JPH05125539A - Device for cooling steel strip in continuous steel strip plasma treating apparatus - Google Patents
Device for cooling steel strip in continuous steel strip plasma treating apparatusInfo
- Publication number
- JPH05125539A JPH05125539A JP10222691A JP10222691A JPH05125539A JP H05125539 A JPH05125539 A JP H05125539A JP 10222691 A JP10222691 A JP 10222691A JP 10222691 A JP10222691 A JP 10222691A JP H05125539 A JPH05125539 A JP H05125539A
- Authority
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- Prior art keywords
- steel strip
- cooling
- continuous
- continuous steel
- reel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、非接触で冷却すること
により装置の構成を単純化した連続鋼帯プラズマ処理の
鋼帯冷却装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a steel strip cooling apparatus for continuous steel strip plasma processing in which the construction of the apparatus is simplified by cooling without contact.
【０００２】[0002]
【従来の技術】図１は、連続鋼帯の各種プラズマ処理装
置を組合せた連続ラインの構成を示した図である。この
連続ラインでは、イオンプレーテイング装置１、スパッ
タリング装置２、プラズマＣＶＤ装置３等のプラズマ処
理装置が配置されている。2. Description of the Related Art FIG. 1 is a diagram showing the construction of a continuous line in which various plasma processing apparatuses for continuous steel strip are combined. In this continuous line, a plasma processing apparatus such as an ion plating apparatus 1, a sputtering apparatus 2 and a plasma CVD apparatus 3 is arranged.
【０００３】連続鋼帯はヒータ４により高温に保持され
た状態で上記各種プラズマ処理装置により蒸着される。
そして、蒸着処理された連続鋼帯は巻き取りリール５に
より巻き取られる。The continuous steel strip is vapor-deposited by the above various plasma processing devices while being kept at a high temperature by the heater 4.
Then, the vapor-deposited continuous steel strip is taken up by the take-up reel 5.
【０００４】この時、５０℃以上の高温で連続鋼帯を巻
き取った場合、巻き取った鋼帯が冷えた時点で巻き締ま
りが発生する。この様な巻き締まりを防止するために、
従来は、巻き取りリールに巻き取る前に別のロールを連
続鋼帯に接触させることにより、予め冷却してから巻き
取ることにしていた。At this time, when the continuous steel strip is wound at a high temperature of 50 ° C. or higher, winding tightness occurs when the rolled steel strip is cooled. In order to prevent such tightening,
Conventionally, before winding on a take-up reel, another roll is brought into contact with the continuous steel strip to cool it in advance and then to wind it.
【０００５】[0005]
【発明が解決しようとする課題】しかし、従来技術のロ
ールとの接触による冷却の場合、連続鋼帯の幅方向に均
一に行わなければ、プラズマ処理を施した連続鋼帯に
「ひずみ」や「そり」が発生し、品質の低下を招くおそ
れがある。また、ロールを回転可能に支持する必要があ
り、真空チャンバー内にベアリング等の機械要素を用い
て装置を構成しなければならず、ベアリングの潤滑油に
よる真空雰囲気の汚染を防止するための装置構成が複雑
化するという欠点がある。さらに、ロールに接触させて
冷却するので蒸着させた連続鋼帯にキズを付けるおそれ
もある。However, in the case of cooling by contact with a roll according to the prior art, if the uniform cooling is not performed in the width direction of the continuous steel strip, "strain" or " There is a possibility that "warpage" may occur and the quality may deteriorate. In addition, it is necessary to rotatably support the roll, and the device must be configured using mechanical elements such as bearings in the vacuum chamber, and the device configuration for preventing contamination of the vacuum atmosphere by the lubricating oil of the bearings. However, there is a drawback that it becomes complicated. Further, since it is brought into contact with a roll to cool it, there is a possibility that the vapor-deposited continuous steel strip may be scratched.
【０００６】[0006]
【課題を解決するための手段】連続鋼帯を一対の銅ブロ
ックで挟み、互いに平行に設置し、該一対の銅ブロック
内に冷却媒体通路を設け、該通路内に水等の冷却媒体を
循環させた。また、一対の銅ブロックの連続鋼帯に向か
い合う面を酸化処理した。Means for Solving the Problems A continuous steel strip is sandwiched between a pair of copper blocks and installed parallel to each other, a cooling medium passage is provided in the pair of copper blocks, and a cooling medium such as water is circulated in the passages. Let Further, the surfaces of the pair of copper blocks facing the continuous steel strip were oxidized.
【０００７】[0007]
【実施例】本発明に基づく一実施例を図２及び図３で説
明する。図２は、本発明に係る連続鋼帯プラズマ処理装
置の鋼帯冷却装置の一実施例を示す図であり、図３は本
発明に係る鋼帯冷却装置を真空チャンバーに設置した時
の熱の授受を説明するための原理図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment according to the present invention will be described with reference to FIGS. FIG. 2 is a diagram showing an embodiment of a steel strip cooling device for a continuous steel strip plasma processing apparatus according to the present invention, and FIG. 3 shows heat generated when the steel strip cooling device according to the present invention is installed in a vacuum chamber. It is a principle diagram for explaining the transfer.
【０００８】１１はプラズマ処理が終了し、巻き取りリ
ール５に巻き取られる前の連続鋼帯である。真空容器１
４内でこの連続鋼帯１１を挟むように一対の銅ブロック
１２ａ，１２ｂを設置する。連続鋼帯１１と銅ブロック
１２ａ，１２ｂは略平行であり、銅ブロック１２ａ，１
２ｂ間の隙間は連続鋼帯１１のカテナリー（懸垂線）を
考慮したものとする。Reference numeral 11 denotes a continuous steel strip that has not been wound on the take-up reel 5 after the plasma treatment is completed. Vacuum container 1
A pair of copper blocks 12a and 12b are installed so that the continuous steel strip 11 is sandwiched between them. The continuous steel strip 11 and the copper blocks 12a and 12b are substantially parallel to each other.
The catenary (suspended line) of the continuous steel strip 11 is taken into consideration in the gap between 2b.
【０００９】また、銅ブロック１２ａ，１２ｂ内には、
それぞれ循環パイプ１３ａ，１３ｂに接続された冷却媒
体通路（図示せず）が設けられている。この冷却媒体通
路は、予め銅ブロック１２ａ，１２ｂに貫通溝を形成す
るか、或いは循環パイプ１３ａ，１３ｂと一体のパイプ
を銅ブロック１２ａ，１２ｂ内に埋設する等の公知の方
法で形成されている。そして、この冷却媒体通路内には
水等の冷却媒体が循環している。なお、冷却媒体として
は冷却水の外、液体窒素等の極低温流体も使用できるこ
とはいうまでもない。Further, in the copper blocks 12a and 12b,
Cooling medium passages (not shown) respectively connected to the circulation pipes 13a and 13b are provided. The cooling medium passage is formed by a known method such as forming a through groove in the copper blocks 12a and 12b in advance or burying a pipe integrated with the circulation pipes 13a and 13b in the copper blocks 12a and 12b. .. A cooling medium such as water circulates in the cooling medium passage. Needless to say, a cryogenic fluid such as liquid nitrogen can be used as the cooling medium in addition to the cooling water.
【００１０】銅ブロック１２ａ，１２ｂの鋼帯に向かい
合う面は酸化処理等が施されている。これは放射率を高
めるためであり、本実施例の目標とする放射率は０．８
である。The surfaces of the copper blocks 12a and 12b facing the steel strips are subjected to an oxidation treatment or the like. This is to increase the emissivity, and the target emissivity in this embodiment is 0.8
Is.
【００１１】次に、図３の原理図を用いて、本発明に係
る鋼帯冷却装置の熱の授受を計算し、冷却効果がどの程
度であるかを説明する。まず、計算の簡単のため鋼帯１
１′は連続ではなく、銅ブロック１２ａ，１２ｂに挟ま
れている長方形部分のみを考えることにする。そこで鋼
帯１１′の通過方向の長さをｘ（ｍ），幅方向の長さを
ｙ（ｍ），厚さをｔ（ｍ），比熱をｃ（ｃａｌ／ｇ・
℃）とする。さらに、便宜的に、銅ブロック１２ａ，１
２ｂは鋼帯１１′に比べて充分に大きいと仮定する。Next, the transfer of heat of the steel strip cooling device according to the present invention will be calculated with reference to the principle diagram of FIG. 3, and the cooling effect will be described. First, for ease of calculation, steel strip 1
1'is not continuous, and only the rectangular portion sandwiched between the copper blocks 12a and 12b is considered. Therefore, the length of the steel strip 11 'in the passing direction is x (m), the length in the width direction is y (m), the thickness is t (m), and the specific heat is c (cal / g.
℃). Furthermore, for convenience, the copper blocks 12a, 1
2b is assumed to be sufficiently larger than the steel strip 11 '.
【００１２】次に、鋼帯１１′及び銅ブロック１２ａ，
１２ｂの放射率をそれぞれＥｓ，Ｅｃｕとし、その表面
温度をＴｓ（Ｋ），Ｔｃｕ（Ｋ）（Ｔｓ＞Ｔｃｕ）とす
る。この時、鋼帯１１′からの抜熱量△Ｑは、鋼帯１
１′の表面より銅ブロック１２ａの表面へ向かつて放射
され、銅ブロック１２ａの表面で吸収された熱量Ｑｓ
（ｋｃａｌ／ｍ２・ｈ）と逆に銅ブロック１２ａの表面
よリ鋼帯１１′の表面に向かって放射され、鋼帯１１′
の表面で吸収された熱量Ｑｃｕ（ｋｃａｌ／ｍ２・ｈ）
の差で与えられる。Next, the steel strip 11 'and the copper block 12a,
The emissivity of 12b is Es and Ecu, and the surface temperatures thereof are Ts (K) and Tcu (K) (Ts> Tcu). At this time, the heat removal amount ΔQ from the steel strip 11 ′ is 1
Heat quantity Qs radiated from the surface of 1'to the surface of the copper block 12a and absorbed by the surface of the copper block 12a.
Contrary to (kcal / m 2 · h), it is radiated from the surface of the copper block 12 a toward the surface of the steel strip 11 ′, and the steel strip 11 ′ is radiated.
Of heat Qcu (kcal / m 2 · h) absorbed on the surface of
Given by the difference of.
【００１３】△Ｑ＝Ｑｓ−Ｑｃｕ ・・・（１）ΔQ = Qs-Qcu (1)
【００１４】放射伝熱の考え方より、（１）式は次式の
ように変形される。From the concept of radiative heat transfer, equation (1) is transformed into the following equation.
【００１５】[0015]
【数１】 [Equation 1]
【００１６】具体例として、ｘ＝１ｍ，ｙ＝０．５ｍ，
ｔ＝０．００６ｍとし、Ｅｓ＝０．２，Ｅｃｕ＝０．
８，Ｔｓ＝８００ｋ，Ｔｃｖ＝３００ｋとすると、
（２） 式に代入してAs a concrete example, x = 1 m, y = 0.5 m,
t = 0.006 m, Es = 0.2, Ecu = 0.
8, Ts = 800k, Tcv = 300k,
(2) Substituting into the formula
【００１７】△Ｑ＝０．９２９５ｘ（８４−３４）×２
＝１２４．４ｋｃａｌ／ｍ２・ｍｉｎ・・・（３）ΔQ = 0.9295 × (8 4 −3 4 ) × 2
= 124.4 kcal / m 2 · min (3)
【００１８】（３）式において「×２」（２倍）とした
のは２つの銅ブロック１２ａ，１２ｂの２面より抜熱さ
れるからである。"× 2" (2 times) is used in the equation (3) because heat is removed from the two surfaces of the two copper blocks 12a and 12b.
【００１９】ここで、鋼帯重量＝２３５５ｇ，比熱Ｃ＝
０．１ｃａｌ／ｇ・℃とすると、（３）式の抜熱量１２
４．４ｋｃａｌ／ｍ２・ｍｉｎは鋼帯１１′を１分間に
５２８℃冷却する熱量に相当する。下式により△Ｔを求
めると、△Ｔ＝５２８℃となるからである。Here, steel strip weight = 2355 g, specific heat C =
With 0.1 cal / g · ° C, the heat removal amount of formula (3) is 12
4.4 kcal / m 2 · min corresponds to the amount of heat for cooling the steel strip 11 ′ at 528 ° C. for 1 minute. This is because when ΔT is calculated by the following equation, ΔT = 528 ° C. is obtained.
【００２０】 １２４．４×１０３＝２３５５×△Ｔ×０．１×１ ・・・（４）124.4 × 10 3 = 2355 × ΔT × 0.1 × 1 (4)
【００２１】以上のごとく、鋼帯１１′が１分間に５２
８℃冷却されれば、鋼帯冷却装置として充分な冷却能力
があることになる。なお、銅ブロック１２ａ，１２ｂを
冷却媒体により冷却するのは、（２）式より明らかなよ
うに、鋼帯からの抜熱量△Ｑを増大させるためである。
従って銅ブロックを冷却水ではなく、液体窒素等の極低
温流体で冷却すれば抜熱量△Ｑをさらに増大させること
になり、冷却能力はさらに増強される。実ラインにおい
ては、鋼帯１１′の表面温度Ｔｓが若干変化するため、
（４）式の△Ｔが小さくなることから、極低温流体によ
る冷却はきわめて有効である。As described above, the steel strip 11 'has 52 pieces per minute.
If it is cooled by 8 ° C., it has a sufficient cooling capacity as a steel strip cooling device. The reason why the copper blocks 12a and 12b are cooled by the cooling medium is to increase the heat removal amount ΔQ from the steel strip, as is clear from the equation (2).
Therefore, if the copper block is cooled with a cryogenic fluid such as liquid nitrogen instead of cooling water, the heat removal amount ΔQ is further increased, and the cooling capacity is further enhanced. In the actual line, since the surface temperature Ts of the steel strip 11 'changes slightly,
Since ΔT in the equation (4) becomes small, cooling with a cryogenic fluid is extremely effective.
【００２２】[0022]
【発明の効果】連続鋼帯のプラズマ処理装置において、
その連続鋼帯の冷却を、連続鋼帯より低温であり、表面
の放射率の高い物質の放射により行うことゝしたので、
非接触で冷却が行えるようになり、連続鋼帯の幅方向に
均一に冷却することができる。従って、連続鋼帯に「ひ
ずみ」や「そり」が発生せず、「キズ」を付けるおそれ
もなくなるので、高付加価値でしかも高品質の保証され
たステンレス鋼板が製造できるようになる。In the plasma processing apparatus for continuous steel strip,
Since the cooling of the continuous steel strip is performed by the radiation of the substance having a higher emissivity on the surface, which has a lower temperature than the continuous steel strip,
It becomes possible to cool without contact, and it is possible to uniformly cool the continuous steel strip in the width direction. Therefore, since "strain" and "warpage" do not occur in the continuous steel strip and there is no possibility of causing "scratch", it is possible to manufacture a stainless steel sheet with high added value and high quality.
【００２３】さらに、ロールとの回転接触による冷却と
異なリ、真空チャンバー内にベアリング等の機械要素を
使用せずに装置を構成することができるので、装置構成
が非常に単純化され信頼性が高くなる。Furthermore, since the device can be constructed without using mechanical elements such as bearings in the vacuum chamber, which is different from the cooling by the rotary contact with the roll, the device structure is greatly simplified and reliability is improved. Get higher
【図１】連続鋼帯の各種プラズマ処理装置を組合せた連
続ラインの構成を示した図。FIG. 1 is a diagram showing a configuration of a continuous line in which various plasma processing apparatuses for continuous steel strip are combined.
【図２】本発明に係る連続鋼帯プラズマ処理装置の鋼帯
冷却装置の一実施例を示す図。FIG. 2 is a diagram showing an embodiment of a steel strip cooling device of a continuous steel strip plasma processing apparatus according to the present invention.
【図３】本発明に係る鋼帯冷却装置を真空チャンバー内
に設置した時の熱の授受を説明するための原理図。FIG. 3 is a principle diagram for explaining heat transfer when a steel strip cooling device according to the present invention is installed in a vacuum chamber.
１ イオンプレーティング装置 ２ スパッタリング装置 ３ プラズマＣＶＤ装置 ４ ヒータ ５ 巻き取りリール １１ 連続鋼帯 １２ａ，１２ｂ 銅ブロック １３ａ，１３ｂ 循環パイプ １４ 真空チャンバー DESCRIPTION OF SYMBOLS 1 Ion plating apparatus 2 Sputtering apparatus 3 Plasma CVD apparatus 4 Heater 5 Take-up reel 11 Continuous steel strips 12a, 12b Copper block 13a, 13b Circulation pipe 14 Vacuum chamber
Claims (2)
いに平行に設置し、該一対の銅ブロック内には冷却媒体
通路を設け、該通路内に水等の冷却媒体を循環させたこ
とを特徴とする連続鋼帯プラズマ処理装置の鋼帯冷却装
置。1. A continuous steel strip is sandwiched between a pair of copper blocks and installed parallel to each other, a cooling medium passage is provided in the pair of copper blocks, and a cooling medium such as water is circulated in the passages. A steel strip cooling device for a continuous steel strip plasma processing apparatus, which is characterized by:
う面を酸化処理したことを特徴とする請求項１の鋼帯冷
却装置。2. The steel strip cooling device according to claim 1, wherein the surfaces of the pair of copper blocks facing the continuous steel strip are oxidized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10222691A JPH05125539A (en) | 1991-02-08 | 1991-02-08 | Device for cooling steel strip in continuous steel strip plasma treating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10222691A JPH05125539A (en) | 1991-02-08 | 1991-02-08 | Device for cooling steel strip in continuous steel strip plasma treating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05125539A true JPH05125539A (en) | 1993-05-21 |
Family
ID=14321745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10222691A Pending JPH05125539A (en) | 1991-02-08 | 1991-02-08 | Device for cooling steel strip in continuous steel strip plasma treating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05125539A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021106439A1 (en) * | 2019-11-27 | 2021-06-03 | 株式会社神戸製鋼所 | Vacuum heat treatment device for foil base materials and heat treatment method for foil base materials |
-
1991
- 1991-02-08 JP JP10222691A patent/JPH05125539A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021106439A1 (en) * | 2019-11-27 | 2021-06-03 | 株式会社神戸製鋼所 | Vacuum heat treatment device for foil base materials and heat treatment method for foil base materials |
| JP2021085066A (en) * | 2019-11-27 | 2021-06-03 | 株式会社神戸製鋼所 | Vacuum heat treatment apparatus for foil base material and heat treatment method for foil base material |
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