JPH07105993B2 - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JPH07105993B2 JPH07105993B2 JP19423483A JP19423483A JPH07105993B2 JP H07105993 B2 JPH07105993 B2 JP H07105993B2 JP 19423483 A JP19423483 A JP 19423483A JP 19423483 A JP19423483 A JP 19423483A JP H07105993 B2 JPH07105993 B2 JP H07105993B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- ultrasonic probe
- composite material
- organic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 title claims description 17
- 239000000463 material Substances 0.000 claims description 23
- 239000002131 composite material Substances 0.000 claims description 17
- 239000011368 organic material Substances 0.000 claims description 10
- 230000001681 protective effect Effects 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000005416 organic matter Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は超音波診断装置に係り、特にそのセンサー部に
複合材料を用いた超音波探触子に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic diagnostic apparatus, and more particularly to an ultrasonic probe using a composite material for its sensor section.
第１図は、複合材料の構成ならびにその形成方法を示し
ている。101は複合材料であり、PZT,PbTiO3などの無機
圧電材料で形成された柱状圧電体であり、103はシリコ
ンゴム、ポリウレタン、エポキシなどの有機物である。
第１図の複合材料101の上下面の全面に（ｂ）のごとく
電極104,105を形成し、次に105から信号線106をとり出
し、（ｃ）のごとく音波吸収体（バッキング材）107上
に101を接着し、104よりアース線108を取り出すことで
超音波探触子が構成される。こうして構成された超音波
探触子は、106,108に電気信号が印加されることで、超
音波を送信し、さらに反射して来た超音波を受信するこ
とで106,108に電気信号を発生する。しかしながら、こ
のような従来の構造では、電極が一面に設けられてお
り、有機物を介して電極が対面して容量を形成し、この
容量により調波印加時の電気的損失が大きいという欠点
を有す。また、バッキング材と電極105との接着性、も
しくは電極106の上に保護材を被着したときその保護材
と電極106との接着性が悪く、機械的強度の弱い探触子
となりがちである。FIG. 1 shows a structure of a composite material and a method of forming the composite material. Reference numeral 101 denotes a composite material, which is a columnar piezoelectric body formed of an inorganic piezoelectric material such as PZT or PbTiO 3 , and 103 is an organic material such as silicon rubber, polyurethane, or epoxy.
Electrodes 104 and 105 are formed on the entire upper and lower surfaces of the composite material 101 of FIG. 1 as shown in FIG. 1B, and then a signal line 106 is taken out from 105, and as shown in FIG. 1C, on a sound wave absorber (backing material) 107. An ultrasonic probe is constructed by bonding 101 and taking out the ground wire 108 from 104. The ultrasonic probe configured in this manner transmits an ultrasonic wave when an electric signal is applied to 106 and 108, and further generates an electric signal at 106 and 108 by receiving the reflected ultrasonic wave. However, in such a conventional structure, the electrodes are provided on one surface, and the electrodes face each other through the organic substance to form a capacitance, and this capacitance has a drawback that electrical loss is large when harmonics are applied. You Further, the adhesiveness between the backing material and the electrode 105, or the adhesiveness between the protective material and the electrode 106 when the protective material is applied on the electrode 106 is poor, and the probe tends to have weak mechanical strength. .
本発明の目的は、従来の複合材料による超音波探触子の
電極形成における欠点を改良することで、性能が良く、
機械的強度の高い超音波探触子を実現することを可能に
する電極形成法を提供することにある。The object of the present invention is to improve the drawbacks in the electrode formation of the ultrasonic probe by the conventional composite material, so that the performance is good,
An object of the present invention is to provide an electrode forming method which makes it possible to realize an ultrasonic probe having high mechanical strength.
従来法の欠点は、複合材料の有機物上に広い範囲で電極
が形成され、それが電気的な損失を生む原因となってい
た。そこで、有機物上の電極をできるだけ小さくすると
いうことにより、電気的な損失を少なくした。さらにこ
ういう構成にすることで、電極の保護という効果をもた
らすことも可能となる。A drawback of the conventional method is that electrodes are formed over a wide area on the organic material of the composite material, which causes electrical loss. Therefore, the electric loss was reduced by making the electrodes on the organic material as small as possible. Further, with such a configuration, it is possible to bring about an effect of protecting the electrodes.
本発明の実施例を第２図に示す。ここで、201は無機圧
電材料より成る柱状圧電体202は有機物、203は形成され
た電極である。電極の形成においては、スクリーン印刷
あるいは蒸着などの方法を用いればよい。204は複合材
料の有機物が露出している部分である。このように有機
物上で電極は細く形成されることで、有機物中での電気
的な損失を少なくすることが可能である。また第３図は
別の実施例を示し、電柱203は一方向のみで細線部分に
て連結されている。要は有機物上の電極を極力少なくす
ることにより容量を小とし電気的損失を小さくできる。
なお、これらの実施例では、203を形成する前に、無機
圧電材料に電極があらかじめ形成されている必要はな
い。上下に電極の付いた無機圧電材料の板を、特開昭58
−21883などの方法にて加工して複合材料を作れば、柱
状圧電体のみに電極が存在する複合材料を作ることが可
能であるが、この場合には無機圧電材料の各素子間を細
線にて後から接続すれば良いので、電極形成は簡単であ
る。アース電極側は第１図、104のように全面に形成さ
れていてもよいが、第2,3図の信号電極のように形成す
ることが可能であり、信号電極と食い違いが生ずるよう
な電極を形成することも可能である。たとえば、第３図
の信号電極に対して、第４図のような電極401にするこ
とも可能である。An embodiment of the present invention is shown in FIG. Here, 201 is a columnar piezoelectric body 202 made of an inorganic piezoelectric material, an organic substance is shown, and 203 is an electrode formed. In forming the electrodes, a method such as screen printing or vapor deposition may be used. Reference numeral 204 denotes a portion of the composite material where organic matter is exposed. Since the electrodes are thinly formed on the organic material as described above, electrical loss in the organic material can be reduced. Further, FIG. 3 shows another embodiment, in which the electric poles 203 are connected to each other only in one direction by a thin line portion. In short, the capacity can be reduced and the electrical loss can be reduced by reducing the number of electrodes on the organic material as much as possible.
In these examples, it is not necessary to previously form electrodes on the inorganic piezoelectric material before forming 203. A plate of inorganic piezoelectric material with electrodes on the top and bottom is disclosed in
It is possible to make a composite material in which electrodes are present only in the columnar piezoelectric body by processing it by a method such as −21883, but in this case, a thin wire is used between each element of the inorganic piezoelectric material. The electrodes can be formed easily because they can be connected later. The ground electrode side may be formed on the entire surface as shown in FIGS. 1 and 104, but it can be formed like the signal electrode in FIGS. 2 and 3 and is an electrode that causes a discrepancy with the signal electrode. Can also be formed. For example, the signal electrode shown in FIG. 3 can be replaced with the electrode 401 shown in FIG.
複合材料では電極がはがれないように、スクリーン印
刷、蒸着などで形成された電極と、電極が形成される無
機圧電材料、有機物などの複合材料側の物質との接着性
が良いことが望しく、かつバッキング材との接着性も良
いことが望しく、かつバッキング材との接着性も良いこ
とが望しい。さらに、第５図のように探触子前面に電極
を保護する役目をはたす保護材501または対象物との音
響インピーダンスのマッチングをはかるマッチング層を
形成すると良いが、この501と電極との接着性が良いこ
とを望れる。なお502は複合材料、503はバッキング材、
504は信号線、505はアース線である。第２〜４図に示し
た形状の電極では複合圧電材料の有機物が露出している
ので、その有機物とバッキング材503あるいは保護材501
とを互いに接着性の良い材料を用いることができ、互い
に強固に被着するので機械的強度の高い超音波探触子を
容易に得ることができる。In order to prevent the electrode from peeling off in the composite material, it is desirable that the electrode formed by screen printing, vapor deposition, etc., and the inorganic piezoelectric material on which the electrode is formed, the adhesiveness to the substance on the composite material side such as the organic material, Moreover, it is desired that the adhesiveness with the backing material is also good, and that the adhesiveness with the backing material is also good. Further, as shown in FIG. 5, it is advisable to form a protective material 501 for protecting the electrode on the front surface of the probe or a matching layer for matching acoustic impedance with the target object. Can hope for good. 502 is a composite material, 503 is a backing material,
504 is a signal line and 505 is a ground line. Since the organic material of the composite piezoelectric material is exposed in the electrodes having the shapes shown in FIGS. 2 to 4, the organic material and the backing material 503 or the protective material 501 are exposed.
Since materials having good adhesiveness to each other can be used and they are firmly adhered to each other, it is possible to easily obtain an ultrasonic probe having high mechanical strength.
なお以上に示した実施例では柱状圧電体の上面及び下面
に被着した電極は全て接続されているが、特定のグルー
プごとにのみ互いに接続し、探触子中に複数の独立した
圧電素子を形成することも可能である。In the examples shown above, the electrodes attached to the upper surface and the lower surface of the columnar piezoelectric body are all connected, but they are connected to each other only in a specific group, and a plurality of independent piezoelectric elements are provided in the probe. It is also possible to form.
以上のように、本発明によれば、複合材料を用いた超音
波探触子において、電気的な損失を少なくすることがで
きる。さらに電極保護の働きをもたらすことも可能であ
るので、複合材料を用いた高性能の超音波探触子を実現
できるという効果がある。As described above, according to the present invention, it is possible to reduce electrical loss in the ultrasonic probe using the composite material. Further, since it is possible to provide a function of protecting the electrodes, there is an effect that a high-performance ultrasonic probe using a composite material can be realized.
第１図は複合材料の構成図ならびに補合材料による従来
の探触子の構造を示す斜視図第2,3,4図は本発明の実施
例の電極形状を示す斜視図、第５図は別の実施例の全体
構造を示す斜視図である。 201…無機圧電材料、202,204…有機物、203,401…電極FIG. 1 is a perspective view showing a structure of a composite material and a structure of a conventional probe using a complementary material. FIGS. 2, 3 and 4 are perspective views showing an electrode shape of an embodiment of the present invention, and FIG. It is a perspective view which shows the whole structure of another Example. 201 ... Inorganic piezoelectric material, 202, 204 ... Organic matter, 203, 401 ... Electrode
Claims (3)
圧電体と、該間隙に充填された有機物とを含む複合圧電
材料を有する超音波探触子において、該柱状圧電体の上
面及び底面にはそれぞれ電極が被着されるとともに、該
上面もしくは底面の少なくとも一方の電極は隣接する柱
状圧電体に被着された電極と細線で接続されている超音
波探触子。1. An ultrasonic probe having a composite piezoelectric material containing a large number of columnar piezoelectric bodies arranged with gaps between each other and an organic substance filled in the gaps. An ultrasonic probe in which an electrode is applied to each of the electrodes, and at least one electrode of the top surface or the bottom surface is connected to an electrode applied to an adjacent columnar piezoelectric body by a thin wire.
着する保護材を有する特許請求の範囲第１項の超音波探
触子。2. The ultrasonic probe according to claim 1, further comprising a protective material which covers the electrodes and the thin wires and adheres to the organic substance.
着するバッキング材を有する特許請求の範囲第１項の超
音波探触子。3. The ultrasonic probe according to claim 1, further comprising a backing material which covers the electrodes and the thin wires and adheres to the organic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19423483A JPH07105993B2 (en) | 1983-10-19 | 1983-10-19 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19423483A JPH07105993B2 (en) | 1983-10-19 | 1983-10-19 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6087000A JPS6087000A (en) | 1985-05-16 |
| JPH07105993B2 true JPH07105993B2 (en) | 1995-11-13 |
Family
ID=16321197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19423483A Expired - Lifetime JPH07105993B2 (en) | 1983-10-19 | 1983-10-19 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07105993B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101965171B1 (en) * | 2018-08-24 | 2019-08-13 | (주)비티비엘 | Method of manufacturing ultrasonic sensor |
-
1983
- 1983-10-19 JP JP19423483A patent/JPH07105993B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6087000A (en) | 1985-05-16 |
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