JPH01188764A - High vacuum gasket - Google Patents
High vacuum gasketInfo
- Publication number
- JPH01188764A JPH01188764A JP1125888A JP1125888A JPH01188764A JP H01188764 A JPH01188764 A JP H01188764A JP 1125888 A JP1125888 A JP 1125888A JP 1125888 A JP1125888 A JP 1125888A JP H01188764 A JPH01188764 A JP H01188764A
- Authority
- JP
- Japan
- Prior art keywords
- gasket
- vacuum
- rubber
- metal
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 claims abstract description 20
- 239000000919 ceramic Substances 0.000 claims abstract description 6
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 6
- 239000000057 synthetic resin Substances 0.000 claims abstract description 6
- 239000010409 thin film Substances 0.000 abstract description 11
- 239000010408 film Substances 0.000 abstract description 6
- 238000000151 deposition Methods 0.000 abstract 2
- 238000007599 discharging Methods 0.000 abstract 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Gasket Seals (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は例えば機器を超高真空に維持するために用い
られる高真空用ガスケットに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a high vacuum gasket used, for example, to maintain equipment in an ultra-high vacuum.
第３図は例えばＪＩＳ Ｂ２４０１に示された典型的な
高真空用ガスケットである従来のＯリングを示す断面図
で、図中（！Ｉ）はＯリングで、合成ゴム、天然ゴム又
は合成樹脂で形成されている。Figure 3 is a cross-sectional view showing a conventional O-ring, which is a typical high-vacuum gasket, as shown in JIS B2401. It is formed.
第４図は高真空用ガスケットの一般的な実施態様を示す
部分断面構成図で、図において、（１）は真空ポンプ、
（２１は真空チャンバ、（３）は真空ボン・プ（１）の
フランジ％（４）は７ランジ（３）に設けられたガスケ
ット用のｅ、（５）はガスケット、この場合はＯリング
、（６）は真空チャンバ品のフランジ、（７）は真空ポ
ンプ（１）と真空チャンバ（２１とを結合するボルト、
ナツト、αＯは真空系である。FIG. 4 is a partial cross-sectional configuration diagram showing a general embodiment of a high vacuum gasket. In the figure, (1) is a vacuum pump,
(21 is the vacuum chamber, (3) is the flange of the vacuum pump (1), % (4) is e for the gasket provided on the 7 flange (3), (5) is the gasket, in this case an O-ring, (6) is the flange of the vacuum chamber product; (7) is the bolt that connects the vacuum pump (1) and the vacuum chamber (21);
Nut, αO is a vacuum system.
この真空系ａｌｌ）においては、真空ポンプ（１）と真
空チャンバ（２）とを７ランジ＜４）（６１で結合して
、真空チャンバ（２１内部を真空にひく。この際にフラ
ンジ（３）の結合部に真空シール用のガスケット（５）
を用いる。In this vacuum system (all), the vacuum pump (1) and the vacuum chamber (2) are connected by a 7-lunge <4) (61, and the inside of the vacuum chamber (21) is evacuated. At this time, the flange (3) Gasket for vacuum sealing (5) at the joint of
Use.
一般にゴム材は多量のガスを内部に吸蔵しており、表面
が真空に曝されると、このガスが表面から真空部に放出
される。この単位面積当りのガス放出量はステンレス鋼
： ３ Ｘ １０ Ｐａ−ｍ”／ｓ／ｎ”。Generally, rubber materials store a large amount of gas inside, and when the surface is exposed to vacuum, this gas is released from the surface into the vacuum area. The amount of gas released per unit area of stainless steel is 3 x 10 Pa-m"/s/n".
ゴム： ３ Ｘ １０ Ｐａ−ｍ”／ｓ／ｍ”である
ノテ、真空系Ｑｄの主要な構成材料であるステンレス鋼
に比べると、約１０００ 倍大きい。従って、真空系α
Ｏの全表面積中、ガスケット（５）が占める表面積は小
さいが、この部分が放出するガス量は全ガス量の中で大
きな部分を占める。Rubber: 3 x 10 Pa-m"/s/m", approximately 1000 times larger than stainless steel, which is the main constituent material of the vacuum system Qd. Therefore, the vacuum system α
Although the surface area occupied by the gasket (5) in the total surface area of O is small, the amount of gas released by this portion occupies a large portion of the total amount of gas.
一方、良く知られているように、真空系αＯの到達真空
度は真空系αｄの全ガス放出量と、真空ポンプ（１）の
排気速度とのつり合いによって決まる。従うて、従来の
真空系αＯではゴム製のガスケットを使用しているため
に、到達真空度がこの部分の放出ガス量で規定されてし
まい、高い真空度が得られないという問題点があった。On the other hand, as is well known, the ultimate vacuum degree of the vacuum system αO is determined by the balance between the total amount of gas discharged from the vacuum system αd and the pumping speed of the vacuum pump (1). Therefore, because the conventional vacuum system αO uses a rubber gasket, the ultimate degree of vacuum is determined by the amount of gas released in this part, and there was a problem that a high degree of vacuum could not be obtained. .
そこで、この問題点を解決するために、ゴム製ガスケッ
トに変えてメタルガスケットを用いるという方法がある
。ところが、メタルガスケットは放出ガス量が小さく、
高真空が得やすい反面、弾性に乏しく、フランジ面にな
じみにくい。このため真空リークをひきおこしやすいと
いう問題点がある。Therefore, in order to solve this problem, there is a method of using a metal gasket instead of a rubber gasket. However, metal gaskets emit a small amount of gas,
Although it is easy to obtain a high vacuum, it has poor elasticity and is difficult to conform to the flange surface. Therefore, there is a problem in that vacuum leaks are likely to occur.
この発明は上記のような問題点を解消するためになされ
たもので、単位面積当りのガス放出量を金属並みに抑制
できるとともに、真空リークをひきおこしにくい高真空
用のガスケットを得ることを目的とする。This invention was made to solve the above-mentioned problems, and the purpose is to obtain a gasket for high vacuum that can suppress the amount of gas released per unit area to the same level as that of metal, and is less likely to cause vacuum leaks. do.
この発明の高真空用ガスケットは、ゴム又は合成樹脂製
のガスケットに金属又はセラミックの薄膜を付着したも
のである。The high vacuum gasket of the present invention is a gasket made of rubber or synthetic resin with a thin metal or ceramic film attached.
この発明における金属又はセラミックの薄膜はガスケッ
ト表面からの単位面積当りのガス放出量を大巾に低減す
る。The metal or ceramic thin film in this invention greatly reduces the amount of gas released per unit area from the gasket surface.
一方、本体はゴム又は合成樹脂製であるので、ゴムの弗
性を保持しており、例えば７リング面とのなじみも良く
、従って真空リークが発生しにくい。On the other hand, since the main body is made of rubber or synthetic resin, it retains the flatness of rubber and fits well with, for example, the surface of the 7-ring, so that vacuum leaks are less likely to occur.
以下、乙の発明の一実施例を図について説明する。ｆｉ
１図の断面図において、（５）はこの発明の一実施例の
高真空用ガスケットで、この場合は０リングであり、ゴ
ム製ガスケット（ロ）の表面に金属薄膜（２）、この場
合は金又は銀の厚さ数μｍの薄膜を付着している。即ち
金属薄膜でコーティングしている。Hereinafter, one embodiment of the invention of B will be described with reference to the drawings. fi
In the cross-sectional view of Figure 1, (5) is a high vacuum gasket according to an embodiment of the present invention, in this case an O-ring, and a thin metal film (2), in this case, on the surface of the rubber gasket (b). A thin film of gold or silver several micrometers thick is attached. That is, it is coated with a thin metal film.
金属薄膜（至）の付着（コーティング）方法としては、
蒸着、スパッタリング、イオンブレーティング、その他
藩膜形成技術の分野で一般的な方法が適用できる。なお
、ゴムに金又は銀の金属を直接付着できない場合には、
まずゴムになじみやすい金属を付着させ、その上に金又
は銀を付着させるようにするとよい。The method of adhering (coating) the metal thin film is as follows:
Vapor deposition, sputtering, ion blating, and other methods commonly used in the field of film formation technology can be applied. In addition, if gold or silver metal cannot be attached directly to the rubber,
It is best to first attach a metal that is compatible with rubber, and then attach gold or silver on top of that.
このように、この発明の高真空用ガスケットは、本体は
ゴム製であるが表面に金属薄膜が付着・コーティングさ
れているので、表面からのガス放出量を大巾に低減する
ことができると１ともに、ゴムの弾性を有しているので
、フランジ面とのなじみも良く、真空リークが発生しに
くい優れたものである。In this way, the main body of the high vacuum gasket of this invention is made of rubber, but the surface is coated with a metal thin film, so the amount of gas released from the surface can be greatly reduced. Since both have the elasticity of rubber, they fit well with the flange surface and are excellent in that vacuum leaks are less likely to occur.
なお、上記実施例ではガスケットに金又は銀の金属薄膜
を付着したものについて示したが、他の金属又は合金で
も良く、場合によっては、ＴｉＮ。In the above embodiments, the gasket is coated with a thin metal film of gold or silver, but other metals or alloys may be used, and in some cases, TiN may be used.
ＳｉＣ等のセラミックであっても良い。It may also be made of ceramic such as SiC.
また、上記実施例では、ゴム製本体全面に金属薄膜を付
着コーティングしたものについて示したが、第２図の断
面図に示す他の実施例の高真空用ガスケットのように、
金属薄膜を部分的に付着。In addition, in the above embodiment, a metal thin film was coated on the entire surface of the rubber body, but like the high vacuum gasket of another embodiment shown in the cross-sectional view of FIG.
Partially attached metal thin film.
即ち真空に接する部分だけに付着、コーティングするよ
うにしても良い。That is, it may be applied and coated only on the portions that come into contact with the vacuum.
さらに上記実施例ではゴム製のガスケットとしてＯリン
グについて示したが、ゴム製に限らず、テフロン■のよ
うな合成樹脂製でもよく他のあらゆる形状のガスケット
に適用できる。Further, in the above embodiments, an O-ring is shown as a rubber gasket, but the gasket is not limited to rubber, and may be made of synthetic resin such as Teflon (2), and can be applied to gaskets of all other shapes.
さらにまた上記実施例では、真空チャンバと真空ポンプ
の結合部の真空シールの場合について示したが、真空パ
ルプのシート面、真空只ルブのグランド部、その他真空
システムのあらゆるシール部に適用できる＠
〔発明の効果〕
以上のように、この発明によれば、ゴム又は合成樹脂製
のガスケットに金属又はセラミックの薄膜を付着したこ
とにより、ガス放出量が小さく、真空リークをひきおこ
しにくい高真空用ガスケットが得られる効果がある。Furthermore, in the above embodiment, the vacuum seal of the joint between the vacuum chamber and the vacuum pump was shown, but it can also be applied to the sheet surface of vacuum pulp, the gland of a vacuum pump, and any other seal part of the vacuum system. [Effects of the Invention] As described above, according to the present invention, a gasket for high vacuum that has a small amount of gas released and is less likely to cause vacuum leaks is obtained by attaching a metal or ceramic thin film to a rubber or synthetic resin gasket. There are benefits to be gained.
第１図はこの発明の一実施例の高真空用ガスケットを示
す断面図、第２図はこの発明の他の実施例を示す断面図
、第３図は従来の高真空用ガスケットを示す断面図、第
４図は高真空用ガスケットの一般的な実施態様を示す部
分断面構成図である。
図において、（５）は高真空用ガスケット、■はゴム製
ガスケット、（２）は金属薄膜である。
なお、図中、同一符号は同−又は相当部分を示す。Fig. 1 is a sectional view showing a high vacuum gasket according to an embodiment of the present invention, Fig. 2 is a sectional view showing another embodiment of the invention, and Fig. 3 is a sectional view showing a conventional high vacuum gasket. , FIG. 4 is a partial cross-sectional configuration diagram showing a general embodiment of a high vacuum gasket. In the figure, (5) is a high vacuum gasket, ■ is a rubber gasket, and (2) is a metal thin film. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
の薄膜を付着したことを特徴とする高真空用ガスケット
。A high vacuum gasket characterized by having a thin metal or ceramic film attached to a rubber or synthetic resin gasket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1125888A JPH01188764A (en) | 1988-01-20 | 1988-01-20 | High vacuum gasket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1125888A JPH01188764A (en) | 1988-01-20 | 1988-01-20 | High vacuum gasket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01188764A true JPH01188764A (en) | 1989-07-28 |
Family
ID=11772915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1125888A Pending JPH01188764A (en) | 1988-01-20 | 1988-01-20 | High vacuum gasket |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01188764A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0550243U (en) * | 1991-12-09 | 1993-07-02 | 株式会社本山製作所 | Ultra-high airtight seal member |
| WO2005050069A1 (en) * | 2003-11-21 | 2005-06-02 | Daikin Industries, Ltd. | Surface-coated sealing material |
| JP2011506980A (en) * | 2007-12-20 | 2011-03-03 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Structure of diaphragm pressure measuring cell |
| JP2019178695A (en) * | 2018-03-30 | 2019-10-17 | 株式会社フジキン | Pipe joint |
-
1988
- 1988-01-20 JP JP1125888A patent/JPH01188764A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0550243U (en) * | 1991-12-09 | 1993-07-02 | 株式会社本山製作所 | Ultra-high airtight seal member |
| WO2005050069A1 (en) * | 2003-11-21 | 2005-06-02 | Daikin Industries, Ltd. | Surface-coated sealing material |
| CN100402895C (en) * | 2003-11-21 | 2008-07-16 | 大金工业株式会社 | Surface-coated sealing material |
| JP2011506980A (en) * | 2007-12-20 | 2011-03-03 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Structure of diaphragm pressure measuring cell |
| JP2019178695A (en) * | 2018-03-30 | 2019-10-17 | 株式会社フジキン | Pipe joint |
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