JPH06258080A - Supporting structure of vibrator - Google Patents

Abstract

PURPOSE:To improve sensitivity of a vibration gyro by forming in hardness a bent part of a support member for supporting a vibration element lower then the other part, and alleviating a reaction force generated in the member at the bent part to obtain an efficient free vibration of a vibrator. CONSTITUTION:A drive signal is applied to a driving piezoelectric element 3 to vibrate to bend a vibration element 2 in a direction perpendicular to a surface free of a piezoelectric element 3, and a voltage is generated in the element in response to the vibration. In this case, support members 6, 7 are bent at horizontal parts 6b, 7b and vertical parts 6c, 7c by bending vibration of the element 2, and a reaction is so generated at the members 6, 7 as to be returned to an original shape state. However, since the parts 6a, 7a are smaller in hardness than the other parts 6b, 6c, 7b, 7c, reaction forces generated at the members 6, 7 due to twisting of the parts 6a, 6b are alleviated to obtain an efficient free vibration of a vibrator 1. Accordingly, sensitivity of a vibration gyro is improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、振動子の支持構造に関
し、例えば振動ジャイロ等に用いられる音片型振動子の
支持構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support structure for a vibrator, and more particularly to a support structure for a sound piece type vibrator used in a vibration gyro or the like.

【０００２】[0002]

【従来の技術】従来の振動子の支持構造としては、例え
ば図４及び図５に示すような特開平３−３４６１３号公
報に開示されたものがある。この従来例は、振動ジャイ
ロに用いられる音片型振動子の支持構造であり、振動子
１は、振動体２とこの振動体２を振動させるための駆動
用圧電素子３，４を含んでいる。振動体２はエリンバと
呼ばれる鉄−ニッケル合金の一種でヤング率の温度係数
が他の金属材料に比べて小さな値をもつ材料により正３
角柱状に形成されている。振動体２の２つの側面の中央
部に駆動用圧電素子３及び４がそれぞれ形成されてい
る。駆動用圧電素子３は、圧電体３ａの両面に電極３
ｂ，３ｃが形成され、一方の電極３ｃが振動体２の側面
に接着されている。同様に、駆動用圧電素子４は、圧電
体４ａの両面に電極４ｂ，４ｃが形成されている。これ
らの駆動用圧電素子３，４に駆動信号が与えられること
によって振動体２は駆動用圧電素子３，４の形成されて
いない面に直交する方向に屈曲振動する。また、振動体
２の他の側面の中央部には、検出用圧電素子５が形成さ
れている。５ａは圧電体、５ｂ，５ｃは電極である。こ
の検出用圧電素子５からの出力信号を検出することによ
って振動ジャイロに加わった回転角速度が検出される。
振動体２は、２個の棒状支持部材８，９によって支持さ
れている。これらの支持部材８，９は、振動体２の駆動
用圧電素子３，４形成面間の稜線部分に接続されてい
る。支持部材８，９は振動体２のノード点付近に接続さ
れ、この例では振動体２の長さをＬとすると、その両端
から０．２２４Ｌの位置に接続されている。この従来例
は、上記の構成により、振動体２の駆動用圧電素子３，
４形成面の振動状態が２つの支持点を結ぶ直線の両側で
対称となり、振動体２の振動が減衰されにくく、小型化
が可能な構造となっている。2. Description of the Related Art As a conventional support structure for a vibrator, there is one disclosed in Japanese Patent Application Laid-Open No. 3-34613 as shown in FIGS. 4 and 5, for example. This conventional example is a support structure of a sound piece type vibrator used for a vibrating gyroscope, and the vibrator 1 includes a vibrating body 2 and driving piezoelectric elements 3 and 4 for vibrating the vibrating body 2. . The vibrating body 2 is a kind of iron-nickel alloy called "elimba", and is made positive by a material having a temperature coefficient of Young's modulus smaller than that of other metal materials.
It is formed in a prismatic shape. Driving piezoelectric elements 3 and 4 are respectively formed in the central portions of the two side surfaces of the vibrating body 2. The driving piezoelectric element 3 has electrodes 3 on both sides of the piezoelectric body 3a.
b and 3c are formed, and one electrode 3c is bonded to the side surface of the vibrating body 2. Similarly, the driving piezoelectric element 4 has electrodes 4b and 4c formed on both surfaces of a piezoelectric body 4a. When a driving signal is applied to the driving piezoelectric elements 3 and 4, the vibrating body 2 flexurally vibrates in a direction orthogonal to a surface on which the driving piezoelectric elements 3 and 4 are not formed. A piezoelectric element 5 for detection is formed in the center of the other side surface of the vibrating body 2. Reference numeral 5a is a piezoelectric body, and 5b and 5c are electrodes. By detecting the output signal from the detecting piezoelectric element 5, the rotational angular velocity applied to the vibration gyro is detected.
The vibrating body 2 is supported by two rod-shaped supporting members 8 and 9. These support members 8 and 9 are connected to the ridge portion between the surfaces of the vibrating body 2 on which the driving piezoelectric elements 3 and 4 are formed. The supporting members 8 and 9 are connected near the node points of the vibrating body 2, and in this example, assuming that the length of the vibrating body 2 is L, they are connected to positions of 0.224 L from both ends thereof. In this conventional example, the piezoelectric element 3 for driving the vibrating body 2 has the above-described configuration.
The vibration state of the 4 formation surface is symmetrical on both sides of the straight line connecting the two support points, the vibration of the vibrating body 2 is not easily attenuated, and the structure can be downsized.

【０００３】また、特開平３−１３００６号公報には、
図６、図７に示すような振動子の支持構造が開示されて
いる。支持部材８，９は、線材によりコ字形に形成さ
れ、そのコ字形の支持部材８，９の中央部分が振動体２
の稜線部分の２個所に、スポット溶接で固着されてい
る。１０はセラミックス材料からなる矩形板状の支持
台、１１は弾性材料からなる緩衝材であり、緩衝材１１
の上には、その長手方向に分割された２つの基板１２，
１３が接着されている。一方の基板１２上には５つの電
極１４ａ，１４ｂ，１４ｃ，１４ｄ，１４ｅが形成さ
れ、他方の基板１３上にも２つの電極１５ａ，１５ｂが
形成されている。一方の基板１２上の電極１４ａ及び１
４ｅには、コ字形の支持部材８の両端部が溶接によって
固着され、同様に、他方のコ字形の支持部材９の両端部
が、他方の基板１３上の電極１５ａ及び１５ｂに固着さ
れている。一方の基板１２上の電極１４ｂ，１４ｄ，１
４ｃには、リード線によって圧電素子３，４，５がそれ
ぞれ電気的に接続されている。この従来例は、分割され
た２つの基板１２，１３にそれぞれ固定された２つの支
持部材８，９が個別に変位するので、支持部材８，９に
よって振動子１の振動が抑制されにくい構造となってい
る。Further, Japanese Patent Application Laid-Open No. 3-13006 discloses that
A support structure for a vibrator as shown in FIGS. 6 and 7 is disclosed. The supporting members 8 and 9 are formed in a U-shape by a wire, and the central portion of the U-shaped supporting members 8 and 9 is the vibrating body 2.
It is fixed by spot welding to two points on the ridge line part. 10 is a rectangular plate-shaped support base made of a ceramic material, 11 is a cushioning material made of an elastic material, and the cushioning material 11
On top of it, there are two substrates 12, divided in the longitudinal direction,
13 is glued. Five electrodes 14a, 14b, 14c, 14d and 14e are formed on one substrate 12, and two electrodes 15a and 15b are also formed on the other substrate 13. Electrodes 14a and 1 on one substrate 12
Both ends of the U-shaped support member 8 are fixed to the 4e by welding, and similarly, both ends of the other U-shaped support member 9 are fixed to the electrodes 15a and 15b on the other substrate 13. . Electrodes 14b, 14d, 1 on one substrate 12
Piezoelectric elements 3, 4 and 5 are electrically connected to 4c by lead wires. In this conventional example, since the two support members 8 and 9 fixed to the two divided substrates 12 and 13 are individually displaced, it is difficult to suppress the vibration of the vibrator 1 by the support members 8 and 9. Has become.

【０００４】[0004]

【発明が解決しようとする課題】従来の振動子の支持構
造にあっては、支持部材として次のような要求を満たす
ものが用いられていた。即ち、（イ）振動子の振動を妨
げないように、振動体のノード点付近の２ヵ所におい
て、支持部材はできるだけ点固定にする必要がある。
（ロ）振動子に共振周波数からのずれをもたらさないよ
うに振動体の質量に対し支持部材の質量は小さくする必
要がある。（ハ）振動子の振動に対し、支持部材に同期
した振動を起させて振動子の振動を不安定にさせないこ
とが必要である。このため、支持部材は、ピアノ線に代
表されるような硬度の高い細い線材で形成されていた。
しかしながら、支持部材に硬度の高い線材を用いると、
支持部材の振動が振動子の自由振動を抑制することにな
って効率のよい振動が妨げられ、この振動子によって構
成される振動ジャイロ等の感度が低下するという問題が
あった。In the conventional vibrator support structure, a support member satisfying the following requirements was used. That is, (a) it is necessary to fix the support member at two points near the node point of the vibrating body as much as possible so as not to disturb the vibration of the vibrator.
(B) It is necessary to make the mass of the supporting member smaller than the mass of the vibrating body so as not to cause the vibrator to deviate from the resonance frequency. (C) With respect to the vibration of the vibrator, it is necessary not to make the vibration of the vibrator unstable by causing vibration in synchronization with the support member. For this reason, the support member is formed of a thin wire having a high hardness as represented by a piano wire.
However, if a wire having high hardness is used for the supporting member,
There is a problem in that the vibration of the support member suppresses the free vibration of the vibrator, which hinders efficient vibration and reduces the sensitivity of the vibration gyro and the like configured by the vibrator.

【０００５】本発明は、このような従来の問題に着目し
てなされたもので、振動子の効率のよい自由振動を得る
ことができて、この振動子によって構成される振動ジャ
イロ等の感度を向上させることのできる振動子の支持構
造を提供することを目的とする。The present invention has been made by paying attention to such a conventional problem, and it is possible to obtain an efficient free vibration of a vibrator and to improve the sensitivity of a vibration gyro or the like constituted by the vibrator. It is an object to provide a support structure for a vibrator that can be improved.

【０００６】[0006]

【課題を解決するための手段】本発明は、上記課題を解
決するために、多角柱状の振動体及び該振動体における
非平行の２つの側面に取付けられ当該振動体を振動させ
る駆動用圧電素子を含む振動子を、前記振動体のノード
点付近において前記２つの側面から等距離で且つ当該振
動体の長手方向の一直線上の２点で略コ字形の支持部材
によりそれぞれ支持し、該支持部材の各端部を基板上に
固定して前記振動子を空間中に支持してなる振動子の支
持構造において、前記支持部材は、略コ字形の屈曲部を
他の部分に比べて硬度を小さく形成してなることを要旨
とする。In order to solve the above problems, the present invention provides a vibrating body having a polygonal prism shape and a driving piezoelectric element mounted on two non-parallel side surfaces of the vibrating body. Each of the vibrators including the above is supported by a substantially U-shaped support member at two points that are equidistant from the two side surfaces in the vicinity of the node point of the vibrating body and are on a straight line in the longitudinal direction of the vibrating body. In a support structure for a vibrator, in which each end of the is fixed on a substrate to support the vibrator in a space, the support member has a substantially U-shaped bent portion having a hardness smaller than that of other portions. The point is to be formed.

【０００７】[0007]

【作用】支持部材は、略コ字形の屈曲部が他の部分に比
べて硬度が小さいため、振動子の屈曲振動に伴ないその
屈曲部の部分がねじれて支持部材に生じる反力が緩和さ
れる。従って振動子の屈曲振動を抑圧する方向に働く支
持部材の反力が小さくなり、振動子の効率よい自由振動
が得られる。In the supporting member, since the bending portion of the substantially U-shape has a smaller hardness than the other portions, the bending portion of the supporting member is twisted due to the bending vibration of the vibrator, and the reaction force generated in the supporting member is alleviated. It Therefore, the reaction force of the supporting member acting in the direction of suppressing the bending vibration of the vibrator is reduced, and efficient free vibration of the vibrator can be obtained.

【０００８】[0008]

【実施例】以下、本発明の実施例を図１乃至図３に基づ
いて説明する。なお、図１乃至図３において前記図４乃
至図７における部材等と同一ないし均等のものは、前記
と同一符号を以って示し、重複した説明を省略する。Embodiments of the present invention will be described below with reference to FIGS. In FIGS. 1 to 3, members that are the same as or equivalent to the members and the like in FIGS. 4 to 7 are denoted by the same reference numerals as those used above, and a duplicate description will be omitted.

【０００９】まず、振動子の支持構造の構成を説明す
る。本実施例では、２つの支持部材６，７が直径０．２
５〜０．３０mm程度の硬度の高い線材によりコ字形に形
成され、その屈曲部６ａ，７ａの部分のみが硬度が小さ
くなるように処理されている。硬度を小さくする処理と
しては、局部的なレーザ照射或いは電子ビーム照射によ
る焼きなまし処理等が用いられる。そして、振動体２の
持つ固有の振動を妨げないように、コ字形の中央部分６
ｄ，７ｄが振動体２の稜線部分の２個所に、点接触に近
い状態でスポット溶接により固着されている。支持部材
６，７は、振動体２と結合されることにより、振動体２
の固有の振動に影響を及ぼさないように、その質量は振
動体２に比べて１桁以上小さな値を持つことが必要であ
り、上記のように、点接触と合わせ考慮して直径が０．
２５〜０．３０mm程度の細い線材が用いられている。ま
た支持部材６，７は、振動体２の固有の振動に対し、同
期した振動をして振動体２の安定した振動を妨げないよ
うにするため、上述のような細い線材であっても全体的
には必要な硬さを持たなければならず、ピアノ線のよう
な材質で形成されている。First, the structure of the support structure for the vibrator will be described. In this embodiment, the two support members 6 and 7 have a diameter of 0.2.
The wire material having a high hardness of about 5 to 0.30 mm is formed into a U-shape, and is processed so that only the bent portions 6a and 7a have a low hardness. As the treatment for reducing the hardness, annealing treatment by local laser irradiation or electron beam irradiation is used. Then, in order not to disturb the inherent vibration of the vibrating body 2, the central portion 6 of the U-shape is formed.
d and 7d are fixed to two points of the ridge of the vibrating body 2 by spot welding in a state close to point contact. The support members 6 and 7 are combined with the vibrating body 2 to thereby form the vibrating body 2
In order not to affect the inherent vibration of the vibrating body 2, its mass needs to have a value smaller than that of the vibrating body 2 by one digit or more. As described above, the diameter is 0.
A thin wire rod of about 25 to 0.30 mm is used. In addition, the support members 6 and 7 do not interfere with the stable vibration of the vibrating body 2 by vibrating in synchronization with the peculiar vibration of the vibrating body 2. In particular, it must have the required hardness and is made of a material such as piano wire.

【００１０】次に、上述のように構成された振動子の支
持構造の作用を説明する。駆動用圧電素子３，４に駆動
信号が印加されることによって振動体２は、図３に示す
ように駆動用圧電素子３，４の形成されていない面に直
交する方向に屈曲振動し、これに応じて検出用圧電素子
５に電圧が生じる。このとき、支持部材６，７はその水
平部６ｂ，７ｂ及び垂直部６ｃ，７ｃ等の部分が振動体
２の屈曲振動によって図３に示すように曲げられ、支持
部材６，７には元の形状状態に戻るような反力が生じ
る。しかし、本実施例では、屈曲部６ａ，７ａの部分
が、他の部分６ｂ，６ｃ，７ｂ，７ｃに比べて硬度が小
さいので、その屈曲部６ａ，７ａの部分がねじれて支持
部材６，７に生じる反力が緩和される。このため、振動
体２の屈曲振動を抑圧する方向に働く支持部材６，７の
反力が小さくなり、振動子１の効率よい自由振動が得ら
れる。従って、この振動子１によって構成される振動ジ
ャイロ等の感度が向上する。Next, the operation of the vibrator support structure configured as described above will be described. When a drive signal is applied to the driving piezoelectric elements 3 and 4, the vibrating body 2 flexurally vibrates in a direction orthogonal to a surface on which the driving piezoelectric elements 3 and 4 are not formed, as shown in FIG. Accordingly, a voltage is generated in the detecting piezoelectric element 5. At this time, the supporting members 6 and 7 are bent at their horizontal portions 6b and 7b and vertical portions 6c and 7c by bending vibration of the vibrating body 2 as shown in FIG. A reaction force that returns to the shape is generated. However, in this embodiment, since the bent portions 6a and 7a have a smaller hardness than the other portions 6b, 6c, 7b and 7c, the bent portions 6a and 7a are twisted and the supporting members 6 and 7 are twisted. The reaction force generated in is relaxed. Therefore, the reaction force of the support members 6 and 7 acting in the direction of suppressing the flexural vibration of the vibrating body 2 becomes small, and efficient free vibration of the vibrator 1 can be obtained. Therefore, the sensitivity of the vibration gyro or the like formed by the vibrator 1 is improved.

【００１１】[0011]

【発明の効果】以上説明してきたように、本発明によれ
ば、振動体を支持する支持部材は、略コ字形の屈曲部を
他の部分に比べて硬度を小さく形成したため、その屈曲
部の部分で支持部材に生じる反力が緩和されて振動子の
効率のよい自由振動を得ることができ、その振動子によ
って構成される振動ジャイロ等の感度を向上させること
ができる。As described above, according to the present invention, the supporting member for supporting the vibrating member has the substantially U-shaped bent portion formed to have a hardness smaller than that of the other portions. The reaction force generated in the support member is relaxed at a portion, and efficient free vibration of the vibrator can be obtained, and the sensitivity of a vibration gyro or the like configured by the vibrator can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明に係る振動子の支持構造の実施例を示す
斜視図である。FIG. 1 is a perspective view showing an embodiment of a vibrator support structure according to the present invention.

【図２】図１のＡ矢視図である。FIG. 2 is a view on arrow A in FIG.

【図３】上記実施例の作用を説明するための図である。FIG. 3 is a diagram for explaining the operation of the above embodiment.

【図４】従来の振動子の支持構造を示す斜視図である。FIG. 4 is a perspective view showing a conventional support structure for a vibrator.

【図５】図４のＢ矢視図である。5 is a view on arrow B of FIG. 4. FIG.

【図６】他の従来例を示す斜視図である。FIG. 6 is a perspective view showing another conventional example.

【図７】図６のＣ矢視図である。FIG. 7 is a view on arrow C in FIG.

【符号の説明】[Explanation of symbols]

１ 振動子 ２ 振動体 ３，４ 駆動用圧電素子 ５ 検出用圧電素子 ６，７ 支持部材 ６ａ，７ａ 屈曲部 １２，１３ 基板 DESCRIPTION OF SYMBOLS 1 vibrator 2 vibrating body 3,4 driving piezoelectric element 5 detection piezoelectric element 6,7 support member 6a, 7a bent portion 12,13 substrate

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】 多角柱状の振動体及び該振動体における
非平行の２つの側面に取付けられ当該振動体を振動させ
る駆動用圧電素子を含む振動子を、前記振動体のノード
点付近において前記２つの側面から等距離で且つ当該振
動体の長手方向の一直線上の２点で略コ字形の支持部材
によりそれぞれ支持し、該支持部材の各端部を基板上に
固定して前記振動子を空間中に支持してなる振動子の支
持構造において、 前記支持部材は、略コ字形の屈曲部を他の部分に比べて
硬度を小さく形成してなることを特徴とする振動子の支
持構造。1. A vibrator including a polygonal prism vibrating body and a driving piezoelectric element attached to two non-parallel side surfaces of the vibrating body and vibrating the vibrating body, wherein the vibrating body is provided near the node point of the vibrating body. The vibrators are supported by a substantially U-shaped support member at two points equidistant from one side surface and on a straight line in the longitudinal direction of the vibrating body, and each end of the support member is fixed on a substrate to space the vibrator. In the vibrator support structure supported inside, the support member has a substantially U-shaped bent portion having a hardness smaller than that of other portions.