JPH05289754A - Dew condensation preventing method for constant temperature/humidity chamber - Google Patents
Dew condensation preventing method for constant temperature/humidity chamberInfo
- Publication number
- JPH05289754A JPH05289754A JP4094588A JP9458892A JPH05289754A JP H05289754 A JPH05289754 A JP H05289754A JP 4094588 A JP4094588 A JP 4094588A JP 9458892 A JP9458892 A JP 9458892A JP H05289754 A JPH05289754 A JP H05289754A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- tank
- heat
- saturation
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Control Of Non-Electrical Variables (AREA)
- Control Of Temperature (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、恒温恒湿槽の結露防
止方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for preventing dew condensation in a constant temperature and constant humidity tank.
【０００２】[0002]
【従来の技術】従来より、温度及び湿度を管理した雰囲
気中において、試料例えば各種材料、半導体素子等の特
性が経時的にどのように変化するかを調べる特性試験が
行なわれている。通常は、二点温度法、二点圧力法或は
分流法を用いて飽和気体から所望の相対湿度を有する気
体を生成しこの気体を恒温恒湿槽内に保持することによ
り、恒温恒湿槽内に特性試験のための雰囲気を形成す
る。2. Description of the Related Art Conventionally, a characteristic test has been conducted to examine how characteristics of a sample such as various materials and semiconductor elements change with time in an atmosphere in which temperature and humidity are controlled. Usually, a two-point temperature method, a two-point pressure method, or a diversion method is used to generate a gas having a desired relative humidity from a saturated gas, and the gas is held in a constant temperature and constant humidity chamber to obtain a constant temperature and constant humidity chamber. An atmosphere for the characteristic test is formed therein.
【０００３】図２は二点温度法の実施に用いる従来装置
の構成を概略的に示す図である。同図において１０は二
点温度法の実施に用いる恒温恒湿槽を示す。この恒温恒
湿槽１０は槽本体１２、外槽１４、断熱材１６及び熱媒
ジャケット１８を備える。外槽１４内に槽本体１２を設
け、外槽１４の外壁を断熱材１６で覆う。また外槽１４
と槽本体１２との間に空間Ｓを形成し、この空間Ｓに熱
媒ジャケット１８例えば空気を充満させ槽本体１２を熱
媒ジャケット１８で覆う。そして空間Ｓ内に冷却器２０
の熱交換部２０ａとヒータ２１の発熱部２１ａと送風機
２２の羽根車２２ａとを設ける。冷却器２０、ヒータ２
１及び送風機２２により熱媒ジャケット１８を冷却或は
加熱し攪拌することにより、槽本体１２内の雰囲気Ａの
温度を調整する。また槽本体１２内にヒーター２４の発
熱部２４ａと送風機２６の羽根車２６ａとを設け、ヒー
ター２４及び送風機２６により雰囲気Ａを加熱及び攪拌
する。このように雰囲気Ａを冷却或は加熱し、雰囲気Ａ
の温度を調整する。FIG. 2 is a diagram schematically showing the structure of a conventional apparatus used for carrying out the two-point temperature method. In the figure, 10 indicates a constant temperature and constant humidity chamber used for carrying out the two-point temperature method. The constant temperature and constant humidity tank 10 includes a tank body 12, an outer tank 14, a heat insulating material 16, and a heat medium jacket 18. The tank body 12 is provided in the outer tank 14, and the outer wall of the outer tank 14 is covered with the heat insulating material 16. The outer tank 14
A space S is formed between the tank body 12 and the tank body 12, and the space S is filled with a heat medium jacket 18, for example, air, and the tank body 12 is covered with the heat medium jacket 18. And the cooler 20 is provided in the space S.
The heat exchange section 20a, the heat generating section 21a of the heater 21, and the impeller 22a of the blower 22 are provided. Cooler 20, heater 2
The temperature of the atmosphere A in the tank main body 12 is adjusted by cooling or heating the heating medium jacket 18 with 1 and the blower 22 and stirring. Further, a heating portion 24a of the heater 24 and an impeller 26a of the blower 26 are provided in the tank body 12, and the atmosphere A is heated and agitated by the heater 24 and the blower 26. In this way, the atmosphere A is cooled or heated, and the atmosphere A
Adjust the temperature of.
【０００４】２８は二点温度法の実施に用いる飽和槽を
示す。この飽和槽２８の下部に、水３０例えば純水を溜
め気体導入部２８ａを設けると共に、飽和槽２８の上部
に、気体３２を溜め気体導出部２８ｂを設ける。気体導
入部２８ａを介して原料気体例えば空気を飽和槽２８外
部から内部へ導入する。気体導入部２８ａは飽和槽２８
内部に配置したフィルタＦを備え、飽和槽２８外部から
の原料気体例えば空気を、フィルタＦが備える多数の細
孔により細かい気泡にして水３０中を通し、これにより
飽和気体を生成する。この飽和気体を飽和槽２８上部に
溜める。気体導出部２８ｂと槽本体１２とを流路３４に
より接続し、飽和槽２８上部に溜めた気体３２を流路３
４を介して槽本体１２内部に導入する。そして飽和槽２
８の任意好適箇所に水注入部２８ｃを設けると共に飽和
槽２８の下部に水排出部２８ｄを設ける。Reference numeral 28 indicates a saturation tank used for carrying out the two-point temperature method. Water 30 such as pure water is stored in the lower portion of the saturation tank 28 and a gas introduction portion 28a is provided, and a gas 32 is stored in the upper portion of the saturation tank 28 and a gas derivation portion 28b is provided. A raw material gas such as air is introduced from the outside to the inside of the saturation tank 28 via the gas introduction unit 28a. The gas introducing portion 28a is the saturation tank 28.
A raw material gas, for example, air from the outside of the saturation tank 28 is provided with the filter F arranged inside, and is made into fine bubbles by the large number of pores provided in the filter F, and is passed through the water 30 to generate a saturated gas. This saturated gas is stored in the upper part of the saturation tank 28. The gas outlet 28b and the tank body 12 are connected by the flow path 34, and the gas 32 accumulated in the upper part of the saturation tank 28 is connected to the flow path 3
It is introduced into the tank main body 12 through No. 4. And saturation tank 2
8 is provided with a water injection part 28c at any suitable position, and a water discharge part 28d is provided below the saturation tank 28.
【０００５】３６は水温調整器を示し、この水温調整器
３６は水槽３８、冷却器４０、ヒーター４２及びポンプ
４４を備える。飽和槽２８の水注入部２８ｃ及び水排出
部２８ｄをそれぞれ流路４６及び４８を介し水槽３８と
接続し、流路４６にポンプ４４を設ける。水槽３８内に
水３０を溜め、ポンプ４４により、水３０を水槽３８か
ら飽和槽２８へさらに飽和槽２８から水槽３８へと還流
させる。そして水槽３８内に冷却器４０の熱交換部４０
ａとヒーター４２の発熱部４２ａとを設ける。熱交換部
４０ａ及び発熱部４２ａにより水３０を加熱或は冷却す
る。気体３２の露点は水３０の温度にほぼ等しい。Reference numeral 36 denotes a water temperature adjuster, which is provided with a water tank 38, a cooler 40, a heater 42 and a pump 44. The water injection part 28c and the water discharge part 28d of the saturation tank 28 are connected to the water tank 38 via the flow paths 46 and 48, respectively, and the pump 44 is provided in the flow path 46. The water 30 is stored in the water tank 38, and the water 44 is returned from the water tank 38 to the saturated tank 28 and further from the saturated tank 28 to the water tank 38 by the pump 44. The heat exchange section 40 of the cooler 40 is provided in the water tank 38.
a and the heating portion 42a of the heater 42 are provided. The water 30 is heated or cooled by the heat exchange section 40a and the heat generation section 42a. The dew point of the gas 32 is approximately equal to the temperature of the water 30.
【０００６】二点温度法によれば、雰囲気Ａの相対湿度
は気体３２の温度における飽和水蒸気圧と雰囲気Ａの温
度における飽和水蒸気圧との比で表せる。従って水３０
及び雰囲気Ａの温度を調整することにより雰囲気Ａの温
度及び湿度を調整できる。According to the two-point temperature method, the relative humidity of the atmosphere A can be expressed by the ratio of the saturated water vapor pressure at the temperature of the gas 32 and the saturated water vapor pressure at the temperature of the atmosphere A. Therefore 30 water
By adjusting the temperature of the atmosphere A, the temperature and humidity of the atmosphere A can be adjusted.
【０００７】[0007]
【発明が解決しようとする課題】上述した従来装置にお
いて、槽本体１２内の雰囲気Ａの温度を降下させる際に
は、槽本体１２内に導入する気体３２の温度を降下させ
ればよいが、それだけでは雰囲気Ａの温度を急冷するこ
とは難しく、また雰囲気Ａの温度をサイクリックに変化
させて特性試験を行なう場合に特性試験に要する時間が
長くなる。In the conventional apparatus described above, when the temperature of the atmosphere A in the tank body 12 is lowered, the temperature of the gas 32 introduced into the tank body 12 may be lowered. It is difficult to rapidly cool the temperature of the atmosphere A by itself, and the time required for the characteristic test becomes long when the characteristic test is performed by cyclically changing the temperature of the atmosphere A.
【０００８】そこで熱媒ジャケット１８を雰囲気Ａの温
度よりも低くするように冷却して雰囲気Ａの温度降下速
度を速めることも考えられるが、この場合には、熱媒ジ
ャケット１８の温度が雰囲気Ａの温度よりも低いがため
に槽本体１２の内壁面に結露を生じてしまう。Therefore, it is conceivable to cool the heating medium jacket 18 so as to be lower than the temperature of the atmosphere A to increase the temperature lowering rate of the atmosphere A. In this case, the temperature of the heating medium jacket 18 is set to the atmosphere A. Since the temperature is lower than the above temperature, dew condensation occurs on the inner wall surface of the tank body 12.
【０００９】また槽本体１２内に冷却器を設けこの冷却
器により雰囲気Ａの温度を降下させることも考えられる
が、通常行なわれる如く、冷却器を流れる熱媒体の温度
を雰囲気Ａの温度よりも低くするとこの場合にも槽本体
１２内で結露を生じてしまう。Although it is conceivable to provide a cooler in the tank body 12 to lower the temperature of the atmosphere A, the temperature of the heat medium flowing through the cooler is set lower than that of the atmosphere A, as is usually done. If it is lowered, dew condensation will occur in the tank body 12 in this case as well.
【００１０】この発明の目的は、上述した従来の問題点
を解決し、雰囲気Ａの温度を急速に冷却しても結露を防
止できる恒温恒湿槽の結露防止方法を提供することにあ
るAn object of the present invention is to solve the above-mentioned conventional problems and to provide a method for preventing dew condensation in a constant temperature and constant humidity tank capable of preventing dew condensation even when the temperature of the atmosphere A is rapidly cooled.
【課題を解決するための手段】上述した従来の問題点を
解決するため、この発明の恒温恒湿槽の結露防止方法
は、槽本体及び槽本体を覆う熱媒ジャケットを備えて成
る恒温恒湿槽の、前記槽本体内に飽和槽からの飽和気体
を導入するに当たり、槽本体内に熱交換器を設け熱交換
器を流れる熱媒体の温度を最小でも飽和槽の内部温度と
し、かつ、熱媒ジャケットの温度を最小でも槽本体の雰
囲気温度とすることを特徴とする。In order to solve the above-mentioned conventional problems, a method for preventing dew condensation in a constant temperature and constant humidity tank according to the present invention is a constant temperature and constant humidity including a tank body and a heat medium jacket covering the tank body. In introducing a saturated gas from the saturation tank into the tank body of the tank, a heat exchanger is provided in the tank body so that the temperature of the heat medium flowing through the heat exchanger is at least the internal temperature of the saturation tank, and It is characterized in that the temperature of the medium jacket is set to the ambient temperature of the tank body even at the minimum.
【００１１】[0011]
【作用】このような構成によれば、熱交換器を槽本体内
に設けるので、槽本体外に熱交換器を設ける場合より
も、槽本体内の雰囲気Ａを迅速に或は急速に冷却するこ
とができる。According to this structure, since the heat exchanger is provided inside the tank body, the atmosphere A inside the tank body is cooled more quickly or rapidly than when the heat exchanger is provided outside the tank body. be able to.
【００１２】また槽本体内に設けた熱交換器により雰囲
気Ａを冷却する場合、熱交換器を流れる熱媒体の温度が
飽和槽の内部温度（或は飽和気体の露点、或は飽和槽内
に溜める水の温度、或は飽和槽内に溜める気体の温度）
よりも低くなると、熱交換器近傍で結露を生じる。しか
し熱交換器を流れる熱媒体の温度を飽和槽内部の温度と
等しいかそれよりも高くしつつ、熱交換器を流れる熱媒
体の温度を低下させて雰囲気Ａを冷却することにより、
熱交換器近傍での結露を防止できる。When the atmosphere A is cooled by the heat exchanger provided in the tank body, the temperature of the heat medium flowing through the heat exchanger is the internal temperature of the saturated tank (or the dew point of the saturated gas or the saturated tank). (Temperature of water stored or temperature of gas stored in saturated tank)
When the temperature is lower than that, dew condensation occurs near the heat exchanger. However, by lowering the temperature of the heat medium flowing through the heat exchanger and cooling the atmosphere A while making the temperature of the heat medium flowing through the heat exchanger equal to or higher than the temperature inside the saturation tank,
Condensation can be prevented near the heat exchanger.
【００１３】また槽本体内の雰囲気Ａを冷却する場合、
槽本体の外部温度が雰囲気Ａの温度よりも低くなると、
これに起因して槽本体の内壁面に結露を生じる。しかし
槽本体を熱媒ジャケットで覆い、この熱媒ジャケットの
温度（≒槽本体の内壁面温度）を雰囲気Ａの温度と等し
いかそれよりも高くしつつ、雰囲気Ａを冷却することに
より、槽本体の内壁面での結露を防止できる。When cooling the atmosphere A in the tank body,
When the outside temperature of the tank body becomes lower than the temperature of the atmosphere A,
This causes dew condensation on the inner wall surface of the tank body. However, by covering the tank main body with a heat medium jacket and cooling the atmosphere A while making the temperature of the heat medium jacket (≈inner wall surface temperature of the tank main body) equal to or higher than the temperature of the atmosphere A, the tank main body is cooled. Condensation on the inner wall surface of the can be prevented.
【００１４】[0014]
【実施例】以下、図面を参照し、この発明の実施例につ
き説明する。尚、図面はこの発明が理解できる程度に概
略的に示してあるにすぎず、従ってこの発明を図示例に
限定するものではない。Embodiments of the present invention will be described below with reference to the drawings. It should be noted that the drawings are merely schematic representations so that the present invention can be understood, and therefore the present invention is not limited to the illustrated examples.
【００１５】まずこの発明の実施に用いて好適な装置の
構成につき説明する。図１はこの発明の実施に用いて好
適な装置の構成を概略的に示す図である。図中、従来の
構成成分に対応する構成成分については同一の符号を付
して示し、従来と同様の点についてはその詳細な説明を
省略する。First, the structure of an apparatus suitable for carrying out the present invention will be described. FIG. 1 is a diagram schematically showing the configuration of an apparatus suitable for carrying out the present invention. In the figure, constituent components corresponding to those of the related art are denoted by the same reference numerals, and detailed description of the same points as the related art will be omitted.
【００１６】同図にも示すように、恒温恒湿槽１０は槽
本体１２、外槽１４、断熱材１６及び熱媒ジャケット１
８を備える。そして槽本体１２及び外槽１４の間の空間
Ｓ内に熱交換器５０例えば潜熱を利用した熱交換器の熱
交換部５０ａとヒーター５１の発熱部５１ａと送風機２
２の羽根車２２ａとを設ける。熱交換器５０及びヒータ
ー５１の双方又は一方を用いて熱媒ジャケット１８を冷
却或は加熱することにより、槽本体１２内の雰囲気Ａ若
しくは槽本体１２の壁を冷却或は加熱する。また槽本体
１２内に熱交換器５２例えば顕熱を利用した熱交換器の
熱交換部５２ａとヒーター５３の発熱部５３ａと送風機
２６の羽根車２６ａとを設ける。熱交換器５２及びヒー
ター５３の双方又は一方を用いることにより雰囲気Ａを
冷却或は加熱する。As shown in the figure, the constant temperature and constant humidity chamber 10 includes a chamber body 12, an outer chamber 14, a heat insulating material 16 and a heat medium jacket 1.
8 is provided. Then, in the space S between the tank body 12 and the outer tank 14, a heat exchanger 50, for example, a heat exchange section 50a of a heat exchanger using latent heat, a heat generating section 51a of a heater 51, and a blower 2
Two impellers 22a are provided. By cooling or heating the heat medium jacket 18 using either or both of the heat exchanger 50 and the heater 51, the atmosphere A in the tank body 12 or the wall of the tank body 12 is cooled or heated. Further, a heat exchanger 52, for example, a heat exchanging portion 52a of a heat exchanger utilizing sensible heat, a heat generating portion 53a of a heater 53, and an impeller 26a of a blower 26 are provided in the tank body 12. The atmosphere A is cooled or heated by using either or both of the heat exchanger 52 and the heater 53.
【００１７】また５４は熱媒槽を示し、熱媒槽５４内に
流す熱媒体例えば水５６を溜める。水５６の変わりに不
凍液或はシリコンオイルを用いることもある。熱媒槽５
４内に熱交換器５８例えば潜熱を利用した熱交換器の熱
交換部５８ａとヒーター５９の発熱部５９ａとを設け
る。熱交換器５８及びヒーター５９の双方又は一方を用
いて、水５６を冷却或は加熱することにより水５６の温
度を精密にまたアナログ的に制御できる。そして熱媒槽
５４を流路６０及び６２を介して槽本体１２内に設けた
熱交換器５２の熱交換部５２ａと接続し流路６２にポン
プ６４を設け、水５６を熱媒槽５４から熱交換部５２ａ
へさらに熱交換部５２ａか熱媒槽５４へと還流させる。Reference numeral 54 denotes a heat medium tank, in which a heat medium, such as water 56, flowing in the heat medium tank 54 is stored. Antifreeze or silicone oil may be used instead of water 56. Heat medium tank 5
A heat exchanger 58, for example, a heat exchange part 58a of a heat exchanger utilizing latent heat and a heat generating part 59a of a heater 59 are provided in the inside of 4. The temperature of the water 56 can be controlled precisely or in an analog manner by cooling or heating the water 56 using the heat exchanger 58 and / or the heater 59. The heat medium tank 54 is connected to the heat exchanging portion 52a of the heat exchanger 52 provided in the tank body 12 through the flow channels 60 and 62, a pump 64 is provided in the flow channel 62, and water 56 is removed from the heat medium tank 54. Heat exchange section 52a
Further, it is returned to the heat exchange section 52a or the heat medium tank 54.
【００１８】また６６は飽和槽２８とは別の飽和槽を示
し、飽和槽２８を高露点の飽和気体例えば露点が１〜８
５℃の飽和気体を発生するのに用い及び別の飽和槽６６
を低露点の飽和気体例えば露点が−３０〜１℃の飽和気
体を発生するのに用いる。飽和槽２８からの気体３２を
流路７０を介して飽和槽６６内に導入する。飽和槽６６
内には熱交換器６８例えば顕熱を利用した熱交換器の熱
交換部６８ａを設け、熱交換器６８により気体３２を冷
却して低露点の飽和気体を生成する。そして飽和槽６６
を流路７２を介し流路３４の槽本体側部分と接続し飽和
槽６６内で冷却した気体３２を流路７２及び３４を介し
槽本体１２内に導入する。流路７０及び７２の間の流路
３４部分にバルブ７４を設け、流路７０及び７２にそれ
ぞれバルブ７６及び７８を設ける。高露点の飽和気体を
槽本体１２内に導入するときは、バルブ７４を開くと共
にバルブ７６及び７８を閉じ、また低露点の飽和気体を
槽本体１２内に導入するときは、バルブ７４を閉じると
共にバルブ７６及び７８を開く。さらに飽和槽６６内に
設けた熱交換器６８の熱交換部６８ａを流路８０及び８
２を介して流路６２及び６０と接続する。そして流路８
０にポンプ８４及びバルブ８６を設け、水５６を熱媒槽
５４から飽和槽６６内の熱交換部６８ａへさらに熱交換
部６８ａから熱媒槽５４へと還流させる。従って槽本体
１２内に設けた熱交換部５２ａと飽和槽６６内に設けた
熱交換部６８ａとにそれぞれ等しい温度の水５６を供給
することとなり、その結果、槽本体１２内の熱交換部５
２ａを流れる熱媒体としての水５６の温度は飽和槽６６
内部の温度（＝飽和槽６６内に溜めた気体３２の温度）
と等しくなる。低露点の飽和気体を槽本体１２内に導入
するときはバルブ８６を開くと共にバルブ４９を閉じ、
高露点の飽和気体を槽本体１２内に導入するときはバル
ブ８６を閉じておくと共にバルブ４９を開いておく。Reference numeral 66 denotes a saturation tank different from the saturation tank 28. The saturation tank 28 is a saturated gas having a high dew point, for example, a dew point of 1 to 8.
Used to generate 5 ° C. saturated gas and another saturation tank 66
Is used to generate a saturated gas having a low dew point, for example, a saturated gas having a dew point of −30 to 1 ° C. The gas 32 from the saturation tank 28 is introduced into the saturation tank 66 through the flow path 70. Saturation tank 66
A heat exchanger 68, for example, a heat exchange section 68a of a heat exchanger utilizing sensible heat is provided therein, and the gas 32 is cooled by the heat exchanger 68 to generate a saturated gas having a low dew point. And the saturation tank 66
Is connected to the tank main body side portion of the flow path 34 via the flow path 72, and the gas 32 cooled in the saturation tank 66 is introduced into the tank main body 12 via the flow paths 72 and 34. A valve 74 is provided in the flow path 34 portion between the flow paths 70 and 72, and valves 76 and 78 are provided in the flow paths 70 and 72, respectively. When introducing a high dew point saturated gas into the tank body 12, the valve 74 is opened and the valves 76 and 78 are closed, and when introducing a low dew point saturated gas into the tank body 12, the valve 74 is closed. Open valves 76 and 78. Further, the heat exchange section 68a of the heat exchanger 68 provided in the saturation tank 66 is connected to the flow paths 80 and 8
2 to the flow paths 62 and 60. And channel 8
0 is provided with a pump 84 and a valve 86 to circulate the water 56 from the heat medium tank 54 to the heat exchange section 68a in the saturation tank 66 and further from the heat exchange section 68a to the heat medium tank 54. Therefore, the water 56 having the same temperature is supplied to the heat exchange section 52a provided in the tank body 12 and the heat exchange section 68a provided in the saturation tank 66, and as a result, the heat exchange section 5 in the tank body 12 is supplied.
The temperature of the water 56 as the heat medium flowing through the 2a is the saturation tank 66.
Internal temperature (= temperature of gas 32 stored in saturation tank 66)
Is equal to When introducing a saturated gas having a low dew point into the tank body 12, the valve 86 is opened and the valve 49 is closed.
When introducing a high dew point saturated gas into the tank body 12, the valve 86 is closed and the valve 49 is opened.
【００１９】８８は熱交換器例えば顕熱を利用した熱交
換器を示す。この例では水温調整器３６を設けず、熱交
換器８８の熱交換部８８ａを飽和槽２８内に設け、熱交
換器８８により飽和槽２８内に溜める水３０を冷却或は
加熱する。また熱交換部８８ａを流路４６を介し熱媒槽
５４の流路８０に接続すると共に熱交換部８８ａを流路
４８を介し熱媒槽５４の流路６０に接続し、熱媒槽５４
の水５６を熱媒槽５４から熱交換部８８ａへさらに熱交
換部８８ａから熱媒槽５４へ還流させる。流路４６にポ
ンプ４７及びバルブ４９を設ける。従って槽本体１２内
の熱交換部５２ａ、飽和槽６６内の熱交換部６８ａ及び
飽和槽２８内の熱交換部８８ａに等しい温度の水５６が
供給される。Reference numeral 88 denotes a heat exchanger, for example, a heat exchanger utilizing sensible heat. In this example, the water temperature adjuster 36 is not provided, the heat exchanging portion 88a of the heat exchanger 88 is provided in the saturation tank 28, and the water 30 stored in the saturation tank 28 is cooled or heated by the heat exchanger 88. Further, the heat exchange section 88a is connected to the flow path 80 of the heat medium tank 54 via the flow path 46, and the heat exchange section 88a is connected to the flow path 60 of the heat medium tank 54 via the flow path 48.
The water 56 is recirculated from the heat medium tank 54 to the heat exchange section 88a and further from the heat exchange section 88a to the heat medium tank 54. A pump 47 and a valve 49 are provided in the flow path 46. Therefore, the water 56 having the same temperature is supplied to the heat exchange section 52a in the tank body 12, the heat exchange section 68a in the saturation tank 66, and the heat exchange section 88a in the saturation tank 28.
【００２０】９０は飽和槽２８の内部温度例えば飽和槽
２８内に溜めた水３０の温度を計測するための温度セン
サを示し、温度センサ９０を飽和槽２８内部に設ける。
飽和槽２８に溜めた気体３２が理想的な飽和状態であれ
ば、飽和槽２８から導出される気体３２の露点は水３０
の温度に等しく、従って飽和槽２８内に溜めた水３０の
温度を調整することにより飽和槽２８から導出される気
体３２の露点を調整できる。９１は飽和槽６６の内部温
度例えば飽和槽６６内に溜めた気体３２の温度を計測す
るための温度センサを示す。Reference numeral 90 denotes a temperature sensor for measuring the internal temperature of the saturation tank 28, for example, the temperature of the water 30 stored in the saturation tank 28. The temperature sensor 90 is provided inside the saturation tank 28.
If the gas 32 stored in the saturation tank 28 is in an ideal saturated state, the dew point of the gas 32 derived from the saturation tank 28 is water 30.
Therefore, the dew point of the gas 32 discharged from the saturation tank 28 can be adjusted by adjusting the temperature of the water 30 stored in the saturation tank 28. Reference numeral 91 denotes a temperature sensor for measuring the internal temperature of the saturation tank 66, for example, the temperature of the gas 32 stored in the saturation tank 66.
【００２１】９２は熱媒ジャケットの温度を計測するた
めの温度センサを示し、温度センサ９２を空間Ｓ内に設
ける。９４は槽本体１２内の雰囲気Ａの温度を計測する
ための温度センサを示し、温度センサ９４を槽本体１２
内に設ける。Reference numeral 92 denotes a temperature sensor for measuring the temperature of the heating medium jacket, and the temperature sensor 92 is provided in the space S. Reference numeral 94 denotes a temperature sensor for measuring the temperature of the atmosphere A in the tank body 12, and the temperature sensor 94 is used as the temperature sensor 94.
Provide inside.
【００２２】９６は熱媒槽５４に溜めた水５６の温度を
計測するための温度センサを示し、温度センサ９６を熱
媒槽５４内に設ける。熱媒槽５４に溜めた水５６の温度
は、槽本体１２内に設けた熱交換部５２ａを流れる水５
６の温度と、飽和槽６６内部の温度（＝飽和槽６６から
導出される気体３２の温度）と、飽和槽２８の内部温度
とに等しい。Reference numeral 96 denotes a temperature sensor for measuring the temperature of the water 56 stored in the heat medium tank 54. The temperature sensor 96 is provided in the heat medium tank 54. The temperature of the water 56 stored in the heat medium tank 54 is the same as that of the water 5 flowing through the heat exchange section 52a provided in the tank body 12.
6 is equal to the temperature inside the saturation tank 66 (= the temperature of the gas 32 derived from the saturation tank 66) and the inside temperature of the saturation tank 28.
【００２３】尚、飽和槽２８、６６から導出された気体
３２を、温度センサ９０により計測される飽和槽２８、
６６の内部温度に等しい温度に保ちながら流路３４、７
０、７２を流すのが好ましい。このようにすることによ
り、飽和槽２８から導出された気体３２の含有水分量の
変動を防止する。また熱媒槽５４から導出された水５６
を、温度センサ９６により計測される熱媒槽５４の内部
温度に等しい温度に保ちながら流路４６、４８、６０、
６２、８０及び８２を流すのが好ましい。The gas 32 led out from the saturation tanks 28, 66 is measured by the temperature sensor 90.
While maintaining a temperature equal to the internal temperature of 66, the flow paths 34, 7
It is preferable to flow 0, 72. By doing so, fluctuations in the amount of water contained in the gas 32 led out from the saturation tank 28 are prevented. Further, water 56 derived from the heat medium tank 54
While maintaining the temperature equal to the internal temperature of the heat medium tank 54 measured by the temperature sensor 96, the flow paths 46, 48, 60,
It is preferred to flush 62, 80 and 82.
【００２４】次にこの発明の実施例として、図１に示す
装置において、槽本体１２内に飽和気体を導入する際の
結露を防止する方法につき説明する。Next, as an embodiment of the present invention, a method for preventing dew condensation when introducing a saturated gas into the tank body 12 in the apparatus shown in FIG. 1 will be described.
【００２５】飽和気体を槽本体１２内に導入しておき槽
本体１２内の雰囲気Ａの温度を下げる或は上げる場合に
は、次のａ）〜ｃ）を満足するようにしつつ雰囲気Ａの
温度を下げ或は上げる。このようにすることにより、雰
囲気Ａの温度を急速に下げる場合の槽本体１２内におけ
る結露を防止でき、また雰囲気Ａの温度をサイクリック
に変化させる場合特に高温から低温へ温度を変化させる
場合に槽本体１２内における結露を防止しつつ雰囲気Ａ
の温度を迅速に変化させることができる。ａ）槽本体１
２内に設けた熱交換部５２ａを流れる水５６の温度を、
飽和槽２８及び６６の内部温度と等しいかそれよりも高
くなるようにする（槽本体１２内に設けた熱交換部５２
ａを流れる水５６の温度を最小でも飽和槽２８及び６６
の内部温度となるようにする）。熱交換部５２ａを流れ
る水５６と飽和槽２８及び６６の内部温度との温度差
は、雰囲気Ａの温度に実質的に影響を与えない程度例え
ば０．５℃〜１℃程度とするのがよい。ｂ）熱媒ジャケ
ット１８の温度（≒槽本体１２の内壁面温度）を、槽本
体１２の雰囲気Ａの温度と等しいかそれよりも高くなる
ようにする（最小でも槽本体１２の雰囲気Ａの温度とす
る）。熱媒ジャケット１８及び槽本体１２の雰囲気Ａの
温度差は、雰囲気Ａの温度に実質的に影響を与えない程
度例えば０．５℃〜１℃程度とするのがよい。ｃ）槽本
体１２の雰囲気Ａの温度を、飽和槽２８及び６６の内部
温度と等しいかそれよりも高くなるようにする（最小で
も飽和槽２８及び６６の内部温度とする）。When the saturated gas is introduced into the tank main body 12 and the temperature of the atmosphere A in the tank main body 12 is lowered or raised, the temperature of the atmosphere A is kept while satisfying the following a) to c). Lower or raise. By doing so, it is possible to prevent dew condensation in the tank body 12 when the temperature of the atmosphere A is rapidly lowered, and when the temperature of the atmosphere A is cyclically changed, especially when the temperature is changed from a high temperature to a low temperature. Atmosphere A while preventing dew condensation in the tank body 12
The temperature of can be changed rapidly. a) Tank body 1
The temperature of the water 56 flowing through the heat exchange section 52a provided in
The internal temperature of the saturation tanks 28 and 66 is equal to or higher than the internal temperature (heat exchange section 52 provided in the tank body 12).
Even if the temperature of the water 56 flowing through a is at least the saturation tanks 28 and 66.
To be the internal temperature of). The temperature difference between the water 56 flowing through the heat exchange section 52a and the internal temperatures of the saturation tanks 28 and 66 is set to a level that does not substantially affect the temperature of the atmosphere A, for example, about 0.5 ° C to 1 ° C. .. b) The temperature of the heat medium jacket 18 (≈inner wall surface temperature of the tank body 12) is set to be equal to or higher than the temperature of the atmosphere A of the tank body 12 (at least the temperature of the atmosphere A of the tank body 12). And). The temperature difference between the heat medium jacket 18 and the atmosphere A of the tank body 12 is preferably set to a degree that does not substantially affect the temperature of the atmosphere A, for example, about 0.5 ° C to 1 ° C. c) The temperature of the atmosphere A in the tank body 12 is made equal to or higher than the internal temperature of the saturated tanks 28 and 66 (at least the internal temperature of the saturated tanks 28 and 66).
【００２６】例えば、槽本体１２内の温度及び相対湿度
を８０℃及び９０％ＲＨから２０℃及び９０％ＲＨまで
急冷する場合、熱媒槽５４内に溜めた水５６の温度を７
７．４℃から１８．３℃まで下げればよい。For example, when the temperature and relative humidity in the tank body 12 are rapidly cooled from 80 ° C. and 90% RH to 20 ° C. and 90% RH, the temperature of the water 56 stored in the heat medium tank 54 is 7
The temperature may be lowered from 7.4 ° C to 18.3 ° C.
【００２７】またこの実施例によれば、槽本体１２、飽
和槽２８及び６６内にそれぞれ顕熱を利用した熱交換器
５２、６８及び８８を設けると共にこれら熱交換器にそ
れぞれ同一の熱媒槽５４から供給される水５６を流し、
しかも水５６の温度を一定に保つようにしながらこれら
熱交換器へと導くので、槽本体１２内、飽和槽２８及び
６６内の温度を精度良く等しくすることができる。Further, according to this embodiment, heat exchangers 52, 68 and 88 utilizing sensible heat are provided in the tank body 12 and the saturation tanks 28 and 66, respectively, and these heat exchangers have the same heat medium tank. Flowing water 56 supplied from 54,
Moreover, since the water 56 is guided to these heat exchangers while keeping the temperature constant, the temperatures in the tank body 12 and the saturation tanks 28 and 66 can be made equal to each other with high accuracy.
【００２８】この発明は上述した実施例にのみ限定され
るものではなく、従って各構成成分の形状、配設位置、
寸法、数値条件及びそのほかを任意好適に変更できる。The present invention is not limited to the above-mentioned embodiment, and therefore, the shape of each component, the arrangement position,
The dimensions, numerical conditions and others can be arbitrarily changed.
【００２９】例えば、飽和槽６６内の熱交換部６８ａ或
は飽和槽２８内の熱交換部８８ａに、熱媒槽５４の水と
は別に温度制御された熱媒体を流すようにしてもよい。
また熱媒槽５４内に溜めた水を飽和槽２８へさらに飽和
槽２８から熱媒槽５４へと還流させるようにしてもよ
い。また飽和槽６６を設けずに、飽和槽２８により低露
点及び高露点の飽和気体を生成するようにしてもよい。For example, in addition to the water in the heat medium tank 54, the temperature-controlled heat medium may be passed through the heat exchange section 68a in the saturation tank 66 or the heat exchange section 88a in the saturation tank 28.
Further, the water stored in the heat medium tank 54 may be returned to the saturated tank 28 and further from the saturated tank 28 to the heat medium tank 54. Alternatively, the saturated tank 66 may not be provided, and the saturated tank 28 may generate saturated gas having a low dew point and a high dew point.
【００３０】またこの発明を分流法、二点圧力法に応用
してもよい。The present invention may be applied to the split flow method and the two-point pressure method.
【００３１】[0031]
【発明の効果】上述した説明からも明らかなように、こ
の発明の恒温恒湿槽の結露防止方法によれば、熱交換器
を槽本体内に設けるので、槽本体内の雰囲気Ａを迅速に
或は急速に冷却することができる。As is apparent from the above description, according to the method for preventing dew condensation in the constant temperature and constant humidity tank of the present invention, since the heat exchanger is provided in the tank main body, the atmosphere A in the tank main body can be quickly changed. Alternatively, it can be cooled rapidly.
【００３２】そして熱交換器を流れる熱媒体の温度を飽
和槽内部の温度と等しいかそれよりも高くしつつ、熱交
換器を流れる熱媒体の温度を低下させて雰囲気Ａを冷却
するので、熱交換器近傍での結露を防止できる。While the temperature of the heat medium flowing through the heat exchanger is made equal to or higher than the temperature inside the saturation tank, the temperature of the heat medium flowing through the heat exchanger is lowered to cool the atmosphere A. Condensation near the exchanger can be prevented.
【００３３】しかも槽本体を熱媒ジャケットで覆い、こ
の熱媒ジャケットの温度（≒槽本体の内壁面温度）を雰
囲気Ａの温度と等しいかそれよりも高くしつつ、雰囲気
Ａを冷却するので、槽本体の内壁面での結露を防止でき
る。Moreover, since the tank body is covered with a heating medium jacket and the temperature of this heating medium jacket (≈inner wall surface temperature of the tank body) is made equal to or higher than the temperature of the atmosphere A, the atmosphere A is cooled. Condensation on the inner wall surface of the tank body can be prevented.
【００３４】従って雰囲気Ａの温度を急速に下げる場合
の槽本体内における結露を防止でき、また雰囲気Ａの温
度をサイクリックに変化させる場合特に高温から低温へ
温度を変化させる場合に槽本体内における結露を防止し
つつ雰囲気の温度を迅速に変化させることができる。Therefore, it is possible to prevent dew condensation in the tank main body when the temperature of the atmosphere A is rapidly lowered, and in the case where the temperature of the atmosphere A is cyclically changed, especially when the temperature is changed from high temperature to low temperature. It is possible to quickly change the temperature of the atmosphere while preventing dew condensation.
【図面の簡単な説明】[Brief description of drawings]
【図１】この発明の実施に用いて好適な装置構成を概略
的に示す図である。FIG. 1 is a diagram schematically showing an apparatus configuration suitable for implementing the present invention.
【図２】従来の二点温度法の実施に用いる装置構成を概
略的に示す図である。FIG. 2 is a diagram schematically showing an apparatus configuration used for performing a conventional two-point temperature method.
１０：恒温恒湿槽 １２：槽本体 １８：熱媒ジャケット ２８、６６：飽和槽 ５２：熱交換器 10: constant temperature and humidity tank 12: tank body 18: heat medium jacket 28, 66: saturation tank 52: heat exchanger
Claims (2)
トを備えて成る恒温恒湿槽の、前記槽本体内に飽和槽か
らの飽和気体を導入するに当たり、 前記槽本体内に熱交換器を設け、該熱交換器を流れる熱
媒体の温度を、最小でも飽和槽の内部温度とし、 前記熱媒ジャケットの温度を、最小でも槽本体の雰囲気
温度とすることを特徴とする恒温恒湿槽の結露防止方
法。1. In introducing a saturated gas from a saturated tank into the tank body of a constant temperature and humidity tank comprising a tank body and a heat medium jacket covering the tank body, a heat exchanger is provided in the tank body. The temperature of the heat medium flowing through the heat exchanger is at least the internal temperature of the saturated tank, and the temperature of the heat medium jacket is at least the ambient temperature of the tank body. Dew condensation prevention method.
の内部温度とすることを特徴とする請求項１記載の恒温
恒湿槽の結露防止方法。2. The method for preventing dew condensation in a constant temperature and constant humidity tank according to claim 1, wherein the ambient temperature of the tank main body is at least the internal temperature of the saturated tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4094588A JP2502240B2 (en) | 1992-04-14 | 1992-04-14 | Dew condensation prevention method for constant temperature and humidity chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4094588A JP2502240B2 (en) | 1992-04-14 | 1992-04-14 | Dew condensation prevention method for constant temperature and humidity chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05289754A true JPH05289754A (en) | 1993-11-05 |
| JP2502240B2 JP2502240B2 (en) | 1996-05-29 |
Family
ID=14114443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4094588A Expired - Fee Related JP2502240B2 (en) | 1992-04-14 | 1992-04-14 | Dew condensation prevention method for constant temperature and humidity chamber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2502240B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009097882A (en) * | 2007-10-12 | 2009-05-07 | Tokyo Riko:Kk | Device for measuring amount of insulated heat |
| CN103034260A (en) * | 2012-11-30 | 2013-04-10 | 江汉大学 | Device for measuring temperature control factor of cavity bubble system and method for the same |
| JP2017040473A (en) * | 2015-08-17 | 2017-02-23 | 浜松ホトニクス株式会社 | Measurement device |
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| JPS62139015A (en) * | 1985-12-13 | 1987-06-22 | Hitachi Ltd | Cooling method for electronic equipment |
| JPH043874A (en) * | 1990-04-20 | 1992-01-08 | Teruo Kawai | Maintaining method of constant humidity in casing |
| JPH0441728U (en) * | 1990-07-31 | 1992-04-09 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62139015A (en) * | 1985-12-13 | 1987-06-22 | Hitachi Ltd | Cooling method for electronic equipment |
| JPH043874A (en) * | 1990-04-20 | 1992-01-08 | Teruo Kawai | Maintaining method of constant humidity in casing |
| JPH0441728U (en) * | 1990-07-31 | 1992-04-09 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009097882A (en) * | 2007-10-12 | 2009-05-07 | Tokyo Riko:Kk | Device for measuring amount of insulated heat |
| CN103034260A (en) * | 2012-11-30 | 2013-04-10 | 江汉大学 | Device for measuring temperature control factor of cavity bubble system and method for the same |
| JP2017040473A (en) * | 2015-08-17 | 2017-02-23 | 浜松ホトニクス株式会社 | Measurement device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2502240B2 (en) | 1996-05-29 |
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