JPH0498165A - Liquid-cooled bt device - Google Patents
Liquid-cooled bt deviceInfo
- Publication number
- JPH0498165A JPH0498165A JP2215560A JP21556090A JPH0498165A JP H0498165 A JPH0498165 A JP H0498165A JP 2215560 A JP2215560 A JP 2215560A JP 21556090 A JP21556090 A JP 21556090A JP H0498165 A JPH0498165 A JP H0498165A
- Authority
- JP
- Japan
- Prior art keywords
- board
- tank
- refrigerant liquid
- overflow tank
- rack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims abstract description 14
- 239000003507 refrigerant Substances 0.000 claims abstract description 14
- 230000002950 deficient Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 1
- 238000005452 bending Methods 0.000 abstract description 2
- 230000008602 contraction Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体集積回路の初期不良品を取り除く目的に
使用するＢＴ装置（Ｂ ｕ ｒ ｎ −Ｉ ｎＴ ｅ
ｓ を装置）に関し、特に循環式液冷ＢＴ装置に関する
。[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to a BT device (Burn-InTe) used for the purpose of removing initial defective products from semiconductor integrated circuits.
s equipment), and particularly relates to circulating liquid-cooled BT equipment.
従来のこの種の液冷ＢＴ装置は、冷媒液を循環させるポ
ンプ、パイプ、バルブ、固定式オーバフロータンク、外
部タンク、外装フレーム、被テストデバイスを動作させ
る信号源を含むＢＴ板ラック等を有している。A conventional liquid-cooled BT device of this type includes a pump for circulating refrigerant liquid, pipes, valves, a fixed overflow tank, an external tank, an exterior frame, a BT board rack containing a signal source for operating the device under test, etc. ing.
次にその動作について説明する。ＢＴ板に被テストデバ
イスを装着した後、動作用信号源を含むＢＴ板ラックを
上下動させ、手前からＢＴ板をＢＴ板ラックに装着させ
、そのｆｕ Ｂ Ｔ板うックを冷媒液中に沈め、冷媒液
を循環させながら被デストチハイスを動作させ、バーン
イン試験を行なっている。Next, its operation will be explained. After mounting the device under test on the BT board, move the BT board rack containing the operating signal source up and down, install the BT board on the BT board rack from the front, and place the fu BT board into the refrigerant liquid. A burn-in test is performed by submerging the decommissioned steel and operating it while circulating the refrigerant.
この従来の液冷ＢＴ装置ては、ＢＴ板を冷媒液に浸漬し
、また引き上ける際、被テストデバイスを動作させる信
号源を含むＢＴ板ラックを上下動させているため、信号
源への給電線が機械的な折れ曲りストレスを受け、断線
等の故障が生し易いという問題があった。In this conventional liquid-cooled BT device, when the BT board is immersed in the refrigerant liquid and then pulled up, the BT board rack containing the signal source that operates the device under test is moved up and down. There is a problem in that the power supply line is subjected to mechanical bending stress and is susceptible to failures such as disconnection.
本発明の液冷ＢＴ装置では、ＢＴ板ラックを固定して上
下動作をさせないようにし、その代り電装系等複雑な機
構を持たない冷媒液のオーバフロータンクを上下動作さ
せる機構を備えている。In the liquid-cooled BT device of the present invention, the BT plate rack is fixed and not allowed to move up and down, and instead is provided with a mechanism for moving up and down a refrigerant liquid overflow tank that does not have a complicated mechanism such as an electrical system.
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図は本発明の第１の実施例の構成図である。FIG. 1 is a block diagram of a first embodiment of the present invention.
可動式オーバフロータンク４ａ（下降時：実線で示す）
は、下降してＢＴ板ラツク９が正面から見える状態とな
る。この時、伸縮パイプ５ａは縮んでいる。ＢＴ板ラツ
ク９にＢＴ板３を矢印方向からセラＩ−Ｌ、オーバフロ
ータンク上下動駆動モータ１を動作させると釣下げチェ
ーン２が巻き取られ、可動式オーバフロータンク４ａが
可動式オーバフロータンク４（上昇時：破線で示す）の
位置まで上昇する。この時、伸縮パイプ５ａは、破線で
示す伸縮パイプらのように伸びている。次にオイルポン
プ８を動作させると冷媒液７が可動式オーバフロータン
ク４からオーバフローし、ＢＴ板が冷媒液に浸漬される
。オーバフローした冷媒液は外部タンク６に落下する。Movable overflow tank 4a (during descent: shown by solid line)
is lowered so that the BT plate rack 9 can be seen from the front. At this time, the telescopic pipe 5a is contracted. When the BT plate 3 is placed on the BT plate rack 9 in the direction of the arrow I-L and the overflow tank vertical movement drive motor 1 is operated, the hanging chain 2 is wound up, and the movable overflow tank 4a is moved from the movable overflow tank 4 (ascending). time: rises to the position shown by the dashed line). At this time, the telescopic pipe 5a extends as shown by the broken line. Next, when the oil pump 8 is operated, the refrigerant liquid 7 overflows from the movable overflow tank 4, and the BT plate is immersed in the refrigerant liquid. The overflowing refrigerant liquid falls into the external tank 6.
従って、本実施例によればＢＴ板シックリか上下動しな
いなめ、信号源の給電線の故障はなくなる。Therefore, according to this embodiment, the BT board does not move up and down, so there is no problem with the power supply line of the signal source.
次に本発明の第２の実施例について説明する。Next, a second embodiment of the present invention will be described.
基本的な動作は第１の実施例と同じであるが、本実施例
では伸縮パイプ５を用いない。The basic operation is the same as the first embodiment, but the telescopic pipe 5 is not used in this embodiment.
すなわち第２図の構成図に示すように、伸縮パイプに代
って可動式オーバフロータンク４に接続されるパイプを
ストレートなパイプとし、このパイプを冷媒液の循環経
路パイプ内に挿入できるようにしたものである。これに
より接続パイプの伸縮による疲労故障はなくすこヒがで
きる。In other words, as shown in the configuration diagram in Fig. 2, the pipe connected to the movable overflow tank 4 is replaced by a straight pipe, so that this pipe can be inserted into the refrigerant liquid circulation path pipe. It is something. This eliminates fatigue failures due to expansion and contraction of the connecting pipe.
もちろん循環経路パイプとオーバフロータンク下のスト
レートパイプとのクリアランスで若干の流量の減少があ
るが無視しうる。Of course, there is a slight decrease in flow rate due to the clearance between the circulation route pipe and the straight pipe under the overflow tank, but it can be ignored.
以上説明したように本発明は、信号源用の給電線を含む
ＢＴ板ラックを固定し、オーバーフロータンクを可動と
したことにより、線径も小さく機械的強度のあまりない
給電線でも、折れ曲りストレスによる゛断線等の故障が
なくなるという効果を有する。As explained above, the present invention fixes the BT board rack containing the signal source power supply line and makes the overflow tank movable, so that even the power supply line with a small wire diameter and low mechanical strength can be easily bent and stressed. This has the effect of eliminating failures such as disconnection due to wire breakage.
第１図は本発明の第１の実施例の構成図、第２図は′第
２の実施例の構成図である。
１・・・オーバフロータンク上下動駆動モータ、２・・
・釣下げチェーン、３・・・ＢＴ板、４，４ａ・・・可
動式オーバフロータンク、５，５ａ・・・伸縮パイプ、
６・・・外部タンク、７・・・冷媒液、８・・・オイル
ポンプ、９・・・ＢＴ板ラック。FIG. 1 is a block diagram of a first embodiment of the present invention, and FIG. 2 is a block diagram of a second embodiment. 1... Overflow tank vertical movement drive motor, 2...
・Hanging chain, 3... BT plate, 4, 4a... Movable overflow tank, 5, 5a... Telescopic pipe,
6...External tank, 7...Refrigerant liquid, 8...Oil pump, 9...BT board rack.
Claims (1)
われるバーイン試験に使用される液冷ＢＴ装置において
、被テストデバイスを実装したＢＴ板を装着するＢＴ板
ラックを固定し、前記ＢＴ板を浸漬する冷媒液のオーバ
フロータンクを上下動可能としたことを特徴とする液冷
ＢＴ装置。In a liquid-cooled BT device used for a burn-in test conducted for the purpose of removing initial defective products of semiconductor integrated circuits, a BT board rack on which a BT board mounted with a device under test is mounted is fixed, and the BT board is immersed. A liquid cooling BT device characterized in that a refrigerant liquid overflow tank can be moved up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2215560A JPH0498165A (en) | 1990-08-15 | 1990-08-15 | Liquid-cooled bt device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2215560A JPH0498165A (en) | 1990-08-15 | 1990-08-15 | Liquid-cooled bt device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0498165A true JPH0498165A (en) | 1992-03-30 |
Family
ID=16674453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2215560A Pending JPH0498165A (en) | 1990-08-15 | 1990-08-15 | Liquid-cooled bt device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0498165A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111366838A (en) * | 2020-03-16 | 2020-07-03 | 华北电力大学 | Power device characteristic testing cavity in immersion cooling environment |
-
1990
- 1990-08-15 JP JP2215560A patent/JPH0498165A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111366838A (en) * | 2020-03-16 | 2020-07-03 | 华北电力大学 | Power device characteristic testing cavity in immersion cooling environment |
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