JPH06323757A - Nitrogen gas atmosphere heating apparatus - Google Patents
Nitrogen gas atmosphere heating apparatusInfo
- Publication number
- JPH06323757A JPH06323757A JP13416993A JP13416993A JPH06323757A JP H06323757 A JPH06323757 A JP H06323757A JP 13416993 A JP13416993 A JP 13416993A JP 13416993 A JP13416993 A JP 13416993A JP H06323757 A JPH06323757 A JP H06323757A
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen gas
- heating furnace
- supply source
- oxygen concentration
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Separation Using Semi-Permeable Membranes (AREA)
- Tunnel Furnaces (AREA)
- Furnace Details (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、加熱炉内に窒素ガスを
流通させて非酸化雰囲気で物品の加熱を行う窒素ガス雰
囲気加熱装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nitrogen gas atmosphere heating apparatus for heating an article in a non-oxidizing atmosphere by circulating nitrogen gas in a heating furnace.
【０００２】[0002]
【従来の技術】例えばプリント配線板に電子部品を実装
する場合には、プリント配線板のパッド上にクリーム半
田を塗布し、その上に電子部品を搭載したものを、加熱
炉内に通し、炉内の熱でクリーム半田を溶融させてパッ
ドと部品リードを半田付けしている。このとき、加熱炉
内には窒素ガスを充満させて、プリント配線板や電子部
品の酸化を防止する必要がある。2. Description of the Related Art For example, when mounting an electronic component on a printed wiring board, cream solder is applied to the pad of the printed wiring board, and the electronic component mounted on the pad is passed through a heating furnace. The heat inside melts the cream solder and solders the pads to the component leads. At this time, it is necessary to fill the heating furnace with nitrogen gas to prevent oxidation of the printed wiring board and electronic parts.
【０００３】加熱炉内に窒素ガスを充満させるには従
来、シャッターで炉内外を遮断する方式が一般的であっ
たが、この方式はトラブルが発生しやすいため、最近、
図４に示すような非接触シール方式の加熱炉が提案され
ている。この加熱炉は、内部に面状ヒーター11、棒状ヒ
ーター13およびファン15などが設置された加熱室17と、
入口通路19と、出口通路21とを備えており、その中を電
子部品を搭載したプリント配線板23が両側縁をチェーン
コンベア25により支持された状態で走行するようになっ
ている。Conventionally, in order to fill the heating furnace with nitrogen gas, a method of shutting off the inside and outside of the furnace with a shutter has been generally used. However, since this method easily causes troubles, recently,
A non-contact seal type heating furnace as shown in FIG. 4 has been proposed. This heating furnace has a heating chamber 17 in which a sheet heater 11, a rod heater 13 and a fan 15 are installed,
An inlet passage 19 and an outlet passage 21 are provided, and a printed wiring board 23 on which electronic components are mounted runs therein, with both side edges thereof being supported by a chain conveyor 25.
【０００４】加熱室17内には電子部品を搭載したプリン
ト配線板23の酸化防止のため窒素ガスを充満させてあ
る。窒素ガスは窒素ガス噴出管27から供給される。窒素
ガスの供給量は、外部から炉内に空気が侵入するのを防
止するため、入口通路19および出口通路21から常時窒素
ガスが炉外に流出するように調節される。窒素ガスが外
部に流出する量をできるだけ少なくするため、入口通路
19および出口通路21内には、コンベア25の走行方向に所
定の間隔をおいて多数のシール板29が設置されている。
これにより入口通路19、出口通路21を通って流れ出す窒
素ガスに抵抗を与え、窒素ガスの使用量を少なくしてい
る。The heating chamber 17 is filled with nitrogen gas in order to prevent oxidation of the printed wiring board 23 on which electronic components are mounted. Nitrogen gas is supplied from the nitrogen gas ejection pipe 27. The supply amount of nitrogen gas is adjusted so that the nitrogen gas always flows out of the furnace from the inlet passage 19 and the outlet passage 21 in order to prevent air from entering the furnace from the outside. In order to minimize the amount of nitrogen gas flowing out, the inlet passage
In the 19 and the exit passage 21, a large number of seal plates 29 are installed at predetermined intervals in the traveling direction of the conveyor 25.
As a result, resistance is given to the nitrogen gas flowing out through the inlet passage 19 and the outlet passage 21, and the amount of nitrogen gas used is reduced.
【０００５】なお図４の例では、窒素ガス噴出管27を出
口通路21内に設置したが、窒素ガス噴出管27は加熱室17
内に設置する場合もある。In the example shown in FIG. 4, the nitrogen gas jet pipe 27 is installed in the outlet passage 21, but the nitrogen gas jet pipe 27 is provided in the heating chamber 17.
It may be installed inside.
【０００６】[0006]
【発明が解決しようとする課題】加熱炉へ窒素ガスを供
給するには従来、液体窒素タンク、窒素ガスＰＳＡ(Pre
ssure Swing Adsorption) 装置などが用いられていた
が、これらの供給手段は不便であるとか大型である等の
難点があるため、最近、空気から窒素ガスを分離する分
離膜を用いた膜分離型窒素ガス発生器で窒素ガスを発生
させ、それを加熱炉に供給することが検討されている。[Problems to be Solved by the Invention] To supply nitrogen gas to a heating furnace, a liquid nitrogen tank and a nitrogen gas PSA (Pre
ssure Swing Adsorption) equipment, etc. were used, but these supply means have disadvantages such as inconvenience and large size, so recently, membrane separation type nitrogen using a separation membrane that separates nitrogen gas from air is used. Generating nitrogen gas with a gas generator and supplying it to a heating furnace is under consideration.
【０００７】ところで、加熱炉内を窒素ガス雰囲気に保
つのは被加熱物品の酸化防止が目的であるから、加熱炉
内の酸素濃度をできるだけ低く抑える必要がある。しか
し膜分離型窒素ガス発生器で発生した窒素ガス中には僅
かながら酸素が残り、加熱炉内の酸素濃度を十分低く抑
えることが困難である。By the way, since the purpose of keeping the inside of the heating furnace in a nitrogen gas atmosphere is to prevent the article to be heated from being oxidized, it is necessary to keep the oxygen concentration in the heating furnace as low as possible. However, a small amount of oxygen remains in the nitrogen gas generated by the membrane separation type nitrogen gas generator, and it is difficult to keep the oxygen concentration in the heating furnace sufficiently low.
【０００８】また、膜分離型窒素ガス発生器が故障した
場合、加熱炉へ窒素ガスが供給ができなくなるという問
題もある。Further, there is a problem that if the membrane separation type nitrogen gas generator fails, the nitrogen gas cannot be supplied to the heating furnace.
【０００９】[0009]
【課題を解決するための手段】本発明は、上記のような
課題を解決した窒素ガス雰囲気加熱装置を提供するもの
である。本発明の窒素ガス雰囲気加熱装置は、加熱炉
と、その加熱炉に窒素ガスを供給する窒素ガス供給装置
とから構成され、特に窒素ガス供給装置の構成に第一の
特徴がある。SUMMARY OF THE INVENTION The present invention provides a nitrogen gas atmosphere heating device that solves the above problems. The nitrogen gas atmosphere heating device of the present invention comprises a heating furnace and a nitrogen gas supply device for supplying nitrogen gas to the heating furnace, and the nitrogen gas supply device has the first characteristic in particular.
【００１０】すなわち本発明に用いる窒素ガス供給装置
は、コンプレッサー等からなる圧縮空気供給源と、圧縮
空気を加熱する空気加熱器と、加熱された圧縮空気から
窒素ガスを分離する分離膜を用いた膜分離型窒素ガス発
生器と、水素ガス供給源と、膜分離型窒素ガス発生器で
発生した窒素ガスに水素ガス供給源から供給された水素
ガスを混合する混合器と、混合したガスを触媒により燃
焼反応させて窒素ガス中の酸素濃度を低下させる精製器
とを備えたものからなっている。That is, the nitrogen gas supply device used in the present invention uses a compressed air supply source such as a compressor, an air heater for heating the compressed air, and a separation membrane for separating the nitrogen gas from the heated compressed air. Membrane separation type nitrogen gas generator, hydrogen gas supply source, mixer for mixing the hydrogen gas supplied from the hydrogen gas supply source with the nitrogen gas generated by the membrane separation type nitrogen gas generator, and the mixed gas as a catalyst And a purifier for reducing the oxygen concentration in the nitrogen gas by causing a combustion reaction.
【００１１】また本発明の第二の特徴は前記窒素ガス供
給装置とは別に、予備窒素ガス供給源と、前記窒素ガス
供給装置から窒素ガスが供給できないときに予備窒素ガ
ス供給源から窒素ガスを供給するように切り換える切り
換え弁とを設けたことである。A second feature of the present invention is that, apart from the nitrogen gas supply device, a nitrogen gas is supplied from the auxiliary nitrogen gas supply source and the auxiliary nitrogen gas supply source when the nitrogen gas cannot be supplied from the nitrogen gas supply device. And a switching valve for switching to supply.
【００１２】[0012]
【作用】膜分離型窒素ガス発生器で発生した窒素ガスに
は微量の酸素が含まれている。この酸素の濃度を低下さ
せるには、窒素ガスに水素ガスを混合して、Ｐｄまたは
Ｐｔ等の貴金属を触媒として酸素と水素を反応させ、酸
素を除去することが有効である。窒素ガスの供給量をほ
ぼ一定とすれば、窒素ガス中の酸素濃度を低下させるた
めには水素ガスの供給量を増加させればよい。水素ガス
の供給量は、窒素ガスの純度により異なるが、例えば窒
素ガス発生器で10ｍ3 ／hr、純度99.9％の窒素ガスを発
生させた場合、その純度を99.999％にするには、水素ガ
スを約20リットル／hr供給すればよい。[Function] Nitrogen gas generated by the membrane separation type nitrogen gas generator contains a trace amount of oxygen. In order to reduce the concentration of oxygen, it is effective to mix hydrogen gas with nitrogen gas and react oxygen with hydrogen using a noble metal such as Pd or Pt as a catalyst to remove oxygen. If the supply amount of nitrogen gas is kept substantially constant, the supply amount of hydrogen gas may be increased in order to reduce the oxygen concentration in the nitrogen gas. The supply amount of hydrogen gas varies depending on the purity of nitrogen gas. For example, when a nitrogen gas generator generates 10 m 3 / hr of nitrogen gas with a purity of 99.9%, the purity of the hydrogen gas must be 99.999%. About 20 liters / hr may be supplied.
【００１３】通常の運転状態では膜分離型窒素ガス発生
器で発生した窒素ガスを精製器で精製して加熱炉に供給
する。もし何らかの原因で膜分離型窒素ガス発生器が故
障したときは、切り換え弁で予備窒素ガス供給源から窒
素ガスを供給するように切り換えて、窒素ガスの供給を
継続する。予備窒素ガス供給源としては液体窒素ボンベ
などを用いることができる。Under normal operating conditions, the nitrogen gas generated by the membrane separation type nitrogen gas generator is purified by the purifier and supplied to the heating furnace. If the membrane-separated nitrogen gas generator fails for some reason, the switching valve is switched to supply the nitrogen gas from the auxiliary nitrogen gas supply source, and the supply of the nitrogen gas is continued. A liquid nitrogen cylinder or the like can be used as the preliminary nitrogen gas supply source.
【００１４】また加熱炉を、窒素ガス雰囲気炉と空気雰
囲気炉の双方に使い分ける必要のあるときは、圧縮空気
供給源から加熱炉に直接空気を送るバイパス配管と、加
熱炉に窒素ガスを供給しないときに空気を供給するよう
に切り換える切り換え弁とを設けておくとよい。Further, when it is necessary to properly use the heating furnace for both the nitrogen gas atmosphere furnace and the air atmosphere furnace, the bypass pipe for sending air directly from the compressed air supply source to the heating furnace and the nitrogen gas are not supplied to the heating furnace. A switching valve for switching to supply air at times may be provided.
【００１５】[0015]
【実施例】以下、本発明の実施例を図面を参照して詳細
に説明する。図１は本発明の一実施例を示す。この窒素
ガス雰囲気加熱装置は、加熱炉31に窒素ガス供給装置33
から窒素ガスを供給し、加熱炉31内を窒素ガス雰囲気に
保つものである。加熱炉31の構造は図４に示した従来の
加熱炉と同様であるので、同一部分には同一符号を付し
て説明を省略する。Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 shows an embodiment of the present invention. This nitrogen gas atmosphere heating device includes a heating furnace 31 and a nitrogen gas supply device 33.
The nitrogen gas is supplied from here to maintain the inside of the heating furnace 31 in a nitrogen gas atmosphere. Since the structure of the heating furnace 31 is the same as that of the conventional heating furnace shown in FIG. 4, the same parts are designated by the same reference numerals and the description thereof will be omitted.
【００１６】窒素ガス供給装置33は、空気を取り入れて
圧縮するコンプレッサー等からなる圧縮空気供給源35
と、供給される圧縮空気を加熱する空気加熱器37と、加
熱された圧縮空気から分離膜により窒素ガスを分離する
膜分離型窒素ガス発生器39と、分離された窒素ガスに、
水素ガス供給源41から流量制御弁43を経て供給される水
素ガスを混合する混合器45と、混合したガスを触媒によ
り燃焼反応させ脱酸素を行って純度の高い窒素ガスを得
る精製器47とから構成されている。なお混合器45として
は例えば配管のＴ形（又はＹ形）接続部で２種類のガス
を合流させるタイプのものを使用することができる。The nitrogen gas supply device 33 is a compressed air supply source 35 including a compressor for taking in and compressing air.
An air heater 37 for heating the supplied compressed air, a membrane separation type nitrogen gas generator 39 for separating the nitrogen gas from the heated compressed air by a separation membrane, and the separated nitrogen gas,
A mixer 45 for mixing the hydrogen gas supplied from the hydrogen gas supply source 41 via the flow rate control valve 43, and a purifier 47 for obtaining a highly pure nitrogen gas by burning and reacting the mixed gas with a catalyst for deoxygenation. It consists of As the mixer 45, for example, a type in which two types of gas are joined at a T-shaped (or Y-shaped) connection portion of a pipe can be used.
【００１７】精製器47で精製された高純度の窒素ガス
は、供給配管49、定流量弁51を経て窒素ガス噴出管27に
送られ、加熱炉31内に供給される。水素ガスの供給量を
調整する流量制御弁43の開度は、加熱炉31内の酸素濃度
を酸素濃度検出器53で検出し、その出力に応じて制御器
55により制御される。The high-purity nitrogen gas purified by the purifier 47 is sent to the nitrogen gas jet pipe 27 through the supply pipe 49 and the constant flow valve 51, and is supplied into the heating furnace 31. The opening degree of the flow rate control valve 43 for adjusting the supply amount of hydrogen gas, the oxygen concentration in the heating furnace 31 is detected by the oxygen concentration detector 53, the controller according to the output.
Controlled by 55.
【００１８】本実施例の装置はさらに、液体窒素ボンベ
などの予備窒素ガス供給源57と、バイパス配管59、60
と、第一ないし第三の切り換え弁61〜63とを備えてい
る。The apparatus of this embodiment further includes a preliminary nitrogen gas supply source 57 such as a liquid nitrogen cylinder, and bypass pipes 59 and 60.
And first to third switching valves 61 to 63.
【００１９】第一ないし第三の切り換え弁61〜63が図１
の状態にあるときは、圧縮空気供給源35、空気加熱器37
を経て膜分離型窒素ガス発生器39に加熱された圧縮空気
が供給され、膜分離型窒素ガス発生器39からはほぼ一定
流量の窒素ガスが送り出される。窒素ガスの供給量を一
定とすれば、膜分離型窒素ガス発生器39で発生する窒素
ガス中の酸素濃度もほぼ一定となり、また加熱炉31の空
気の吸い込み量もほぼ一定となるので、加熱炉31内の酸
素濃度は何らかの外乱がないかぎり一定に保たれる。The first to third switching valves 61 to 63 are shown in FIG.
In this condition, compressed air supply source 35, air heater 37
The heated compressed air is supplied to the membrane separation type nitrogen gas generator 39 through the above, and a substantially constant flow rate of nitrogen gas is sent out from the membrane separation type nitrogen gas generator 39. If the supply amount of nitrogen gas is constant, the oxygen concentration in the nitrogen gas generated in the membrane separation type nitrogen gas generator 39 is also substantially constant, and the amount of air sucked into the heating furnace 31 is also substantially constant. The oxygen concentration in the furnace 31 is kept constant unless there is any disturbance.
【００２０】酸素濃度検出器53は常時、加熱炉31内の酸
素濃度を検出し、検出信号を制御器55に送る。制御器55
は検出した酸素濃度に応じて流量制御弁43の開度を制御
する。すなわち酸素濃度が高いときは、その程度に応じ
て流量制御弁43の開度を大きくし、水素ガスの供給量を
多くする。すると窒素ガス中の酸素が精製器47でより多
く除去され、精製器47からは酸素濃度の低い窒素ガスが
加熱炉31に供給されるため、加熱炉31内の酸素濃度を低
下させることができる。また加熱炉31内の酸素濃度が設
定値より低いときは上記と逆の制御が行われる。The oxygen concentration detector 53 always detects the oxygen concentration in the heating furnace 31 and sends a detection signal to the controller 55. Controller 55
Controls the opening of the flow control valve 43 according to the detected oxygen concentration. That is, when the oxygen concentration is high, the opening degree of the flow rate control valve 43 is increased and the hydrogen gas supply amount is increased according to the degree. Then, more oxygen in the nitrogen gas is removed by the purifier 47, and nitrogen gas having a low oxygen concentration is supplied from the purifier 47 to the heating furnace 31, so that the oxygen concentration in the heating furnace 31 can be reduced. . When the oxygen concentration in the heating furnace 31 is lower than the set value, the reverse control is performed.
【００２１】実験によると、膜分離型窒素ガス発生器39
から酸素濃度1000ppm の窒素ガスを９ｍ3 ／hrの流量で
供給する場合、水素ガスを約20リットル／hrの流量で供
給すれば、加熱炉31内の酸素濃度を100ppmに保つことが
できる。精製器47はＰｄまたはＰｔ系の触媒を用いる
と、ＳＶ（空筒速度）＝30,000までは窒素ガス中の酸素
と注入した水素ガスが十分反応する。According to experiments, the membrane separation type nitrogen gas generator 39
When nitrogen gas having an oxygen concentration of 1000 ppm is supplied at a flow rate of 9 m 3 / hr, the hydrogen concentration in the heating furnace 31 can be maintained at 100 ppm by supplying hydrogen gas at a flow rate of about 20 liters / hr. If the purifier 47 uses a Pd or Pt-based catalyst, oxygen in the nitrogen gas and injected hydrogen gas sufficiently react up to SV (blank speed) = 30,000.
【００２２】次に、膜分離型窒素ガス発生器39が故障し
た場合を説明する。この場合は膜分離型窒素ガス発生器
39から窒素ガスが供給できなくなるので、第一の切り換
え弁61はそのままにして、第二の切り換え弁62と第三の
切り換え弁63を図２のように切り換える。すると予備窒
素ガス供給源57から窒素ガスが供給されるようになるの
で、とりあえずは加熱炉31の運転を継続することができ
る。膜分離型窒素ガス発生器39の故障が短時間で直れ
ば、再び図１の状態に戻して運転を継続する。短時間で
直らない場合は、適当な時点で運転を停止し、膜分離型
窒素ガス発生器39を修理を行う。Next, the case where the membrane separation type nitrogen gas generator 39 fails will be described. In this case, a membrane separation type nitrogen gas generator
Since nitrogen gas cannot be supplied from 39, the first switching valve 61 is left as it is and the second switching valve 62 and the third switching valve 63 are switched as shown in FIG. Then, since the nitrogen gas is supplied from the preliminary nitrogen gas supply source 57, the operation of the heating furnace 31 can be continued for the time being. If the failure of the membrane separation type nitrogen gas generator 39 is repaired in a short time, the condition shown in FIG. 1 is restored and the operation is continued. If the problem cannot be resolved within a short time, the operation is stopped at an appropriate time and the membrane separation type nitrogen gas generator 39 is repaired.
【００２３】次に、加熱炉31を空気雰囲気炉として使用
する場合を説明する。この場合は第一ないし第三の切り
換え弁61〜63を図３のように切り換える。すると圧縮空
気供給源35から加熱炉31に直接空気が送り込まれるよう
になるので、加熱炉31を空気雰囲気炉として使用するこ
とができる。空気雰囲気炉は、酸化しない物品または酸
化しても差し支えない物品の加熱に使用される。空気雰
囲気炉として使用する必要のない場合は、バイパス配管
61、第一の切り換え弁61および第二の切り換え弁62は不
要である。Next, the case where the heating furnace 31 is used as an air atmosphere furnace will be described. In this case, the first to third switching valves 61 to 63 are switched as shown in FIG. Then, since the compressed air supply source 35 directly sends the air to the heating furnace 31, the heating furnace 31 can be used as an air atmosphere furnace. Air atmosphere furnaces are used to heat articles that do not oxidize or that can oxidize. Bypass piping when it is not necessary to use it as an air atmosphere furnace
61, the first switching valve 61 and the second switching valve 62 are unnecessary.
【００２４】[0024]
【発明の効果】以上説明したように本発明によれば、窒
素ガス雰囲気加熱装置の窒素ガス供給源として膜分離型
窒素ガス発生器を使用する場合に、膜分離型窒素ガス発
生器で発生した窒素ガスに水素ガスを混合し、その混合
ガスを触媒により燃焼反応させて脱酸素を行うようにし
たので、窒素ガスの純度を高めることができ、加熱炉内
の酸素濃度を十分低く抑えることができる。As described above, according to the present invention, when the membrane separation type nitrogen gas generator is used as the nitrogen gas supply source of the nitrogen gas atmosphere heating device, it is generated by the membrane separation type nitrogen gas generator. Since hydrogen gas is mixed with nitrogen gas, and the mixed gas is burned and reacted by a catalyst to perform deoxidation, the purity of nitrogen gas can be increased and the oxygen concentration in the heating furnace can be kept sufficiently low. it can.
【００２５】また膜分離型窒素ガス発生器に万一故障が
発生した場合には、加熱炉への窒素ガス供給を予備窒素
ガス供給源からの供給に切り換えることができるので、
被加熱物品を不良にする危険性が少ない。If a failure occurs in the membrane separation type nitrogen gas generator, the nitrogen gas supply to the heating furnace can be switched to the supply from the spare nitrogen gas supply source.
There is little risk of defective articles being heated.
【図１】 本発明に係る窒素ガス雰囲気加熱装置の一実
施例を示す説明図。FIG. 1 is an explanatory view showing an embodiment of a nitrogen gas atmosphere heating device according to the present invention.
【図２】 図１の装置で、予備窒素ガス供給源から窒素
ガスを加熱炉に供給する状態を示す説明図。FIG. 2 is an explanatory view showing a state in which nitrogen gas is supplied from a preliminary nitrogen gas supply source to a heating furnace in the apparatus of FIG.
【図３】 図１の装置で、圧縮空気供給源から空気を加
熱炉に供給する状態を示す説明図。FIG. 3 is an explanatory diagram showing a state in which air is supplied from a compressed air supply source to a heating furnace in the apparatus of FIG. 1.
【図４】 従来の窒素ガス雰囲気加熱炉を示す断面図。FIG. 4 is a sectional view showing a conventional nitrogen gas atmosphere heating furnace.
17：加熱室 19：入口通路 21：出口通路 25：コンベア 27：窒素ガス噴出管 29：シール板 31：加熱炉 33：窒素ガス
供給装置 35：圧縮空気供給源 37：空気加熱
器 39：膜分離型窒素ガス発生器 41：水素ガス
供給源 43：流量制御弁 45：混合器 47：精製器 51：定流量弁 53：酸素濃度検出器 55：制御器 57：予備窒素ガス供給源 59、60：バイ
パス配管 61、62、63：切り換え弁17: Heating chamber 19: Inlet passage 21: Outlet passage 25: Conveyor 27: Nitrogen gas ejection pipe 29: Seal plate 31: Heating furnace 33: Nitrogen gas supply device 35: Compressed air supply source 37: Air heater 39: Membrane separation Type Nitrogen gas generator 41: Hydrogen gas supply source 43: Flow control valve 45: Mixer 47: Purifier 51: Constant flow valve 53: Oxygen concentration detector 55: Controller 57: Spare nitrogen gas supply source 59, 60: Bypass piping 61, 62, 63: Switching valve
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０５Ｋ 3/34 7128−4Ｅ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location H05K 3/34 7128-4E
Claims (2)
供給して加熱炉内を窒素ガス雰囲気に保つ窒素ガス雰囲
気加熱装置において、 前記窒素ガス供給装置は、圧縮空気供給源と、圧縮空気
を加熱する空気加熱器と、加熱された圧縮空気から窒素
ガスを分離する分離膜を用いた膜分離型窒素ガス発生器
と、水素ガス供給源と、膜分離型窒素ガス発生器で発生
した窒素ガスに水素ガス供給源から供給された水素ガス
を混合する混合器と、混合したガスを触媒により燃焼反
応させて窒素ガス中の酸素濃度を低下させる精製器とを
備えたものからなり、 さらに前記窒素ガス供給装置とは別に、予備窒素ガス供
給源と、前記窒素ガス供給装置から窒素ガスが供給でき
ないときに予備窒素ガス供給源から窒素ガスを供給する
ように切り換える切り換え弁とを設けた、 ことを特徴とする窒素ガス雰囲気加熱装置。1. A nitrogen gas atmosphere heating device for supplying a nitrogen gas from a nitrogen gas supply device to a heating furnace to maintain the inside of the heating furnace in a nitrogen gas atmosphere, wherein the nitrogen gas supply device comprises a compressed air supply source and compressed air. The air heater that heats the air, the membrane separation type nitrogen gas generator that uses a separation membrane that separates nitrogen gas from the heated compressed air, the hydrogen gas supply source, and the nitrogen generated by the membrane separation type nitrogen gas generator. A gas mixer for mixing hydrogen gas supplied from a hydrogen gas supply source, and a purifier for reducing the oxygen concentration in the nitrogen gas by causing the mixed gas to burn and react with a catalyst. Separately from the nitrogen gas supply device, a spare nitrogen gas supply source and a switch for switching to supply the nitrogen gas from the spare nitrogen gas supply source when nitrogen gas cannot be supplied from the nitrogen gas supply device. Preparative provided, a nitrogen gas heating device, characterized in that.
あって、圧縮空気供給源から加熱炉に空気を送るバイパ
ス配管と、加熱炉に窒素ガスを供給しないときに空気を
供給するように切り換える切り換え弁とを設けたことを
特徴とするもの。2. A nitrogen gas atmosphere heating apparatus according to claim 1, wherein a bypass pipe for sending air from a compressed air supply source to the heating furnace, and supplying air when nitrogen gas is not supplied to the heating furnace. A switching valve for switching is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13416993A JPH06323757A (en) | 1993-05-13 | 1993-05-13 | Nitrogen gas atmosphere heating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13416993A JPH06323757A (en) | 1993-05-13 | 1993-05-13 | Nitrogen gas atmosphere heating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06323757A true JPH06323757A (en) | 1994-11-25 |
Family
ID=15122066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13416993A Pending JPH06323757A (en) | 1993-05-13 | 1993-05-13 | Nitrogen gas atmosphere heating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06323757A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100229466A1 (en) * | 2006-06-19 | 2010-09-16 | Oxygen Removal | Oxygen removal |
| WO2014121331A1 (en) * | 2013-02-08 | 2014-08-14 | Furnace Engineering Pty Ltd | Industrial furnaces having oxidation control means and methods of operation thereof |
| CN105234569A (en) * | 2015-10-13 | 2016-01-13 | 甘肃虹光电子有限责任公司 | Hydrogen furnace welding method |
| JP2018190511A (en) * | 2017-04-28 | 2018-11-29 | マイクロコントロールシステムズ株式会社 | Power generating equipment for working apparatus or system and power generating system |
| CN117450791A (en) * | 2023-12-26 | 2024-01-26 | 山西晋能集团大同能源发展有限公司 | Pressure roasting furnace for graphite preparation |
-
1993
- 1993-05-13 JP JP13416993A patent/JPH06323757A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100229466A1 (en) * | 2006-06-19 | 2010-09-16 | Oxygen Removal | Oxygen removal |
| US8574328B2 (en) * | 2006-06-19 | 2013-11-05 | Johnson Matthey Plc | Oxygen removal |
| US9284189B2 (en) | 2006-06-20 | 2016-03-15 | Johnson Matthey Plc | Oxygen removal |
| WO2014121331A1 (en) * | 2013-02-08 | 2014-08-14 | Furnace Engineering Pty Ltd | Industrial furnaces having oxidation control means and methods of operation thereof |
| CN105234569A (en) * | 2015-10-13 | 2016-01-13 | 甘肃虹光电子有限责任公司 | Hydrogen furnace welding method |
| JP2018190511A (en) * | 2017-04-28 | 2018-11-29 | マイクロコントロールシステムズ株式会社 | Power generating equipment for working apparatus or system and power generating system |
| CN117450791A (en) * | 2023-12-26 | 2024-01-26 | 山西晋能集团大同能源发展有限公司 | Pressure roasting furnace for graphite preparation |
| CN117450791B (en) * | 2023-12-26 | 2024-04-23 | 山西晋能集团大同能源发展有限公司 | Pressure roasting furnace for graphite preparation |
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