JPH0446347U - - Google Patents

Info

Publication number
JPH0446347U
JPH0446347U JP8874090U JP8874090U JPH0446347U JP H0446347 U JPH0446347 U JP H0446347U JP 8874090 U JP8874090 U JP 8874090U JP 8874090 U JP8874090 U JP 8874090U JP H0446347 U JPH0446347 U JP H0446347U
Authority
JP
Japan
Prior art keywords
sample chamber
chamber
preliminary
exhaust system
gate valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8874090U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8874090U priority Critical patent/JPH0446347U/ja
Publication of JPH0446347U publication Critical patent/JPH0446347U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
添付図面は本考案に係る排気系の一実施例を示
す構成概略図である。 １……試料室、２……予備室、３……仕切弁、
４……ウエハ、５，９……第１及び第２の油回転
ポンプ、６，８ａ，８ｂ，１０，１１……排気管
、７……ターボ分子ポンプ、１２ａ乃至１２ｆ…
…バルブ、１３……連通管。

Claims (1)

    【実用新案登録請求の範囲】
  1. 高真空に保たれる試料室と、該試料室内に試料
    を出し入れするためにこの試料室と仕切弁を介し
    て連通する予備室とを備え、前記予備室内に２つ
    の油回転ポンプを並列に接続したことを特徴とす
    る電子線装置における排気系。
JP8874090U 1990-08-24 1990-08-24 Pending JPH0446347U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8874090U JPH0446347U (ja) 1990-08-24 1990-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8874090U JPH0446347U (ja) 1990-08-24 1990-08-24

Publications (1)

Publication Number Publication Date
JPH0446347U true JPH0446347U (ja) 1992-04-20

Family

ID=31822228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8874090U Pending JPH0446347U (ja) 1990-08-24 1990-08-24

Country Status (1)

Country Link
JP (1) JPH0446347U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003016990A (ja) * 2001-06-28 2003-01-17 Seiko Instruments Inc 誘導結合プラズマ質量分析装置
JP2010177004A (ja) * 2009-01-29 2010-08-12 Hitachi High-Technologies Corp 真空排気装置、及び真空排気装置を備えた荷電粒子線装置
JP2011154922A (ja) * 2010-01-28 2011-08-11 Hitachi High-Technologies Corp 予備排気用真空装置及び荷電粒子線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003016990A (ja) * 2001-06-28 2003-01-17 Seiko Instruments Inc 誘導結合プラズマ質量分析装置
JP2010177004A (ja) * 2009-01-29 2010-08-12 Hitachi High-Technologies Corp 真空排気装置、及び真空排気装置を備えた荷電粒子線装置
JP2011154922A (ja) * 2010-01-28 2011-08-11 Hitachi High-Technologies Corp 予備排気用真空装置及び荷電粒子線装置

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