JPH0480071U - - Google Patents
Info
- Publication number
- JPH0480071U JPH0480071U JP12499790U JP12499790U JPH0480071U JP H0480071 U JPH0480071 U JP H0480071U JP 12499790 U JP12499790 U JP 12499790U JP 12499790 U JP12499790 U JP 12499790U JP H0480071 U JPH0480071 U JP H0480071U
- Authority
- JP
- Japan
- Prior art keywords
- conductivity type
- detection electrode
- semiconductor substrate
- diffusion
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
Landscapes
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
- Pressure Sensors (AREA)
Description
第1図及び第2図は本案の一実施例の平面図、
第3図はその他の実施例の略断面図、第4図及び
第5図はさらに他の実施例の平面図、第6図、第
7図及び第8図はそれぞれ従来の例の平面図であ
る。 1……N型半導体基板、2,3……位置検出用
電極、4……P型拡散層、5……P+型拡散層、
6……チヤネルストツパー、7……N+型拡散層
、8……裏面電極、9……SiO2膜。
第3図はその他の実施例の略断面図、第4図及び
第5図はさらに他の実施例の平面図、第6図、第
7図及び第8図はそれぞれ従来の例の平面図であ
る。 1……N型半導体基板、2,3……位置検出用
電極、4……P型拡散層、5……P+型拡散層、
6……チヤネルストツパー、7……N+型拡散層
、8……裏面電極、9……SiO2膜。
Claims (1)
- 第一の導電型の半導体基板の表面の両端に設け
られた信号検出用電極と、これらの電極間を接続
する前記の基板の表面に形成された複数の空間を
有する第二の導電型の拡散層とを有するポジシヨ
ンセンサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990124997U JP2524708Y2 (ja) | 1990-11-26 | 1990-11-26 | ポジションセンサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990124997U JP2524708Y2 (ja) | 1990-11-26 | 1990-11-26 | ポジションセンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0480071U true JPH0480071U (ja) | 1992-07-13 |
JP2524708Y2 JP2524708Y2 (ja) | 1997-02-05 |
Family
ID=31872622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990124997U Expired - Fee Related JP2524708Y2 (ja) | 1990-11-26 | 1990-11-26 | ポジションセンサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2524708Y2 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917288A (ja) * | 1982-07-20 | 1984-01-28 | Hamamatsu Tv Kk | 入射位置検出用半導体装置 |
JPS59127883A (ja) * | 1983-01-12 | 1984-07-23 | Matsushita Electronics Corp | 感光半導体装置 |
-
1990
- 1990-11-26 JP JP1990124997U patent/JP2524708Y2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917288A (ja) * | 1982-07-20 | 1984-01-28 | Hamamatsu Tv Kk | 入射位置検出用半導体装置 |
JPS59127883A (ja) * | 1983-01-12 | 1984-07-23 | Matsushita Electronics Corp | 感光半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2524708Y2 (ja) | 1997-02-05 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |