JPH05170489A - Heat ray shielding glass for automobile - Google Patents
Heat ray shielding glass for automobileInfo
- Publication number
- JPH05170489A JPH05170489A JP35630691A JP35630691A JPH05170489A JP H05170489 A JPH05170489 A JP H05170489A JP 35630691 A JP35630691 A JP 35630691A JP 35630691 A JP35630691 A JP 35630691A JP H05170489 A JPH05170489 A JP H05170489A
- Authority
- JP
- Japan
- Prior art keywords
- heat ray
- glass
- film
- ray shielding
- shielding film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/225—Nitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Joining Of Glass To Other Materials (AREA)
- Details Of Aerials (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、冷暖房効果を向上させ
るようにするとともに比較的高い可視光透過率を有する
ものであって、しかも電波の透過がよく、硝子面に熱線
遮蔽機能とアンテナ機能とを付与した自動車用窓硝子に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is intended to improve the cooling and heating effect and has a relatively high visible light transmittance, and has good radio wave transmission, and has a glass surface with a heat ray shielding function and an antenna function. The present invention relates to a window glass for an automobile.
【0002】[0002]
【従来の技術】近年、自動車には、AM放送やFM放送
などのためのラジオ受信機の他、テレビ受像記や無線電
話などの各種送受信装置が搭載される傾向にあり、これ
に対応して窓硝子面に一種あるいは複数の送受信機のた
めのアンテナを形成してなる窓硝子アンテナが使用され
ている。2. Description of the Related Art In recent years, in addition to radio receivers for AM broadcasting, FM broadcasting, and the like, automobiles tend to be equipped with various transmission / reception devices such as television receivers and wireless telephones. A window glass antenna is used in which an antenna for one or a plurality of transceivers is formed on the window glass surface.
【0003】一方、最近では自動車の窓硝子板がその面
積を大きくして形成される傾向にあり直射日光などの熱
線が前記窓面を通して入射して車内温度の上昇を招くな
どの不都合を生じるに至っている。そして、このような
不都合を少しでも解消するものとして、熱線反射性能の
高い金属薄膜を硝子板に施し、熱線の車内への流入を抑
制する手法が提案され、一部において使用されている。On the other hand, recently, a window glass plate of an automobile tends to be formed with a large area, and a heat ray such as direct sunlight enters through the window surface to cause an inconvenience such as an increase in temperature inside the vehicle. It has arrived. Then, in order to eliminate such inconvenience as much as possible, a method has been proposed, in which a metal thin film having high heat ray reflection performance is applied to a glass plate to suppress the inflow of heat rays into the vehicle, and is partially used.
【0004】かかる金属薄膜は可視光反射率が高くな
り、可視光透過率が低下するとともにギラギラ感が生じ
るため、実際には反射防止膜が施されて使用されてい
る。例えば、金属薄膜をZnO,SnO2 ,TiO2 ,
Bi2 O3 などの金属酸化物によりサンドイッチ状に挟
み、干渉を利用して金属薄膜による反射を低減させ、併
せて耐久性を向上させた形で使用されている。Since such a metal thin film has a high visible light reflectance, a low visible light transmittance and a glaring feeling, it is actually used after being provided with an antireflection film. For example, a metal thin film may be formed of ZnO, SnO 2 , TiO 2 ,
It is sandwiched between metal oxides such as Bi 2 O 3 and sandwiched, and the interference is used to reduce reflection by the metal thin film, and the durability is also improved.
【0005】[0005]
【発明が解決しようとする課題】Ag系等の金属薄膜を
熱線反射膜として使用した場合、それ自体が電導性を有
しており、シート抵抗値が数Ω/□〜10Ω/□程度で
性質的に電磁遮蔽特性の高いものとなる。一方、前記し
たように、アンテナが送受信する電波は、電磁波である
ことから、硝子アンテナ近傍に上記した金属薄膜系の熱
線反射膜を施した場合には電磁遮蔽特性高い熱線反射膜
によって窓硝子アンテナが受信すべき電波が遮断されて
しまうため、例えば電波の受信時のゲイン特性が低下
し、必要にして十分な利得が得られなくなるという問題
があった。When a metal thin film such as Ag is used as a heat ray reflective film, it has electric conductivity and has a sheet resistance of several Ω / □ to 10 Ω / □. The electromagnetic shielding property is accordingly high. On the other hand, as described above, since the radio waves transmitted and received by the antenna are electromagnetic waves, when the above-mentioned metal thin film heat ray reflective film is applied in the vicinity of the glass antenna, the window glass antenna is provided with a heat ray reflective film having a high electromagnetic shielding property. Since the electric wave to be received is blocked, for example, there is a problem that the gain characteristic at the time of receiving the electric wave is deteriorated and a necessary and sufficient gain cannot be obtained.
【0006】[0006]
【課題を解決するための手段】本発明は、硝子面に熱線
遮断機能をも付与しようとする際にみられた従来技術の
上記課題に鑑みてなされたものでありその構成上の特徴
は熱線遮蔽膜とアンテナ導体とを設けてなる自動車用窓
硝子であって前記熱線遮蔽膜は20KΩ/□以上のシー
ト抵抗値を有することを特徴とする自動車用窓硝子にあ
る。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art found when trying to impart a heat ray blocking function to a glass surface, and the structural feature thereof is the heat ray. A window glass for an automobile provided with a shielding film and an antenna conductor, wherein the heat ray shielding film has a sheet resistance value of 20 KΩ / □ or more.
【0007】以下、図面に基づいて本発明を詳説する。
図1は、自動車後部窓用硝子板に熱線遮蔽膜5とアンテ
ナ導体4(7はターミナル)とを設けた状態の本発明の
熱線遮蔽硝子1の一例を示す平面図である。このように
熱線遮蔽膜5とアンテナ導体4とがもうけられる窓硝子
1については、2枚の硝子板もしくは2枚以上の硝子板
をポリビニールブチラール膜等の合わせ中間膜により積
層し、接合した積層構造の合わせ硝子、あるいは硝子板
の室内側面に耐擦傷性のプラスチックフィルムを張り合
わせた硝子のほか単層構造の単板硝子を用いることもで
きる。The present invention will be described in detail below with reference to the drawings.
FIG. 1 is a plan view showing an example of the heat ray shielding glass 1 of the present invention in which a heat ray shielding film 5 and an antenna conductor 4 (7 is a terminal) are provided on a glass plate for a rear window of an automobile. As for the window glass 1 in which the heat ray shielding film 5 and the antenna conductor 4 are provided in this way, two glass plates or two or more glass plates are laminated by a laminated interlayer film such as a polyvinyl butyral film and joined. It is also possible to use a laminated glass having a structure, or a glass in which a scratch-resistant plastic film is laminated on the inner surface of the glass plate, as well as a single-layer glass having a single-layer structure.
【0008】本発明においては、熱線遮蔽膜5がアンテ
ナ導体4が受信すべき電波や送信する電波を遮蔽しない
ようにするために熱線遮蔽膜5としては、シート抵抗値
が20KΩ/□以上の熱線遮蔽膜を使用することが特徴
である。熱線遮蔽膜5アンテナ導体が非接触状態ある時
は熱線遮蔽膜5は20KΩ/□以上であれば上記目的を
達成でき、アンテナ導体4の機能を低下せずにすむので
好ましい。特に50KΩ/□以上であればより好まし
い。In the present invention, in order to prevent the heat ray shielding film 5 from shielding the electric wave to be received or transmitted by the antenna conductor 4, the heat ray shielding film 5 has a sheet resistance value of 20 KΩ / □ or more. The feature is that a shielding film is used. Heat ray shielding film 5 When the antenna conductor is in a non-contact state, it is preferable that the heat ray shielding film 5 has a resistance of 20 KΩ / □ or more so that the above object can be achieved and the function of the antenna conductor 4 is not deteriorated. Particularly, it is more preferable if it is 50 KΩ / □ or more.
【0009】一方、熱線遮蔽膜5とアンテナ導体4が、
接触状態にあるときは、電磁遮蔽能消去以外に、アンテ
ナの受信する電磁波が熱線遮蔽膜5に拡散して減衰して
しまうのを防止するためにより高い抵抗が必要とされ、
熱線遮蔽膜5のシート抵抗は500KΩ/□以上、好ま
しくは1MΩ/□以上とする。送受信する電波がFM,
AM,TV電波などの目的により周波数がことなり、対
応して熱線遮蔽膜のシート抵抗値の下限が若干異なる
が、上述のような値であればこれらのどの目的に対して
も十分である。On the other hand, the heat ray shielding film 5 and the antenna conductor 4 are
In the contact state, in addition to erasing the electromagnetic shielding ability, a higher resistance is required to prevent the electromagnetic waves received by the antenna from diffusing into and attenuating the heat ray shielding film 5.
The sheet resistance of the heat ray shielding film 5 is 500 KΩ / □ or more, preferably 1 MΩ / □ or more. The transmitted and received radio waves are FM,
The frequency varies depending on the purpose of AM, TV radio waves, etc., and the lower limit of the sheet resistance value of the heat ray-shielding film is slightly different correspondingly.
【0010】本発明における熱線遮蔽膜5は、電磁遮蔽
特性を消失させるべく、また、電磁波の拡散を防止する
べく、抵抗値の高い薄膜により形成する必要があり、例
えばTi,Zr,Cr,Hf,Taのうち少なくとも1
種(以下金属M1 という)の窒化物(これらは熱線遮蔽
性能に優れる)及びSi,B,Alのうち少なくとも1
種(以下金属M2 という)の窒化物(これらは絶縁性で
ある)を含む複合化物などは従来のAg金属と比べて比
抵抗が高く、適当な膜厚を選択すると20KΩ/□以上
のシート抵抗値を得ることができる。熱線遮蔽膜5にお
いて、十分な熱線遮蔽性能を得るためには、M2 の総量
はM1 の総量に対して原子比で80%以下であることが
好ましい。The heat ray shielding film 5 in the present invention needs to be formed of a thin film having a high resistance value in order to eliminate the electromagnetic shielding characteristics and prevent the diffusion of electromagnetic waves. For example, Ti, Zr, Cr, Hf. , Ta of at least 1
Species (hereinafter referred to as metal M 1 ) nitride (these have excellent heat ray shielding performance) and at least one of Si, B and Al
Composites containing nitrides of species (hereinafter referred to as metal M 2 ) (which are insulative) have higher specific resistance than conventional Ag metal, and a sheet of 20 KΩ / □ or more when an appropriate film thickness is selected. The resistance value can be obtained. In order to obtain sufficient heat ray shielding performance in the heat ray shielding film 5, the total amount of M 2 is preferably 80% or less in atomic ratio with respect to the total amount of M 1 .
【0011】M2 の含有割合が比較的少ない領域(例え
ば、M2 の総量がM1 の総量に対して原子比で30%未
満)では熱線遮断能が特に優れるため、可視光透過率が
余り低下しない程度の薄い膜厚において20KΩ/□以
上のシート抵抗値が得られ、且つ熱線遮断機能も十分に
発揮されるので好ましく、特にアンテナ導体と非接触状
態でもうけられる熱線遮断膜に用いると最適である。In a region where the content ratio of M 2 is relatively small (for example, the total amount of M 2 is less than 30% in atomic ratio with respect to the total amount of M 1 ), the heat ray-shielding ability is particularly excellent, and the visible light transmittance is excessive. A sheet resistance value of 20 KΩ / □ or more is obtained at a thin film thickness that does not decrease, and the heat ray blocking function is sufficiently exerted, which is particularly preferable, and is particularly suitable for use as a heat ray blocking film that is provided in a non-contact state with the antenna conductor. Is.
【0012】また、絶縁性窒化物の多い領域(例えば、
M2 の総量がM1 の総量に対して原子比で30%以上、
80%以下の領域)では、熱線遮断性能はやや劣るが比
抵抗が高いため500KΩ/□のシート抵抗値が得られ
易いので、特にアンテナ導体と接触して設けられる熱線
遮断膜に用いられると最適である。これらは可視光吸収
が少ないため膜厚を厚くして、光線透過率を高く保持し
つつ、十分な熱線遮断性能を得ることができる。これら
は膜厚を厚くしても500KΩ/□以上のシート抵抗が
得られるような高比抵抗を有する材料である。In addition, a region rich in insulating nitride (for example,
The total amount of M 2 is 30% or more in atomic ratio with respect to the total amount of M 1 ,
In the area of 80% or less), the heat ray blocking performance is slightly inferior, but since the sheet resistance value of 500 KΩ / □ is easily obtained due to the high specific resistance, it is particularly suitable for use in the heat ray blocking film provided in contact with the antenna conductor. Is. Since these have little visible light absorption, the film thickness can be increased and a sufficient heat ray blocking performance can be obtained while maintaining a high light transmittance. These are materials having a high specific resistance such that a sheet resistance of 500 KΩ / □ or more can be obtained even if the film thickness is increased.
【0013】本発明の熱線遮蔽膜5としては、上述の熱
線遮蔽機能を単層として用いてもよいし、耐久性を向上
させるための保護膜をもうけた少なくとも2層からなっ
ても良い。As the heat ray shielding film 5 of the present invention, the heat ray shielding function described above may be used as a single layer, or may be composed of at least two layers provided with a protective film for improving durability.
【0014】一方、アンテナ導体4は窓硝子1の構成硝
子板に銀ペーストなどをプリントして焼き付けることで
形成されるプリントアンテナの他、銅線などの電導性金
属細線を配線することで形成される線アンテナや、透明
電導膜を形成した膜状アンテナなどを所望の要求仕様、
利得などで選択される適宜のパターンのもとで形成した
ものを用いることができる。On the other hand, the antenna conductor 4 is formed by wiring a conductive metal thin wire such as a copper wire in addition to a printed antenna formed by printing silver paste or the like on the glass plate constituting the window glass 1 and baking it. Line antenna, a film antenna with a transparent conductive film, etc.
It is possible to use those formed under an appropriate pattern selected by gain or the like.
【0015】熱線遮蔽膜5は、アンテナ導体4より車外
側に設けられてもよいし、車内側に設けられてもよい。
また、図1は熱線遮蔽膜の周辺部をトリミングすること
によって、車体への電波の拡散防止をより確実にした例
であるが、必ずしもトリミングしていなくてもよい。さ
らに電波透過性については、シールド効果即ちプリント
アンテナ硝子基板と比して、電波が透過しにくくなる程
度を知るためネットワークアナライザー(ヒューレット
パッカード社製)を用いて測定した。The heat ray shielding film 5 may be provided outside the antenna conductor 4 or inside the vehicle.
Further, although FIG. 1 shows an example in which the diffusion of radio waves to the vehicle body is prevented more reliably by trimming the peripheral portion of the heat ray shielding film, it is not always necessary to trim. Further, the radio wave permeability was measured using a network analyzer (manufactured by Hewlett-Packard Co.) in order to know the shield effect, that is, the degree to which radio waves are less likely to be transmitted as compared with the glass substrate of the printed antenna.
【0016】[0016]
【作用】このようにして、硝子1のアンテナ導体4を覆
うようにして熱線遮蔽膜5が配置されても、この熱線遮
蔽膜5自体が抵抗値の高い非電導性の薄膜により形成さ
れているので電磁遮蔽特性は抑制されておりアンテナ導
体4の利得性を損なうことはない。したがって自動車に
搭載される各種送受信装置のためのガラスアンテナとし
て設計どうりに有効に機能させることができる。また硝
子1面は、熱線遮蔽膜5により覆われているので、直射
日光などの熱が車内へと入射し、室内が温度上昇するの
を効果的に阻止することができ、冷房負荷低減などの省
エネルギー対策を講じつつ車内環境の向上に効果的に寄
与させることができる。In this way, even if the heat ray shielding film 5 is arranged so as to cover the antenna conductor 4 of the glass 1, the heat ray shielding film 5 itself is formed of a non-conductive thin film having a high resistance value. Therefore, the electromagnetic shielding property is suppressed and the gain of the antenna conductor 4 is not impaired. Therefore, it can effectively function as designed as a glass antenna for various transmitting / receiving devices mounted on an automobile. Further, since the surface of the glass 1 is covered with the heat ray shielding film 5, it is possible to effectively prevent heat such as direct sunlight from entering the inside of the vehicle and raising the temperature in the room, thereby reducing the cooling load. It is possible to effectively contribute to the improvement of the in-vehicle environment while taking energy saving measures.
【0017】[0017]
【実施例】以下、実施例により本発明を具体的に説明す
る。ただし本発明はかかる実施例に限定されるものでは
ない。EXAMPLES The present invention will be specifically described below with reference to examples. However, the present invention is not limited to such an embodiment.
【0018】[実施例1]直流マグネトロンスパッタ装
置内にターゲットとして、TiとSiの合金ターゲット
(Ti:Si=7:3原子比)を設置した。2mm厚の
ソーダライムガラス基を洗浄、乾燥した後真空装置内に
入れ6×10-6torr程度まで排気した。この際基板
加熱はおこなわなかった。[Example 1] An alloy target of Ti and Si (Ti: Si = 7: 3 atomic ratio) was installed as a target in a DC magnetron sputtering apparatus. The soda-lime glass substrate having a thickness of 2 mm was washed and dried, then placed in a vacuum device and evacuated to about 6 × 10 -6 torr. At this time, the substrate was not heated.
【0019】次にアルゴンガスを真空槽内へ導入し、そ
の圧力が2×10-3torrになるように調節し、この
状態で、上記ターゲットへ2.2w/cm2 の電力を印
加し、5分間プレスパッタを実施した。この後真空槽内
の雰囲気をArとN2 の混合ガス(Ar:N2 =9:
1)に置換し、圧力を2×10-3torrになるように
調節し、この状態で上記ターゲットへ2. 2w/cm2
の電力を印加しTiSiNx 膜を約100Å成膜した。Next, argon gas was introduced into the vacuum chamber, the pressure was adjusted to 2 × 10 -3 torr, and in this state, a power of 2.2 w / cm 2 was applied to the target, Pre-sputtering was performed for 5 minutes. After that, the atmosphere in the vacuum chamber was changed to a mixed gas of Ar and N 2 (Ar: N 2 = 9:
1), the pressure was adjusted to 2 × 10 −3 torr, and in this state, 2.2 w / cm 2 was applied to the target.
Was applied to deposit a TiSiN x film of about 100 Å.
【0020】このようにして得られたサンプルの分光ス
ペクトルを測定したところ、可視光線透過率73. 1
%、日射透過率70%、可視光線反射率(硝子面側)
8. 5%、また透過色調はX=0. 32OO、Y=0.
3309で黄色がかったグレー色を呈していた。このサ
ンプルのシート抵抗値を調べたところ26KΩ/□であ
った。The spectroscopic spectrum of the sample thus obtained was measured and the visible light transmittance was 73.1.
%, Solar radiation transmittance 70%, visible light reflectance (glass side)
8.5%, and the transmission color tone is X = 0.32OO, Y = 0.
3309 had a yellowish gray color. When the sheet resistance value of this sample was examined, it was 26 KΩ / □.
【0021】このガラスを、アンテナ導体が形成された
もう1枚のガラス板と、熱線遮蔽膜とアンテナが直接接
触しない状態で合わせガラスとして、アンテナ性能を測
ったところ、十分アンテナとして機能した。When this glass was used as a laminated glass in a state where the heat ray shielding film and the antenna were not in direct contact with another glass plate on which the antenna conductor was formed, the antenna performance was measured, and it worked sufficiently as an antenna.
【0022】[実施例2]直流マグネトロンスパッタ装
置内にターゲットとして、ZrとSiの合金ターゲット
(Zr:Si=9:1原子比)を設置した。2mm厚の
ソーダライムガラス基板を洗浄、乾燥した後真空装置内
に入れ6×10-6torr程度まで排気した。この際基
板加熱はおこなわなかった。Example 2 An alloy target of Zr and Si (Zr: Si = 9: 1 atomic ratio) was set as a target in a DC magnetron sputtering apparatus. A soda lime glass substrate having a thickness of 2 mm was washed and dried, and then placed in a vacuum device and evacuated to about 6 × 10 -6 torr. At this time, the substrate was not heated.
【0023】次にアルゴンガスを真空槽内へ導入し、そ
の圧力が2×10-3torrになるように調節し、この
状態で、上記ターゲットへ2.2w/cm2 の電力を印
加し、5分間プレスパッタを実施した。この後真空槽内
の雰囲気をArとN2 の混合ガス(Ar:N2 =95:
5)に5置換し、圧力を2×10-3torrになるよう
に調節し、この状態で上記ターゲットへ1. 6w/cm
2 の電力を印加しZrSiNx 膜を約60Å成膜した。Next, argon gas was introduced into the vacuum chamber, the pressure was adjusted to 2 × 10 -3 torr, and in this state, a power of 2.2 w / cm 2 was applied to the target, Pre-sputtering was performed for 5 minutes. After that, the atmosphere in the vacuum chamber was changed to a mixed gas of Ar and N 2 (Ar: N 2 = 95:
5) was replaced with 5 and the pressure was adjusted to 2 × 10 −3 torr. In this state, 1.6 w / cm was applied to the target.
A power of 2 was applied to deposit a ZrSiN x film of about 60 Å.
【0024】このようにして得られたサンプルの分光ス
ペクトルを測定したところ、可視光線透過率80.3
%、日射透過率77. 0%可視光線反射率(硝子面側)
7. 2%、また透過色調はX=0. 3111、Y=0.
3198でほぼグレー色を呈していた。このサンプルの
シート抵抗値を調べたところ20KΩ/□であった。The spectroscopic spectrum of the sample thus obtained was measured, and the visible light transmittance was 80.3.
%, Solar radiation transmittance 77.0% Visible light reflectance (glass side)
7.2%, and the transmitted color tone is X = 0.3111, Y = 0.
In 3198, it was almost gray. When the sheet resistance value of this sample was examined, it was 20 KΩ / □.
【0025】このガラスを、アンテナ導体が形成された
もう1枚のガラス板と、熱線遮蔽膜とアンテナが直接接
触しない状態で合わせガラスとして、アンテナ性能を測
ったところ、十分アンテナとして機能した。When this glass was used as a laminated glass in a state where the heat ray shielding film and the antenna were not in direct contact with another glass plate on which the antenna conductor was formed, the antenna performance was measured, and it worked sufficiently as an antenna.
【0026】[実施例3]直流マグネトロンスパッタ装
置内にターゲットとして、TiとBの合金ターゲット
(Ti:B=7:3原子比)を設置した。2mm厚のプ
リントアンテナ付きソーダライムガラス基を洗浄、乾燥
した後真空装置内に入れ6×10-6torr程度まで排
気した。この際基板加熱はおこなわなかった。Example 3 An alloy target of Ti and B (Ti: B = 7: 3 atomic ratio) was set as a target in a DC magnetron sputtering apparatus. The soda-lime glass substrate with a printed antenna having a thickness of 2 mm was washed and dried, then put in a vacuum device and evacuated to about 6 × 10 −6 torr. At this time, the substrate was not heated.
【0027】次にアルゴンガスを真空槽内へ導入し、そ
の圧力が2×10-3torrになるように調節し、この
状態で、上記ターゲットへ2.2w/cm2 の電力を印
加し、5分間プレスパッタを実施した。この後真空槽内
の雰囲気をArとN2 の混合ガス(Ar:N2 =9:
1)に置換し、圧力を2×10-3torrになるように
調節し、この状態で上記ターゲットへ2. 2w/cm2
の電力を印加しプリントアンテナ上に直接TiBNx を
約70Å成膜した。Next, argon gas was introduced into the vacuum chamber, the pressure was adjusted to 2 × 10 -3 torr, and in this state, a power of 2.2 w / cm 2 was applied to the target, Pre-sputtering was performed for 5 minutes. After that, the atmosphere in the vacuum chamber was changed to a mixed gas of Ar and N 2 (Ar: N 2 = 9:
1), the pressure was adjusted to 2 × 10 −3 torr, and in this state, 2.2 w / cm 2 was applied to the target.
Was applied to deposit TiBN x directly on the printed antenna in an amount of about 70 Å.
【0028】このようにして得られたサンプルの分光ス
ペクトルを測定したところ、可視光線透過率78. 0
%、日射透過率75. 0%、可視光線反射率(硝子面
側)8.5%でほぼグレー色を呈していた。上記と同様
にして形成した熱線遮蔽膜のシート抵抗値を調べたとこ
ろ1. 2MΩ/□であった。この熱線遮蔽硝子は、十分
なアンテナ性能を有していた。The spectroscopic spectrum of the sample thus obtained was measured and the visible light transmittance was 78.0.
%, The solar radiation transmittance was 75.0%, and the visible light reflectance (on the glass surface side) was 8.5%, which was almost gray. When the sheet resistance value of the heat ray-shielding film formed in the same manner as above was examined, it was 1.2 MΩ / □. This heat ray shielding glass had sufficient antenna performance.
【0029】[実施例4]直流マグネトロンスパッタ装
置内にターゲットとして、(a)TiとBの合金ターゲ
ット(Ti:B=7:3原子比)と(b)ZrとSiの
合金ターゲット(Zr:Si=1:2原子比)をそれぞ
れ設置した。2mm厚のプリントアンテナ付きソーダラ
イムガラス基を洗浄、乾燥した後真空装置内にいれ6×
10-6torr程度まで排気した。この際基板加熱はお
こなわなかった。[Embodiment 4] As targets in a DC magnetron sputtering apparatus, (a) an alloy target of Ti and B (Ti: B = 7: 3 atomic ratio) and (b) an alloy target of Zr and Si (Zr: Si = 1: 2 atomic ratio) was installed. 2mm thick soda lime glass base with printed antenna is washed and dried, then put in a vacuum device and 6x
The gas was exhausted to about 10 −6 torr. At this time, the substrate was not heated.
【0030】次にアルゴンガスを真空槽内へ導入し、そ
の圧力が2×10-3torrになるように調節し、この
状態で、上記(a)ターゲットで実施例1の条件で10
0Å程度成膜した。次にArとO2 の混合ガス(Ar:
O2 =8:2)に置換し圧力を2×10-3torrに調
節した。この状態で(b)ターゲットに2.8w/cm
2 の電力を印加し、保護膜としてZrSiOx 約100
Å成膜した。Next, argon gas was introduced into the vacuum chamber, the pressure was adjusted to 2 × 10 -3 torr, and in this state, the target (a) was used under the conditions of Example 1 to 10
About 0Å film was formed. Next, a mixed gas of Ar and O 2 (Ar:
O 2 = 8: 2) and the pressure was adjusted to 2 × 10 −3 torr. In this state, (b) target 2.8 w / cm
Applying power of 2 , ZrSiO x about 100 as protective film
Å The film was formed.
【0031】このようにして得られたサンプルの分光ス
ペクトルを測定したところ、可視光線透過率78%、日
射透過率75%、可視光線反射率(硝子面側)8.5%
でほぼグレー色を呈していた。上記と同様にして形成し
た熱線遮蔽膜のシート抵抗値を調べたところ150MΩ
/□であった。この熱線遮蔽硝子は、十分なアンテナ性
能を有していた。The spectroscopic spectrum of the sample thus obtained was measured, and the visible light transmittance was 78%, the solar radiation transmittance was 75%, and the visible light reflectance (on the glass surface side) was 8.5%.
It was almost gray. When the sheet resistance value of the heat ray shielding film formed in the same manner as above was examined, it was 150 MΩ.
It was / □. This heat ray shielding glass had sufficient antenna performance.
【0032】[実施例5]直流マグネトロンスパッタ装
置内にターゲットとして、(a)SnO2 ターゲットと
(b)TiとSiの合金ターゲット(Ti:Si=7:
3原子比)をそれぞれ設置した。2mm厚のプリントア
ンテナ付きソーダライムガラス基を洗浄、乾燥した後真
空装置内に入れ6×10-6torr程度まで排気した。
この際基板加熱はおこなわなかった。[Embodiment 5] As targets in a DC magnetron sputtering apparatus, (a) SnO 2 target and (b) Ti-Si alloy target (Ti: Si = 7:
3 atomic ratios) were installed respectively. The soda-lime glass substrate with a printed antenna having a thickness of 2 mm was washed and dried, then put in a vacuum device and evacuated to about 6 × 10 −6 torr.
At this time, the substrate was not heated.
【0033】次に酸素を真空槽内へ導入し、その圧力が
2×10-3torrになるように調節し、この状態で、
上記(a)ターゲットで1. 1W/cm2 印加しSnO
2 膜をプリントアンテナ上に直接600Å程度成膜し
た。次にArとN2 の混合ガス(Ar:N2 =9:1)
に置換し圧力を2×10-3torrに調節した。この状
態で(b)ターゲットに2. 2w/cm2 の電力を印加
し、TiSiNx 膜約100Å成膜した。さらにこの上
に(a)ターゲットによりSnO2 を600Å成膜し
た。Next, oxygen was introduced into the vacuum chamber, and the pressure was adjusted to 2 × 10 -3 torr. In this state,
Applying 1.1 W / cm 2 with the above target (a), SnO
Two films were directly formed on the printed antenna to a thickness of about 600Å. Next, a mixed gas of Ar and N 2 (Ar: N 2 = 9: 1)
The pressure was adjusted to 2 × 10 −3 torr. In this state, a power of 2.2 w / cm 2 was applied to the target (b) to deposit a TiSiN x film of about 100 Å. Further, a 600 Å film of SnO 2 was formed thereon by the target (a).
【0034】このようにして得られたサンプルを測定し
たところ、可視光線透過率86. 4%、日射透過率7
6. 9%、可視光線反射率(硝子面側)11. 5%であ
った。上記と同様にして形成した熱線遮蔽膜のシート抵
抗値を調べたところ12MΩ/□であった。この熱線遮
蔽硝子は、十分なアンテナ性能を有していた。When the sample thus obtained was measured, the visible light transmittance was 86.4% and the solar radiation transmittance was 7%.
The reflectance was 6.9% and the visible light reflectance (on the glass surface side) was 11.5%. When the sheet resistance value of the heat ray-shielding film formed in the same manner as above was examined, it was 12 MΩ / □. This heat ray shielding glass had sufficient antenna performance.
【0035】[実施例6]直流マグネトロンスパッタ装
置内にターゲットとして、TiとSiの合金ターゲット
(Ti:Si=7:3原子比)を設置した。2mm厚の
プリントアンテナ付きソーダライムガラス基板(グレー
ガラス)を洗浄、乾燥した後真空装置内にいれ6×10
-6torr程度まで排気した。この際基板加熱はおこな
わなかった。Example 6 An alloy target of Ti and Si (Ti: Si = 7: 3 atomic ratio) was set as a target in a DC magnetron sputtering apparatus. 2mm thick soda lime glass substrate with printed antenna (gray glass) is washed and dried, then put in a vacuum device and 6 x 10
The gas was exhausted to about -6 torr. At this time, the substrate was not heated.
【0036】次にアルゴンガスを真空槽内へ導入し、そ
の圧力が2×10-3torrになるように調節し、この
状態で、上記ターゲットへ2.2w/cm2 の電力を印
加し、5分間プレスパッタを実施した。この後真空槽内
の雰囲気をArとN2 の混合ガス(Ar:N2 =9:
1)に置換し、圧力を2×10-3torrになるように
調節し、この状態で上記ターゲットへ2. 2w/cm2
の電力を印加しTiSiNx 膜約100Åを成膜した。Next, argon gas was introduced into the vacuum chamber, the pressure was adjusted to 2 × 10 -3 torr, and in this state, a power of 2.2 w / cm 2 was applied to the target, Pre-sputtering was performed for 5 minutes. After that, the atmosphere in the vacuum chamber was changed to a mixed gas of Ar and N 2 (Ar: N 2 = 9:
1), the pressure was adjusted to 2 × 10 −3 torr, and in this state, 2.2 w / cm 2 was applied to the target.
Was applied to deposit a TiSiN x film of about 100 Å.
【0037】このようにして得られたサンプルをポリビ
ニールブチラール中間膜を介して2mm硝子板と合わせ
硝子にしたところ、可視光線透過率が73. 1%、日射
透過率65. 6%であった。上記と同様にして形成した
熱線遮蔽膜のシート抵抗値は200KΩ/□であった。
この合わせ硝子も十分なアンテナ性能を有していた。The sample thus obtained was combined with a 2 mm glass plate through a polyvinyl butyral interlayer to form a glass, and the visible light transmittance was 73.1% and the solar radiation transmittance was 65.6%. .. The sheet resistance value of the heat ray-shielding film formed in the same manner as above was 200 KΩ / □.
This laminated glass also had sufficient antenna performance.
【0038】[0038]
【発明の効果】以上述べたように本発明によれば、熱線
遮断膜は抵抗値の高い薄膜により形成されているので、
電磁遮蔽性を消失させることができ、したがって熱線遮
断膜の影響によるアンテナ導体の利得特性の低下を防止
することができ、熱線の車内への入射を阻止つつ、硝子
アンテナとしても優れた利得特性を発揮することができ
る。As described above, according to the present invention, since the heat ray blocking film is formed of a thin film having a high resistance value,
It is possible to eliminate the electromagnetic shielding property, and thus to prevent the deterioration of the gain characteristic of the antenna conductor due to the influence of the heat ray blocking film. While preventing the heat ray from entering the vehicle, it is possible to obtain an excellent gain characteristic as a glass antenna. Can be demonstrated.
【図1】本発明の一例を示す平面図FIG. 1 is a plan view showing an example of the present invention.
4 アンテナ導体 5 熱線遮蔽膜 4 Antenna conductor 5 Heat ray shielding film
Claims (4)
自動車用熱線遮蔽硝子であって、前記熱線遮蔽膜は、2
0KΩ/□以上のシート抵抗値を有し、Ti,Zr,C
r,Hf,Taのうち少なくとも1種(以下金属M1 と
いう)と、Si,B,Alのうち少なくとも1種(以下
金属M2 という)とを含む複合窒化物を主成分とする熱
線遮蔽膜であることを特徴とする自動車用熱線遮蔽硝
子。1. A heat ray shielding glass for an automobile, comprising a heat ray shielding film and an antenna conductor, wherein the heat ray shielding film is 2
It has a sheet resistance value of 0 KΩ / □ or more, Ti, Zr, C
A heat ray-shielding film containing as a main component a composite nitride containing at least one of r, Hf, and Ta (hereinafter referred to as metal M 1 ) and at least one of Si, B, and Al (hereinafter referred to as metal M 2 ). The heat ray shielding glass for automobiles, which is characterized by:
総量に対して原子比で80%以下であることを特徴とす
る請求項1の自動車用熱線遮蔽硝子。2. The heat ray shielding glass for an automobile according to claim 1, wherein in the heat ray shielding film, the total amount of M 2 is 80% or less in atomic ratio with respect to the total amount of M 1 .
にあり、20KΩ/□以上のシート抵抗値を有すること
を特徴とする請求項1の自動車用熱線遮蔽硝子。3. The heat ray-shielding glass for automobiles according to claim 1, wherein the heat ray-shielding film is not in contact with the antenna conductor and has a sheet resistance value of 20 KΩ / □ or more.
あり、500KΩ/□以上のシート抵抗を有することを
特徴とする請求項1の自動車用熱線遮蔽硝子。4. The heat ray shielding glass for an automobile according to claim 1, wherein the heat ray shielding film is in contact with the antenna conductor and has a sheet resistance of 500 KΩ / □ or more.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35630691A JPH05170489A (en) | 1991-12-24 | 1991-12-24 | Heat ray shielding glass for automobile |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35630691A JPH05170489A (en) | 1991-12-24 | 1991-12-24 | Heat ray shielding glass for automobile |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05170489A true JPH05170489A (en) | 1993-07-09 |
Family
ID=18448375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP35630691A Withdrawn JPH05170489A (en) | 1991-12-24 | 1991-12-24 | Heat ray shielding glass for automobile |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05170489A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1597067A4 (en) * | 2003-02-13 | 2009-09-02 | Guardian Industries | Coated articles with nitrided layer and methods of making same |
JP2012062244A (en) * | 2003-08-13 | 2012-03-29 | Saint-Gobain Glass France | Transparent substrate having antireflection film |
-
1991
- 1991-12-24 JP JP35630691A patent/JPH05170489A/en not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1597067A4 (en) * | 2003-02-13 | 2009-09-02 | Guardian Industries | Coated articles with nitrided layer and methods of making same |
JP2012062244A (en) * | 2003-08-13 | 2012-03-29 | Saint-Gobain Glass France | Transparent substrate having antireflection film |
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Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990311 |