JPH058111A - Method and device for processing groove in round bar material - Google Patents
Method and device for processing groove in round bar materialInfo
- Publication number
- JPH058111A JPH058111A JP3191108A JP19110891A JPH058111A JP H058111 A JPH058111 A JP H058111A JP 3191108 A JP3191108 A JP 3191108A JP 19110891 A JP19110891 A JP 19110891A JP H058111 A JPH058111 A JP H058111A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- shaft
- processed
- outer peripheral
- peripheral surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012545 processing Methods 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title abstract description 20
- 239000000463 material Substances 0.000 title abstract 2
- 238000005868 electrolysis reaction Methods 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 230000002093 peripheral effect Effects 0.000 claims description 37
- 239000008151 electrolyte solution Substances 0.000 claims description 15
- 238000005096 rolling process Methods 0.000 claims description 9
- 238000003672 processing method Methods 0.000 claims description 5
- 238000003754 machining Methods 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 239000003792 electrolyte Substances 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 3
- 230000009471 action Effects 0.000 abstract description 2
- 238000004090 dissolution Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 description 10
- 230000000873 masking effect Effects 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000003854 Surface Print Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C17/00—Sliding-contact bearings for exclusively rotary movement
- F16C17/02—Sliding-contact bearings for exclusively rotary movement for radial load only
- F16C17/026—Sliding-contact bearings for exclusively rotary movement for radial load only with helical grooves in the bearing surface to generate hydrodynamic pressure, e.g. herringbone grooves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
- F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
- F16C33/106—Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
- F16C33/107—Grooves for generating pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/14—Special methods of manufacture; Running-in
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H2200/00—Specific machining processes or workpieces
- B23H2200/10—Specific machining processes or workpieces for making bearings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Fluid Mechanics (AREA)
- Thermal Sciences (AREA)
- Milling Processes (AREA)
- Sliding-Contact Bearings (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は円形棒状物の外周面へ任
意のパターンの溝を加工する方法及びその装置に関す
る。更に詳述すると、本発明は、例えば動圧軸受の回転
軸の外周面に形成される動圧発生用の溝の加工に適する
加工方法及びその装置に関する。尚、本明細書におい
て、円形棒状物とは外周面形状が円形の軸、棒状物ある
いは円筒などを含む。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and a device for processing grooves having an arbitrary pattern on the outer peripheral surface of a circular rod. More specifically, the present invention relates to a processing method and apparatus suitable for processing a groove for generating dynamic pressure formed on the outer peripheral surface of a rotary shaft of a dynamic pressure bearing, for example. In the present specification, the circular rod-shaped object includes a shaft, a rod-shaped object or a cylinder whose outer peripheral surface shape is circular.
【０００２】[0002]
【従来の技術】通常、円形棒状物の外周面に複雑なパタ
ーンで浅い溝を形成する場合は、例えば動圧軸受の回転
軸の表面に動圧発生用の溝（グルーブ）を形成する場合
には、ホトエッチングや印刷エッチングあるいは転造に
よることが一般的である。2. Description of the Related Art Usually, when a shallow groove is formed in a complicated pattern on the outer peripheral surface of a circular rod-shaped object, for example, when a groove for generating a dynamic pressure is formed on the surface of a rotary shaft of a dynamic pressure bearing. Is generally by photo-etching, print-etching or rolling.
【０００３】ホトエッチングによる溝の成形は、ホトレ
ジスト膜とマスキングを使った部分エッチングによって
行なわれる。ホトレジスト膜は、回転軸の外周面に均一
に塗布され、マスキングを通した露光後に残された部分
によって回転軸の表面を被う。したがって、ホトレジス
ト膜が除かれた軸表面部分だけがエッチングされてマス
キングによってパターニングされたのと同じ溝が形成さ
れる。Groove formation by photoetching is performed by partial etching using a photoresist film and masking. The photoresist film is uniformly applied to the outer peripheral surface of the rotating shaft, and covers the surface of the rotating shaft with the portion left after the exposure through the masking. Therefore, only the shaft surface portion where the photoresist film is removed is etched to form the same groove as that patterned by masking.
【０００４】また、印刷エッチングによる溝の成形も部
分エッチングによって行なわれる。この場合、レジスト
膜は、曲面印刷によって軸表面の必要な部分にだけ塗布
され、エッチング後は除去される。The formation of grooves by printing etching is also performed by partial etching. In this case, the resist film is applied only on a necessary portion of the shaft surface by curved surface printing, and is removed after etching.
【０００５】更に、転造による溝の成形は得ようとする
溝形状とは逆の突起を有する円柱状の工具を用いて行な
われる。円柱状の工具を被加工軸に押しつけながら、塑
性加工により工具表面の突起で被加工軸の表面に溝を形
成して溝パターンを転写するものである。Further, the forming of the groove by rolling is performed by using a cylindrical tool having a projection having a shape opposite to that of the groove to be obtained. While pressing a cylindrical tool against a shaft to be processed, a groove on the surface of the shaft to be processed is formed by a projection on the tool surface by plastic working and the groove pattern is transferred.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、ホトエ
ッチング法または印刷エッチング法は、レジスト膜の塗
布とその除去、不溶解部分のマスキング工程、化学エッ
チング処理等、多工程でありコスト上難点がある。ま
た、転造法はその製造装置及び工具が高価であることか
ら、大量生産品でなければコスト的メリットは得られ
ず、また高精度を要する回転軸に対しては塑性変形によ
る変形のため、研削等の追加工が必要となる。更に加え
て、薄肉円筒状の外面へ加工する場合にはワーク全体の
変形に対する補強のために特別の工夫が必要である。こ
のように従来の工法によっては円柱状ないし円筒状の外
周面へ安価に溝を形成することは困難である。However, the photo-etching method or the print-etching method is a multi-step process such as coating and removing a resist film, masking an insoluble portion, and chemical etching treatment, and has a cost problem. In addition, since the rolling method is expensive for its manufacturing equipment and tools, unless it is a mass-produced product, no cost advantage can be obtained, and for a rotating shaft that requires high accuracy, deformation due to plastic deformation, Additional work such as grinding is required. In addition, when machining a thin-walled cylindrical outer surface, special measures are required to reinforce the deformation of the entire work. As described above, it is difficult to inexpensively form the groove on the outer peripheral surface of the columnar shape or the cylindrical shape by the conventional method.
【０００７】本発明は、工程数が極めて少なく、しかも
簡単な装置で極めて安いコストで円形外周面への溝加工
が可能な円形棒状物への溝加工方法及び装置を提供する
ことを目的とする。[0007] It is an object of the present invention to provide a groove processing method and device for a circular rod-like object, which has a very small number of steps and is capable of forming a groove on a circular outer peripheral surface at a very low cost with a simple device. .
【０００８】[0008]
【課題を解決するための手段】かかる目的を達成するた
め、本発明の円形棒状物への溝加工方法は、転写すべき
凹部で構成される任意のパターンをその外周面に有する
円形棒状物でありかつ前記凹部内の表面が導電性であり
凹部を含まない外周面が電気絶縁性である電極と、円形
棒状物の金属製被加工軸とを平行でかつ互いの外周面が
接触ないし近接させて配置し、かつ前記電極と前記被加
工軸とを各々の軸心の回りに同一周速度で転動させ、そ
の両者の隙間に電解液を供給しつつ前記電極と前記被加
工軸との間に電極側が負、被加工軸側が正となる直流電
圧をかけ、電気分解作用により前記電極外周面に形成さ
れた凹部パターンを前記被加工軸の外周面へ溶解により
転写するようにしている。In order to achieve the above object, the method for grooving a circular rod-shaped article according to the present invention is a circular rod-shaped article having an arbitrary pattern constituted of concave portions to be transferred on its outer peripheral surface. And the inner surface of the recess is electrically conductive and the outer peripheral surface not including the recess is electrically insulative, and the metal work shaft made of the circular rod is parallel to each other and their outer peripheral surfaces are in contact with or close to each other. Between the electrode and the shaft to be machined while rolling the electrode and the shaft to be machined around each axis at the same peripheral speed and supplying an electrolytic solution to the gap between them. A negative voltage is applied to the electrode side and a positive side is applied to the processed shaft side, and the concave pattern formed on the outer peripheral surface of the electrode by electrolysis is transferred to the outer peripheral surface of the processed shaft by melting.
【０００９】また、本発明の円形棒状物への溝加工装置
は、転写すべき凹部で構成される任意のパターンをその
外周表面に有する円形棒状物でありかつ前記凹部内の表
面が導電性であり凹部を含まない外周面が電気絶縁性で
ある電極と、円形棒状物の金属製被加工軸を前記電極と
平行でかつ互いの外周面を接触ないし近接させて配置す
る被加工軸保持手段と、前記電極及び前記被加工軸を各
々の軸心回りに転動させる回転手段と、前記電極と前記
被加工軸の隙間に電解液を供給する電解液供給手段と、
前記電極に負、前記被加工軸に正の直流電圧を供印加す
る電圧印加手段とから成り、前記電極外周表面へ形成さ
れた凹部パターンを前記被加工軸の外周面へ電気分解作
用による溶解によって転写するようにしている。Further, the groove processing device for a circular rod-shaped article of the present invention is a circular rod-shaped article having an arbitrary pattern constituted of concave portions to be transferred on its outer peripheral surface, and the surface inside the concave portions is conductive. An electrode whose outer peripheral surface not including a concave portion is electrically insulating, and a processed shaft holding means for arranging a metal processed shaft made of a circular rod-shaped member in parallel with the electrode and in contact or close to each other's outer peripheral surface. Rotating means for rolling the electrode and the shaft to be processed around their respective axes, and an electrolytic solution supplying means for supplying an electrolytic solution to a gap between the electrode and the shaft to be processed,
Voltage application means for applying a negative DC voltage to the electrode and a positive DC voltage to the shaft to be processed, and the concave pattern formed on the outer peripheral surface of the electrode is melted by electrolysis on the outer peripheral surface of the shaft to be processed. I am trying to transfer it.
【００１０】[0010]
【作用】したがって、電極に形成された溝表面と被加工
軸との間で電気分解作用が起こり、電極の溝と対面する
被加工軸の外周面の一部が溶解し、電極の溝が被加工軸
の外周面転写される。Therefore, an electrolysis action occurs between the surface of the groove formed in the electrode and the shaft to be processed, a part of the outer peripheral surface of the shaft to be processed facing the groove of the electrode is melted, and the groove of the electrode is covered. The outer peripheral surface of the processing shaft is transferred.
【００１１】[0011]
【実施例】以下、本発明の構成を図面に示す実施例に基
づいて詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of the present invention will be described in detail below with reference to the embodiments shown in the drawings.
【００１２】図１及び図２に本発明にかかる円形棒状物
への溝加工装置の一実施例を示す。この溝加工装置は、
転写すべき凹部例えば溝２２を外周面に形成した円柱状
ないし円筒状の電極１と、円形棒状物の金属製被加工軸
２を電極１と平行でかつ互いの外周面を接触ないし近接
させて配置する被加工軸保持手段３０と、電極１及び被
加工軸２を各々軸心周りに転動させる回転手段３１と、
電極１と被加工軸２との間に電解液を供給する電解液供
給手段３２と、電極１と被加工軸２との間に直流電圧を
印加する電圧印加手段３３とによって構成されている。
尚、本実施例の被加工軸保持手段３０は、被加工軸２を
受け支える載物軸５と、駆動輪７と、ローラ９及び電極
１によって構成され、電極１に対し平行でかつ電極１の
外周面に接触するように被加工軸２を保持するように設
けられている。また、回転手段３１は電動機１３とプー
リ１０，１２、ベルト１１を介して連動回転し被加工軸
２を回転させる駆動輪７と、取付板３に電極１を回転自
在に支持させる軸受４と、電極１上に固定されたプーリ
１６、ベルト１５、プーリ１６及びこれを回転させる電
動機１７とから成り、被加工軸２と電極１とを同期した
別々の電動機１３，１７で駆動するように設けられてい
る。したがって、本実施例においては被加工軸保持手段
３０と回転手段３１とは構成部品を共用しているが、特
にこれに限定されるものではない。1 and 2 show an embodiment of a groove processing device for a circular rod-like object according to the present invention. This groove processing device
A cylindrical or cylindrical electrode 1 having a concave portion to be transferred, for example, a groove 22 formed on the outer peripheral surface thereof, and a metal workpiece shaft 2 having a circular rod shape, which are parallel to the electrode 1 and have their outer peripheral surfaces contacting or approaching each other. A work shaft holding means 30 to be arranged, a rotating means 31 for rolling the electrode 1 and the work shaft 2 around their respective axial centers,
Electrolytic solution supply means 32 for supplying an electrolytic solution between the electrode 1 and the shaft 2 to be processed and voltage application means 33 for applying a DC voltage between the electrode 1 and the shaft 2 to be processed.
The workpiece shaft holding means 30 of the present embodiment is constituted by a workpiece shaft 5 supporting the workpiece shaft 2, a drive wheel 7, a roller 9 and an electrode 1, and is parallel to the electrode 1 and the electrode 1. It is provided so as to hold the shaft 2 to be processed so as to contact the outer peripheral surface of the. Further, the rotating means 31 is a driving wheel 7 that rotates in conjunction with the electric motor 13 via the pulleys 10, 12 and the belt 11 to rotate the shaft 2 to be processed, and a bearing 4 that rotatably supports the electrode 1 on the mounting plate 3. It comprises a pulley 16 fixed on the electrode 1, a belt 15, a pulley 16 and an electric motor 17 for rotating the pulley 16. The shaft 2 to be processed and the electrode 1 are provided so as to be driven by separate electric motors 13 and 17 which are synchronized with each other. ing. Therefore, in the present embodiment, the processed shaft holding means 30 and the rotating means 31 share components, but the present invention is not limited to this.
【００１３】転写すべき表面凹凸を有する円柱状の電極
１と円柱状の被加工軸２とは、互いに接触して軸心が平
行になるように配置されている。電極１は取付板３に固
定された軸受４により回転自在に保持されている。被加
工軸２は載物軸５上に軸端が載置されて支えられ、駆動
輪７と軸心を平行に接触している。駆動輪７は取付板３
に固着されている軸受６に支持されている。この被加工
軸２の電極１及び駆動輪７に対する接触状態は、被加工
軸２が載物軸５上へ着脱される際に前進後退が可能なロ
ーラ軸８の先端へ回転可能なように保持されたローラ９
によりばね圧あるいはエアシリンダの空気圧等を介して
適当な圧力で押し付けられることにより維持される。ま
た、駆動輪７にはプーリ１０、ベルト１１、プーリ１２
を介して電動機１３の回転が伝達される。一方、電極１
にはプーリ１４、ベルト１５、プーリ１６を介して電動
機１７の回転が伝達される。このような状態において電
極１、被加工軸２、駆動輪７及びローラ９は矢印に示す
方向に回転が与えられ、かつ電極１と被加工軸２はちょ
うど表面の周速度が一致するように、即ち電極１と被加
工軸２との間に滑りが生じないように、電動機１３と電
動機１７の回転速度が設定される。A cylindrical electrode 1 having surface irregularities to be transferred and a cylindrical shaft 2 to be machined are arranged in contact with each other so that their axes are parallel to each other. The electrode 1 is rotatably held by a bearing 4 fixed to a mounting plate 3. The shaft 2 to be machined is supported by the shaft end being mounted on a mounting shaft 5, and the driving wheel 7 and the shaft center are in parallel contact with each other. Drive wheel 7 is mounting plate 3
It is supported by a bearing 6 that is fixed to the. The contact state of the processed shaft 2 with the electrode 1 and the drive wheel 7 is rotatably held to the tip of the roller shaft 8 which can move forward and backward when the processed shaft 2 is attached to and detached from the mounting shaft 5. Roller 9
It is maintained by being pressed by a proper pressure through spring pressure or air pressure of the air cylinder. Further, the drive wheel 7 includes a pulley 10, a belt 11 and a pulley 12.
The rotation of the electric motor 13 is transmitted via. On the other hand, electrode 1
The rotation of the electric motor 17 is transmitted to the motor through the pulley 14, the belt 15, and the pulley 16. In such a state, the electrode 1, the processed shaft 2, the drive wheel 7 and the roller 9 are rotated in the directions indicated by the arrows, and the electrode 1 and the processed shaft 2 have exactly the same peripheral velocities on their surfaces. That is, the rotation speeds of the electric motor 13 and the electric motor 17 are set so that slippage does not occur between the electrode 1 and the shaft 2 to be processed.
【００１４】一方、電極１と被加工軸２の接する近傍の
２つの狭隙部分の軸長方向に沿って被加工軸２の上端か
ら下端へ向かって高速に電解液を噴射するためのノズル
１８ａ，１８ｂが設置されている。このノズル１８ａ，
１８ｂは、図示していない電解液供給ポンプ及びタンク
とで電解液供給手段２２を構成するもので、地板３に取
付けられ支持されている。On the other hand, a nozzle 18a for injecting an electrolytic solution at high speed from the upper end to the lower end of the shaft 2 to be processed along the axial direction of the two narrow gaps in the vicinity of the contact between the electrode 1 and the shaft 2 to be processed. , 18b are installed. This nozzle 18a,
Reference numeral 18b constitutes an electrolytic solution supply means 22 with an electrolytic solution supply pump and a tank (not shown), and is attached to and supported by the main plate 3.
【００１５】また、電極１に嵌合されかつ電気的に接続
されているスリップリング１９に摺接しているブラシ２
０と、載物軸５との間には直流電源２１が繋げられてお
り、電極１がマイナス、被加工軸２がプラスとなるよう
に直流電圧を印加する電圧印加手段３３を構成してい
る。載物軸５は本装置全体から電気的に絶縁されてお
り、自らは導電性を有し被加工軸２に対してのみ電気的
接触を保つように設けられている。その他、被加工軸２
に接する駆動輪７及びローラ９には電気絶縁物を用いる
等の方法によって装置全体と電気的に導通しないように
設けられている。また、電圧印加手段３３は載物軸５を
介して通電する場合ばかりに限定されず、他の装置構成
要素と電気的に絶縁された導電性を有する駆動輪７また
はローラ９を介してプラス電圧を被加工軸２へ供給する
ようにしてもよい。Further, the brush 2 slidably in contact with the slip ring 19 fitted to the electrode 1 and electrically connected thereto.
A DC power supply 21 is connected between 0 and the mounting shaft 5, and constitutes a voltage applying means 33 for applying a DC voltage so that the electrode 1 is negative and the work shaft 2 is positive. . The stage shaft 5 is electrically insulated from the entire apparatus, is electrically conductive, and is provided so as to maintain electrical contact only with the shaft 2 to be processed. Other axes to be processed 2
The drive wheel 7 and the roller 9 that are in contact with are provided so as not to be electrically connected to the entire apparatus by a method such as using an electrical insulator. Further, the voltage applying means 33 is not limited to the case of energizing via the stage shaft 5, but a positive voltage is applied via the drive wheel 7 or the roller 9 which is electrically insulated from the other device constituent elements. May be supplied to the shaft 2 to be processed.
【００１６】電極１は図３に示すように被加工軸２へ転
写すべき凹部例えば動圧発生用の溝２２を外周面に形成
している。この電極１の溝２２内の表面（底及び側壁）
は導電性を有するが、被加工軸２と接触する表面２３は
電気絶縁性でなければならない。このような電極１の作
成方法は、金属表面へ酸化物を形成し、その後、エッチ
ング法あるいはイオンミリング法によって溝２２部分を
食刻すればよい。酸化物の形成方法としては、アルミま
たはアルミ合金に対するアルマイト法またはアルミニウ
ム、ステンレス鋼等に対して酸素雰囲気中で高周波放電
することによる酸化被膜の形成法がある。いずれも極め
て強固でかつ絶縁性の高い被膜を形成することができ
る。その後、レジスト被膜によるマスキングにより上述
の化学エッチングまたはイオンミリングにより任意の深
さに溝２２部分を食刻することができる。As shown in FIG. 3, the electrode 1 has a concave portion to be transferred to the shaft 2 to be processed, for example, a groove 22 for generating a dynamic pressure, which is formed on the outer peripheral surface. The surface (bottom and side walls) in the groove 22 of this electrode 1
Is electrically conductive, but the surface 23 in contact with the work shaft 2 must be electrically insulating. The electrode 1 may be formed by forming an oxide on the metal surface and then etching the groove 22 by an etching method or an ion milling method. As a method for forming an oxide, there is an alumite method for aluminum or an aluminum alloy, or a method for forming an oxide film by high-frequency discharging aluminum, stainless steel or the like in an oxygen atmosphere. Any of these can form a coating film that is extremely strong and has a high insulating property. After that, the groove 22 portion can be etched to an arbitrary depth by the above-described chemical etching or ion milling by masking with a resist film.
【００１７】以上のように構成された溝加工装置によっ
て被加工軸（円形棒状物）２は次のようにして加工され
る。上述のようにして作成された電極１をセットし、被
加工軸２と接触させて両者の表面をお互いに滑りのない
ように逆方向に転動させ、その隙間へノズル１８ａ，１
８ｂから電解液を高速で噴射させる。電解液としては、
通常安価な食塩水が用いられるが特にこれに限定される
ものではない。このような状態で前述のように電極１を
マイナス、被加工軸２がプラスとなるように直流電圧を
印加すると、表面が導電性を有する溝２２部分から被加
工軸２の表面へ通電され、電気分解によって溝２２部分
に対接する近傍の被加工軸２の表面が溶解される。電極
１と被加工軸２がお互いに転動することにより電極１へ
形成された溝パターンが被加工軸２の表面へ溶解転写さ
れる。このような電解加工法によれば、通常の動圧軸受
の動圧用グルーブの溝深さは５〜２０μｍ程度と僅かな
量であるので、高速の加工ができる。溝方向は互いに逆
向きに転写されるため電極１の溝パターンは必要なパタ
ーンに対して対称形となるように形成されていなければ
ならない。The shaft to be processed (circular rod-shaped object) 2 is processed as follows by the groove processing apparatus configured as described above. The electrode 1 produced as described above is set, brought into contact with the shaft 2 to be processed, the surfaces of the two are rolled in the opposite directions so as not to slip with each other, and the nozzles 18a, 1
The electrolytic solution is jetted at high speed from 8b. As the electrolyte,
Inexpensive salt solution is usually used, but not limited to this. In such a state, when a DC voltage is applied so that the electrode 1 is minus and the work shaft 2 is positive as described above, electricity is applied to the surface of the work shaft 2 from the groove 22 portion whose surface has conductivity. By electrolysis, the surface of the shaft 2 to be processed near the groove 22 is melted. The groove pattern formed on the electrode 1 is melt-transferred onto the surface of the shaft 2 to be processed by rolling of the electrode 1 and the shaft 2 to be processed. According to such an electrolytic processing method, since the groove depth of the dynamic pressure groove of a normal dynamic pressure bearing is as small as about 5 to 20 μm, high speed processing can be performed. Since the groove directions are transferred in opposite directions, the groove pattern of the electrode 1 must be formed symmetrically with respect to the required pattern.
【００１８】このようにして被加工軸２に転写された溝
２４の形状は、電極１及び被加工軸２が円柱であるため
の対接面同士の曲率、電極１の溝深さ、溶解される溝の
深さ等に起因する電極１と被加工軸２間の電解液の抵抗
値の分布の仕方によって電極から発生する電気力線が分
散するため鋭角的にはならない。例えば、図４の電極、
被加工軸の断面図に示すように、電極１の溝形状２２に
対して被加工軸２へ食刻された溝形状２４はシャープに
ならずなだらかな広がりを有する。しかし、動圧軸受と
して使用する場合、溝形状がシャープである必要はな
く、広げられる溝幅に対してはあらかじめ電極１側の溝
幅を狭く設定しておけば何ら支障はない。このような転
写の方法は、本発明の主目的である動圧用溝に限られ
ず、転写形状の厳密さを要求しなければ文字や絵模様等
の凹凸の円柱状面への転写適用も可能である。The shape of the groove 24 transferred to the shaft 2 to be processed in this manner is such that the curvature of the contact surfaces of the electrode 1 and the shaft 2 to be processed is a cylinder, the groove depth of the electrode 1 and the melting. The line of electric force generated from the electrode is dispersed depending on the distribution of the resistance value of the electrolytic solution between the electrode 1 and the shaft 2 to be processed due to the depth of the groove or the like. For example, the electrode of FIG.
As shown in the cross-sectional view of the shaft to be processed, the groove shape 24 etched into the shaft 2 to be processed with respect to the groove shape 22 of the electrode 1 is not sharp but has a gentle spread. However, when it is used as a dynamic pressure bearing, the groove shape does not need to be sharp, and there is no problem if the groove width on the electrode 1 side is set narrow in advance with respect to the groove width to be widened. Such a transfer method is not limited to the groove for dynamic pressure, which is the main object of the present invention, and transfer application to a concavo-convex cylindrical surface such as a character or a picture pattern is also possible unless strictness of the transfer shape is required. is there.
【００１９】尚、上述の実施例は本発明の好適な実施の
一例ではあるがこれに限定されるものではなく本発明の
要旨を逸脱しない範囲において種々変形実施可能であ
る。例えば、被加工軸２の支持は、載物軸５に被加工軸
２を把握する弾力性のある爪のようなものを設け、載物
軸５に被加工軸２を載せた状態のまま爪で把持するよう
にしても良い。また、電極１の作成方法においてはレジ
スト膜でマスキングを行った後でアルマイト等の酸化被
膜を形成する手順でもよく、いずれにしても酸化被膜法
による電極の形成は転造法での工具作成コストに比べれ
ば遥かに安価であり、また軸受の直径、長さ等が変わっ
てもある程度の範囲であれば電極１と載物軸５の取付け
位置変更程度で対応ができ、多種少量生産に対しても適
応性のある工法といえる。It should be noted that the above-mentioned embodiment is an example of the preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be made without departing from the gist of the present invention. For example, the workpiece shaft 2 is supported by providing the workpiece shaft 5 with an elastic claw for grasping the workpiece shaft 2, and the workpiece shaft 2 with the workpiece shaft 2 mounted thereon. You may make it hold | grip with. In addition, in the method of forming the electrode 1, a procedure of forming an oxide film such as alumite after masking with a resist film may be used. In any case, the formation of the electrode by the oxide film method is a tool manufacturing cost in the rolling method. It is much cheaper than the above, and even if the bearing diameter, length, etc. change, it can be handled by changing the mounting position of the electrode 1 and the mounting shaft 5 within a certain range, and for a variety of small-volume production. Can be said to be an adaptable construction method.
【００２０】[0020]
【発明の効果】以上の説明より明らかなように、お互い
に軸心を平行にして接触し逆向きにすべりなく転動する
円柱状の電極と被加工軸との間に電解液を供給して電気
分解を行い、電極表面の溝パターンを被加工軸の表面へ
溶解転写するようにしたので、マスキングや露光、塗布
膜の除去等の工程が不要であり、また安価な装置と単純
な工程により高速に溝パターンを形成することが可能と
なり、動圧軸受の製造コストを大幅に下げることができ
る。即ち、本発明の溝加工によると、部分エッチングの
ためのマスクを必要とせず部分的食刻を行うので、マス
キングのための塗膜の形成、除去、露光等の工程がな
く、また転造法のようにワークに過大な力を加える必要
もなく薄肉円筒状の表面へも容易に成形することができ
る。更に本発明の溝加工装置によると、電極に平行に被
加工軸を配置して直流電圧と電解液の供給下に両者を回
転させるという簡単な装置構成にできる。As is apparent from the above description, the electrolytic solution is supplied between the cylindrical electrode and the shaft to be machined which come into contact with each other with their axes parallel to each other and roll in the opposite direction without slipping. Since the groove pattern on the electrode surface is dissolved and transferred to the surface of the shaft to be processed by electrolysis, steps such as masking, exposure, and removal of the coating film are unnecessary, and an inexpensive device and simple process are used. The groove pattern can be formed at high speed, and the manufacturing cost of the dynamic pressure bearing can be significantly reduced. That is, according to the groove processing of the present invention, since partial etching is performed without the need for a mask for partial etching, there is no step of forming a coating film for masking, removing, exposing, etc. It is possible to easily form a thin-walled cylindrical surface without the need to apply an excessive force to the work. Further, according to the groove processing apparatus of the present invention, the shaft to be processed is arranged in parallel with the electrode, and both can be rotated under the supply of the DC voltage and the electrolytic solution.
【図１】本発明の円形棒状物への溝加工方法を実施する
装置の概略構造を示す平面図である。FIG. 1 is a plan view showing a schematic structure of an apparatus for carrying out a groove processing method for a circular rod-shaped object of the present invention.
【図２】同装置の正面図である。FIG. 2 is a front view of the same device.
【図３】電極の一例を示す正面図である。FIG. 3 is a front view showing an example of an electrode.
【図４】加工状態を説明する電極と被加工軸との拡大断
面図である。FIG. 4 is an enlarged cross-sectional view of an electrode and a shaft to be processed for explaining a processing state.
１ 電極
２ 被加工軸（円形棒状物）
５ 電圧印加手段及び被加工軸保持手段を構成する載物
軸
７ 被加工軸保持手段を構成する駆動輪
９ 被加工軸保持手段を構成するローラ
１３ 回転手段を構成する電動機
１７ 回転手段を構成する電動機
１８ａ，１８ｂ 電解液供給手段を構成するノズル
１９ 電圧印加手段を構成するスリップリング
２０ 電圧印加手段を構成するブラシ
２１ 電圧印加手段を構成する直流電源
２２ 溝（転写すべき凹部）
２３ 電極の電気絶縁性外周面
２４ 加工された被加工軸の溝
３０ 被加工軸保持手段
３１ 回転手段
３２ 電解液供給手段
３３ 電圧印加手段DESCRIPTION OF SYMBOLS 1 Electrode 2 Work shaft (circular rod) 5 Load shaft 7 that constitutes voltage applying means and work shaft holding means 7 Drive wheel that constitutes work shaft holding means 9 Roller 13 that constitutes work shaft holding means Rotation Motor 17 constituting means Means 18a and 18b constituting rotating means Nozzle 19 constituting electrolyte supplying means Slip ring 20 constituting voltage applying means Brush 21 constituting voltage applying means DC power source 22 constituting voltage applying means Grooves (recesses to be transferred) 23 Electrically insulating outer peripheral surface of electrode 24 Grooves of machined shaft 30 Machining shaft holding means 31 Rotating means 32 Electrolyte supply means 33 Voltage applying means
Claims (3)
ーンをその外周面に有する円形棒状物でありかつ前記凹
部内の表面が導電性であり凹部を含まない外周面が電気
絶縁性である電極と、円形棒状物の金属製被加工軸とを
平行でかつ互いの外周面が接触ないし近接させて配置
し、かつ前記電極と前記被加工軸とを各々の軸心の回り
に同一周速度で転動させ、その両者の隙間に電解液を供
給しつつ前記電極と前記被加工軸との間に電極側が負、
被加工軸側が正となる直流電圧をかけ、電気分解作用に
より前記電極外周面に形成された凹部パターンを前記被
加工軸の外周面へ溶解により転写することを特徴とする
円形棒状物への溝加工方法。1. A circular rod-shaped article having, on its outer peripheral surface, an arbitrary pattern composed of recesses to be transferred, the surface inside the recesses being electrically conductive, and the outer peripheral surface not containing the recesses being electrically insulating. The electrode and the metal work shaft made of a circular rod are arranged in parallel and their outer peripheral surfaces are in contact with or in close proximity to each other, and the electrode and the work shaft have the same circumferential speed around their respective axial centers. The electrode side is negative between the electrode and the shaft to be processed while supplying the electrolytic solution to the gap between them,
A groove to a circular rod-shaped article, characterized in that a direct-current voltage having a positive value on the processed shaft side is applied, and the concave pattern formed on the outer peripheral surface of the electrode by electrolysis is melted and transferred to the outer peripheral surface of the processed shaft. Processing method.
ーンをその外周表面に有する円形棒状物でありかつ前記
凹部内の表面が導電性であり凹部を含まない外周面が電
気絶縁性である電極と、円形棒状物の金属製被加工軸を
前記電極と平行でかつ互いの外周面を接触ないし近接さ
せて配置する被加工軸保持手段と、前記電極及び前記被
加工軸を各々の軸心回りに転動させる回転手段と、前記
電極と前記被加工軸の隙間に電解液を供給する電解液供
給手段と、前記電極に負、前記被加工軸に正の直流電圧
を供印加する電圧印加手段とから成り、前記電極外周表
面へ形成された凹部パターンを前記被加工軸の外周面へ
電気分解作用による溶解によって転写することを特徴と
する円形棒状物への溝加工装置。2. A circular rod-shaped article having, on its outer peripheral surface, an arbitrary pattern composed of recesses to be transferred, the surface inside the recesses being electrically conductive, and the outer peripheral surface not containing the recesses being electrically insulating. An electrode, a processed shaft holding means for arranging a metal processed shaft of a circular rod-shaped object in parallel with the electrode and making their outer peripheral surfaces in contact with or close to each other, and the shaft center of each of the electrode and the processed shaft. Rotating means for rolling around, electrolytic solution supplying means for supplying an electrolytic solution to the gap between the electrode and the processed shaft, and voltage application for applying a negative DC voltage to the electrode and a positive DC voltage to the processed shaft. A groove machining device for a circular rod-shaped object, comprising: a means for transferring a concave pattern formed on the outer peripheral surface of the electrode to the outer peripheral surface of the shaft to be processed by melting by electrolysis.
く外周表面に電極を構成する金属の酸化被膜を形成して
絶縁することを特徴とする請求項２記載の円形棒状物へ
の溝加工装置。3. The groove for a circular rod-shaped article according to claim 2, wherein the electrode is insulated by forming an oxide film of a metal forming the electrode on the outer peripheral surface except the surface in the recess to be transferred. Processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3191108A JPH058111A (en) | 1991-07-05 | 1991-07-05 | Method and device for processing groove in round bar material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3191108A JPH058111A (en) | 1991-07-05 | 1991-07-05 | Method and device for processing groove in round bar material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH058111A true JPH058111A (en) | 1993-01-19 |
Family
ID=16268990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3191108A Pending JPH058111A (en) | 1991-07-05 | 1991-07-05 | Method and device for processing groove in round bar material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058111A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998023405A1 (en) * | 1996-11-28 | 1998-06-04 | Loadpoint Limited | Method and apparatus for forming recesses in a bearing surface |
| JP2002242958A (en) * | 2001-02-16 | 2002-08-28 | Nsk Warner Kk | End bearing, one-way clutch device, and manufacturing method for end bearing |
-
1991
- 1991-07-05 JP JP3191108A patent/JPH058111A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998023405A1 (en) * | 1996-11-28 | 1998-06-04 | Loadpoint Limited | Method and apparatus for forming recesses in a bearing surface |
| JP2002242958A (en) * | 2001-02-16 | 2002-08-28 | Nsk Warner Kk | End bearing, one-way clutch device, and manufacturing method for end bearing |
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