって、密着性を大幅に向上させる
ことができることを見い出した。[Operation] The bonding force between the diamond film and the base material is basically due to the intermolecular force of both, and there is no continuous or gradual composition change or structure change from the base material to the diamond film. it is conceivable that. Therefore, in order to further improve the adhesion between the diamond film and the base material, it is considered that increasing the contact area between the diamond film and the base material is an effective means. Therefore, the present inventors examined from various angles a method for maximizing the contact area between the diamond film and the base material. As a result, the initial deposition morphology of the diamond film does not go through the process of starting the nucleation and growing the film to form the film, but deposits it in a substantially film-like form from the initial stage to form a film with the base material. It was found that the adhesion can be significantly improved by increasing the contact area of.
【００１０】ところで、例えば特公昭６２−２７０３９
号公報や特開昭６１−１２１８５９号等には、ダイヤモ
ンド膜を母材表面に形成するに当たり、母材表面を予め
高硬度粉末で摩擦或は衝突の処理を施して鋭利な表面傷
を生成することによって、核発生密度を向上させる技術
が提案されているが、これらの方法によれば表面傷の部
分に選択的にダイヤモンド核が生成されるので、核同士
が成長して合体したときに母材との間に微小な空隙が残
留することを避けることができない。これに対し、前述
の如く母材表面に微細なダイヤモンド粒子を予め均一に
吸着させておいた場合には、ダイヤモンド粒は成膜初期
から実質的に膜状に析出し、母材と膜の界面に空隙を残
留させることなく成長するので、密着性は飛躍的に向上
するのである。By the way, for example, Japanese Patent Publication No. 62-27039.
In forming the diamond film on the surface of the base material, Japanese Patent Laid-Open No. 61-121859 and the like disclose sharp surface scratches by subjecting the surface of the base material to friction or collision with a high hardness powder in advance. Although techniques for improving the nucleation density have been proposed by these methods, diamond nuclei are selectively generated at the surface scratches by these methods, so when the nuclei grow and coalesce, the mother nuclei grow. It is inevitable that minute voids remain with the material. On the other hand, when fine diamond particles are preliminarily and uniformly adsorbed on the surface of the base material as described above, the diamond particles are deposited substantially in the form of a film from the initial film formation, and the interface between the base material and the film is increased. Since it grows without leaving voids, the adhesion is dramatically improved.
【００１１】本発明方法を実施するに当たり、ダイヤモ
ンド膜と母材との密着性を更に向上させるという観点か
らすれば、前記ダイヤモンド粉は凝集することなく均一
に母材表面に吸着していることが好ましく、またその粒
子の粒径が微細なほど効果的であり、特に平均粒径は
０．５μｍ以下であることが好ましい。平均粒径がこれ
より大きくなると、その粒子の周りのダイヤモンドまた
はダイヤモンド状炭素が形成され、気相合成の初期から
膜状とならず、本発明における密着性向上効果が低減す
る。In carrying out the method of the present invention, from the viewpoint of further improving the adhesion between the diamond film and the base material, the diamond powder is uniformly adsorbed on the surface of the base material without agglomeration. The finer the particle size, the more effective it is, and the average particle size is preferably 0.5 μm or less. When the average particle size is larger than this, diamond or diamond-like carbon is formed around the particles, and the film does not become a film from the initial stage of vapor phase synthesis, and the effect of improving the adhesion in the present invention is reduced.
【００１２】また本発明で用いる母材の表面は、その表
面粗度がＲｍａｘで０．１μｍ以上の凹凸を有している
ことが好ましい。これは、母材の表面を大きくすること
によって、母材と膜との接触面積を増大させるのに効果
的である。この凹凸の上限値については、密着性向上と
いう観点だけからすれば特に限定されるものではない
が、本発明を工具に応用する場合には加工精度も考慮す
る必要があり、こうした観点からすれば母材表面の凹凸
はＲｍａｘで５μｍ以下であることが好ましい。The surface of the base material used in the present invention preferably has irregularities having a surface roughness Rmax of 0.1 μm or more. This is effective in increasing the contact area between the base material and the film by increasing the surface of the base material. The upper limit of the unevenness is not particularly limited only from the viewpoint of improving the adhesiveness, but when applying the present invention to a tool, it is necessary to consider the processing accuracy as well. The roughness of the surface of the base material is preferably 5 μm or less in Rmax.
【００１３】本発明で用いる母材の材質としては、特に
限定されるものではなく、例えば超硬合金，サーメッ
ト，セラミックス等のいずれも採用してもよいが、前記
粉体との吸着性からすれば、超硬合金であることが好ま
しい。母材として超硬合金を用いる場合は、前述のごと
く、ダイヤモンド膜と母材との界面にグラファイトを生
成させないという観点からして、該超合金表面が実質的
にＷＣのみ、または鉄族金属以外の成分とＷＣのみが露
出しているのが好ましい。The material of the base material used in the present invention is not particularly limited, and for example, any of cemented carbide, cermet, ceramics, etc. may be adopted, but it may be adsorbed to the powder. For example, it is preferably a cemented carbide. When a cemented carbide is used as the base material, as described above, from the viewpoint that graphite is not generated at the interface between the diamond film and the base material, the surface of the superalloy is substantially only WC, or other than the iron group metal. It is preferable that only the component and WC are exposed.
【００１４】前記粉体を母材表面に吸着させる方法につ
いては、例えばダイヤモンドを主成分とする粉体を含む
サスペンションに母材表面を接触させる方法や、ダイヤ
モンドを主体とする粒子を圧縮ガス等で母材表面に吹き
付ける方法等が挙げられる。要するに、媒体中にダイヤ
モンドを主体とする粉体を分散させて、これを母材表面
と接触させれば良い。Regarding the method of adsorbing the powder on the surface of the base material, for example, a method of bringing the surface of the base material into contact with a suspension containing powder containing diamond as a main component, or a method of compressing particles containing diamond as a main component with a compressed gas or the like is used. Examples include a method of spraying on the surface of the base material. In short, it suffices to disperse the powder mainly containing diamond in the medium and bring it into contact with the surface of the base material.
【００１５】上記方法のうちサスペンションに母材表面
を接触させる方法では、水、アルコールやアセトン等の
有機溶剤或はこれらの混合物を溶媒としてもちいること
ができ、この溶媒中にダイヤモンドを主体とする粒子を
添加し、振動、弾性波、攪拌等を加えることによって、
目的とするサスペンションを得ることができる。尚これ
らの溶媒中に増粘剤や界面活性剤を添加することも可能
であるが、その成分や添加量によっては母材表面へのダ
イヤモンド粒の吸着を抑制する場合があるので、成分や
添加量は適切に選定する必要がある。また母材表面に該
サスペンションを接触させる時間についても特に限定さ
れるものではなく、本発明者らは１分以内の短時間の接
触によってもダイヤモンド粒子が吸着されることが確認
されており、通常３０分以内が適当である。更に、サス
ペンション処理を施した場合には、その後必要によって
は乾燥や洗浄等の工程を加える様にしても良い。In the method of bringing the surface of the base material into contact with the suspension among the above methods, water, an organic solvent such as alcohol or acetone, or a mixture thereof can be used as a solvent, and diamond is mainly contained in this solvent. By adding particles, adding vibration, elastic wave, stirring, etc.,
The desired suspension can be obtained. It is also possible to add a thickener or a surfactant to these solvents, but since the adsorption of diamond particles on the surface of the base material may be suppressed depending on the component and the amount added, the component or addition may be added. The amount should be selected appropriately. Further, the time for which the suspension is brought into contact with the surface of the base material is not particularly limited, and the present inventors have confirmed that the diamond particles are adsorbed even by a short contact time of 1 minute or less. Within 30 minutes is appropriate. Furthermore, when suspension treatment is performed, if necessary, steps such as drying and washing may be added thereafter.
【００１６】本発明において被覆される膜は、多結晶ダ
イヤモンドは勿論のこと、非晶質ダイヤモンド或はこれ
らの混合物のいずれでも良く、要するに炭素を主体とす
る膜であれば、膜質に拘らず密着性の飛躍的向上を得る
ことができる。またこのときの膜厚は、部材の形状や使
用目的によって任意に選択することができるが、一般的
には５〜２０μｍ程度が適当である。そしてこれらの炭
素膜被覆部材を切削工具の素材として用いることによっ
て、従来の切削工具よりも遥かに密着性に優れ高性能の
切削工具を得ることができる。The film coated in the present invention may be not only polycrystalline diamond, but also amorphous diamond or a mixture thereof. In short, if the film is mainly composed of carbon, it adheres regardless of film quality. A dramatic improvement in sex can be obtained. Further, the film thickness at this time can be arbitrarily selected depending on the shape of the member and the purpose of use, but generally about 5 to 20 μm is suitable. Then, by using these carbon film-coated members as a material for a cutting tool, it is possible to obtain a high-performance cutting tool that has much better adhesion than conventional cutting tools.
【００１７】尚本発明の炭素膜被覆部材が適用できる切
削工具の種類としては、特に限定されるものではなく、
チップ、エンドミル、ドリルのいずれにも適用できる。
また被覆する炭素膜の形成方法についても特定されるも
のではなく、例えば熱フィラメント法、マイクロ波プラ
ズマＣＶＤ法、高周波プラズマＣＶＤ法、イオンビーム
法等、一般的に知られているＣＶＤ法やＰＶＤ法を適用
することができる。更に膜合成の際に用いる原料ガスと
しては、メタン、エタン等の炭化水素系ガスの他、メタ
ノール、エタノール等のアルコール系のガス、或は一酸
化炭素等の酸化炭素系ガスを用いることができるが、通
常はこれら炭素含有ガスと水素との混合ガスを用いる。The type of cutting tool to which the carbon film-coated member of the present invention can be applied is not particularly limited.
It can be applied to any of inserts, end mills and drills.
Also, the method of forming the carbon film to be coated is not specified, and generally known CVD methods and PVD methods such as a hot filament method, a microwave plasma CVD method, a high frequency plasma CVD method, an ion beam method, and the like. Can be applied. Further, as the raw material gas used in the membrane synthesis, a hydrocarbon-based gas such as methane or ethane, an alcohol-based gas such as methanol or ethanol, or a carbon oxide-based gas such as carbon monoxide can be used. However, a mixed gas of these carbon-containing gas and hydrogen is usually used.
【００１８】以下本発明を実施例によって更に詳細に説
明するが、下記実施例は本発明を限定する性質の者では
なく、前・後記の趣旨に徴して設計変更することはいず
れも本発明の技術的範囲に含まれるものである。The present invention will be described in more detail with reference to the following examples. However, the following examples are not those having the property of limiting the present invention, and any design changes taking into the spirit of the preceding and the following will not be considered. It is included in the technical scope.
【００１９】[0019]
実施例１ Ｋ種超硬合金（Ｃｏ含有量：５重量％，ＷＣ粒の平均粒
径：０．８μｍ）を母材とするミニアチュアドリル（直
径：１ｍｍ）を用いて、下記表１に示す各種の処理を行
った。Example 1 Using a miniature drill (diameter: 1 mm) having a K-type cemented carbide (Co content: 5% by weight, average grain size of WC grains: 0.8 μm) as a base material, various types shown in Table 1 below are used. Was processed.
【００２０】[0020]
【表１】 [Table 1]
【００２１】処理後の母材表面をＳＥＭ観察およびＥＤ
Ｘ分析した結果、母材表面は下記表２に示す状態である
ことが確認された。SEM observation and ED of the surface of the base material after the treatment
As a result of X analysis, it was confirmed that the surface of the base material was in the state shown in Table 2 below.
【００２２】[0022]
【表２】 [Table 2]
【００２３】次に、少なくとも刃先工具作用部分に、マ
イクロ波プラズマＣＶＤ装置を用いて励起したメタン／
水素混合ガスを接触させて炭素膜を被覆した。このとき
の被覆条件は、メタン濃度：２％，ガス圧力：３０ｔｏ
ｒｒ，マイクロ波出力：３Ｋｗ，母材表面温度：８５０
℃とした。反応時間：０．５時間後の表面をＳＥＭ観察
した結果、下記表３の状態であることが確認された。Next, methane / excited by using a microwave plasma CVD apparatus is applied to at least the working portion of the cutting edge tool.
A hydrogen mixed gas was contacted to coat the carbon film. The coating conditions at this time are: methane concentration: 2%, gas pressure: 30 to
rr, microwave output: 3 Kw, base material surface temperature: 850
℃ was made. Reaction time: As a result of SEM observation of the surface after 0.5 hours, the states shown in Table 3 below were confirmed.
【００２４】[0024]
【表３】 [Table 3]
【００２５】引き続き、上記と同一の条件で８．５時間
のダイヤモンド膜の被覆を行なった後、刃測定を行った
ところ、切刃近傍では各々約１０μｍのダイヤモンド膜
が被覆されていることが確認された。以下これらの試料
Ａ〜Ｄを、夫々比較例１，本発明例１，比較例２および
本発明例２とする。これら４種類のミニアチュアドリル
を用い、プリント基板の穴明け加工試験を行なった。こ
のとき被削材は、厚み：１．５ｍｍのエポキシ樹脂製基
板を３枚重ねにした合板を用い、加工条件は、切削速
度：２００ｍ／ｍｉｎ，回転数：６０００ｒｐｍとし
た。その結果を、下記表４に示す。Subsequently, the diamond film was coated under the same conditions as above for 8.5 hours, and then the blade was measured. As a result, it was confirmed that a diamond film of about 10 μm was coated near the cutting edge. Was done. Hereinafter, these samples A to D are referred to as Comparative Example 1, Inventive Example 1, Comparative Example 2 and Inventive Example 2, respectively. Using these four types of miniature drills, a drilling test of the printed circuit board was conducted. At this time, the work material used was a plywood board in which three epoxy resin substrates having a thickness of 1.5 mm were stacked, and the processing conditions were cutting speed: 200 m / min and rotation speed: 6000 rpm. The results are shown in Table 4 below.
【００２６】[0026]
【表４】 [Table 4]
【００２７】上記結果から、次の様に考察できる。気相
合成法でダイヤモンド膜を被覆するに先立ち、ダイヤモ
ンド砥粒を母材表面に均一に吸着させることによって、
被覆膜の密着性を大幅に向上させることができ、切削工
具としての良好な性能を安定して得ることができる。ま
たこの場合、本発明例２に示される如く、超硬合金表面
を実質的にＷＣのみに改質し、且つ表面粗度を増大させ
た場合には、密着性向上の効果は更に顕著なものとな
る。From the above results, the following can be considered. Prior to coating the diamond film by the vapor phase synthesis method, by uniformly adsorbing diamond abrasive grains on the surface of the base material,
The adhesion of the coating film can be greatly improved, and good performance as a cutting tool can be stably obtained. Further, in this case, as shown in Example 2 of the present invention, when the surface of the cemented carbide is substantially modified to WC and the surface roughness is increased, the effect of improving the adhesion is more remarkable. Becomes
【００２８】これに対し比較例１に示される如く、表面
に微細な傷を形成しただけの試料では、成膜初期から膜
状とならず、発生した核が成長した際に界面に多数の空
隙を残留させるので、密着性は悪くなっている。またダ
イヤモンド砥粒が凝集した状態で表面に吸着させた状態
で被覆を行うと、ダイヤモンド粒は母材のＷＣ上に直接
成長しないので、密着性向上効果が得られないばかりで
なく、生成するダイヤモンド粒もボール状となって加工
精度も悪くなっている。On the other hand, as shown in Comparative Example 1, in the sample having only minute scratches formed on the surface, it did not become film-like at the initial stage of film formation, and many voids were formed at the interface when the generated nuclei grew. As a result, the adhesiveness deteriorates. Further, if coating is performed in a state where the diamond abrasive grains are agglomerated and adsorbed on the surface, the diamond grains do not grow directly on the WC of the base material, so that not only the effect of improving the adhesiveness is not obtained, but also the diamond produced. The particles are also ball-shaped and the processing accuracy is poor.
【００２９】[0029]
【発明の効果】本発明は以上の様に構成されており、母
材との密着性が優れた炭素膜を被覆することができ、こ
うして得られた炭素膜被覆部材は切削工具や耐摩工具と
して最適であり、その工業的価値は極めて大きい。The present invention is constructed as described above and can coat a carbon film having excellent adhesion to the base material. The carbon film-coated member thus obtained can be used as a cutting tool or an abrasion resistant tool. Optimal and its industrial value is extremely high.
Claims (10)
る粉体を吸着させた後、該母材表面に気相合成によって
炭素を主成分とする膜を被覆することを特徴とする炭素
膜被覆部材の製造方法。1. A carbon film characterized in that after a powder containing diamond as a main component is adsorbed on the surface of a base material, the surface of the base material is coated with a film containing carbon as a main component by vapor phase synthesis. A method for manufacturing a covering member.
を、粉体同士が凝集することなく均一に母材表面に吸着
させる請求項１に記載の製造方法。2. The manufacturing method according to claim 1, wherein the powder containing diamond as a main component is uniformly adsorbed on the surface of the base material without agglomeration of the powder particles.
ｍ以下である請求項１または２に記載の製造方法。3. The average particle size of the diamond is 0.5 μm.
The production method according to claim 1, wherein the production method is m or less.
表面粗度がＲｍａｘで０．１μｍ以上である請求項１〜
３のいずれかに記載の製造方法。4. The surface of the base material has irregularities, and the surface roughness Rmax is 0.1 μm or more.
3. The manufacturing method according to any one of 3 above.
である請求項４に記載の製造方法。5. The manufacturing method according to claim 4, wherein the base material is a cemented carbide containing WC as a main component.
粒のみ、または鉄族金属以外の成分とＷＣ粒のみが露出
している請求項５に記載の製造方法。6. The surface of the cemented carbide base material is substantially WC
The manufacturing method according to claim 5, wherein only the grains, or only the components other than the iron group metal and the WC grains are exposed.
る粉体を分散させて前記母材に接触させることによって
該母材表面に粉体を吸着させる請求項１〜６のいずれか
に記載の製造方法。7. The powder according to claim 1, wherein the powder containing diamond as a main component is dispersed in a medium and brought into contact with the base material to adsorb the powder on the surface of the base material. Production method.
ダイヤモンドまたはこれらの混合物である請求項１〜７
のいずれかに記載の製造方法。8. The film is made of polycrystalline diamond, amorphous diamond, or a mixture thereof.
The manufacturing method according to any one of 1.
よって製造されたものである炭素膜被覆部材。9. A carbon film-covered member manufactured by the method according to claim 1.
具作用部分として構成されたものである工具。10. A tool in which the carbon film-coated member according to claim 9 is configured as a tool acting portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15742293A JPH0711444A (en) | 1993-06-28 | 1993-06-28 | Carbon film-coated member, its production and tool using the member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15742293A JPH0711444A (en) | 1993-06-28 | 1993-06-28 | Carbon film-coated member, its production and tool using the member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0711444A true JPH0711444A (en) | 1995-01-13 |
Family
ID=15649293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15742293A Pending JPH0711444A (en) | 1993-06-28 | 1993-06-28 | Carbon film-coated member, its production and tool using the member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0711444A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100387385C (en) * | 2003-07-31 | 2008-05-14 | 联合材料公司 | Diamond film coated tool and process for producing the same |
| JP2009091234A (en) * | 2007-09-18 | 2009-04-30 | Tokyo Univ Of Science | Conductive diamond film-formed substrate, and method for production of the substrate |
-
1993
- 1993-06-28 JP JP15742293A patent/JPH0711444A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100387385C (en) * | 2003-07-31 | 2008-05-14 | 联合材料公司 | Diamond film coated tool and process for producing the same |
| JP2009091234A (en) * | 2007-09-18 | 2009-04-30 | Tokyo Univ Of Science | Conductive diamond film-formed substrate, and method for production of the substrate |
| JP2013166692A (en) * | 2007-09-18 | 2013-08-29 | Tokyo Univ Of Science | Method for producing substrate with conductive diamond film formed thereon |
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