JPH0476170B2 - - Google Patents
Info
- Publication number
- JPH0476170B2 JPH0476170B2 JP16271184A JP16271184A JPH0476170B2 JP H0476170 B2 JPH0476170 B2 JP H0476170B2 JP 16271184 A JP16271184 A JP 16271184A JP 16271184 A JP16271184 A JP 16271184A JP H0476170 B2 JPH0476170 B2 JP H0476170B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic layer
- thin film
- magnetic
- head
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 68
- 239000010409 thin film Substances 0.000 claims description 39
- 239000000758 substrate Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 11
- 239000000696 magnetic material Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 230000035699 permeability Effects 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000002356 single layer Substances 0.000 claims description 2
- 230000005415 magnetization Effects 0.000 description 18
- 230000005330 Barkhausen effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3113—Details for improving the magnetic domain structure or avoiding the formation or displacement of undesirable magnetic domains
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】
（発明の分野）
本発明は磁気デイスク、磁気テープ等の磁気記
録媒体上を摺動して各種の信号の記録再生を行な
う磁気ヘツドおよびその製造方法に関し、特に詳
細には小型の磁気記録媒体に対して記録再生を行
なうのに適した薄膜磁気ヘツドおよびその製造方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to a magnetic head that records and reproduces various signals by sliding on a magnetic recording medium such as a magnetic disk or magnetic tape, and a method for manufacturing the same. The present invention relates to a thin film magnetic head suitable for recording and reproducing data on and from a small magnetic recording medium, and a method for manufacturing the same.
（発明の技術的背景および先行技術）
従来より、磁気記録媒体を用いて各種の信号を
記録再生する磁気記録再生装置が種々開発されて
おり、近年、磁気記録媒体の形状が多様化、小型
化するにつれて、これらの媒体に情報を記録し、
この記録された情報を再生する手段である磁気ヘ
ツドについても多様な媒体に適した種々の磁気ヘ
ツドの開発が進められている。例えば最内周記録
半径が15mm、最外周記録半径が20mm程度の小型の
円板状磁気記録媒体を用いて記録再生を行なうた
めの磁気ヘツドとしては、ヘツド自体も小型で低
クロストークである必要があるため、従来のバル
ク型の磁性材料を用いたバルクヘツドに代つて薄
膜型の磁気ヘツドが多く用いられるようになつて
いる。このような薄膜磁気ヘツドは、微細な形状
に作製でき、マルチチヤンネル化およびクロスト
ークの低減がはかれる等の利点があることから、
特に小形の媒体を用いて記録再生を行なう狭トラ
ツク磁気ヘツドとして注目されている。(Technical Background and Prior Art of the Invention) Various magnetic recording and reproducing devices that record and reproduce various signals using magnetic recording media have been developed, and in recent years, the shapes of magnetic recording media have become more diverse and smaller. As the information is recorded on these media,
Regarding magnetic heads, which are means for reproducing recorded information, various magnetic heads suitable for various media are being developed. For example, as a magnetic head for recording and reproducing using a small disc-shaped magnetic recording medium with an innermost recording radius of 15 mm and an outermost recording radius of about 20 mm, the head itself must be small and have low crosstalk. Therefore, thin film magnetic heads are increasingly being used in place of conventional bulk heads using magnetic materials. Such thin-film magnetic heads have the advantage of being able to be manufactured into fine shapes, allowing for multi-channeling, and reducing crosstalk.
In particular, it is attracting attention as a narrow track magnetic head for recording and reproducing information using small media.
この薄膜磁気ヘツドとしては、磁極を形成する
ための上部磁性層と下部磁性層が基板上に薄膜に
より成膜されてなるものが一般的であるが、この
ような構造の薄膜磁気ヘツドにおいて非常にトラ
ツク幅の狭い磁気ヘツドを得ようとすると、薄膜
による上下磁性層を、ヨーク長に比べてトラツク
幅が小さくなるように成膜しなければならなくな
る。しかしながら、トラツク幅よりもヨーク長の
大きい形状の磁性層においては、形状異方性によ
り、磁性層内の自発磁化の方向がヨーク長方向に
向き易くなる。このため再生時の磁気記録媒体か
らの再生信号磁束や記録時の記録電流から生じる
記録信号磁束に応答する際には、前記磁性層内の
磁化機構は磁壁の移動によるものが主となるため
記録再生時の応答速度が低下してしまう。従つ
て、上記のような薄膜磁気ヘツドにおいては、高
周波領域での磁気効率が低下し、またＳ／Ｎ比も
低くなるとともに、再生時にはバルクハウゼンノ
イズが多くなるなどの不都合が生じていた。 This thin-film magnetic head generally has an upper magnetic layer and a lower magnetic layer formed on a substrate as thin films for forming magnetic poles, but in a thin-film magnetic head with such a structure, there are very few problems. In order to obtain a magnetic head with a narrow track width, the upper and lower thin magnetic layers must be formed so that the track width is smaller than the yoke length. However, in a magnetic layer having a shape where the yoke length is larger than the track width, the direction of spontaneous magnetization in the magnetic layer tends to be oriented in the yoke length direction due to shape anisotropy. Therefore, when responding to the reproduction signal magnetic flux from the magnetic recording medium during reproduction or the recording signal magnetic flux generated from the recording current during recording, the magnetization mechanism in the magnetic layer is mainly due to the movement of the domain walls, so the recording The response speed during playback decreases. Therefore, in the thin film magnetic head as described above, there have been disadvantages such as a decrease in magnetic efficiency in a high frequency region, a decrease in S/N ratio, and an increase in Barkhausen noise during reproduction.
（発明の目的）
上記のような問題点に鑑みてなされたものであ
り、高トラツク密度の媒体の記録再生に適する狭
いトラツク幅を有し、しかも高周波数特性にすぐ
れ、Ｓ／Ｎ比も良好でバルクハウゼンノイズの少
ない高性能な薄膜磁気ヘツドおよびその製造方法
を提供することを目的とするものである。(Objective of the invention) This was developed in view of the above problems, and has a narrow track width suitable for recording and reproducing on a medium with a high track density, excellent high frequency characteristics, and a good S/N ratio. The object of the present invention is to provide a high-performance thin film magnetic head with low Barkhausen noise and a method for manufacturing the same.
（発明の構成）
本発明の薄膜磁気ヘツドは、薄膜による上部磁
性層のトラツク幅方向の長さがヨーク長よりも大
きく、また下部磁層は磁気ヘツドの基板内に挾持
されており、磁気ヘツドのトラツク幅を規定する
幅と、この幅よりも大きい高さを有することを特
徴とするものである。このような構造の薄膜磁気
ヘツドにおいては、形状異方性により、上部磁性
層の磁化容易軸はトラツク幅方向となり、また下
部磁性層によつて狭いトラツク幅を規定すること
が可能になる。(Structure of the Invention) In the thin film magnetic head of the present invention, the length of the thin film upper magnetic layer in the track width direction is larger than the yoke length, and the lower magnetic layer is sandwiched within the substrate of the magnetic head. It is characterized by having a width that defines the track width of the track, and a height that is larger than this width. In a thin film magnetic head having such a structure, the axis of easy magnetization of the upper magnetic layer is in the track width direction due to the shape anisotropy, and it is possible to define a narrow track width by the lower magnetic layer.
また本発明の薄膜磁気ヘツドの製造方法は、磁
気ヘツドのトラツク幅を規定する幅と、該幅より
も大きい高さを有する下部磁性層を磁気ヘツドの
基板内に挾持せしめ、この下部磁性層および基板
の上部にトラツク幅方向の長さがヨーク長よりも
大きい上部磁性層を薄膜により成膜することを特
徴とするものである。上記のように本発明の方法
では、上部磁性層は薄膜により成膜されるが、下
部磁性層は薄膜に限らず、バルク薄体の接着など
により設けられてもよい。 Further, in the method for manufacturing a thin film magnetic head of the present invention, a lower magnetic layer having a width that defines the track width of the magnetic head and a height larger than the width is sandwiched within the substrate of the magnetic head, and the lower magnetic layer and This method is characterized in that an upper magnetic layer whose length in the track width direction is larger than the yoke length is formed as a thin film on the top of the substrate. As described above, in the method of the present invention, the upper magnetic layer is formed as a thin film, but the lower magnetic layer is not limited to a thin film, and may be formed by adhering a bulk thin body.
（実施態様）
以下、図面により本発明の実施態様について説
明する。なお本実施態様においては２チヤンネル
の薄膜磁気ヘツドを例にとつて説明する。(Embodiments) Hereinafter, embodiments of the present invention will be described with reference to the drawings. In this embodiment, a two-channel thin film magnetic head will be described as an example.
第１図の斜視図に示すように、本発明の薄膜磁
気ヘツドの製造方法においては、まず非磁性体で
あるガラス、サフアイア、非磁性フエライト、ア
ルミナチタンカーバイト（Al2O3TiC）等の基板
１と一定の幅を有する高透磁率磁性体からなる下
部磁性層２が交互に積層され、下部磁性層２は基
板１内に挾持される。この下部磁性層２は、第２
図ａに示すようにパーマロイ、センダスト、アモ
ルフアス合金等の金属磁性体２ａをSiO2、SiO2
を分散含有せしめた樹脂等からなる絶縁層２ｂを
介して複数層積層したものであつてもよいし、第
２図ｂに示すようにフエライト等の酸化物磁性体
の単層であつてもよい。前者の下部磁性層は蒸
着、スパツタ、メツキ、バルク薄体の接着等の方
法によつて基板１内に挾持せしめられ、また後者
の下部磁性層は接着等の方法によつて基板１内に
挾持せしめられる。なお、下部磁性層２の幅はそ
の高さ（図中上下方向）よりも小さいものとなつ
ている。 As shown in the perspective view of FIG. 1, in the method for manufacturing a thin film magnetic head of the present invention, first, a nonmagnetic material such as glass, sapphire, nonmagnetic ferrite, alumina titanium carbide (Al 2 O 3 TiC), etc. A substrate 1 and a lower magnetic layer 2 made of a high permeability magnetic material having a constant width are alternately laminated, and the lower magnetic layer 2 is sandwiched within the substrate 1. This lower magnetic layer 2
As shown in Figure a, metal magnetic material 2a such as permalloy, sendust, amorphous alloy, etc. is mixed with SiO 2 , SiO 2
It may be a plurality of layers laminated with an insulating layer 2b interposed therebetween made of a resin or the like containing dispersed oxide, or it may be a single layer of an oxide magnetic material such as ferrite as shown in FIG. 2b. . The former lower magnetic layer is sandwiched within the substrate 1 by a method such as vapor deposition, sputtering, plating, or bulk thin body adhesion, and the latter lower magnetic layer is sandwiched within the substrate 1 by a method such as bonding. I am forced to do it. Note that the width of the lower magnetic layer 2 is smaller than its height (in the vertical direction in the figure).
このように積層された基板１と下部磁性層２か
らなる積層体は、少なくとも上面３が平滑になる
ように仕上げられた後、第３図に示すように各下
部磁性層２の上部にコイル４が両端部４ａ，４ａ
を突出させてうず巻き状に積層される。これらの
積層体の上部にはさらに、第４図に示すように薄
膜により高透磁率磁性体であるパーマロイ、セン
ダスト、アモルフア合金等からなる上部磁性層５
が成膜される。この上部磁性層５は前記コイル４
を２つずつ覆い、かつ前記コイルの両端部４ａ，
４ａを上方に露出させるように形成され、前記下
部磁性層の幅（図中矢印ｄ）方向の長さ（図中矢
印ａ）がヨーク長（図中矢印ｂ）よりも大きくな
つている。上記のように積層された磁気ヘツドの
集合体は第４図中破線で示す位置で切断されてそ
れぞれ薄膜磁気ヘツド単体となる。 The laminate consisting of the substrate 1 and the lower magnetic layer 2 thus laminated is finished so that at least the upper surface 3 is smooth, and then a coil 4 is placed on top of each lower magnetic layer 2 as shown in FIG. are both ends 4a, 4a
They are stacked in a spiral shape with the edges protruding from the top. Further, on top of these laminates, as shown in FIG. 4, an upper magnetic layer 5 made of a high permeability magnetic material such as permalloy, sendust, or amorphous alloy is formed by a thin film.
is deposited. This upper magnetic layer 5 is the coil 4
, and both ends 4a of the coil,
4a is exposed upward, and the length (arrow a in the figure) in the width direction (arrow d in the figure) of the lower magnetic layer is larger than the yoke length (arrow b in the figure). The assembly of magnetic heads laminated as described above is cut at the positions indicated by broken lines in FIG. 4 to form individual thin film magnetic heads.
このように製造された薄膜磁気ヘツドにおいて
はそのトラツク幅は前記下部磁性層２の幅によつ
て規定され、この下部磁性層の幅は、基板１上に
積層された際の下部磁性層の厚みであることか
ら、下部磁性層２が薄膜であつてもバルクであつ
ても、トラツク幅は小さく設定することができ
る。また前記上部磁性層５はそのトラツク幅方向
の長さ（矢印ａ）がヨーク長（矢印ｂ）よりも大
きくなつているので、形状異方性により磁層の内
部磁化は磁化容易軸がトラツク幅方向に、磁化困
難軸がトラツク幅方向と直交する方向になる。こ
のため、信号の記録再生時に前記磁化困難軸方向
（ヨーク長方向）に外部磁界が印加されると、磁
性層内の磁化機構は回転磁化によるものが主とな
るので、記録再生時の応答速度が向上する。な
お、以上説明した本発明の一実施態様において
は、下部磁性層２のヨーク長方向の長さは、高さ
（矢印ｃ）よりも大きいものとなつているが、こ
の下部磁性層２の高さはそのままにしてヨーク長
方向の長さを前記高さよりも小さいものとする
と、下部磁性層においても形状異方性により磁性
層内の磁化容易軸を高さ方向にすることができ
る。この場合にも磁化容易軸は外部磁界の印加さ
れる方向（ヨーク長方向）と垂直になるので、上
部磁性層と同様に下部磁性層内での磁化機構は回
転磁化によるものが主となり、一層良好な記録再
生を行なうことのできる磁気ヘツドが得られる。
また本実施態様においては２チヤンネルの薄膜磁
気ヘツドを例にとつて説明したが、チヤンネル数
は言うまでもなく２チヤンネルに限定されるもの
ではなく、１チヤンネル以上の任意のチヤンネル
の薄膜磁気ヘツドについて本発明を適用すること
ができる。 In the thin film magnetic head manufactured in this manner, the track width is defined by the width of the lower magnetic layer 2, and the width of the lower magnetic layer is determined by the thickness of the lower magnetic layer when laminated on the substrate 1. Therefore, whether the lower magnetic layer 2 is a thin film or a bulk, the track width can be set small. Further, since the length of the upper magnetic layer 5 in the track width direction (arrow a) is larger than the yoke length (arrow b), the internal magnetization of the magnetic layer is such that the axis of easy magnetization is along the track width due to shape anisotropy. In this direction, the axis of difficult magnetization is perpendicular to the track width direction. Therefore, when an external magnetic field is applied in the hard magnetization axis direction (yoke length direction) during signal recording and reproduction, the magnetization mechanism in the magnetic layer is mainly based on rotational magnetization, so the response speed during recording and reproduction is will improve. In the embodiment of the present invention described above, the length of the lower magnetic layer 2 in the yoke length direction is greater than the height (arrow c); If the length in the yoke length direction is made smaller than the above-mentioned height while keeping the height unchanged, the axis of easy magnetization in the magnetic layer can be set in the height direction due to shape anisotropy in the lower magnetic layer as well. In this case as well, the axis of easy magnetization is perpendicular to the direction in which the external magnetic field is applied (the yoke length direction), so the magnetization mechanism in the lower magnetic layer is mainly due to rotational magnetization, just like in the upper magnetic layer. A magnetic head capable of performing good recording and reproduction can be obtained.
Further, in this embodiment, a two-channel thin-film magnetic head has been described as an example, but the number of channels is not limited to two channels, and the present invention can be applied to a thin-film magnetic head with one or more arbitrary channels. can be applied.
（発明の効果）
以上詳細に説明したように、上記のような製造
方法により作られた本発明の薄膜磁気ヘツドにお
いては、下部磁性層が基板によつて挾持されてい
るために、下部磁性層薄膜であつてもバルクであ
つてもトラツク幅を小さく規定することができる
ので従来の薄膜磁気ヘツドと同等以上に高トラツ
ク密度の媒体への磁気記録再生特性を得ることが
できるとともに、上部磁性層のトラツク幅方向の
長さが、ヨーク長よりも大きくなるように上部磁
性層を成膜したことにより、上部磁性層の磁化容
易軸はトラツク幅方向となるので、信号の記録再
生時にヨーク長方向の外部磁界が印加されると、
回転磁化により磁性体層内部の磁化が行なわれ
る。従つて回転磁化は磁壁の移動による磁化に比
べて応答速度が速いことから高周波数特性にすぐ
れＳ／Ｎ比も良好であるとともにバルクハウゼン
ノイズも少ない高性能な薄膜磁気ヘツドを提供す
ることが可能となる。また前述のように下部磁性
層のヨーク長方向の長さをその高さに比べ小さく
すると上記のような本発明の薄膜磁気ヘツドの特
性は一層すぐれたものとなる。(Effects of the Invention) As explained in detail above, in the thin film magnetic head of the present invention manufactured by the above manufacturing method, since the lower magnetic layer is sandwiched between the substrates, the lower magnetic layer Since the track width can be defined small whether it is a thin film or a bulk head, it is possible to obtain magnetic recording and reproducing characteristics for a medium with a higher track density than that of a conventional thin film magnetic head. By forming the upper magnetic layer so that the length in the track width direction is larger than the yoke length, the axis of easy magnetization of the upper magnetic layer is in the track width direction. When an external magnetic field of
Rotational magnetization causes magnetization inside the magnetic layer. Therefore, since rotational magnetization has a faster response speed than magnetization due to domain wall movement, it is possible to provide a high-performance thin film magnetic head with excellent high frequency characteristics, a good S/N ratio, and less Barkhausen noise. becomes. Further, as described above, if the length of the lower magnetic layer in the yoke length direction is made smaller than its height, the characteristics of the thin film magnetic head of the present invention as described above will be further improved.
第１図は本発明の薄膜磁気ヘツドの基板および
下部磁性層を示す斜視図、第２図は下部磁性層の
違いによる構造の差異を示す第１図の一部拡大
図、第３図は第１図に示した積層体にコイルを積
層した状態を示す斜視図、第４図は第３図に示し
た積層体に上部磁性層を積層した状態を示す斜視
図である。
１…基板、２…下部磁性層、４…コイル、５…
上部磁性層。
FIG. 1 is a perspective view showing the substrate and lower magnetic layer of the thin film magnetic head of the present invention, FIG. 2 is a partially enlarged view of FIG. 1 showing differences in structure due to differences in the lower magnetic layer, and FIG. FIG. 4 is a perspective view showing a state in which coils are laminated on the laminate shown in FIG. 1, and FIG. 4 is a perspective view showing a state in which an upper magnetic layer is laminated on the laminate shown in FIG. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Lower magnetic layer, 4...Coil, 5...
Top magnetic layer.
Claims (1)
性層および下部磁性層のうち、少なくとも上部磁
性層が薄膜である薄膜磁気ヘツドにおいて、前記
上部磁性層のトラツク幅方向の長さがヨーク長よ
りも大きく、また前記下部磁性層が前記ヘツドの
トラツク幅を規定する幅および該幅より大きい高
さを有し、前記ヘツドの基板内に挾持されてなる
ことを特徴とする薄膜磁気ヘツド。 ２ 前記下部磁性層が、金属磁性体を絶縁層を介
して複数層積層したものであることを特徴とする
特許請求の範囲第１項記載の薄膜磁気ヘツド。 ３ 前記下部磁性層が酸化物磁性体の単層である
ことを特徴とする特許請求の範囲第１項記載の薄
膜磁気ヘツド。 ４ 前記下部磁性層のヨーク長方向の長さが、該
下部磁性層の高さよりも小さいことを特徴とする
特許請求の範囲第１項乃至第３項のいずれか１項
記載の薄膜磁気ヘツド。 ５ 磁極を構成する高透磁率磁性体である上部磁
性層および下部磁性層のうち、少なくとも上部磁
性層が薄膜である薄膜磁気ヘツドを製造する方法
において、前記ヘツドのトラツク幅を規定する幅
および該幅より大きい高さを有する下部磁性層を
前記ヘツドの基板内に挾持せしめ、この下部磁性
層および基板の上にコイルを形成し、さらにこの
コイル上にトラツク幅方向の長さがヨーク長より
も大きい薄膜の上部磁性層を成膜することを特徴
とする薄膜磁気ヘツドの製造方法。[Scope of Claims] 1. In a thin film magnetic head in which at least the upper magnetic layer is a thin film among an upper magnetic layer and a lower magnetic layer which are high permeability magnetic materials constituting a magnetic pole, The lower magnetic layer has a length greater than a yoke length, and the lower magnetic layer has a width defining a track width of the head and a height greater than the width, and is sandwiched within the substrate of the head. Thin film magnetic head. 2. The thin film magnetic head according to claim 1, wherein the lower magnetic layer is a plurality of layers of metal magnetic material laminated with an insulating layer interposed therebetween. 3. The thin film magnetic head according to claim 1, wherein the lower magnetic layer is a single layer of oxide magnetic material. 4. The thin film magnetic head according to any one of claims 1 to 3, wherein the length of the lower magnetic layer in the yoke length direction is smaller than the height of the lower magnetic layer. 5. A method for manufacturing a thin film magnetic head in which at least the upper magnetic layer is a thin film among the upper magnetic layer and the lower magnetic layer, which are high permeability magnetic materials constituting the magnetic pole, wherein the width defining the track width of the head and the A lower magnetic layer having a height greater than the width is sandwiched within the substrate of the head, a coil is formed on the lower magnetic layer and the substrate, and a coil is further formed on the coil so that the length in the track width direction is greater than the yoke length. A method for manufacturing a thin film magnetic head, characterized by forming a large thin film upper magnetic layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16271184A JPS6139915A (en) | 1984-08-01 | 1984-08-01 | Thin film magnetic head and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16271184A JPS6139915A (en) | 1984-08-01 | 1984-08-01 | Thin film magnetic head and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6139915A JPS6139915A (en) | 1986-02-26 |
| JPH0476170B2 true JPH0476170B2 (en) | 1992-12-02 |
Family
ID=15759837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16271184A Granted JPS6139915A (en) | 1984-08-01 | 1984-08-01 | Thin film magnetic head and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6139915A (en) |
-
1984
- 1984-08-01 JP JP16271184A patent/JPS6139915A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6139915A (en) | 1986-02-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |