JPH02228518A - Support structure of vibrator - Google Patents
Support structure of vibratorInfo
- Publication number
- JPH02228518A JPH02228518A JP1051097A JP5109789A JPH02228518A JP H02228518 A JPH02228518 A JP H02228518A JP 1051097 A JP1051097 A JP 1051097A JP 5109789 A JP5109789 A JP 5109789A JP H02228518 A JPH02228518 A JP H02228518A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- support
- length
- bending vibration
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005452 bending Methods 0.000 abstract description 21
- 238000001514 detection method Methods 0.000 abstract description 8
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 230000001629 suppression Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は振動子の支持構造に関し、特にたとえば振動
ジャイロなどに用いられる屈曲振動モードを有する振動
子の支持構造に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a support structure for a vibrator, and more particularly to a support structure for a vibrator having a bending vibration mode used in, for example, a vibrating gyroscope.
（従来技術）
第４図はこの発明の背景となる従来の振動子の支持構造
の一例を示す斜視図である。この振動子の支持構造では
、３角柱状の振動子１の一方のノード点付近に支持部材
２ａおよび２ｂが接続される。これらの支持部材２ａ、
２ｂはたとえば金属線などで形成され、振動子１の稜線
部分に接続される。同様に、振動子１の他方のノード点
付近にも、支持部材３ａおよび３ｂが接続される。これ
らの支持部材３ａ、３ｂも、それぞれ支持部材２ａ、２
ｂと共通の稜線部分に接続される。したがって、このよ
うな振動子１は、支持部材２ａ、２ｂおよび支持部材３
ａ、３ｂの接続点を支点として屈曲振動をする。(Prior Art) FIG. 4 is a perspective view showing an example of a conventional vibrator support structure, which is the background of the present invention. In this vibrator support structure, support members 2a and 2b are connected near one node point of the triangular prism-shaped vibrator 1. These support members 2a,
2b is formed of, for example, a metal wire, and is connected to the ridgeline portion of the vibrator 1. Similarly, support members 3a and 3b are also connected near the other node point of the vibrator 1. These support members 3a and 3b are also supported by support members 2a and 2, respectively.
It is connected to the common ridgeline with b. Therefore, such a vibrator 1 includes support members 2a, 2b and support member 3.
Bending vibration is made using the connection point of a and 3b as a fulcrum.
また、第５図に示すように、振動子１にそのノード点を
通る貫通孔４を形成し、これらの貫通孔４に支持部材５
を通すことによって、振動子１を支持する支持構造があ
った。このような支持構造を採用すれば、振動子１の屈
曲振動が抑圧されず、効率のよい振動を得ることができ
る。Furthermore, as shown in FIG.
There was a support structure that supported the vibrator 1 by passing it through. By employing such a support structure, the bending vibration of the vibrator 1 is not suppressed, and efficient vibration can be obtained.
（発明が解決しようとする課題）
しかしながら、第４図に示すような支持構造では、振動
子が屈曲振動をする時に、たとえば第６図に示すように
、２つのノード点付近の支持部材が互いに反対方向に屈
曲してしまう。これらの支持部材が屈曲することによっ
て、振動子にその屈曲振動を抑圧する向きの力が加わる
。そのため、このような支持構造では、効率のよい振動
を得ることができない。(Problem to be Solved by the Invention) However, in the support structure shown in FIG. 4, when the vibrator performs bending vibration, the support members near the two node points are mutually connected to each other, as shown in FIG. 6, for example. It bends in the opposite direction. By bending these support members, a force is applied to the vibrator in a direction that suppresses the bending vibration. Therefore, with such a support structure, efficient vibration cannot be obtained.
また、第５図に示すような支持構造では、振動子に貫通
孔を形成しかつ支持部材を通すため、その構造が複雑と
なり、組立も面倒になる。Further, in the support structure shown in FIG. 5, a through hole is formed in the vibrator and the support member is passed through, making the structure complicated and the assembly difficult.
それゆえに、この発明の主たる目的は、振動子の振動が
抑圧されず、構造が簡単で、かつ組立の容易な、振動子
の支持構造を提供することである。Therefore, the main object of the present invention is to provide a support structure for a vibrator that does not suppress the vibration of the vibrator, has a simple structure, and is easy to assemble.
（課題を解決するための手段）
この発明は、３角柱状の振動子の支持構造であって、振
動子はその一方のノード点付近において振動子側部の２
つの稜線部分で支持され、かつその他方のノード点付近
において振動子側部の他の稜線部分で支持される、振動
子の支持構造である。(Means for Solving the Problems) The present invention provides a support structure for a triangular prism-shaped vibrator, in which the vibrator has two sides of the vibrator in the vicinity of one node point.
This is a support structure for a vibrator that is supported by one ridgeline portion and supported by another ridgeline portion of the vibrator side near the other node point.
（作用）
振動子側部の３つの稜線部分には、それぞれ１つの支持
点しかないため、振動子が屈曲振動をした時に、振動を
抑圧する方向に力が加わらない。(Function) Since each of the three ridgeline portions on the side of the vibrator has only one support point, when the vibrator undergoes bending vibration, no force is applied in the direction of suppressing the vibration.
さらに、振動子を支持するための支持台から振動子の２
つの稜線部分までの長さを振動子の厚みと同じ長さにし
、支持台から他の稜線部分までの長さをその２倍にする
ことによって、屈曲振動時におけるそれぞれの支持点の
変位量の比と支持台からそれぞれの支持点までの長さの
比が等しくなる。Furthermore, two parts of the vibrator are connected to the support base for supporting the vibrator.
By making the length from one ridgeline the same as the thickness of the vibrator, and by making the length from the support base to the other ridgeline twice that length, the amount of displacement of each support point during bending vibration can be reduced. The ratio and the ratio of the length from the support base to each support point become equal.
（発明の効果） この発明によれば、振動子の屈曲振動が抑圧されない。(Effect of the invention) According to this invention, the bending vibration of the vibrator is not suppressed.
しかも、振動子の屈曲振動時におけるそれぞれの支持点
の変位量の比と支持台から支持点までの長さの比を等し
くすることによって、振動子に自由振動を与えることが
でき、振動子は効率のよい振動を行うことができる。Furthermore, by making equal the ratio of the displacement of each support point during bending vibration of the vibrator and the ratio of the length from the support base to the support point, it is possible to give free vibration to the vibrator, and the vibrator Enables efficient vibration.
さらに、このような振動子の支持構造では、振動子に貫
通孔などを形成する必要がなく、構造が簡単でかつ組立
が容易となる。Further, in such a support structure for a vibrator, there is no need to form a through hole or the like in the vibrator, and the structure is simple and easy to assemble.
この発明の上述の目的、その他の目的、特徴および利点
は、図面を参照して行う以下の実施例の詳細な説明から
一層明らかとなろう。The above objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.
（実施例）
第１図はこの発明の振動子の支持構造を利用した振動ジ
ャイロを示す斜視図であり、第２図は第１図に示す振動
ジャイロを正面から見た図解図である。この振動ジャイ
ロ１０は振動子１２を含む。(Example) FIG. 1 is a perspective view showing a vibrating gyroscope using the vibrator support structure of the present invention, and FIG. 2 is an illustrative view of the vibrating gyroscope shown in FIG. 1 viewed from the front. This vibrating gyroscope 10 includes a vibrator 12.
振動子１２は、たとえば正３角柱状に形成される。The vibrator 12 is formed, for example, in the shape of a regular triangular prism.
この振動子１２は、たとえばエリンバ、鉄−ニソケル合
金１石英、ガラス、水晶、セラミックなど、−船釣に機
械的な振動を生じる材料で形成される。The vibrator 12 is made of a material that causes mechanical vibrations when fishing on a boat, such as Erimba, iron-Nisokel alloy 1 quartz, glass, crystal, and ceramic.
振動子１２の３つの側面の中央部には、それぞれ圧電素
子１４．１６および１８が形成される。この圧電素子１
４は、第２図に示すように、圧電体１４ａの両面に電極
１４ｂおよび１４ｃが形成されたものである。そして、
一方の電極１４Ｃが、振動子１２の側面に接着される。Piezoelectric elements 14, 16 and 18 are formed in the center of the three sides of the vibrator 12, respectively. This piezoelectric element 1
4, as shown in FIG. 2, electrodes 14b and 14c are formed on both sides of a piezoelectric body 14a. and,
One electrode 14C is adhered to the side surface of the vibrator 12.
同様に、圧電素子１６も、圧電体１６ａの両面に電極１
６ｂおよび１６ｃが形成され、一方の電極１６ｃが振動
子１２の側面に接着される。さらに、圧電素子１日も、
圧電体１８ａの両面に電極１８ｂおよび１８Ｃが形成さ
れ、一方の電極１８ｃが振動子１２の側面に接着される
。Similarly, the piezoelectric element 16 also has electrodes 1 on both sides of the piezoelectric body 16a.
6b and 16c are formed, and one electrode 16c is adhered to the side surface of the vibrator 12. Furthermore, the piezoelectric element can also be used for one day.
Electrodes 18b and 18C are formed on both sides of the piezoelectric body 18a, and one electrode 18c is bonded to the side surface of the vibrator 12.
この実施例では、圧電素子１４および１６が信号検出用
として用いられ、圧電素子１８が駆動用として用いられ
る。したがって、圧電素子１８に駆動信号を印加するこ
とによって、振動子１２は、圧電素子１８の形成された
面に直交する方向に屈曲振動をする。この場合、振動子
１２のノード点は、振動子１２の長手方向の長さをＬと
してその厚みをＴとすると、振動子１２の長手方向の両
端からそれぞれ０．２２４Ｌの長さだけ内側でかつ下面
から１／３Ｔの高さにある。そのため、この振動子１２
において、一方のノード点を含む断面の正３角形の底辺
部分と他方のノード点を含む断面の正３角形の頂点部分
とは、１：２の変位量の比で変位する。In this embodiment, piezoelectric elements 14 and 16 are used for signal detection, and piezoelectric element 18 is used for driving. Therefore, by applying a drive signal to the piezoelectric element 18, the vibrator 12 bends and vibrates in a direction perpendicular to the plane on which the piezoelectric element 18 is formed. In this case, if the length of the vibrator 12 in the longitudinal direction is L and its thickness is T, the node points of the vibrator 12 are located inside by a length of 0.224L from both ends of the vibrator 12 in the longitudinal direction, and It is located at a height of 1/3T from the bottom surface. Therefore, this vibrator 12
In this case, the base portion of the regular triangle in the cross section including one node point and the apex portion of the regular triangle in the cross section including the other node point are displaced at a displacement ratio of 1:2.
この振動子１２には、屈曲振動の一方のノード点を含む
断面の正３角形の底辺部分の両端に支持部材２０および
２２が接続される。すなわち、これらの支持部材２０．
２２は、振動子１２の駆動用圧電素子１８形成面の両側
の２つの稜線部分においてそれらの一端からたとえば０
．２２４Ｌの長さだけ内側の部分に接続される。そして
、これらの支持部材２０．２２は支持台２４に溶接、接
着および螺子止め等の方法で固定される。Support members 20 and 22 are connected to this vibrator 12 at both ends of the bottom portion of a regular triangular cross section that includes one node point of bending vibration. That is, these support members 20.
22 is, for example, 0 from one end of two ridgeline portions on both sides of the driving piezoelectric element 18 forming surface of the vibrator 12.
．． It is connected to the inner part by a length of 224L. These support members 20 and 22 are fixed to the support base 24 by welding, gluing, screwing, or the like.
また、振動子１２には、屈曲振動の他方のノード点を含
む断面の正３角形の頂点部分に支持部材２６が接続され
る。すなわち、この支持部材２６は、振動子１２の検出
用圧電素子１４形成面と検出用圧電素子１６形成面との
間の稜線部分においてその他端からたとえば０゜２２４
Ｌの長さだけ内側の部分に接続される。そして、支持部
材２６は振動子１２の両側に延びて折れ曲がり、支持台
２４に固定される。したがって、振動子１２は、屈曲振
動の他方のノード点付近において、支持部材２６に吊り
下げられた状態になる。Further, a support member 26 is connected to the vibrator 12 at the apex portion of the regular triangle in the cross section that includes the other node point of the bending vibration. That is, the support member 26 is tilted at an angle of, for example, 0° 224° from the other end in the ridgeline portion between the detection piezoelectric element 14 forming surface and the detection piezoelectric element 16 forming surface of the vibrator 12.
It is connected to the inner part by a length of L. The support member 26 extends to both sides of the vibrator 12, is bent, and is fixed to the support base 24. Therefore, the vibrator 12 is suspended from the support member 26 near the other node of bending vibration.
振動子１２および支持部材２０．２２の接続点と支持台
２４との間の長さり、は振動子１２の厚みＴと同じ長さ
に設定される。さらに、振動子１２および支持部材２６
の接続点と支持台２４との間の長さＬ２は、振動子１２
および支持部材２０２２と支持台２４との間の長さし、
の２倍になるように設定される。これらの支持部材２０
，２２および２６は、たとえば導電ペーストを用いて振
動子１２に接着されたり、溶接などによって振動子１２
に接続される。これらの支持部材２０２２および２６を
アース線や接続線として使用することができる。The length between the connection point of the vibrator 12 and the support members 20 and 22 and the support base 24 is set to be the same length as the thickness T of the vibrator 12. Furthermore, the vibrator 12 and the support member 26
The length L2 between the connection point of the vibrator 12 and the support base 24 is
and the length between the support member 2022 and the support stand 24,
is set to be twice as large. These support members 20
, 22 and 26 are bonded to the vibrator 12 using conductive paste, or by welding or the like.
connected to. These support members 2022 and 26 can be used as ground wires or connection wires.
この振動ジャイロ１０では、駆動用圧電素子１８に駆動
信号を印加することによって、振動子１２が屈曲振動し
、それに応じて検出用圧電素子１４および１６に電圧が
発生する。これらの検出用圧電素子１４および１６から
の出力電圧の差を測定すれば、振動ジャイロ１０の無回
転時の出力を小さくすることができる。この時、３つの
支持部材２”０．２２および２６は、それぞれ振動子１
２の異なる稜線部分に接続されているため、これらの支
持部材２０．２２および２６によって屈曲振動を抑圧す
る方向に力が加わらない。しかも、支持台２４から支持
部材２６の接続された支持点までの長さが、支持台から
支持部材２０．２２の接続された接続点までの長さの２
倍に設定されているため、第３図に示すように、これら
の長さの比と屈曲振動時における２つのノード点付近の
支持点における変位量ｄ、、ｄ２の比とが等しくなる。In this vibrating gyroscope 10, by applying a drive signal to the drive piezoelectric element 18, the vibrator 12 bends and vibrates, and a voltage is generated in the detection piezoelectric elements 14 and 16 accordingly. By measuring the difference between the output voltages from these detection piezoelectric elements 14 and 16, the output when the vibrating gyroscope 10 is not rotating can be reduced. At this time, the three supporting members 2"0.22 and 26 are respectively connected to the vibrator 1.
Since these support members 20, 22 and 26 are connected to two different ridgeline portions, no force is applied in the direction of suppressing bending vibration. Moreover, the length from the support base 24 to the connected support point of the support member 26 is 2 times the length from the support base to the connection point where the support member 20.22 is connected.
As shown in FIG. 3, the ratio of these lengths becomes equal to the ratio of the displacement amounts d, d2 at the support points near the two node points during bending vibration.
したがって、振動子１２は自由振動を得ることができ、
効率よく振動させることができる。Therefore, the vibrator 12 can obtain free vibration,
It can be vibrated efficiently.
振動ジャイロ１０がその軸方向を中心として回転すると
、コリオリカによって振動体１２の振動方向が変わり、
検出用圧電素子１４および１６に発生する電圧に差が生
じる。したがって、これらの検出用圧電素子１４および
１６の出力電圧の差を検出すれば、大きな出力を得るこ
とができる。When the vibrating gyroscope 10 rotates around its axis, the direction of vibration of the vibrating body 12 changes due to Coriolis,
A difference occurs between the voltages generated in the detection piezoelectric elements 14 and 16. Therefore, by detecting the difference between the output voltages of these detection piezoelectric elements 14 and 16, a large output can be obtained.
したがって、このような振動ジャイロ１０では、無回転
時の出力と回転時の出力との差が大きく、Ｓ／Ｎ比を大
きくすることができる。Therefore, in such a vibrating gyroscope 10, the difference between the output when not rotating and the output when rotating is large, and the S/N ratio can be increased.
なお、上述の実施例では、この発明の振動子の支持構造
を利用した振動ジャイロについて説明したが、この振動
子の支持構造は加速度センサなど屈曲振動を利用した他
のセンサに適用可能である。In the above-described embodiment, a vibrating gyroscope using the vibrator support structure of the present invention has been described, but this vibrator support structure can be applied to other sensors that utilize bending vibration, such as an acceleration sensor.
本実施例では支持部材の長さを２：１で示したが、これ
以外の長さでも振動漏れの抑制効果のあることを申しそ
えておく。In this embodiment, the length of the support member is shown as 2:1, but it should be noted that other lengths can also have the effect of suppressing vibration leakage.
第１図はこの発明の振動子の支持構造を応用した振動ジ
ャイロを示す斜視図である。
第２図は第１図に示す振動ジャイロを正面から見た図解
図である。
第３図は第１図に示す振動ジャイロが屈曲した状態を示
す図解図である。
第４図はこの発明の背景となる従来の振動子の支持構造
を示す斜視図である。
第５図はこの発明の背景となる従来の振動子の支持構造
の他の例を示す斜視図である。
第６図は第４図に示す従来の支持構造を応用した振動子
の屈曲振動の状態を示す図解図である。
図において、１０はこの発明の振動子の支持構造を用い
た振動ジャイロ、１２は振動子、１４゜１６および１８
は圧電素子、２０．２２および２６は支持部材、２４は
支持台を示す。
特許出願人 株式会社 村田製作所
代理人 弁理士 岡 １） 全 啓
図FIG. 1 is a perspective view showing a vibrating gyroscope to which the vibrator support structure of the present invention is applied. FIG. 2 is an illustrative view of the vibrating gyroscope shown in FIG. 1, viewed from the front. FIG. 3 is an illustrative view showing the vibrating gyroscope shown in FIG. 1 in a bent state. FIG. 4 is a perspective view showing a conventional vibrator support structure, which is the background of the present invention. FIG. 5 is a perspective view showing another example of a conventional vibrator support structure, which is the background of the present invention. FIG. 6 is an illustrative diagram showing the state of bending vibration of a vibrator to which the conventional support structure shown in FIG. 4 is applied. In the figure, 10 is a vibrating gyroscope using the vibrator support structure of the present invention, 12 is a vibrator, 14° 16 and 18
20, 22 and 26 are support members, and 24 is a support base. Patent applicant Murata Manufacturing Co., Ltd. Representative Patent attorney Oka 1) Keizu Zen
Claims (1)
はその一方のノード点付近において前記振動子側部の２
つの稜線部分で支持され、かつその他方のノード点付近
において前記振動子側部の他の稜線部分で支持される、
振動子の支持構造。 ２ 前記振動子は支持台に支持され、前記支持台から前
記２つの稜線部分までの長さを前記振動子の厚みと同じ
長さにし、前記支持台から前記他の稜線部分までの長さ
を前記支持台から前記２つの稜線部分までの長さの２倍
にした、特許請求の範囲第１項記載の振動子の支持構造
。[Scope of Claims] 1. A support structure for a triangular prism-shaped vibrator, wherein the vibrator has two sides of the vibrator in the vicinity of one node point.
supported by one ridgeline portion, and supported by another ridgeline portion of the vibrator side near the other node point;
Support structure for the vibrator. 2. The vibrator is supported by a support base, the length from the support base to the two ridgeline portions is the same as the thickness of the vibrator, and the length from the support base to the other ridgeline portion is the same as the thickness of the vibrator. The vibrator support structure according to claim 1, wherein the length from the support base to the two ridgeline portions is twice the length.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1051097A JPH02228518A (en) | 1989-03-02 | 1989-03-02 | Support structure of vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1051097A JPH02228518A (en) | 1989-03-02 | 1989-03-02 | Support structure of vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02228518A true JPH02228518A (en) | 1990-09-11 |
Family
ID=12877308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1051097A Pending JPH02228518A (en) | 1989-03-02 | 1989-03-02 | Support structure of vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02228518A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0552572A (en) * | 1991-08-28 | 1993-03-02 | Akai Electric Co Ltd | Supporting structure for vibrator |
| US5623705A (en) * | 1994-03-18 | 1997-04-22 | Nikon Corporation | Apparatus for inspecting blur correction camera, blur correction camera, and method of inspecting blur correction camera |
| US5802403A (en) * | 1994-03-18 | 1998-09-01 | Nikon Corporation | Apparatus for inspecting blur correction camera, blur correction camera, and method of inspecting blur correction camera |
-
1989
- 1989-03-02 JP JP1051097A patent/JPH02228518A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0552572A (en) * | 1991-08-28 | 1993-03-02 | Akai Electric Co Ltd | Supporting structure for vibrator |
| US5254898A (en) * | 1991-08-28 | 1993-10-19 | Akai Electric Co., Ltd. | Vibrator |
| US5623705A (en) * | 1994-03-18 | 1997-04-22 | Nikon Corporation | Apparatus for inspecting blur correction camera, blur correction camera, and method of inspecting blur correction camera |
| US5634145A (en) * | 1994-03-18 | 1997-05-27 | Nikon Corporation | Apparatus for inspecting blur correction camera, blur correction camera, and method of inspecting blur correction camera |
| US5802403A (en) * | 1994-03-18 | 1998-09-01 | Nikon Corporation | Apparatus for inspecting blur correction camera, blur correction camera, and method of inspecting blur correction camera |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3211562B2 (en) | Piezoelectric vibrator | |
| JPH06147902A (en) | Vibration gyro | |
| JPH0313006A (en) | Support structure of vibrator | |
| JPH08278146A (en) | Vibrating gyro | |
| JPH02228518A (en) | Support structure of vibrator | |
| JP3166522B2 (en) | Acceleration sensor | |
| JP2741620B2 (en) | Vibrator support structure | |
| EP0732566B1 (en) | Vibrating gyroscope | |
| JP3293487B2 (en) | Vibrating gyro | |
| EP0684450B1 (en) | Supporting structure of vibrator | |
| JP3407635B2 (en) | Vibrator for vibrating gyroscope | |
| JPH02228519A (en) | Support construction of vibrator | |
| JP3293486B2 (en) | Vibrating gyro | |
| JPH0251066A (en) | Vibration gyroscope | |
| JP3282442B2 (en) | Vibrating gyro | |
| JPH06174474A (en) | Support structure for vibrator | |
| JP2536151B2 (en) | Vibrating gyro | |
| JPH06201387A (en) | Oscillating gyro | |
| JPH1194558A (en) | Oscillation gyro | |
| JPH0510763A (en) | Vibration gyroscope | |
| JPH0674772A (en) | Supporting structure for oscillator | |
| JPH05280990A (en) | Vibration gyro | |
| JPH07128063A (en) | Oscillation gyro | |
| JPH07103769A (en) | Vibration gyro | |
| JP2002257550A (en) | Piezoelectric vibration gyro |