JPH046608A - Thin film magnetic head and magnetic disk device with the thin film magnetic head mounted thereon - Google Patents
Thin film magnetic head and magnetic disk device with the thin film magnetic head mounted thereonInfo
- Publication number
- JPH046608A JPH046608A JP10761190A JP10761190A JPH046608A JP H046608 A JPH046608 A JP H046608A JP 10761190 A JP10761190 A JP 10761190A JP 10761190 A JP10761190 A JP 10761190A JP H046608 A JPH046608 A JP H046608A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- thin film
- magnetic core
- core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 38
- 239000010408 film Substances 0.000 claims abstract description 72
- 230000001681 protective effect Effects 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910020641 Co Zr Inorganic materials 0.000 claims description 2
- 229910020517 Co—Ti Inorganic materials 0.000 claims description 2
- 229910020520 Co—Zr Inorganic materials 0.000 claims description 2
- 229910017061 Fe Co Inorganic materials 0.000 claims description 2
- 229910003271 Ni-Fe Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 3
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 229910020598 Co Fe Inorganic materials 0.000 claims 1
- 229910002519 Co-Fe Inorganic materials 0.000 claims 1
- 229910017082 Fe-Si Inorganic materials 0.000 claims 1
- 229910017133 Fe—Si Inorganic materials 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- 230000005381 magnetic domain Effects 0.000 abstract description 14
- 238000009413 insulation Methods 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 239000002356 single layer Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910002593 Fe-Ti Inorganic materials 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、特に、高記録密度を達成するために適した薄
膜磁気ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention particularly relates to a thin film magnetic head suitable for achieving high recording density.
更に、本発明は薄膜磁気ヘッドを搭載した磁気ディスク
装置、特に、コンピュータの外部記憶装置として使用す
るのに好適な磁気ディスク装置に関する。Furthermore, the present invention relates to a magnetic disk device equipped with a thin film magnetic head, and particularly to a magnetic disk device suitable for use as an external storage device for a computer.
磁気ディスク装置、フロッピーディスク装置。 Magnetic disk device, floppy disk device.
ビデオテープレコーダ等の磁気記録装置の記録密度が増
加するにつれて、情報の書込みや読出しを行う薄膜磁気
ヘッドの高周波特性を向上させなければならない。薄膜
磁気ヘッドの特性は磁気コアの磁区構造と密接な関係が
あり、磁区構造の制御が重要になってきている。読出又
は書込み時に好ましい磁区構造の変化は、応答の速い磁
化回転であるが、単層磁性膜を磁気コアに用いると環流
磁区構造となるため、応答が遅く不連続な変化になりや
すい９０度磁壁の移動を含んでしまい、高周波特性が劣
下しＳ／Ｎ比が悪くなってしまう。また、読込時の信号
波形が歪むことがあり読出エラーの原因になってしまう
。従来の方法は、特開昭５８−１７１７０９号公報に記
載のように、磁性膜と非磁性膜を交互に積層した多層磁
性膜を磁気コアに用いる事により、磁区構造を単磁区化
していた。単磁区の場合には磁化回転だけで磁束を通す
ため、高周波特性が良く読込時に信号波形が歪むことも
ない。この場合、上部・下部磁気コアはそれぞれ分割さ
れておらず、それぞれ連続した多層磁性膜から成る。As the recording density of magnetic recording devices such as video tape recorders increases, the high frequency characteristics of thin film magnetic heads for writing and reading information must be improved. The characteristics of thin-film magnetic heads are closely related to the magnetic domain structure of the magnetic core, and control of the magnetic domain structure is becoming important. The preferred change in the magnetic domain structure during reading or writing is magnetization rotation with a fast response, but if a single-layer magnetic film is used for the magnetic core, it becomes a circulating magnetic domain structure, so the 90-degree domain wall has a slow response and is prone to discontinuous changes. , the high frequency characteristics deteriorate and the S/N ratio worsens. Further, the signal waveform at the time of reading may be distorted, causing a reading error. In the conventional method, as described in JP-A-58-171709, the magnetic domain structure is made into a single domain by using a multilayer magnetic film in which magnetic films and non-magnetic films are alternately laminated as a magnetic core. In the case of a single magnetic domain, the magnetic flux is passed only by magnetization rotation, so the high frequency characteristics are good and the signal waveform is not distorted when reading. In this case, the upper and lower magnetic cores are not divided, but are each made of a continuous multilayer magnetic film.
また、記録密度を高くするにはトラック幅を小さく高精
度で形成しなければならない。トラック幅を決める上部
磁気コア先端部の幅を高精度で形成するには特開昭６０
−１０４０９号公報に記載のように上部磁気コア先端部
のみを先に形成し、その後、上部磁気コア後部を形成す
るのが有利とされている。Furthermore, in order to increase the recording density, the track width must be small and formed with high precision. To form the width of the tip of the upper magnetic core with high precision, which determines the track width, JP-A-60
As described in Japanese Patent No. 10409, it is considered advantageous to form only the tip end of the upper magnetic core first, and then form the rear part of the upper magnetic core.
上記従来技術のうち、特開昭５８−１７１７０９号に記
載されている技術を用いれば、再生波形歪を発生させず
に高周波でのＳ／Ｎ比を良くすることができるが上部磁
気コア先端部形成の高精度化については考慮されておら
ず、出力が薄膜磁気ヘッドによってばらつくという問題
があった。また、従来技術のうち特開昭６０−１０４０
９号公報に記載されている技術を用いれば、上部磁気コ
ア先端部を高精度で形成できるが、磁区構造については
考慮がされておらず、再生波形歪が発生したり、高周波
でのＳ／Ｎ比が低くなる問題があった。Among the above conventional techniques, if the technique described in JP-A-58-171709 is used, it is possible to improve the S/N ratio at high frequencies without generating reproduced waveform distortion. No consideration was given to high precision formation, and there was a problem in that the output varied depending on the thin film magnetic head. Also, among the conventional techniques, Japanese Patent Application Laid-Open No. 60-1040
Using the technology described in Publication No. 9, the tip of the upper magnetic core can be formed with high precision, but the magnetic domain structure is not taken into consideration, which may cause reproduction waveform distortion or S/S at high frequencies. There was a problem that the N ratio became low.
本発明の目的は、上部磁気コア先端部を高精度に形成す
る薄膜磁気ヘッドの、再生波形歪をなくし、高周波での
Ｓ／Ｎ比を向上することにある。An object of the present invention is to eliminate reproduction waveform distortion and improve the S/N ratio at high frequencies in a thin film magnetic head in which the tip of the upper magnetic core is formed with high precision.
上記目的を達成するために、薄膜磁気ヘッドは上部磁気
コアを先端部と後部に分割して別々に形成する構造とし
、上部磁気コア先端部、上部磁気コア後部、下部磁気コ
アの一部又は全部を磁性膜と非磁性膜を交互に積層した
二層以上の多層磁性膜により形成したものである。In order to achieve the above purpose, the thin film magnetic head has a structure in which the upper magnetic core is divided into a tip part and a rear part, which are formed separately. is formed from a multilayer magnetic film of two or more layers in which magnetic films and nonmagnetic films are alternately laminated.
薄膜磁気ヘッドを上部磁気コアが先端部と後部に分割し
て別々に形成する構造とすることにより。By creating a thin-film magnetic head with a structure in which the upper magnetic core is divided into a tip part and a rear part, which are formed separately.
トラック幅を決める上部磁気コア先端部の幅を高精度で
形成することができる。また、上部磁気コア先端部、上
部磁気コア後部、下部磁気コアを多層磁性膜で形成する
ことにより磁区構造は単磁区となり、磁壁がないため再
生波形歪が無くなるだけでなく高周波領域でのＳ／Ｎ比
も高くなる。The width of the tip of the upper magnetic core, which determines the track width, can be formed with high precision. In addition, by forming the tip of the upper magnetic core, the rear part of the upper magnetic core, and the lower magnetic core with a multilayer magnetic film, the magnetic domain structure becomes a single magnetic domain, and since there is no domain wall, not only does reproduction waveform distortion disappear, but also S/ The N ratio also increases.
以下、本発明を用いた一実施例を第１図（ａ）。 An example using the present invention is shown in FIG. 1(a) below.
（ｂ）に示す。薄膜磁気ヘッドは基板１上に形成された
。磁性膜（Ｇｏ−Ｔａ−Ｚｒ）２と非磁性膜（ＡＱｚＯ
δ）３により形成された下部磁気コア。Shown in (b). A thin film magnetic head was formed on a substrate 1. Magnetic film (Go-Ta-Zr) 2 and non-magnetic film (AQzO
δ) The lower magnetic core formed by 3.
磁気ギャップ（ＡＱｚＯａ）４．下層絶縁層（レジスト
）５．磁性膜（Ｇｏ−Ｔａ−Ｚｒ）６と非磁性膜（ＡＱ
ｚＯａ）７により形成された上部磁気コア先端部、保護
膜（Ａ Ｑ ｚｏ ｓ”） ８ 、磁気性膜（Ｇｏ−Ｔ
ａ−Ｚｒ）１０と非磁性膜（Ａ Ｑ ２０３）９により
形成された上部磁気コア後部、コイル（＠）１２．上層
絶縁膜（レジスト）１３．素子保護膜１４から構成され
る。上部磁気コア先端部と上部磁気コア後部は保護膜８
に設けたコンタクトホール１１を通して接続しており、
下部磁気コアとともに磁気回路を形成している。Magnetic gap (AQzOa)4. Lower insulating layer (resist) 5. Magnetic film (Go-Ta-Zr) 6 and non-magnetic film (AQ
The tip of the upper magnetic core formed of
a-Zr) 10 and a non-magnetic film (AQ 203) 9 at the rear of the upper magnetic core, the coil (@) 12. Upper layer insulating film (resist) 13. It is composed of an element protection film 14. The tip of the upper magnetic core and the rear part of the upper magnetic core are covered with a protective film 8.
It is connected through a contact hole 11 provided in the
Together with the lower magnetic core, it forms a magnetic circuit.
磁性膜ＣｏＴａＺｒ−層の膜厚を０．４μｍ非磁性膜八
ρへ０３−暦の膜厚を５ｎｍとし、下部磁気コアを五層
磁性膜（６１ｉ性膜膜厚２μｍ）、上部磁気コア先端部
を六層磁性膜（磁性膜膜厚２．４μｍ）＋上部磁気コア
後部を上層磁性膜（磁性膜膜厚２．８μｍ）で形成した
薄膜磁気ヘッドの各磁気コアの磁区構造は単磁区となっ
た。第２図（ａ）に規格化したＳ／Ｎ比の周波数変化を
示す。The thickness of the magnetic CoTaZr layer is 0.4 μm and the non-magnetic film is 5 nm. The lower magnetic core is a 5-layer magnetic film (61i film thickness 2 μm) and the tip of the upper magnetic core. The magnetic domain structure of each magnetic core of the thin-film magnetic head is made up of a six-layer magnetic film (magnetic film thickness 2.4 μm) + an upper magnetic film (magnetic film thickness 2.8 μm) at the rear of the upper magnetic core. Ta. FIG. 2(a) shows the frequency change of the normalized S/N ratio.
各磁気コアの膜厚がそれぞれ等しく、各磁気コアを単層
Ｃｏ−Ｔａ−Ｚｒ膜で形成し、他は同じ構成の薄膜磁気
ヘッドと、同じ記録媒体からの読込特性を比較すると、
トラック＠８μｍの場合には、１０ＭＨｚ以上の高周波
領域でＳ／Ｎ比が向上した。第２図（ｂ）に規格化した
ノイズの周波数変化を示す、多層磁性膜の薄膜磁気ヘッ
ドで高周波領域でノイズが減少するのは磁気コアが単磁
区で磁壁がないため、磁壁移動の寄与がなくなるためで
ある。また、トラック幅が５μｍの薄膜磁気ヘッドの場
合には、第３図に示すように、Ｓ／Ｎ比の向上はトラッ
ク幅が８μｍの場合よりも大きい。Comparing the reading characteristics from the same recording medium with a thin-film magnetic head with the same configuration, where each magnetic core has the same film thickness and each magnetic core is formed of a single-layer Co-Ta-Zr film,
In the case of track @8 μm, the S/N ratio improved in the high frequency region of 10 MHz or higher. Figure 2 (b) shows the normalized noise frequency change.The reason why the noise decreases in the high frequency range in a thin film magnetic head with a multilayer magnetic film is because the magnetic core is a single domain and there is no domain wall, so the contribution of domain wall movement is This is because it disappears. Furthermore, in the case of a thin film magnetic head with a track width of 5 μm, as shown in FIG. 3, the improvement in the S/N ratio is greater than in the case of a track width of 8 μm.
本発明によれば、狭トラック幅、高周波領域でＳ／Ｎ比
向上の効果がある。さらに、単Ｈａ性膜で形成した薄膜
磁気ヘッドでは再生波形歪が発生したが、多層磁性層で
形成した薄膜磁気ヘッドでは再生波形歪は問題とならな
いレベルであった。According to the present invention, there is an effect of improving the S/N ratio in a narrow track width and high frequency region. Further, although reproduction waveform distortion occurred in the thin film magnetic head formed of a single Ha film, reproduction waveform distortion was at a level that did not pose a problem in the thin film magnetic head formed of a multilayer magnetic layer.
磁性膜をＮｉ−Ｆｅ、Ｆｅ−５ｉ、Ｆｅ−Ｇｅ。The magnetic film is made of Ni-Fe, Fe-5i, or Fe-Ge.
Ｆｅ−Ｔｉ、Ｆｅ−Ｎ、Ｎｉ−Ｆｅ−Ｃｏ、Ｃ。Fe-Ti, Fe-N, Ni-Fe-Co, C.
−Ｆ ｅ 、 Ｃｏ −Ｚ ｒ 、 Ｃｏ −Ｔ ａ
、又は、Ｃｏ−Ｔｉで形成し、非磁性膜をＣ，Ｔｉ、Ｗ
、Ｃｒ。-Fe, Co-Zr, Co-Ta
, or Co-Ti, and the nonmagnetic film is made of C, Ti, W.
, Cr.
Ｔａ、Ｐｔ、ＳｉＯ２，Ｓ ｉ Ｎ、 Ｔ ｉ−Ｃ，Ｙ
２Ｏ３、又は、ＢＮで形成した多層膜で磁気コアを構成
した薄膜磁気ヘッドは再生波形歪は問題にならないレベ
ルであり、同じ膜厚で単層磁性膜で形成した薄膜磁気ヘ
ッドよりも１０ＭＨｚ以上の高周波領域でＳ／Ｎ比が向
上した。Ta, Pt, SiO2, SiN, Ti-C, Y
A thin-film magnetic head whose magnetic core is made of a multilayer film made of 2O3 or BN has no problem with reproduction waveform distortion, and has a higher frequency of 10 MHz or more than a thin-film magnetic head made of a single-layer magnetic film with the same film thickness. The S/N ratio has improved in the high frequency range.
本実施例の、トラック幅が１０μｍ以下の多層磁性膜で
磁気コアを形成した薄膜磁気ヘッドを搭載した磁気ディ
スク装置はトラック密度を−インチ当り１８００）−ラ
ック以上に、線記録密度を一インチ当り３０キロビット
以上にでき、両者の積である面記録密度を５４メガビッ
ト以上にできた。The magnetic disk drive of this embodiment, which is equipped with a thin film magnetic head whose magnetic core is formed of a multilayer magnetic film with a track width of 10 μm or less, has a track density of -1800 per inch) or higher than the rack, and a linear recording density of 1800 per inch. It was possible to increase the recording density to 30 kilobits or more, and the areal recording density, which is the product of both, to 54 megabits or more.
また、直径８〜１１インチの磁気ディスクを３８００ｒ
ｐｍ以上で回転することにより転送速度を４．５メガバ
イト／秒以上にできた。再生波形歪が問題とならないレ
ベルであるため、読出エラーは無かった。トラック幅が
１０μｍ以下の、単層磁性膜で磁気コアを形成した薄膜
磁気ヘッドを搭載した磁気ディスク装置は再生波形歪の
ため読出エラーが頻発した。また、Ｓ／Ｎ比が低下する
ため線記録密度を３０キロビット以上にはできなかった
。In addition, a magnetic disk with a diameter of 8 to 11 inches can be loaded at 3800 rpm.
By rotating at pm or higher, the transfer speed could be increased to 4.5 megabytes/second or higher. Since the reproduced waveform distortion was at a level that did not pose a problem, there were no read errors. In a magnetic disk drive equipped with a thin film magnetic head having a track width of 10 μm or less and a magnetic core formed of a single-layer magnetic film, read errors frequently occur due to reproduction waveform distortion. Furthermore, the linear recording density could not be increased to 30 kilobits or more because the S/N ratio decreased.
本発明によれば、トラック幅を高精度で形成する薄膜磁
気ヘッドの磁気コアの磁区構造を単磁区にできるので、
１０μｍ以下の狭トラツク幅薄膜磁気ヘッドにおいて１
０ＭＨｚ以上の高周波領域でのＳ／Ｎ比を向上する効果
がある。According to the present invention, the magnetic domain structure of the magnetic core of the thin film magnetic head that forms the track width with high precision can be made into a single magnetic domain.
1 in a thin film magnetic head with a narrow track width of 10 μm or less
This has the effect of improving the S/N ratio in a high frequency region of 0 MHz or higher.
さらに、再生波形歪がないので読比エラーをなくす効果
がある。Furthermore, since there is no reproduction waveform distortion, there is an effect of eliminating reading ratio errors.
さらに、磁気ディスク装置の面記録密度を１平方インチ
当り５４メガビット以上にできるため、６０ギガバイト
以上の容量の磁気ディスク装置を提供することができる
。Furthermore, since the areal recording density of the magnetic disk device can be increased to 54 megabits per square inch or more, it is possible to provide a magnetic disk device with a capacity of 60 gigabytes or more.
第１図は本発明の一実施例の薄膜磁気ヘッドの断面図（
ａ）および上面図（ｂ）、第２図（ａ）はトラック幅が
８μｍの、本発明の一実施例の薄膜磁気ヘッドと従来技
術の薄膜磁気ヘッドの、Ｓ／Ｎ比の周波数変化（ａ）お
よびノイズの周波数変化（ｂ）を示す特性図、第３図は
トラック幅が５μｍの、本発明の薄膜磁気ヘッドと従来
技術の薄膜磁気ヘッドのＳ／Ｎ比の周波数変化の説明図
を示す。
１・・・基板、２・・・下部磁気コア磁性膜、３・・・
下部磁気コア非磁性膜、４・・・磁気ギャップ、５・・
・下層絶縁膜、６・・・上部磁気コア先端部磁性膜、７
・・・上部磁気コア先端部非磁性膜、８・・・保護膜、
９・・・上部磁気コア後部非磁性膜、１０・・・上部磁
気コア磁性膜、１１・・・コンタクトホール、１２・・
・コイル、１３・・・上層絶縁膜、１４・・・素子保護
膜。FIG. 1 is a sectional view (
a), a top view (b), and FIG. 2(a) show the frequency change of the S/N ratio (a ) and noise frequency change (b). FIG. 3 is an explanatory diagram of the frequency change of the S/N ratio of the thin film magnetic head of the present invention and the conventional thin film magnetic head with a track width of 5 μm. . DESCRIPTION OF SYMBOLS 1...Substrate, 2...Lower magnetic core magnetic film, 3...
Lower magnetic core non-magnetic film, 4... Magnetic gap, 5...
・Lower insulating film, 6... Upper magnetic core tip magnetic film, 7
... Upper magnetic core tip non-magnetic film, 8... Protective film,
9... Upper magnetic core rear nonmagnetic film, 10... Upper magnetic core magnetic film, 11... Contact hole, 12...
- Coil, 13... Upper layer insulating film, 14... Element protective film.
Claims (1)
、前記下部磁気コア上に形成され一部が前記下部磁気コ
アの一端に接し、他端が前記下部磁気コアの他端に磁気
ギャップを介して対向し、これによつて前記下部磁気コ
アと共に一部に前記磁気ギャップをもつ磁気回路を形成
する上部磁気コアが、前記スライダの浮上面側の先端部
と、少なくとも前記先端部上に形成した保護膜と、前記
保護膜に設けられたコンタクトホールを通じて前記先端
部と接続する後部とをもち、前記上部磁気コアと前記下
部磁気コアの間を通り前記磁気回路と交差する導体コイ
ルとを具備した薄膜磁気ヘッドにおいて、 前記上部磁気コアの先端部及び前記上部磁気コアの後部
及び前記下部磁気コアの一部又は全部が磁性膜と非磁性
膜を交互に積層した複数層の多層磁性膜により形成され
ることを特徴とする薄膜磁気ヘッド。 ２、請求項１において、前記上部磁気コア後部を形成す
る磁気膜の総膜厚が、前記上部磁気コア先端部を形成す
る磁性膜の総膜厚よりも大きい薄膜磁気ヘッド。 ３、請求項１または２において、前記磁性膜が、Ｃｏ−
Ｔａ−Ｚｒ、Ｎｉ−Ｆｅ、Ｆｅ−Ｓｉ、Ｆｅ−Ｇｅ、Ｆ
ｅ−Ｔｉ、Ｆｅ−Ｎ、Ｎｉ−Ｆｅ−Ｃｏ、Ｃｏ−Ｆｅ、
Ｃｏ−Ｚｒ、Ｃｏ−Ｔａ、Ｃｏ−Ｔｉを主成分とする合
金から選ばれた材料である薄膜磁気ヘッド。４、請求項
１または２において、前記非磁性膜が高融点非磁性金属
材料である薄膜磁気ヘッド。 ５、請求項１または２において、前記非磁性膜が、Ｃ、
Ｔｉ、Ｗ、Ｃｒ、Ｔａ、Ｐｔから選ばれた材料である薄
膜磁気ヘッド。 ６、請求項１または２において、前記非磁性膜が非磁性
絶縁膜である薄膜磁気ヘッド。 ７、請求項１または２において、前記非磁性膜絶縁膜が
Ａｌ＿２Ｏ＿３、ＳｉＯ＿２、ＳｉＮ、Ｔｉ−Ｃ、Ｙ＿
２Ｏ＿３、ＢＮから選ばれた材料である薄膜磁気ヘッド
。 ８、請求項１、２、３、４、５、６または７において、
情報を記録する少なくとも一枚の前記磁気ディスクと、 前記磁気ディスクに対して情報の書込及び読出を行う前
記薄膜磁気ヘッドと、 前記磁気ディスクを回転させる手段と、 前記薄膜磁気ヘッドの位置決め手段とをもつヘッド・デ
ィスク・アッセンブリを少なくとも一つ具備し前記薄膜
磁気ヘッドを一個以上搭載する磁気ディスク装置。[Scope of Claims] 1. A slider made of a non-magnetic material includes a lower magnetic core formed on the lower magnetic core, a portion of which is in contact with one end of the lower magnetic core, and the other end of which is formed on the lower magnetic core. An upper magnetic core, which faces the other end with a magnetic gap in between and forms a magnetic circuit with the lower magnetic core having the magnetic gap in part, is connected to at least one end of the slider on the air bearing surface side. It has a protective film formed on the tip, and a rear part that connects to the tip through a contact hole provided in the protective film, passes between the upper magnetic core and the lower magnetic core, and intersects with the magnetic circuit. A thin film magnetic head comprising a conductor coil, wherein the tip of the upper magnetic core, the rear part of the upper magnetic core, and a part or all of the lower magnetic core are made of a plurality of layers in which magnetic films and nonmagnetic films are alternately laminated. A thin film magnetic head characterized in that it is formed of a multilayer magnetic film. 2. The thin film magnetic head according to claim 1, wherein the total thickness of the magnetic films forming the rear part of the upper magnetic core is greater than the total thickness of the magnetic films forming the tip end of the upper magnetic core. 3. In claim 1 or 2, the magnetic film is made of Co-
Ta-Zr, Ni-Fe, Fe-Si, Fe-Ge, F
e-Ti, Fe-N, Ni-Fe-Co, Co-Fe,
A thin film magnetic head made of a material selected from alloys whose main components are Co-Zr, Co-Ta, and Co-Ti. 4. The thin film magnetic head according to claim 1 or 2, wherein the nonmagnetic film is made of a high melting point nonmagnetic metal material. 5. Claim 1 or 2, wherein the non-magnetic film comprises C,
A thin film magnetic head made of a material selected from Ti, W, Cr, Ta, and Pt. 6. The thin film magnetic head according to claim 1 or 2, wherein the nonmagnetic film is a nonmagnetic insulating film. 7. In claim 1 or 2, the non-magnetic insulating film is Al_2O_3, SiO_2, SiN, Ti-C, Y_
Thin film magnetic head made of material selected from 2O_3 and BN. 8. In claim 1, 2, 3, 4, 5, 6 or 7,
at least one of the magnetic disks for recording information; the thin film magnetic head for writing and reading information on the magnetic disk; means for rotating the magnetic disk; and means for positioning the thin film magnetic head. 1. A magnetic disk device comprising at least one head disk assembly having a head disk assembly having one or more of the thin film magnetic heads described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10761190A JPH046608A (en) | 1990-04-25 | 1990-04-25 | Thin film magnetic head and magnetic disk device with the thin film magnetic head mounted thereon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10761190A JPH046608A (en) | 1990-04-25 | 1990-04-25 | Thin film magnetic head and magnetic disk device with the thin film magnetic head mounted thereon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH046608A true JPH046608A (en) | 1992-01-10 |
Family
ID=14463563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10761190A Pending JPH046608A (en) | 1990-04-25 | 1990-04-25 | Thin film magnetic head and magnetic disk device with the thin film magnetic head mounted thereon |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH046608A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04214205A (en) * | 1990-12-12 | 1992-08-05 | Fuji Electric Co Ltd | Thin-film magnetic head and its production |
| KR100415446B1 (en) * | 2000-03-09 | 2004-01-24 | 알프스 덴키 가부시키가이샤 | Thin film magnetic head and method for manufacturing the same |
-
1990
- 1990-04-25 JP JP10761190A patent/JPH046608A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04214205A (en) * | 1990-12-12 | 1992-08-05 | Fuji Electric Co Ltd | Thin-film magnetic head and its production |
| KR100415446B1 (en) * | 2000-03-09 | 2004-01-24 | 알프스 덴키 가부시키가이샤 | Thin film magnetic head and method for manufacturing the same |
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