JPH05164608A - Pyroelectric infrared-ray detector - Google Patents
Pyroelectric infrared-ray detectorInfo
- Publication number
- JPH05164608A JPH05164608A JP35368391A JP35368391A JPH05164608A JP H05164608 A JPH05164608 A JP H05164608A JP 35368391 A JP35368391 A JP 35368391A JP 35368391 A JP35368391 A JP 35368391A JP H05164608 A JPH05164608 A JP H05164608A
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- Prior art keywords
- electrodes
- light receiving
- sensitivity
- difference
- sensitivities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000035945 sensitivity Effects 0.000 claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 15
- 238000009826 distribution Methods 0.000 claims abstract description 13
- 238000001514 detection method Methods 0.000 abstract description 11
- 238000013459 approach Methods 0.000 abstract description 6
- 230000009977 dual effect Effects 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
- Geophysics And Detection Of Objects (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はデュアルタイプの焦電型
赤外線検出器の改良に関する。FIELD OF THE INVENTION The present invention relates to an improvement of a dual type pyroelectric infrared detector.
【０００２】[0002]
【従来の技術】デュアルタイプの焦電型赤外線検出器
は、例えば通路の天井等に取り付けられ、図13に示すよ
うに、単一の焦電素材１の上に赤外線受光用の一対の電
極２，３を近接させて平行に配置し、その両電極２，３
に移動体から放射される赤外線がレンズやミラー等の光
学系（図示省略）を介して入射されると赤外線照射光量
に応じた電荷が電極２もしくは３に誘起され、その電荷
量を移動体検出信号として取り出せるようにしたもので
ある。このデュアルタイプでは、両電極２，３の受光面
積を等しくすることによって、太陽光や各種照明、ある
いは周囲の温度変化や振動等のいわゆるコモンモードの
ノイズがあっても、両電極２，３からの出力差を生じさ
せないようにし、これらのノイズを排除できるようにし
ている。2. Description of the Related Art A dual-type pyroelectric infrared detector is mounted on, for example, a ceiling of a passage, and as shown in FIG. 13, a pair of electrodes 2 for receiving infrared rays are provided on a single pyroelectric material 1. , 3 are arranged close to each other in parallel, and both electrodes 2, 3
When infrared rays radiated from the moving body enter through an optical system (not shown) such as a lens or a mirror, a charge according to the amount of infrared irradiation light is induced in the electrode 2 or 3, and the amount of the charge is detected by the moving body. It can be taken out as a signal. In this dual type, by making the light receiving areas of both electrodes 2 and 3 equal, even if there is so-called common mode noise such as sunlight, various kinds of illumination, ambient temperature change, vibration, etc. The output difference is not generated and these noises can be eliminated.
【０００３】[0003]
【発明が解決しようとする課題】このようなデュアルタ
イプの焦電型赤外線検出器は、移動体の進入方向によっ
ては失報を生じることがあった。それはこのタイプで
は、両電極２，３の受光面積が相等しく、かつ互いに平
行に配置されているため、例えば矢印イの方向（または
その逆方向）から移動体が接近する場合には、両電極
２，３に対して赤外線が均等に入射されるため両電極
２，３からの出力電流に差異がなく、検出信号が得られ
ないからである。In such a dual type pyroelectric infrared detector, a false alarm may occur depending on the approaching direction of the moving body. In this type, since the light receiving areas of both electrodes 2 and 3 are equal to each other and are arranged in parallel to each other, for example, when a moving body approaches in the direction of arrow a (or the opposite direction), both electrodes are This is because the infrared rays are evenly incident on the electrodes 2 and 3, so that there is no difference in the output current from the electrodes 2 and 3 and a detection signal cannot be obtained.
【０００４】本発明はこのような事情を考慮してなさ
れ、デュアルタイプの焦電型赤外線検出器を検出死角の
ないように構成することを課題としている。The present invention has been made in consideration of such circumstances, and an object thereof is to construct a dual type pyroelectric infrared detector so as to have no detection blind spot.
【０００５】[0005]
【課題を解決するための手段】本発明は上述の課題を解
決するための手段を以下のように構成している。すなわ
ち、焦電素材の上に受光面積が等しい少なくとも一対の
電極を近接させて配置し、その両電極に移動体からの赤
外線が入射することによって両電極から異なる出力の信
号が検出されるようにしたデュアルタイプの焦電型赤外
線検出器にあって、前記各電極が部分的に異なる受光感
度を有し、かつその感度分布が一対の電極間で互いに異
なることを特徴としている。The present invention comprises means for solving the above-mentioned problems as follows. That is, at least a pair of electrodes having the same light receiving area are arranged close to each other on the pyroelectric material, and when infrared rays from the moving body are incident on both electrodes, different output signals are detected from both electrodes. The dual-type pyroelectric infrared detector is characterized in that each of the electrodes has a partially different light-receiving sensitivity, and the sensitivity distribution is different between the pair of electrodes.
【０００６】[0006]
【作用】例えば、図１に示すように、それぞれ部分的に
異なる受光感度Ｓ1, Ｓ2 （Ｓ1 ＞Ｓ2 ）を有する両電
極２，３をその感度分布が互いに逆向きとなるように焦
電素材１上に配置した場合、たとえ両電極２，３の受光
面積が等しくなるイ方向（またはその逆方向）から移動
体が接近しても、両電極２，３が部分的に異なる受光感
度Ｓ1 , Ｓ2 を有しかつその感度分布が互いに逆向きに
なっているので、両電極２，３からの出力に差異が生じ
る。これにより、その差分を検出信号として得ることが
でき、失報を招くことがない。For example, as shown in FIG. 1, both electrodes 2 and 3 having partially different light receiving sensitivities S 1 and S 2 (S 1 > S 2 ) are arranged so that their sensitivity distributions are opposite to each other. When placed on the pyroelectric material 1, even if the moving body approaches from the direction (or the opposite direction) where the light receiving areas of both electrodes 2 and 3 are equal, both electrodes 2 and 3 partially receive light differently. Since the sensitivities have the sensitivities S 1 and S 2 and the sensitivity distributions are opposite to each other, the outputs from the electrodes 2 and 3 are different from each other. As a result, the difference can be obtained as a detection signal, and no false alarm will occur.
【０００７】その他の場合、つまりイ方向とは直交する
方向、あるいは検出器に対して斜め方向に接近する場合
等においても、両電極２，３からの出力差を検知するこ
とができ、良好な感度で移動体の進入を検出することが
できる。つまり、検出死角が発生することがない。In other cases, that is, in the direction orthogonal to the direction a, or when approaching the detector obliquely, the output difference from both electrodes 2 and 3 can be detected, which is excellent. It is possible to detect the entry of a moving body with sensitivity. That is, the detection blind spot does not occur.
【０００８】[0008]
【実施例】以下に本発明を実施例に基づいて詳細に説明
する。図１は本発明の焦電型赤外線検出器の一実施例に
おける平面図で、図２はその背面図である。図中、１は
自発分極性を有する焦電素材で、ＰＺＴやＬｉＴａＯ3
等の強誘電体結晶によりペレット状（４×４×０．１m
m）に形成され、その表面には相等しい受光面積を有す
る一対の透過電極２，３が、その裏面には反射電極４，
５がそれぞれ被着されている。EXAMPLES The present invention will be described in detail below based on examples. 1 is a plan view of an embodiment of a pyroelectric infrared detector of the present invention, and FIG. 2 is a rear view thereof. In the figure, 1 is a pyroelectric material having spontaneous polarization, such as PZT or LiTaO 3.
Pellet form (4 × 4 × 0.1m
m) and a pair of transmissive electrodes 2 and 3 having the same light receiving area on the front surface thereof and a reflective electrode 4 on the back surface thereof.
5 are each applied.
【０００９】各電極はＣｒ，Ｎｉ，ＡｌやＮｉ−Ｃｒ等
の金属を蒸着法やスパッタリング法によって焦電素材１
に被着させて形成される。その透過電極２，３は、部分
的に異なる受光感度Ｓ1 , Ｓ2 （Ｓ1 ＞Ｓ2 ）を有する
ように、各電極エレメント２，３の長手方向の中央で２
分した２つ領域Ｅ1 ，Ｅ2 で厚さｔ1 ，ｔ2 （ｔ1 ＜ｔ
2 ）をそれぞれ異ならせており（図３参照）、その感度
分布が互いに逆向きとなるように両透過電極２，３が所
定の間隔をおいて焦電素材１の表面に配置されている。
また、この受光感度はある一定傾きで変化するようなも
のでもよい。一方、反射電極４，５は、両透過電極２，
３からの透過光を反射できるように両透過電極２，３に
対応して配置される。そして、その両透過電極２，３
は、図４に示すように、互いに分極方向を対向させて直
列に接続される一方、反射電極４，５がインピーダンス
変換用のＦＥＴ（電界効果トランジスタ）６とゲート抵
抗Ｒｇに接続され、この反射電極４，５から出力信号Ｖ
OUT を取り出せるように付属回路が構成される。なお、
ＶDDは供給電圧、Ｅはアース、Ｒは接続負荷抵抗を示
す。For each electrode, a metal such as Cr, Ni, Al or Ni-Cr is deposited by a vapor deposition method or a sputtering method to obtain a pyroelectric material 1.
It is formed by being adhered to. The transmissive electrodes 2 and 3 are arranged at the center in the longitudinal direction of each electrode element 2 and 3 so as to have partially different photosensitivities S 1 and S 2 (S 1 > S 2 ).
In the divided two regions E 1 and E 2 , the thicknesses t 1 and t 2 (t 1 <t
2 ) are made different (see FIG. 3), and the transmissive electrodes 2 and 3 are arranged on the surface of the pyroelectric material 1 at a predetermined interval so that their sensitivity distributions are opposite to each other.
Further, the light receiving sensitivity may change with a certain inclination. On the other hand, the reflective electrodes 4 and 5 are
The transparent electrodes 2 and 3 are arranged so as to reflect the transmitted light from the transparent electrodes 3. Then, both transparent electrodes 2, 3
As shown in FIG. 4, while the polarization directions are opposed to each other and are connected in series, the reflection electrodes 4 and 5 are connected to the impedance conversion FET (field effect transistor) 6 and the gate resistance Rg, respectively. Output signal V from electrodes 4 and 5
The accessory circuit is configured so that OUT can be taken out. In addition,
V DD is a supply voltage, E is ground, and R is a connection load resistance.
【００１０】上述のように構成した焦電型赤外線検出器
では、両透過電極２，３が個々に高い受光感度Ｓ1 を有
する領域Ｅ1 と低い受光感度Ｓ2 を有する領域Ｅ2 とを
有するものの、全体の受光面積（Ｅ1 ＋Ｅ2 ）が相等し
いために、両透過電極２，３に同時に入射する太陽光や
各種照明、あるいは周囲の温度変化や振動等のいわゆる
コモンモードのノイズは、出力差が生じないことにより
相殺され、デュアルタイプ特有のノイズ除去効果を得る
ことができる。[0010] In construction the pyroelectric infrared detector as described above, and a region E 2 both transparent electrodes 2 and 3 has a region E 1 and the lower light receiving sensitivity S 2 having a high light reception sensitivity S 1 individually However, since the total light receiving areas (E 1 + E 2 ) are the same, sunlight and various lights that are simultaneously incident on both transmission electrodes 2 and 3, or so-called common mode noise such as ambient temperature change and vibration are The output difference does not occur, which is offset, and the noise removal effect peculiar to the dual type can be obtained.
【００１１】そして、その両透過電極２，３の感度分布
つまり領域Ｅ1 と領域Ｅ2 とが互いに逆向きになってい
るので、移動体がいかなる方向から接近しても、各透過
電極２，３に入射された赤外線の透過光量に差異が生
じ、その差分を出力の差として検出することができ、検
出死角を生じさせることなく失報のない高い信頼性が得
られる。例えば従来のデュアル検出器で死角となってい
たイ方向またはその逆方向（図１参照）から移動体が接
近しても、その移動体からの赤外線によって横切られる
両透過電極２，３の受光面積（一点鎖線より下方部分）
は等しくなるものの、その受光部分の受光感度Ｓ1 ，Ｓ
2 の相異により、各透過電極２，３を透過する赤外線の
光量に必ず差異が生じる。そのため、その差分を出力の
差として検出することができ、失報を招くことなく、移
動体の進入を検知することができる。Since the sensitivity distributions of the two transmissive electrodes 2 and 3, that is, the regions E 1 and E 2 are opposite to each other, no matter which direction the moving body approaches, the transmissive electrodes 2 and 3 are not affected. A difference occurs in the transmitted light amount of the infrared rays incident on the beam No. 3, and the difference can be detected as a difference in output, and high reliability with no false alarm can be obtained without causing a detection blind spot. For example, even if the moving body approaches from the direction (i.e., the opposite direction) which is a blind spot in the conventional dual detector (see FIG. 1), the light receiving area of both transmission electrodes 2 and 3 which is traversed by the infrared rays from the moving body. (The part below the dashed line)
Are equal, but the light receiving sensitivities of the light receiving portions S 1 , S
Due to the difference of 2 , the amount of infrared light transmitted through each of the transmission electrodes 2 and 3 always differs. Therefore, the difference can be detected as an output difference, and the entry of the moving body can be detected without causing a false alarm.
【００１２】図５〜図７はその他の実施例を示し、図５
は各透過電極２，３の表面の対角線で２分される片半分
を黒化処理（ハッチングで示す）することによりその部
分の受光感度を増加させて、その感度分布が逆つまり点
対称となるように両透過電極２，３を配置したものであ
る。5 to 7 show another embodiment, and FIG.
Increases the light receiving sensitivity of one half of the surface of each transmissive electrode 2 and 3 which is bisected by a diagonal line (shown by hatching), and the sensitivity distribution becomes reverse, that is, point-symmetrical. Thus, both transmissive electrodes 2 and 3 are arranged.
【００１３】図６は焦電素材１の厚みを中央で２分され
る２つの領域Ｐ1 と領域Ｐ2 とで異ならせることによ
り、その２つの領域Ｐ1，Ｐ2 における受光感度を異な
らせるようにしたものである。In FIG. 6, by making the thickness of the pyroelectric material 1 different between the two regions P 1 and P 2 which are divided into two in the center, the light receiving sensitivities in the two regions P 1 and P 2 are made different. It was done like this.
【００１４】図７は焦電効果の異なる２種の焦電素材Ｐ
A ，ＰBを薄膜の基板材料Ｆ上で一体化したもので、両
焦電素材ＰA ，ＰB 間で焦電効果が異なるため、その両
焦電素材ＰA ，ＰB の両面に被着された単一の電極エレ
メント２（または３）内で部分的に受光感度を異ならせ
ることができる。FIG. 7 shows two types of pyroelectric materials P having different pyroelectric effects.
A, which was a P B are integrated on a substrate material F of the thin film, both pyroelectric material P A, since the pyroelectric effect is different between P B, the two pyroelectric material P A, on both sides of the P B to be The light receiving sensitivities can be partially varied within the attached single electrode element 2 (or 3).
【００１５】なお、図示は省略するが、透過電極２，３
の表面に、部分的に赤外線吸収率の異なるフィルムを被
着させたり、透光性の材料を部分的に赤外線吸収率が異
なるように塗着してもよく、結果として単一の電極エレ
メント内で受光感度を部分的に異ならしめることができ
れば如何なる構成を採ることもできる。また、両透過電
極２，３のその他の各種パターン等との組合せにより、
検出感度をさらに向上させることもできる。さらに異な
る実施例として、例えば図８および図９に示すように、
使用条件に応じて複数組のデュアル検出器を適宜に組合
せて展開し、より一層検出感度の向上を図ることもでき
る。図示のようなデュアルツインタイプの場合の付属回
路は図10に示すような直流逆接続でもよく、あるいは並
列逆接続（図示省略）でもよい。Although not shown, the transmissive electrodes 2, 3
The surface of the film may be partially covered with a film having a different infrared absorption rate, or a translucent material may be applied so as to have a partially different infrared absorption rate, resulting in a single electrode element. Any configuration can be adopted as long as the light receiving sensitivity can be partially made different. In addition, by combining with other various patterns of both transparent electrodes 2 and 3,
The detection sensitivity can be further improved. As a further different embodiment, for example, as shown in FIG. 8 and FIG.
A plurality of sets of dual detectors may be appropriately combined and developed in accordance with use conditions to further improve the detection sensitivity. The accessory circuit in the case of the dual twin type as shown in the drawing may be a direct current reverse connection as shown in FIG. 10 or a parallel reverse connection (not shown).
【００１６】さらに異なる別の実施例として、感度分布
が各電極２，３間で逆向きとはならず、例えば図11に示
すように、ハッチングで示す感度良好な部分が互いに異
なる位置に配置されるようにしてもよい。また、図12に
示すように、感度分布が個々にある一定の傾きで変化
し、その傾き変化が互いに異なるように配置した電極対
２，３をデュアルタイプに構成することもできる。In a further different embodiment, the sensitivity distribution is not reversed between the electrodes 2 and 3, and, for example, as shown in FIG. 11, hatched portions having good sensitivity are arranged at different positions. You may do it. Further, as shown in FIG. 12, the electrode pairs 2 and 3 arranged so that the sensitivity distributions individually change with a certain inclination and the inclination changes are different from each other may be configured as a dual type.
【００１７】[0017]
【発明の効果】以上説明したように、本発明の焦電型赤
外線検出器によれば、各電極の受光感度を部分的に異な
らせ、その感度分布が互いに逆向きになるようにしたの
で、あらゆる角度から移動体が接近しても両電極間で出
力に差異が生じ、その差分を検出信号として得ることが
でき、検出死角がなく失報を招くことがない。As described above, according to the pyroelectric infrared detector of the present invention, the light receiving sensitivities of the respective electrodes are partially different so that the sensitivity distributions thereof are opposite to each other. Even if the moving body approaches from any angle, there is a difference in output between both electrodes, and the difference can be obtained as a detection signal, and there is no blind spot for detection and no false alarm occurs.
【００１８】なお、受光感度を部分的に異ならせると
は、赤外線吸収処理を施している部分についてであっ
て、両電極の接続部分やリード線等その他の赤外線吸収
処理を施していない部分は含まないことはいうまでもな
い。また、本発明は感度分布の態様を実施例のものに限
定するものではなく、受光感度の異なる領域を２つ以上
設けてもよく、また、その組合せを適宜に設定してもよ
いことはいうまでもない。It is to be noted that the fact that the light receiving sensitivities are partially different means that the portions are subjected to the infrared ray absorption treatment, and includes the portions where both electrodes are connected, the lead wires and other portions which are not subjected to the infrared ray absorption treatment. Needless to say In addition, the present invention is not limited to the embodiment of the sensitivity distribution, and two or more regions having different light receiving sensitivities may be provided, and the combination may be appropriately set. There is no end.
【図１】本発明の焦電型赤外線検出器の一実施例を示す
平面図である。FIG. 1 is a plan view showing an embodiment of a pyroelectric infrared detector of the present invention.
【図２】同背面図である。FIG. 2 is a rear view of the same.
【図３】同電極エレメントの縦断面図である。FIG. 3 is a vertical sectional view of the electrode element.
【図４】同付属の回路図である。FIG. 4 is a circuit diagram attached to the same.
【図５】異なる実施例における検出器の平面図である。FIG. 5 is a plan view of a detector according to another embodiment.
【図６】別の実施例における電極エレメントの縦断面図
である。FIG. 6 is a vertical sectional view of an electrode element according to another embodiment.
【図７】さらに別の実施例における電極エレメントの縦
断面図である。FIG. 7 is a vertical sectional view of an electrode element according to still another embodiment.
【図８】さらに異なるデュアルツインタイプの検出器の
平面図である。FIG. 8 is a plan view of still another dual twin type detector.
【図９】同背面図である。FIG. 9 is a rear view of the same.
【図10】同付属の回路図である。FIG. 10 is a circuit diagram attached to the same.
【図11】さらに異なる別の実施例における検出器の平面
図である。FIG. 11 is a plan view of a detector according to still another embodiment.
【図12】同その他の実施例における検出器の平面図であ
る。FIG. 12 is a plan view of a detector in the other example.
【図13】従来例における検出器の平面図である。FIG. 13 is a plan view of a detector in a conventional example.
１…焦電素材、２，３…電極（透過電極）、４，５…電
極（反射電極）。1 ... Pyroelectric material, 2, 3 ... Electrode (transmissive electrode), 4,5 ... Electrode (reflection electrode).
───────────────────────────────────────────────────── フロントページの続き (72)発明者 操谷 俊之 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshiyuki Misutani No. 2 Higashimachi, Kichijoin Miya, Minami-ku, Kyoto-shi, Kyoto
Claims (1)
とも一対の電極を近接させて配置し、その両電極に移動
体からの赤外線が入射することによって両電極から異な
る出力の信号が検出されるようにしたデュアルタイプの
焦電型赤外線検出器において、前記各電極が部分的に異
なる受光感度を有し、かつその感度分布が一対の電極間
で互いに異なることを特徴とする焦電型赤外線検出器。1. At least a pair of electrodes having the same light receiving area are arranged close to each other on a pyroelectric material, and when infrared rays from a moving body are incident on both electrodes, signals of different outputs are detected from both electrodes. In the dual-type pyroelectric infrared detector, the respective electrodes have partially different light receiving sensitivities, and the sensitivity distribution is different between the pair of electrodes. Detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35368391A JPH05164608A (en) | 1991-12-17 | 1991-12-17 | Pyroelectric infrared-ray detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35368391A JPH05164608A (en) | 1991-12-17 | 1991-12-17 | Pyroelectric infrared-ray detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05164608A true JPH05164608A (en) | 1993-06-29 |
Family
ID=18432511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35368391A Pending JPH05164608A (en) | 1991-12-17 | 1991-12-17 | Pyroelectric infrared-ray detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05164608A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014029306A (en) * | 2012-07-31 | 2014-02-13 | Eizo Corp | Structure of mask |
| WO2017221718A1 (en) * | 2016-06-23 | 2017-12-28 | 株式会社村田製作所 | Infrared detection element and infrared detection device |
-
1991
- 1991-12-17 JP JP35368391A patent/JPH05164608A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014029306A (en) * | 2012-07-31 | 2014-02-13 | Eizo Corp | Structure of mask |
| US9389123B2 (en) | 2012-07-31 | 2016-07-12 | Eizo Corporation | Mask applied to a sensing surface of a dual pyroelectric sensor |
| WO2017221718A1 (en) * | 2016-06-23 | 2017-12-28 | 株式会社村田製作所 | Infrared detection element and infrared detection device |
| CN109328295A (en) * | 2016-06-23 | 2019-02-12 | 株式会社村田制作所 | Infrared-ray detecting element and infra-red ray detection device |
| US20190101450A1 (en) * | 2016-06-23 | 2019-04-04 | Murata Manufacturing Co., Ltd. | Infrared detection element and infrared detection device |
| EP3477267A4 (en) * | 2016-06-23 | 2020-02-19 | Murata Manufacturing Co., Ltd. | Infrared detection element and infrared detection device |
| US10823620B2 (en) | 2016-06-23 | 2020-11-03 | Murata Manufacturing Co., Ltd. | Infrared detection element and infrared detection device |
| CN109328295B (en) * | 2016-06-23 | 2021-06-11 | 株式会社村田制作所 | Infrared detection device |
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