JPH0550243U - Ultra-high airtight seal member - Google Patents
Ultra-high airtight seal memberInfo
- Publication number
- JPH0550243U JPH0550243U JP10110191U JP10110191U JPH0550243U JP H0550243 U JPH0550243 U JP H0550243U JP 10110191 U JP10110191 U JP 10110191U JP 10110191 U JP10110191 U JP 10110191U JP H0550243 U JPH0550243 U JP H0550243U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- ultra
- seal member
- thin film
- covered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gasket Seals (AREA)
Abstract
(57)【要約】
【目的】吸蔵流体の放出が極小で、相手部材の材質に拘
らず僅かな締付力で良好な密着性が得られる超高密度シ
ール部材を提供する。
【構成】非金属材料から弾性変形自在に形成された本体
１を有するシール部材において、上記本体１が、金属薄
膜２により被覆されてなることを特徴とする。
【作用】本体が金属薄膜で被覆されているから吸蔵流体
の放出量が極小であり、かつ弾性変形自在な非金属材料
から形成されているから僅かな締付力で良好な密着性が
得られる。
(57) [Summary] [Object] To provide an ultra-high-density seal member that emits a minimum amount of occluded fluid and can obtain good adhesion with a slight tightening force regardless of the material of the mating member. A seal member having a main body 1 formed of a non-metallic material so as to be elastically deformable is characterized in that the main body 1 is covered with a metal thin film 2. [Function] Since the main body is covered with a metal thin film, the amount of the occluded fluid released is extremely small, and because it is made of an elastically deformable non-metallic material, good adhesion can be obtained with a slight tightening force. .
Description
【０００１】[0001]
本考案は、超高真空や超高純度流体等に係わる超高気密シール部材に関する。 The present invention relates to an ultra-high airtight seal member for ultra-high vacuum or ultra-high purity fluid.
【０００２】[0002]
従来、超高真空や超高純度流体などに係わる分野におけるシール部材としては 、主として非金属製のＯリングやガスケットまたは、金属製のＯリング、Ｃリン グ、ガスケットなどが使用されていた。 Conventionally, non-metal O-rings and gaskets, or metal O-rings, C-rings, gaskets, etc. have been mainly used as sealing members in the fields related to ultra-high vacuum and ultra-high purity fluids.
【０００３】[0003]
上記従来例のうち非金属製のものは、それ自体が流体を吸蔵、放出するため真 空度や流体純度を低下させる。また、金属製のものではシールするために大きな 締付力を必要とし、しかも接触面の密着性が悪いためガラス、石英、セラミック ス等とのシールには不適当である。 Among the above-mentioned conventional examples, those made of non-metals themselves occlude and release fluids, and thus reduce the degree of vacuum and the purity of fluids. In addition, a metal material requires a large tightening force for sealing, and the contact surface is poor in adhesion, so that it is not suitable for sealing with glass, quartz, ceramics or the like.
【０００４】 本考案は上述のような問題点を解決するためになされたもので、吸蔵流体の放 出が極小で、しかも、相手部材の材質に拘らず僅かな締付力で良好な密着性が得 られる超高密度シール部材を提供することを目的とする。The present invention has been made in order to solve the above-mentioned problems, and the discharge of the occlusion fluid is extremely small, and the good adhesion can be obtained with a slight tightening force regardless of the material of the mating member. It is an object of the present invention to provide an ultra-high density seal member that can obtain the above.
【０００５】[0005]
本考案は、非金属材料から弾性変形自在に形成された本体を有するシール部材 において、上記本体が非透過性を備えた金属薄膜により被覆されてなることを特 徴とするものである。 The present invention is characterized in that, in a seal member having a main body made of a non-metallic material so as to be elastically deformable, the main body is covered with a non-permeable metal thin film.
【０００６】[0006]
上記の構成において、上記本体が金属薄膜で被覆されているから吸蔵流体の放 出量が極小であり、かつ弾性変形自在な非金属材料から形成されているから僅か な締付力で良好な密着性が得られる。 In the above configuration, since the main body is covered with the metal thin film, the amount of the occluded fluid discharged is extremely small, and since it is made of the elastically deformable non-metallic material, it is possible to achieve a good adhesion with a slight tightening force. Sex is obtained.
【０００７】[0007]
以下、本考案につき図１に示す一実施例を参照しながら説明する。 The present invention will be described below with reference to an embodiment shown in FIG.
【０００８】 図１において、シール部材の本体１は弾性変形自在な非金属材料（例えば天然 ゴム、合成樹脂等）から形成されている。また、本体１の表面は適宜の金属材料 から所望厚さ（例えば０．１mm程度ないしそれ以下）に形成された薄膜２によっ て被覆されている。そして、自由状態おける形状は使用条件に応じて適宜に設定 され、図示例においては断面円形のリング状をなしている。In FIG. 1, the main body 1 of the seal member is formed of an elastically deformable non-metallic material (eg, natural rubber, synthetic resin, etc.). The surface of the main body 1 is covered with a thin film 2 formed of an appropriate metal material to a desired thickness (for example, about 0.1 mm or less). The shape in the free state is set appropriately according to the usage conditions, and in the illustrated example, it has a ring shape with a circular cross section.
【０００９】 上記金属材料は、接触流体に適応する耐蝕性、非吸蔵性、非浸透性等を備え、 かつ使用条件に適応する強度や変形性をも備えており、例えばステンレス鋼、ニ ッケルおよびその合金、アルミニウムおよびその合金などが用いられる。The above metal material has corrosion resistance, non-occlusion property, non-penetrability, etc. adapted to contact fluids, and also has strength and deformability adapted to use conditions, such as stainless steel, nickel and Its alloy, aluminum, its alloy, etc. are used.
【００１０】 上記シール部材を形成する場合には、薄膜２を予め所望の外形を有する中空状 に形成しておき、それに開設された貫通孔から本体１を形成する素材を注入して 所要の処理を施し、その後に貫通孔を封鎖すればよい。In the case of forming the above-mentioned sealing member, the thin film 2 is previously formed into a hollow shape having a desired outer shape, and the material for forming the main body 1 is injected through a through hole formed in the thin film 2 to perform a required treatment. Then, the through hole may be closed thereafter.
【００１１】 または、先に弾性変形自在な非金属材料で所望の形状の本体１を形成しておき 、その後この本体１の表面に、スパッタリング法、ＣＶＤ法などの薄膜形成技術 により、薄い金属薄膜２を形成してもよい。 あるいは、薄い金属箔膜を塑性変形加工などにより形成し、これを非金属材料 からなる弾性変形可能な本体１の外面に被覆させるようにしてもよい。Alternatively, a body 1 having a desired shape is first formed of an elastically deformable non-metal material, and then a thin metal thin film is formed on the surface of the body 1 by a thin film forming technique such as a sputtering method or a CVD method. 2 may be formed. Alternatively, a thin metal foil film may be formed by plastic deformation processing or the like, and the outer surface of the elastically deformable main body 1 made of a non-metal material may be covered therewith.
【００１２】 上記実施例においては、本体１の表面が上記金属薄膜２で被覆されているから 吸蔵流体の放出が極小であり、仮に本体１に流体が吸蔵されていても外部に放出 されることはない。また、本体１自体は弾性変形自在な非金属材料から形成され ており、かつ表面は金属薄膜２で被覆されているだけであるから、僅かな締付力 で良好な密着性が得られる。In the above embodiment, since the surface of the main body 1 is covered with the metal thin film 2, the amount of stored fluid is minimal, and even if the fluid is stored in the main body 1, it is released to the outside. There is no. Further, since the main body 1 itself is made of an elastically deformable non-metallic material and the surface is only covered with the metal thin film 2, good adhesion can be obtained with a slight tightening force.
【００１３】 すなわち、本考案者が実験したところによれば、Ｈe ディテクタによるリーク 量を２×１０-11 Torr・リットル／sec 以下にすることができた。したがって、 従来は困難視されていた金属と異種材料（例えば石英、ガラス、セラミックス等 ）との対向部に介設しても超高気密シールが可能であり、特に、半導体製造装置 における石英反応管と金属配管との接続部や、金属製大型反応室における密封シ ール等に極めて有効かつ有利である。そして、半導体の性能や歩留等の向上に大 きく寄与することができた。That is, according to the experiment conducted by the present inventor, the leak amount by the He detector is 2 × 10 −11. It was possible to reduce it to less than Torr / liter / sec. Therefore, it is possible to achieve an ultrahigh airtight seal even if it is placed in the facing portion of a metal and a different material (eg, quartz, glass, ceramics, etc.), which has been difficult to achieve in the past, and in particular, a quartz reaction tube in a semiconductor manufacturing apparatus. It is extremely effective and advantageous for the connection between the metal pipe and the metal pipe, and the sealed seal in a large metal reaction chamber. And, it was able to make a great contribution to the improvement of semiconductor performance and yield.
【００１４】 なお、本考案は上記実施例のみに限定されるものではなく、例えば図２に示す ように超高純度ガス等が接触しない部分３については、金属被膜を省略してもよ い。 その他、本考案の要旨とするところの範囲内で種々の変更ないし応用が可能で ある。It should be noted that the present invention is not limited to the above-described embodiment, and for example, as shown in FIG. 2, the metal film may be omitted in the portion 3 which does not come into contact with ultra-high purity gas or the like. Besides, various modifications and applications are possible within the scope of the gist of the present invention.
【００１５】[0015]
以上説明したように本考案によれば、吸蔵流体の放出が極小で、しかも、相手 部材の材質に拘らず僅かな締付力で良好な密着性が得られる超高密度シール部材 を提供することができる。 As described above, according to the present invention, it is possible to provide an ultra-high-density sealing member that emits a minimum amount of occluded fluid and that can achieve good adhesion with a slight tightening force regardless of the material of the mating member. You can
【図１】本考案の一実施例を示す断面図。FIG. 1 is a sectional view showing an embodiment of the present invention.
【図２】本考案の変形例を示す断面図。FIG. 2 is a sectional view showing a modified example of the present invention.
１…本体，２…金属薄膜。 1 ... Main body, 2 ... Metal thin film.
Claims (1)
た本体を有するシール部材において、上記本体が非浸透
性を備えた金属薄膜により被覆されてなることを特徴と
する超高気密シール部材。1. An ultra-high airtight seal member comprising a main body elastically deformable from a non-metallic material, the main body being covered with a non-permeable metal thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10110191U JPH0550243U (en) | 1991-12-09 | 1991-12-09 | Ultra-high airtight seal member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10110191U JPH0550243U (en) | 1991-12-09 | 1991-12-09 | Ultra-high airtight seal member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0550243U true JPH0550243U (en) | 1993-07-02 |
Family
ID=14291701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10110191U Pending JPH0550243U (en) | 1991-12-09 | 1991-12-09 | Ultra-high airtight seal member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0550243U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5517705A (en) * | 1978-07-20 | 1980-02-07 | Tokyo Inst Of Technol | Gasket for super high-vacuum |
| JPH01188764A (en) * | 1988-01-20 | 1989-07-28 | Mitsubishi Electric Corp | High vacuum gasket |
-
1991
- 1991-12-09 JP JP10110191U patent/JPH0550243U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5517705A (en) * | 1978-07-20 | 1980-02-07 | Tokyo Inst Of Technol | Gasket for super high-vacuum |
| JPH01188764A (en) * | 1988-01-20 | 1989-07-28 | Mitsubishi Electric Corp | High vacuum gasket |
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