JPH06310759A - Image pickup device - Google Patents

Image pickup device

Info

Publication number
JPH06310759A
JPH06310759A JP12337993A JP12337993A JPH06310759A JP H06310759 A JPH06310759 A JP H06310759A JP 12337993 A JP12337993 A JP 12337993A JP 12337993 A JP12337993 A JP 12337993A JP H06310759 A JPH06310759 A JP H06310759A
Authority
JP
Japan
Prior art keywords
array
image
common electrode
clip terminal
flip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12337993A
Other languages
Japanese (ja)
Inventor
Shunji Murano
俊次 村野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP12337993A priority Critical patent/JPH06310759A/en
Publication of JPH06310759A publication Critical patent/JPH06310759A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12041LED
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/483Containers
    • H01L33/486Containers adapted for surface mounting

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Led Device Packages (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE:To provide an image pickup device in which an imaging array is protected against damage at the time of flip chip connection. CONSTITUTION:A LED array 8 is a flip chip connected with a transparent substrate 2 and a common electrode 9 thereof is connected with a printed board 4 at a clip terminal thereof. The LED array 8 is pressed uniformly by the clip terminal 20 and protected against damage at the time of flip chip connection.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の利用分野】この発明は、LEDヘッドや、イメ
ージセンサ等の画像装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image device such as an LED head and an image sensor.

【0002】[0002]

【従来技術】発明者は、画像アレイをガラス基板にフリ
ップチップ接続し、アレイ裏面の共通電極にはリードフ
レームを接続した画像装置を提案した(特開平4−35
6,978号公報)。ここでのリードフレームは、画像
アレイを搭載したのと同じ主面に他端が接続される。
2. Description of the Related Art The inventor has proposed an image device in which an image array is flip-chip connected to a glass substrate and a lead frame is connected to a common electrode on the back surface of the array (Japanese Patent Laid-Open No. 4-35).
6,978). The lead frame here has the other end connected to the same main surface on which the image array is mounted.

【0003】発明者はその後、フリップチップ接続時に
画像アレイが損傷するという問題に直面した。フリップ
チップ接続では、画像アレイをダイマウントした後、共
通電極の側から加圧して、リフロー炉等でフリップチッ
プ接続用のバンプを溶着する。溶着に必要な圧力は、ア
レイ当たりのバンプの数を64〜128として、数Kg
程度となる。工程を単純化するため、多数の画像アレイ
を同時に加圧するので、特定のアレイに局所的に圧力が
加わり易い。例えば40個の画像アレイを均一に加圧す
るのは困難である。これが画像アレイの損傷の原因であ
った。
The inventor then faced the problem of image array damage during flip chip bonding. In the flip-chip connection, after the image array is die-mounted, pressure is applied from the common electrode side and a bump for flip-chip connection is welded in a reflow furnace or the like. The pressure required for welding is several Kg when the number of bumps per array is 64 to 128.
It will be about. In order to simplify the process, many image arrays are pressed at the same time, which makes it easy to locally apply pressure to a particular array. For example, it is difficult to uniformly press 40 image arrays. This was the cause of the image array damage.

【0004】[0004]

【発明の課題】この発明の課題は、1) 画像アレイのフ
リップチップ接続を容易にし、特にフリップチップ接続
時のアレイの損傷を防止し、2) 画像アレイを共通電極
を介して放熱し、3) 画像アレイをクリップ端子で静電
シールドし、4) 画像アレイの共通電極への配線抵抗を
小さくする、ことにある。
An object of the present invention is to 1) facilitate flip-chip connection of an image array, particularly to prevent damage to the array during flip-chip connection, and 2) radiate the image array through a common electrode, 4) The image array is electrostatically shielded by the clip terminal, and 4) the wiring resistance to the common electrode of the image array is reduced.

【0005】[0005]

【発明の構成】この発明は、受発光素子を集積化した画
像アレイを、透明基板の一方の主面にフリップチップ接
続した画像装置において、前記画像アレイのフリップチ
ップ接続部と反対側の主面に共通電極を設けると共に、
前記基板を挟むように配置したクリップ端子の一端を前
記共通電極に接続し、かつその他端を、透明基板からみ
て前記主面と反対側に設けた他の配線パターンに接続し
たことを特徴とする。ここで画像アレイには、例えばL
EDアレイや、MOSCCDアレイ、MOS光センサア
レイ等を用いる。クリップ端子の他端は、透明基板と背
中合わせに配置した他の基板、例えばプリント基板、に
設けた配線パターン接続しても良く、あるいは透明基板
の反対側の主面に設けた配線パターンに接続しても良
い。
According to the present invention, in an image device in which an image array in which light-receiving and emitting elements are integrated is flip-chip connected to one main surface of a transparent substrate, the main surface of the image array opposite to the flip-chip connection portion is provided. With a common electrode on
One end of the clip terminal arranged so as to sandwich the substrate is connected to the common electrode, and the other end is connected to another wiring pattern provided on the side opposite to the main surface when viewed from the transparent substrate. . Here, in the image array, for example, L
An ED array, a MOS CCD array, a MOS photosensor array, etc. are used. The other end of the clip terminal may be connected to a wiring pattern provided on another substrate arranged back to back with the transparent substrate, for example, a printed circuit board, or to a wiring pattern provided on the main surface on the opposite side of the transparent substrate. May be.

【0006】[0006]

【発明の作用】この発明では、クリップ端子を透明基板
を挟み込むように配置し、クリップ端子からの圧力を画
像アレイの共通電極に加える。そしてこの圧力と熱や超
音波振動等で、画像アレイをフリップチップ接続する。
クリップ端子からの圧力は、端子の厚さや材質,形状等
が一定なので一定となり、画像アレイに無理な力が加わ
り損傷することがない。用いたクリップ端子は、画像ア
レイの共通電極への電気的接続の他に、静電シールドや
放熱板の役割を兼ね、低抵抗で共通電極へ配線でき、面
積が広いので感光体ドラム等からの電磁ノイズに対する
静電シールドとして作用し、かつ共通電極を冷却して画
像アレイの過熱を防止する。
According to the present invention, the clip terminals are arranged so as to sandwich the transparent substrate, and the pressure from the clip terminals is applied to the common electrode of the image array. Then, the image array is flip-chip connected by the pressure, heat, ultrasonic vibration, and the like.
The pressure from the clip terminal is constant because the thickness, material, shape, etc. of the terminal are constant, and no excessive force is applied to the image array to prevent damage. The clip terminal used not only electrically connects to the common electrode of the image array, but also serves as an electrostatic shield and a heat sink, and can be wired to the common electrode with low resistance. It acts as an electrostatic shield against electromagnetic noise and cools the common electrode to prevent overheating of the image array.

【0007】[0007]

【実施例】図1〜図4に、LEDヘッドを例に実施例を
示す。図1において、2はガラス等の透明基板で、4は
プリント基板等の他の基板であり、ガラス基板2と背中
合わせに密着して配置する。6はガラス基板2の一方の
主面に設けたデータバス、8はLEDアレイで、9は金
等の共通電極、10は半田等のバンプ、12はデータバ
ス6側に設けた金等のバンプである。プリント基板4に
は切り欠き部14を設け、LEDアレイ8からの光を外
へ導くようにする。16はスイッチングICで、LED
アレイ8をダイナミックドライブするためのスイッチン
グ回路を内蔵している。18は基板4に設けた配線パタ
ーンである。20はクリップ端子で、画像アレイ8の共
通電極9と、基板4の配線パターン18とを接続する。
クリップ端子20にはリン青銅等のバネ性のある材料を
用い、基板2,4を挟み込むように配置し、図の矢印の
ような加圧力を配線パターン18と共通電極9とに加え
る。この加圧力をフリップチップ接続時の圧力として用
いると共に、基板2,4の固定にも用いる。
EXAMPLES FIGS. 1 to 4 show an example of an LED head. In FIG. 1, reference numeral 2 is a transparent substrate such as glass, and 4 is another substrate such as a printed circuit board, which are arranged back to back and in close contact with the glass substrate 2. 6 is a data bus provided on one main surface of the glass substrate 2, 8 is an LED array, 9 is a common electrode such as gold, 10 is a bump such as solder, and 12 is a bump such as gold provided on the data bus 6 side. Is. The printed board 4 is provided with a notch 14 so that the light from the LED array 8 is guided to the outside. 16 is a switching IC, which is an LED
A switching circuit for dynamically driving the array 8 is built in. Reference numeral 18 is a wiring pattern provided on the substrate 4. A clip terminal 20 connects the common electrode 9 of the image array 8 and the wiring pattern 18 of the substrate 4.
A material having a spring property, such as phosphor bronze, is used for the clip terminal 20 and is arranged so as to sandwich the substrates 2 and 4, and a pressing force as indicated by an arrow in the drawing is applied to the wiring pattern 18 and the common electrode 9. This pressure is used as the pressure for flip-chip connection and also for fixing the substrates 2 and 4.

【0008】図2に、透明基板2のLEDアレイ8側の
主面を示す。透明基板2の両端には、LEDアレイ8に
画像信号を供給するための駆動IC22を設ける。駆動
IC22には、画像信号を一時的に記憶するためのシフ
トレジスタと、LEDアレイ8を定電流駆動するための
定電流回路とを内蔵させる。そして駆動IC22にデー
タバス6を図のように接続し、LEDアレイ8毎にジグ
ザグにデータバス6を折り返させる。またクリップ端子
20は図に示すように、LEDアレイ8の裏面のほぼ全
面を被覆している。
FIG. 2 shows the main surface of the transparent substrate 2 on the LED array 8 side. Driving ICs 22 for supplying image signals to the LED array 8 are provided at both ends of the transparent substrate 2. The drive IC 22 has a built-in shift register for temporarily storing an image signal and a constant current circuit for driving the LED array 8 with a constant current. Then, the data bus 6 is connected to the drive IC 22 as shown in the figure, and the data bus 6 is folded back zigzag for each LED array 8. Further, as shown in the figure, the clip terminal 20 covers almost the entire back surface of the LED array 8.

【0009】駆動IC22は定電流回路を内蔵している
ため、最も過熱し易いICである。そこでクリップ端子
24で、駆動IC22を基板4の配線パターン18に接
続する。クリップ端子24は先端が駆動IC22の近傍
に現れるように配置し、図示しない配線パターンを介し
て駆動IC22に接続する。そしてクリップ端子24に
より、駆動IC22の熱をプリント基板4の側に逃が
す。好ましくは駆動IC22の端面とクリップ端子24
の先端との間隔Dを0.5〜3mmとする。このように
すれば、駆動IC22を多数のクリップ端子24により
放熱し、過熱を防止することができる。
Since the drive IC 22 has a built-in constant current circuit, it is the IC that is most easily overheated. Therefore, the drive IC 22 is connected to the wiring pattern 18 of the substrate 4 by the clip terminal 24. The clip terminal 24 is arranged so that its tip appears near the drive IC 22, and is connected to the drive IC 22 via a wiring pattern (not shown). Then, the heat of the drive IC 22 is released to the printed circuit board 4 side by the clip terminal 24. Preferably, the end surface of the drive IC 22 and the clip terminal 24
The distance D from the tip of is 0.5 to 3 mm. In this way, the driving IC 22 can be radiated by the large number of clip terminals 24 to prevent overheating.

【0010】図3に、プリント基板4のスイッチングI
C16側の配置を示す。鎖線で示した領域が配線パター
ン18で、クリップ端子20,24は配線パターン18
を介してスイッチングIC16等に接続する。
FIG. 3 shows the switching I of the printed circuit board 4.
The arrangement on the C16 side is shown. The area shown by the chain line is the wiring pattern 18, and the clip terminals 20 and 24 are the wiring pattern 18.
To the switching IC 16 or the like.

【0011】図4に、フリップチップ接続の工程を示
す。クリップ端子20,24は例えば半田付けで接続
し、事前に半田メッキを施すと共に、半田付け部にクリ
ーム半田を塗布しておく。これと並行して、ダイマウン
タでLEDアレイ8をダイマウントし、基板2に仮止め
しておく。次にクリップ端子20,24をセットする。
クリップ端子20からの圧力は、その幅や厚さ,材質,
形状が一定であれば、一定となる。そして均一なクリッ
プ端子20を製造することはきわめて容易で、各LED
アレイ8には均一な圧力が加わり、接続時にLEDアレ
イ8が損傷することがない。クリップ端子20,24を
セットすることにより、基板2,4は仮止めされ、同時
にLEDアレイ8はフリップチップ位置に固定される。
この状態で基板2,4を半田リフロー炉等をくぐらせ
る。するとクリップ端子20,24のクリーム半田が溶
融し、クリップ端子20,24の半田付けが行われる。
これによって基板2,4が一体に固定される。これと同
時にクリップ端子20からの加圧力とリフロー炉の熱
で、バンプ10,12が溶着し、フリップチップ接続が
完成する。
FIG. 4 shows a flip-chip connection process. The clip terminals 20 and 24 are connected, for example, by soldering, and solder plating is performed in advance and cream solder is applied to the soldering portion. In parallel with this, the LED array 8 is die-mounted with a die mounter and temporarily fixed to the substrate 2. Next, the clip terminals 20 and 24 are set.
The pressure from the clip terminal 20 depends on its width, thickness, material,
If the shape is constant, it will be constant. And it is very easy to manufacture a uniform clip terminal 20,
A uniform pressure is applied to the array 8 and the LED array 8 is not damaged during connection. By setting the clip terminals 20 and 24, the substrates 2 and 4 are temporarily fixed, and at the same time, the LED array 8 is fixed to the flip chip position.
In this state, the substrates 2 and 4 are passed through a solder reflow furnace or the like. Then, the cream solder of the clip terminals 20 and 24 is melted, and the clip terminals 20 and 24 are soldered.
As a result, the substrates 2 and 4 are fixed together. At the same time, the bumps 10 and 12 are welded by the pressure applied from the clip terminal 20 and the heat of the reflow furnace, and the flip chip connection is completed.

【0012】フリップチップ接続後のLEDヘッドで
は、クリップ端子20はLEDアレイ8に対する静電シ
ールドとして働く。これはクリップ端子20がLEDア
レイ8の裏面の大部分を被覆するからである。またクリ
ップ端子20は面積が広く、共通電極9をプリント基板
4の配線パターン18に低抵抗で接続することができ
る。さらにクリップ端子20は、LEDアレイ8の放熱
板として作用し、その過熱を防止することができる。駆
動IC22には多数のクリップ端子24をその近傍で接
続したので、クリップ端子24を介して放熱させ、過熱
を防止することができる。
In the LED head after flip chip connection, the clip terminal 20 functions as an electrostatic shield for the LED array 8. This is because the clip terminal 20 covers most of the back surface of the LED array 8. Further, the clip terminal 20 has a large area, and the common electrode 9 can be connected to the wiring pattern 18 of the printed board 4 with low resistance. Further, the clip terminal 20 acts as a heat dissipation plate of the LED array 8 and can prevent its overheating. Since a large number of clip terminals 24 are connected to the drive IC 22 in the vicinity thereof, heat can be released through the clip terminals 24 to prevent overheating.

【0013】[0013]

【発明の効果】この発明では、以下の効果が得られる。 1) 画像アレイのフリップチップ接続を容易にし、フリ
ップチップ接続時の画像アレイの損傷を防止する。 2) 画像アレイを共通電極からクリップ端子を介して放
熱し、画像アレイの温度上昇を防止する。 3) 画像アレイをクリップ端子で静電シールドし、誤動
作を防止する。 4) 画像アレイの共通電極への配線抵抗を小さくし、印
画品質を向上させる。
According to the present invention, the following effects can be obtained. 1) Flip chip connection of the image array is facilitated and damage to the image array during flip chip connection is prevented. 2) The image array is radiated from the common electrode via the clip terminal to prevent the temperature rise of the image array. 3) The image array is electrostatically shielded by the clip terminal to prevent malfunction. 4) Reduce wiring resistance to the common electrode of the image array to improve printing quality.

【図面の簡単な説明】[Brief description of drawings]

【図1】 実施例の画像装置の要部断面図FIG. 1 is a cross-sectional view of a main part of an image device according to an embodiment.

【図2】 実施例の画像装置での、透明基板の配置を示
す平面図
FIG. 2 is a plan view showing the arrangement of transparent substrates in the image device of the embodiment.

【図3】 実施例の画像装置での、プリント基板の配置
を示す平面図
FIG. 3 is a plan view showing the arrangement of printed circuit boards in the image device of the embodiment.

【図4】 実施例の画像装置での、フリップチップ接続
工程を示す工程図
FIG. 4 is a process diagram showing a flip-chip connection process in the image device of the embodiment.

【符号の説明】[Explanation of symbols]

2 ガラス基板 4 プリント基板 6 データバス 8 LEDアレイ 9 共通電極 10 バンプ 12 バンプ 16 スイッチングIC 18 配線パターン 20 クリップ端子 22 駆動IC 24 クリップ端子 2 glass substrate 4 printed circuit board 6 data bus 8 LED array 9 common electrode 10 bump 12 bump 16 switching IC 18 wiring pattern 20 clip terminal 22 drive IC 24 clip terminal

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 受発光素子を集積化した画像アレイを、
透明基板の一方の主面にフリップチップ接続した画像装
置において、 前記画像アレイのフリップチップ接続部と反対側の主面
に共通電極を設けると共に、 前記基板を挟むように配置したクリップ端子の、一端を
前記共通電極に接続し、かつその他端を、透明基板から
みて前記主面と反対側に設けた他の配線パターンに接続
したことを特徴とする、画像装置。
1. An image array in which light receiving and emitting elements are integrated,
In an image device flip-chip connected to one main surface of a transparent substrate, a common electrode is provided on the main surface of the image array opposite to the flip-chip connection portion, and one end of a clip terminal arranged to sandwich the substrate. Is connected to the common electrode, and the other end is connected to another wiring pattern provided on the side opposite to the main surface when viewed from the transparent substrate.
JP12337993A 1993-04-26 1993-04-26 Image pickup device Pending JPH06310759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12337993A JPH06310759A (en) 1993-04-26 1993-04-26 Image pickup device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12337993A JPH06310759A (en) 1993-04-26 1993-04-26 Image pickup device

Publications (1)

Publication Number Publication Date
JPH06310759A true JPH06310759A (en) 1994-11-04

Family

ID=14859127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12337993A Pending JPH06310759A (en) 1993-04-26 1993-04-26 Image pickup device

Country Status (1)

Country Link
JP (1) JPH06310759A (en)

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JP2002100785A (en) * 2000-07-18 2002-04-05 Infineon Technologies Ag Surface-mountable optoelectronic module and optoelectronic coupling unit with optoelectronic module
KR100419611B1 (en) * 2001-05-24 2004-02-25 삼성전기주식회사 A Light Emitting Diode, a Lighting Emitting Device Using the Same and a Fabrication Process therefor
JP2004287215A (en) * 2003-03-24 2004-10-14 Fuji Photo Film Co Ltd Transmission type optical modulation apparatus and method for packaging the same
JP2004325939A (en) * 2003-04-25 2004-11-18 Seiko Epson Corp Optical communication module, optical communication system and its manufacture method
US7065275B2 (en) 2003-06-18 2006-06-20 Seiko Epson Corporation Optic communications module, method for manufacturing the same, optic communications device, and electronic equipment
WO2006089510A2 (en) * 2005-02-24 2006-08-31 Wolfram Henning Optical semiconductor component and associated contacting device
US7693360B2 (en) 2002-06-24 2010-04-06 Nec Corporation Optoelectronic hybrid integrated module and light input/output apparatus having the same as component

Cited By (10)

* Cited by examiner, † Cited by third party
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JP2002100785A (en) * 2000-07-18 2002-04-05 Infineon Technologies Ag Surface-mountable optoelectronic module and optoelectronic coupling unit with optoelectronic module
US6550982B2 (en) 2000-07-18 2003-04-22 Infineon Technologies Ag Optoelectronic surface-mountable module and optoelectronic coupling unit
EP1174745A3 (en) * 2000-07-18 2004-05-26 Infineon Technologies AG Optoelectronic surface- mountable module
KR100419611B1 (en) * 2001-05-24 2004-02-25 삼성전기주식회사 A Light Emitting Diode, a Lighting Emitting Device Using the Same and a Fabrication Process therefor
US7693360B2 (en) 2002-06-24 2010-04-06 Nec Corporation Optoelectronic hybrid integrated module and light input/output apparatus having the same as component
JP2004287215A (en) * 2003-03-24 2004-10-14 Fuji Photo Film Co Ltd Transmission type optical modulation apparatus and method for packaging the same
JP2004325939A (en) * 2003-04-25 2004-11-18 Seiko Epson Corp Optical communication module, optical communication system and its manufacture method
US7065275B2 (en) 2003-06-18 2006-06-20 Seiko Epson Corporation Optic communications module, method for manufacturing the same, optic communications device, and electronic equipment
WO2006089510A2 (en) * 2005-02-24 2006-08-31 Wolfram Henning Optical semiconductor component and associated contacting device
WO2006089510A3 (en) * 2005-02-24 2007-01-11 Wolfram Henning Optical semiconductor component and associated contacting device

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