JPS6087000A - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JPS6087000A JPS6087000A JP19423483A JP19423483A JPS6087000A JP S6087000 A JPS6087000 A JP S6087000A JP 19423483 A JP19423483 A JP 19423483A JP 19423483 A JP19423483 A JP 19423483A JP S6087000 A JPS6087000 A JP S6087000A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- organic matter
- ultrasonic probe
- thin wire
- piezoelectric material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 29
- 239000002131 composite material Substances 0.000 claims abstract description 20
- 239000000126 substance Substances 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 5
- 239000005416 organic matter Substances 0.000 abstract description 8
- 238000007650 screen-printing Methods 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 238000012856 packing Methods 0.000 abstract 1
- 239000011368 organic material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229910003781 PbTiO3 Inorganic materials 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は超音波診断装置に係り、特にそのセンサー部に
複合材料を用いた超音波探触子に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an ultrasonic diagnostic apparatus, and particularly to an ultrasonic probe using a composite material in its sensor portion.
第１図は、複合材料の構成ならびにその形成方法を示し
ている。１０１は複合材料であり、ＰＺＴ。FIG. 1 shows the composition of the composite material and its method of formation. 101 is a composite material, PZT.
ＰｂＴｉＯ３などの無機圧電材料で形成された柱状圧電
体であり、１０３はシリコンゴム、ポリウレタン、エポ
キシなどの有機物である。第１図の複合材料１０１の上
下面の全面に（ｂ）のごとく電極１０４゜１０５’ｉ形
成し、次に１０５から信号線１０６をとり出し、（ｅ）
のごとく音波吸収体（バッキング材）１０７上に１０１
を接着し、１０４よりアース線１０８を取り出すことで
超音波探触子が構成される。こうして構成された超音波
探触子は、１０６゜１０８に電機信号が印加されること
で、超音波を送信し、さらに反射して来た超音波を受信
することで１０６．１０ｂに電気信号を発生する。しか
しながら、このような従来の構造では、電極が一面に設
けられており、有機物を介して電極が対面して容量を形
成し、この容量により調波印加時の電気的損失が大きい
といつ欠点を有す。また、バッキング材と電極１０５と
の接着性、もしくは電極１０’６の上は保護材を竺着し
たときその保護材と電極）０６との接着性が悪く、機械
的強度の弱い探触子となりがちである。It is a columnar piezoelectric body made of an inorganic piezoelectric material such as PbTiO3, and 103 is an organic material such as silicone rubber, polyurethane, or epoxy. Electrodes 104°105'i are formed on the entire upper and lower surfaces of the composite material 101 in FIG. 1 as shown in (b), and then the signal line 106 is taken out from 105, and
101 on top of the sound wave absorber (backing material) 107
An ultrasonic probe is constructed by gluing these together and taking out the ground wire 108 from 104. The ultrasonic probe configured in this way transmits an ultrasonic wave by applying an electrical signal to 106°108, and further sends an electric signal to 106.10b by receiving the reflected ultrasonic wave. Occur. However, in such a conventional structure, the electrodes are provided on one side, and the electrodes face each other through an organic material to form a capacitance, and this capacitance causes a large electrical loss when harmonics are applied. have In addition, the adhesiveness between the backing material and the electrode 105 or the adhesiveness between the protective material and the electrode (06) when a protective material is pasted on the electrode (10'6) is poor, resulting in a probe with weak mechanical strength. It tends to be.
本発明の目的は、従来の複合材料による超音波探触子の
電極形成における欠点を改良することで、性能が良く、
機械的強度の高い超音波探触子を実現することを可能に
する電極形成法を提供することにある。The purpose of the present invention is to improve the shortcomings in the electrode formation of conventional ultrasonic probes using composite materials, thereby achieving good performance and
An object of the present invention is to provide an electrode forming method that makes it possible to realize an ultrasonic probe with high mechanical strength.
従来法の欠点は、複合材料の有機物上に広い範囲で電極
が形成され、それが電気的な損失を生む原因となってい
た。そこで、有機物上の電極をできるだけ小さくすると
いうことにより、電気的な損失を少なくした。さらにこ
ういう構成にすることで、電極の保護という効果をもた
らすことも可能となる。The disadvantage of the conventional method is that electrodes are formed over a wide area on the organic material of the composite material, which causes electrical loss. Therefore, electrical loss was reduced by making the electrode on the organic material as small as possible. Furthermore, by adopting such a configuration, it is also possible to bring about the effect of protecting the electrode.
〔発明の実施例〕
本発明の実施例を第２図に示す。ここで、２０１は無機
圧電材料より成る柱状圧電体２０２は有機物、２０３は
形成された電極である。電極の形成においては、スクリ
ーン印刷あるいは蒸着などの方法を用いればよい。２０
４は複合材料の有機物が露出している部分である。この
ように有機物上で電極は細く形成されることで、有機物
中での電気的な損失を少なくすることが可能である。ま
た第３図は別の実施例を示し、電柱２０３は一方向のみ
で細線部分にて連結されている。要は有機物上の電極を
極力少なくすることにより容量を小とし電気的損失を小
さくできる。なお、これらの実施例では、２０３を形成
する前に、無機圧電材料に電極があらかじめ形成されて
いる必要はない。[Embodiment of the Invention] An embodiment of the present invention is shown in FIG. Here, 201 is an organic piezoelectric column 202 made of an inorganic piezoelectric material, and 203 is a formed electrode. In forming the electrodes, a method such as screen printing or vapor deposition may be used. 20
4 is a portion of the composite material where organic matter is exposed. By forming a thin electrode on the organic material in this way, it is possible to reduce electrical loss in the organic material. Further, FIG. 3 shows another embodiment, in which utility poles 203 are connected only in one direction by thin line portions. In short, by minimizing the number of electrodes on the organic substance, the capacity can be reduced and electrical loss can be reduced. Note that in these examples, it is not necessary that electrodes be formed in advance on the inorganic piezoelectric material before forming 203.
上下に電極の付いた無材圧電材料の板を、特開昭５８−
２１８８３などの方法にて加工して複合材料を作れば、
柱状圧電体のみに電極が存在する複合材料を作ることが
可能であ為が、この場合には無機圧電材料の各素子間を
細線にて後から接続すれば良いので、電極形成は簡単で
ある。アース電極側は第１図、１０４のように全面に形
成されていてもよいが、第２，３図の信号電極のように
形成することが可能であり、信号電極と食い違いが生ず
るような電極を形成することも可能である。A plate made of a plain piezoelectric material with electrodes on the top and bottom was manufactured by
If you make a composite material by processing it using methods such as 21883,
It is possible to create a composite material in which electrodes exist only on the columnar piezoelectric material, but in this case, forming the electrodes is easy because it is only necessary to connect each element of the inorganic piezoelectric material later with a thin wire. . The ground electrode side may be formed on the entire surface as shown in Fig. 1, 104, but it is also possible to form it as in the signal electrode shown in Figs. 2 and 3. It is also possible to form
たとえば、第３図の信号電極に対して、第４図のような
電極４０１にすることも可能である。For example, it is also possible to use an electrode 401 as shown in FIG. 4 in place of the signal electrode in FIG. 3.
複合材料では電極がはがれないように、スクリーン印刷
、蒸着などで形成された電極と、電極が形成される無機
圧電材料、有機物などの複合材料側の物質との接着性が
良いことが望しく、かつバッキング材との接着性も良い
ことが望しく、かつバクキング材との接着性も良いこと
が望しい。さらに、第５図のように探触子前面に電極を
保護する役目をはたす保護材５０１または対象物との音
響インピーダンスのマツチングをはかるマツチング層を
形成すると良いが、この５０１と電極との接着性が良い
ことを望れる。なお５０２は複合材料、５０３にバッキ
ング材、５０４は信号線、５０５はアース線である。第
２〜４図に示した形状の電極では複合圧電材料の有機物
が露出しているので、その有機物とバッキング材５０３
あるいは保護材５０１とを互いに接着性の良い材料を用
いることができ、互いに強固に被着するので機械的強度
の高い超音波探触子を容易に得ることがでλろ、。In order to prevent electrodes from peeling off in composite materials, it is desirable that the electrodes formed by screen printing, vapor deposition, etc. have good adhesion to the material on the composite material side, such as the inorganic piezoelectric material or organic substance on which the electrodes are formed. Also, it is desirable that the adhesive property is good with the backing material, and it is also desirable that the adhesive property is good with the backing material. Furthermore, as shown in Fig. 5, it is preferable to form a protective material 501 on the front surface of the probe that serves to protect the electrodes or a matching layer that matches the acoustic impedance with the target object. I hope it's good. Note that 502 is a composite material, 503 is a backing material, 504 is a signal line, and 505 is a ground wire. In the electrodes having the shapes shown in FIGS. 2 to 4, the organic matter of the composite piezoelectric material is exposed, so the organic matter and the backing material 503
Alternatively, a material with good adhesiveness can be used for the protective material 501, and since they are firmly adhered to each other, it is possible to easily obtain an ultrasonic probe with high mechanical strength.
なお以上に示した実施例では柱状圧電体の上面及びＦ面
に被着１．た電極は全で接続されているが、特定のグル
ー・プごとにのみ互いに接続し、探触子中に複数の独立
［７た圧電素子を形成することも可能であるう
〔発明の効果〕
以上のように、本発明によれば、複合材料を用７・た超
音波探触子において、電気的な損失を斥なくすることが
できる。さらに電極保障の働きをもたらすことも可能で
あるので、複合材料を用いた高性能の超音波探触子を実
現できるという効果がある。In the embodiment shown above, the upper surface and F surface of the columnar piezoelectric body are coated with 1. Although all of the electrodes are connected to each other, it is also possible to connect each other only in specific groups to form a plurality of independent piezoelectric elements in the probe. [Effects of the Invention] As described above, according to the present invention, electrical loss can be eliminated in an ultrasonic probe using a composite material. Furthermore, since it is possible to bring about the function of electrode security, there is an effect that a high-performance ultrasonic probe using a composite material can be realized.
第１図は複合材料の構成図ならびに補合材料による従来
の探触子の構造を示す斜視同第２，３゜４図は本発明の
実施例の電極形状を示す斜視図、第５図は別の実施例の
全体構造を示す斜視図である。
２０１・・・無機圧電材料、２０２，２０４．、、有機
物、２０３，４０１・・・電極
第１図
第２ 図
第４図
第５図Figure 1 is a perspective view showing the structure of a composite material and the structure of a conventional probe made of complementary materials. Figures 2, 3 and 4 are perspective views showing the electrode shape of an embodiment of the present invention. It is a perspective view showing the whole structure of another example. 201... Inorganic piezoelectric material, 202, 204. ,,Organic substance,203,401...Electrode Fig. 1 Fig. 2 Fig. 4 Fig. 5
Claims (1)
、該間隙に充填された有機物とを含む複合圧電材料を有
する超音波探触子において、該柱状圧電体の上面及び底
面にはそれぞれ電柱が粘着されるとともに、該上面もし
くは低面の少なくとも一方は隣接する柱状圧電体に被着
された電極と細線で接続されている超音波探触子。 ２、前記電極及び細線を覆い、前記有機物に被着する保
護材を有する特許請求の範囲第１項の超音波探触子。 ３、前記電極及び細線を覆い、前記有機物に被着するバ
ッキング材を有する特許請求の範囲第１項の超音波探触
子。[Claims] 1. In an ultrasonic probe having a composite piezoelectric material including a large number of columnar piezoelectric bodies arranged with gaps between them and an organic substance filled in the gaps, the columnar piezoelectric bodies An ultrasonic probe in which utility poles are adhered to the top and bottom surfaces, respectively, and at least one of the top and bottom surfaces is connected by a thin wire to an electrode attached to an adjacent columnar piezoelectric body. 2. The ultrasonic probe according to claim 1, further comprising a protective material that covers the electrode and the thin wire and adheres to the organic substance. 3. The ultrasonic probe according to claim 1, further comprising a backing material that covers the electrode and the thin wire and adheres to the organic substance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19423483A JPH07105993B2 (en) | 1983-10-19 | 1983-10-19 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19423483A JPH07105993B2 (en) | 1983-10-19 | 1983-10-19 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6087000A true JPS6087000A (en) | 1985-05-16 |
| JPH07105993B2 JPH07105993B2 (en) | 1995-11-13 |
Family
ID=16321197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19423483A Expired - Lifetime JPH07105993B2 (en) | 1983-10-19 | 1983-10-19 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07105993B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210193909A1 (en) * | 2018-08-24 | 2021-06-24 | Btbl Co., Ltd | Method of manufacturing ultrasonic sensors |
-
1983
- 1983-10-19 JP JP19423483A patent/JPH07105993B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210193909A1 (en) * | 2018-08-24 | 2021-06-24 | Btbl Co., Ltd | Method of manufacturing ultrasonic sensors |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07105993B2 (en) | 1995-11-13 |
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