JPH04255864A - Magnetic recording medium and its production - Google Patents
Magnetic recording medium and its productionInfo
- Publication number
- JPH04255864A JPH04255864A JP3017625A JP1762591A JPH04255864A JP H04255864 A JPH04255864 A JP H04255864A JP 3017625 A JP3017625 A JP 3017625A JP 1762591 A JP1762591 A JP 1762591A JP H04255864 A JPH04255864 A JP H04255864A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- film
- substrate
- recording medium
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims abstract description 35
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000001301 oxygen Substances 0.000 claims abstract description 32
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 32
- 239000000203 mixture Substances 0.000 claims abstract description 18
- 238000004544 sputter deposition Methods 0.000 claims abstract description 18
- 239000007789 gas Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 17
- 230000004907 flux Effects 0.000 abstract description 13
- 239000010408 film Substances 0.000 description 80
- 238000010586 diagram Methods 0.000 description 18
- 230000005415 magnetization Effects 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 229910000599 Cr alloy Inorganic materials 0.000 description 3
- 229910000767 Tm alloy Inorganic materials 0.000 description 3
- 239000011162 core material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- AYTAKQFHWFYBMA-UHFFFAOYSA-N chromium dioxide Chemical compound O=[Cr]=O AYTAKQFHWFYBMA-UHFFFAOYSA-N 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、磁気記録媒体及びその
製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium and a method for manufacturing the same.
【０００２】0002
【従来の技術】従来、磁気記録材料は、例えば熱磁気プ
リンタに用いられており、その場合磁気プリンタドラム
に磁気潜像が形成され、これを磁気的に現像して可視像
を得るようにしている（「マグネトグラフィプリンタ」
今村舜仁著、大野信編集、ＣＭＣ「ノンインパクトプリ
ンティング」第１５章Ｐ． １５９〜Ｐ．１６８、１９
８６参照） 。Conventionally, magnetic recording materials have been used, for example, in thermomagnetic printers, in which a magnetic latent image is formed on a magnetic printer drum, which is magnetically developed to obtain a visible image. (“Magnetography Printer”)
Written by Shunjin Imamura, edited by Shin Ohno, CMC "Non-Impact Printing" Chapter 15 P. 159-P. 168, 19
86).
【０００３】図２は従来の熱磁気プリンタの印刷プロセ
ス図である。図において、記録用磁気ドラム１は矢印Ａ
方向に回転する。該記録用磁気ドラム１面上には磁気潜
像を形成するための磁気記録媒体であるＣｒＯ２ 薄膜
などが設けられている。印刷プロセスにおいて、まず消
磁手段２が磁気記録媒体を一定方向に磁化する。次に、
磁気記録手段３が所定の磁気潜像を形成し、現像手段４
が磁気潜像上にトナーを付着させることにより、磁気潜
像は可視像化される。ここで、トナーは磁気記録媒体面
上の漏れ磁界による磁力線と磁気記録媒体面とが交差す
る部分に付着し、その結果、磁気潜像は可視像化される
。FIG. 2 is a diagram showing the printing process of a conventional thermomagnetic printer. In the figure, the recording magnetic drum 1 is indicated by the arrow A.
Rotate in the direction. A CrO2 thin film, which is a magnetic recording medium for forming a magnetic latent image, is provided on one surface of the recording magnetic drum. In the printing process, first, the demagnetizing means 2 magnetizes the magnetic recording medium in a certain direction. next,
The magnetic recording means 3 forms a predetermined magnetic latent image, and the developing means 4
The magnetic latent image is made visible by depositing toner on the magnetic latent image. Here, the toner adheres to a portion where lines of magnetic force due to a leakage magnetic field on the surface of the magnetic recording medium intersect with the surface of the magnetic recording medium, and as a result, the magnetic latent image is visualized.
【０００４】その後、転写手段５及び定着手段６は、可
視像を用紙上に転写、定着する。最後にクリーニング手
段７は磁気記録媒体上の残留トナーを除去し、印刷プロ
セスを終了する。ところで、上記磁気記録媒体上に磁気
潜像を記録する方法としてはサーマルヘッドを用いる方
法やレーザビーム光照射によって加熱する方法がある。
また、磁気記録媒体の磁化方向は、主として記録媒体面
に沿う方向（面内記録法） と記録媒体の面に対し垂直
である方向 （垂直記録法） とがあり、高解像度を必
要とする場合には垂直記録法が用いられる。垂直記録用
の磁気記録媒体は、希土類元素と鉄族元素との合金膜、
すなわちＲＥ−ＴＭ合金膜又はＣｏ−Ｃｒ合金膜で形成
される。ＲＥ−ＴＭ合金膜は光磁気記録法を用いた光磁
気ディスクに、またＣｏ−Ｃｒ合金膜は磁気ヘッド記録
法を用いた磁気ディスクに多く用いられている。[0004] Thereafter, the transfer means 5 and the fixing means 6 transfer and fix the visible image onto the paper. Finally, the cleaning means 7 removes the residual toner on the magnetic recording medium and ends the printing process. By the way, methods for recording a magnetic latent image on the magnetic recording medium include a method using a thermal head and a method of heating by laser beam irradiation. Furthermore, the magnetization direction of a magnetic recording medium is mainly along the recording medium surface (in-plane recording method) or perpendicular to the recording medium surface (perpendicular recording method), and when high resolution is required. Perpendicular recording method is used. Magnetic recording media for perpendicular recording are made of alloy films of rare earth elements and iron group elements,
That is, it is formed of an RE-TM alloy film or a Co-Cr alloy film. RE-TM alloy films are often used in magneto-optical disks using magneto-optical recording, and Co--Cr alloy films are often used in magnetic disks using magnetic head recording.
【０００５】さらに、最近では、Ｃｏ／Ｐｔ人工格子膜
やＣｏ／Ｐｄ人工格子膜などの薄膜、またこれら人工格
子膜を大気中において熱処理した膜も垂直磁化膜として
熱磁気記録用として利用することができるようになって
いる。Furthermore, recently, thin films such as Co/Pt superlattice films and Co/Pd superlattice films, as well as films obtained by heat-treating these superlattice films in the atmosphere, have been used as perpendicularly magnetized films for thermomagnetic recording. is now possible.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、上記構
成の磁気記録媒体において、Ｃｏ−Ｃｒ合金膜で形成し
た場合はキューリ温度が高いため熱磁気記録が困難とな
り、ＲＥ−ＴＭ合金膜で形成した場合は残留磁束密度が
小さいためトナーの付着力が不十分となる。また、Ｃｏ
／Ｐｔ人工格子膜やＣｏ／Ｐｄ人工格子膜の場合、全膜
厚が数千Å程度以上においては磁気ヒステリシス曲線の
角形比は１より小さくなり、熱磁気記録に必要な残留磁
束密度が得られず、更に保磁力も２００Ｏｅ程度で小さ
い。[Problems to be Solved by the Invention] However, in the magnetic recording medium having the above structure, when it is formed with a Co-Cr alloy film, thermomagnetic recording becomes difficult due to the high Curie temperature, and when it is formed with an RE-TM alloy film, it becomes difficult to perform thermomagnetic recording. Since the residual magnetic flux density is small, the adhesion force of the toner is insufficient. Also, Co
/Pt superlattice film or Co/Pd superlattice film, the squareness ratio of the magnetic hysteresis curve becomes less than 1 when the total film thickness is approximately several thousand Å or more, and the residual magnetic flux density necessary for thermomagnetic recording cannot be obtained. Moreover, the coercive force is also small at about 200 Oe.
【０００７】そして、人工格子膜を大気中において熱処
理を施した膜においては、膜が酸化するため保持力が大
きく、残留磁束密度の大きい垂直磁化膜を得ることがで
きるが、該垂直磁化膜を形成する場合、膜の厚さや組成
比などを考慮に入れて熱処理温度や熱処理時間などを正
確に制御する必要があって、所定の磁気特性を得ること
が困難となる。しかも、膜を形成した後に熱処理を行う
ため、膜の形成時間が長くなってしまう。[0007] In the case of a superlattice film subjected to heat treatment in the atmosphere, since the film is oxidized, it is possible to obtain a perpendicularly magnetized film with a large coercive force and a large residual magnetic flux density. When forming the film, it is necessary to accurately control the heat treatment temperature, heat treatment time, etc., taking into account the film thickness, composition ratio, etc., making it difficult to obtain predetermined magnetic properties. Moreover, since heat treatment is performed after forming the film, the time required to form the film becomes long.
【０００８】このように、垂直記録用の垂直磁化膜を使
用した熱磁気プリンタは、原理的には記録の安定性が高
く、高解像度を得ることができ、しかも低消費電力で作
動させることができるが、垂直磁化膜として有効な磁気
記録媒体がない。本発明は、上記従来の磁気記録媒体の
問題点を解決して、残留磁束密度が十分高く磁気記録を
行うことができ、しかも保磁力が十分に大きく、かつキ
ューリ温度が十分に低く熱磁気記録を行うことができる
垂直記録用の磁気記録媒体を提供するとともに、その製
造方法を提供することを目的とする。As described above, a thermomagnetic printer using a perpendicular magnetization film for perpendicular recording has high recording stability in principle, can obtain high resolution, and can operate with low power consumption. However, there is no magnetic recording medium that is effective as a perpendicularly magnetized film. The present invention solves the problems of the conventional magnetic recording media and enables magnetic recording with a sufficiently high residual magnetic flux density, a sufficiently large coercive force, and a sufficiently low Curie temperature for thermomagnetic recording. An object of the present invention is to provide a magnetic recording medium for perpendicular recording that can perform the following steps, as well as a method for manufacturing the same.
【０００９】[0009]
【課題を解決するための手段】そのために、本発明の磁
気記録媒体においては、基板の上に酸素−Ｃｏ／Ｐｔ人
工格子膜又は酸素−Ｃｏ／Ｐｄ人工格子膜を形成してお
り、該膜は、Ｘを原子％とした時、組成式（Ｃｏ／Ｐｔ
）１００−Ｘ ＯＸ 又は（Ｃｏ／Ｐｄ）１００ −Ｘ
ＯＸ で示されるものとする。この時、組成範囲は１≦
Ｘ≦３０となるように設定される。[Means for Solving the Problems] To this end, in the magnetic recording medium of the present invention, an oxygen-Co/Pt superlattice film or an oxygen-Co/Pd superlattice film is formed on the substrate, and is the compositional formula (Co/Pt
)100-X OX or (Co/Pd)100-X
It shall be denoted by OX. At this time, the composition range is 1≦
It is set so that X≦30.
【００１０】また、上記酸素−Ｃｏ／Ｐｔ人工格子膜又
は酸素−Ｃｏ／Ｐｄ人工格子膜のＣｏ層厚ｄＣｏを１Å
≦ｄＣｏ≦１５Åとし、Ｐｔ層厚ｄＰｔ又はＰｄ層厚ｄ
Ｐｄを２Å≦ｄＰｔ≦３０Å又は２Å≦ｄＰｄ≦３０Å
とする。上記構成の磁気記録媒体を製造する場合、基板
と間隔をおいてＣｏターゲット及びＰｔターゲット（又
はＰｄターゲット）を配設し、基板を周期的に移動させ
、上記両ターゲットに交互に対向する位置に置く。[0010] Furthermore, the Co layer thickness dCo of the oxygen-Co/Pt superlattice film or the oxygen-Co/Pd superlattice film is set to 1 Å.
≦dCo≦15 Å, Pt layer thickness dPt or Pd layer thickness d
Pd is 2 Å≦dPt≦30 Å or 2 Å≦dPd≦30 Å
shall be. When manufacturing a magnetic recording medium with the above configuration, a Co target and a Pt target (or a Pd target) are placed at a distance from the substrate, and the substrate is moved periodically to positions alternately facing both of the targets. put.
【００１１】そして、少なくとも酸素を含む混合ガスの
雰囲気において、高周波スパッタリングを施し、基板上
に酸素−Ｃｏ／Ｐｔ人工格子膜（又は酸素−Ｃｏ／Ｐｄ
人工格子膜）を形成する。[0011] Then, high-frequency sputtering is performed in an atmosphere of a mixed gas containing at least oxygen to form an oxygen-Co/Pt superlattice film (or oxygen-Co/Pd) on the substrate.
form an artificial lattice film).
【００１２】0012
【作用】本発明によれば、上記のように基板と間隔をお
いてＣｏターゲット及びＰｔターゲット（又はＰｄター
ゲット）を配設し、基板を周期的に移動させ、上記両タ
ーゲットに交互に対向する位置に置く。そして、基板は
少なくとも酸素を含む混合ガスの雰囲気に置かれ、スパ
ッタリングが施される。[Operation] According to the present invention, a Co target and a Pt target (or a Pd target) are arranged at a distance from the substrate as described above, and the substrate is moved periodically to face the two targets alternately. put it in position. Then, the substrate is placed in an atmosphere of a mixed gas containing at least oxygen, and sputtering is performed.
【００１３】このようにして、基板上に酸素−Ｃｏ／Ｐ
ｔ人工格子膜（又は酸素−Ｃｏ／Ｐｄ人工格子膜）が形
成されるが、該膜は、Ｘを原子％とした時、組成式（Ｃ
ｏ／Ｐｔ）１００−Ｘ ＯＸ 又は（Ｃｏ／Ｐｄ）１０
０−Ｘ ＯＸ で示されるものとし、組成範囲は１≦Ｘ
≦３０となるように設定される。また、上記酸素−Ｃｏ
／Ｐｔ人工格子膜又は酸素−Ｃｏ／Ｐｄ人工格子膜のＣ
ｏ層厚ｄＣｏが１Å≦ｄＣｏ≦１５Åとなるように、Ｐ
ｔ層厚ｄＰｔ又はＰｄ層厚ｄＰｄが２Å≦ｄＰｔ≦３０
Å又は２Å≦ｄＰｄ≦３０Åになるように設定される。In this way, oxygen-Co/P is deposited on the substrate.
A t superlattice film (or an oxygen-Co/Pd superlattice film) is formed, and the film has a composition formula (C
o/Pt)100-X OX or (Co/Pd)10
0-X OX, and the composition range is 1≦X
It is set so that ≦30. In addition, the above oxygen-Co
/Pt superlattice film or oxygen-Co/Pd superlattice film C
P so that the o layer thickness dCo satisfies 1 Å≦dCo≦15 Å.
t layer thickness dPt or Pd layer thickness dPd is 2 Å≦dPt≦30
Å or 2 Å≦dPd≦30 Å.
【００１４】[0014]
【実施例】以下、本発明の実施例について図面を参照し
ながら詳細に説明する。図１は本発明の磁気記録媒体を
示す図であり、図の（Ａ）は磁気記録媒体の断面図、（
Ｂ）は記録用磁気ドラムの断面図である。図において、
厚さが数十〜数百ミクロンの曲折自在なステンレス基板
８上に、不活性物質のアルゴンと酸素の混合ガスによっ
てＲＦマグネトロンスパッタ法を用いて垂直磁化膜、す
なわち数十〜数百ミクロンの膜厚を有する酸素−Ｃｏ／
Ｐｔ人工格子膜１０が積層されて磁気記録媒体１１が形
成される。該磁気記録媒体１１はシート状に形成され、
記録用磁気ドラム芯材１２上に巻き付けられる。Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing a magnetic recording medium of the present invention, in which (A) is a cross-sectional view of the magnetic recording medium, (
B) is a sectional view of the recording magnetic drum. In the figure,
A perpendicularly magnetized film, that is, a film of several tens to hundreds of microns, is formed on a bendable stainless steel substrate 8 with a thickness of several tens to several hundred microns using an RF magnetron sputtering method using a mixed gas of argon and oxygen, which are inert substances. Oxygen-Co/ with thickness
A magnetic recording medium 11 is formed by laminating Pt superlattice films 10. The magnetic recording medium 11 is formed in a sheet shape,
It is wound onto the recording magnetic drum core material 12.
【００１５】図３は本発明の磁気記録媒体の製造方法が
適用される製造装置の概略図、図の（Ａ）は同正面図、
（Ｂ）は同平面図である。図において、２１は回転板２
２上に配設され、アルゴンと酸素の混合ガスの雰囲気で
スパッタリングを行うことによって人工格子膜が形成さ
れる基板である。２４は上記基板２１に対向して配設さ
れるＣｏターゲットであり、２５は同様に基板２１に対
向して配設されるＰｔ （又は後述するＰｄ） ターゲ
ットである。FIG. 3 is a schematic diagram of a manufacturing apparatus to which the method of manufacturing a magnetic recording medium of the present invention is applied, and (A) is a front view of the same;
(B) is the same plan view. In the figure, 21 is the rotating plate 2
This is a substrate on which an artificial lattice film is formed by sputtering in an atmosphere of a mixed gas of argon and oxygen. 24 is a Co target disposed facing the substrate 21, and 25 is a Pt (or Pd to be described later) target similarly disposed facing the substrate 21.
【００１６】Ｃｏターゲット２４及びＰｔ （又は後述
するＰｄ） ターゲット２５と上記回転板２２との間に
スパッタ用の高周波（ＲＦ） 電源２６， ２７が接続
される。
また、Ｃｏターゲット２４とＰｔ （又はＰｄ） ター
ゲット２５間にはしきり板２８が配設される。上記構成
の電圧印加型のＲＦ多元スパッタ装置においては、回転
板２２が回転するのに伴い、Ｃｏターゲット２４とＰｔ
（又はＰｄ） ターゲット２５上を基板２１が回転す
ることになり、該基板２１上にＰｔ （又はＰｄ） と
Ｃｏが周期的に積層され、酸素−Ｃｏ／Ｐｔ人工格子膜
１０が形成される。酸素は一部分のＣｏ及びＰｔを酸化
している。この時、ＣｏとＰｔの酸化の程度は条件によ
って異なる。Radio frequency (RF) power sources 26 and 27 for sputtering are connected between the Co target 24 and the Pt (or Pd to be described later) target 25 and the rotating plate 22. Further, a partition plate 28 is provided between the Co target 24 and the Pt (or Pd) target 25. In the voltage application type RF multi-source sputtering apparatus having the above configuration, as the rotating plate 22 rotates, the Co target 24 and the Pt
(or Pd) The substrate 21 rotates on the target 25, and Pt (or Pd) and Co are periodically stacked on the substrate 21, thereby forming the oxygen-Co/Pt superlattice film 10. Oxygen oxidizes some Co and Pt. At this time, the degree of oxidation of Co and Pt varies depending on the conditions.
【００１７】ここで、スパッタリングの条件は、バック
グラウンド真空度：ＰＢＧ＝２．０×１０−６Ｔｏｒｒ
以下
アルゴンと酸素の混合ガス圧：ＰＡｒ＝３．０×１０−
３Ｔｏｒｒ
基板温度：室温
投入電力：周波数３００〜７００Ｗ
また、上記酸素−Ｃｏ／Ｐｔ人工格子膜１０のＣｏ層厚
ｄＣｏは１Å≦ｄＣｏ≦１５Åであり、Ｐｔ層厚ｄＰｔ
は２Å≦ｄＰｔ≦３０Åである。[0017] Here, the sputtering conditions are as follows: Background vacuum: PBG = 2.0 x 10-6 Torr
Below is the mixed gas pressure of argon and oxygen: PAr=3.0×10-
3 Torr Substrate temperature: Room temperature Input power: Frequency 300 to 700 W In addition, the Co layer thickness dCo of the oxygen-Co/Pt superlattice film 10 is 1 Å≦dCo≦15 Å, and the Pt layer thickness dPt
is 2 Å≦dPt≦30 Å.
【００１８】また、酸素−Ｃｏ／Ｐｔ人工格子膜１０は
（Ｃｏ／Ｐｔ）１００−Ｘ ＯＸ なる組成式で示され
、その組成範囲は、１≦Ｘ≦３０である。ただし、（Ｃ
ｏ／Ｐｔ）はＣｏ／Ｐｔ人工格子膜、Ｘは原子％とする
。図４は酸素−Ｃｏ／Ｐｔ人工格子膜中における酸素濃
度とスパッタリング時の酸素分圧の関係を示す図である
。The oxygen-Co/Pt superlattice film 10 is represented by the composition formula (Co/Pt)100-X OX , and the composition range is 1≦X≦30. However, (C
o/Pt) is a Co/Pt superlattice film, and X is atomic %. FIG. 4 is a diagram showing the relationship between the oxygen concentration in the oxygen-Co/Pt superlattice film and the oxygen partial pressure during sputtering.
【００１９】次に、上記構成の磁気記録媒体１１を用い
て熱磁気記録による磁気特性評価を行った結果について
説明する。この実験には、酸素−Ｃｏ／Ｐｔ人工格子膜
１０として組成が（Ｃｏ／Ｐｔ）９０Ｏ１０の垂直磁化
膜を使用し、Ｃｏ層厚ｄＣｏが５Å、Ｐｔ層厚ｄＰｔが
１５Åとなるように周期的に積層したものを用いた。こ
の磁気記録媒体１１を評価したところ、保磁力は１３０
０Ｏｅ程度で残留磁束密度は３０００Ｇａｕｓｓ程度で
あり、磁性体であるトナーを吸収するのに十分な磁気力
を有する。また、キューリ温度は２００°Ｃ程度以下で
ある。Next, the results of magnetic property evaluation by thermomagnetic recording using the magnetic recording medium 11 having the above configuration will be explained. In this experiment, a perpendicularly magnetized film with a composition of (Co/Pt)90O10 was used as the oxygen-Co/Pt superlattice film 10, and the film was periodically A layered material was used. When this magnetic recording medium 11 was evaluated, the coercive force was 130
At about 0 Oe, the residual magnetic flux density is about 3000 Gauss, and has sufficient magnetic force to absorb toner, which is a magnetic substance. Further, the curie temperature is about 200°C or less.
【００２０】次に、上記条件で作成した磁気記録媒体１
１の特性について図５及び図６に基づき説明する。図５
は磁気記録媒体において膜中の酸素濃度を０％とした時
の磁化曲線を示す図、図６は磁気記録媒体において膜中
の酸素濃度を１０％とした時の磁化曲線を示す図である
。Next, magnetic recording medium 1 prepared under the above conditions
The characteristics of No. 1 will be explained based on FIGS. 5 and 6. Figure 5
6 is a diagram showing a magnetization curve in a magnetic recording medium when the oxygen concentration in the film is 0%, and FIG. 6 is a diagram showing a magnetization curve in a magnetic recording medium when the oxygen concentration in the film is 10%.
【００２１】保磁力及び残留磁束密度が著しく増加して
いるのが分かる。図７はスパッタリングによる膜作成時
の酸素分圧と磁気特性の関係図である。酸素分圧ＰＯＸ
が５×１０−６Ｔｏｒｒ以上になると磁気特性の向上が
見られ、１００×１０−６Ｔｏｒｒにおいて保磁力及び
残留磁束密度が最大となっているのが分かる。It can be seen that the coercive force and residual magnetic flux density are significantly increased. FIG. 7 is a diagram showing the relationship between oxygen partial pressure and magnetic properties during film formation by sputtering. Oxygen partial pressure POX
It can be seen that the magnetic properties are improved when the value is 5 x 10-6 Torr or more, and the coercive force and residual magnetic flux density are maximum at 100 x 10-6 Torr.
【００２２】次に、本発明の他の実施例について説明す
る。図８は本発明の他の磁気記録媒体を示す図、図の（
Ａ）は磁気記録媒体の断面図、（Ｂ）は記録用磁気ドラ
ムの断面図である。図において、厚さが数十〜数百ミク
ロンの曲折自在なステンレス基板８上に、アルゴンと酸
素の混合ガスによってＲＦマグネトロンスパッタ法を用
いて垂直磁化膜、すなわち数十〜数百ミクロンの膜厚を
有する酸素−Ｃｏ／Ｐｄ人工格子膜１３が積層されて磁
気記録媒体１４が形成される。該磁気記録媒体１４はシ
ート状に形成され、記録用磁気ドラム芯材１２上に巻き
付けられる。Next, another embodiment of the present invention will be described. FIG. 8 is a diagram showing another magnetic recording medium of the present invention, (
A) is a cross-sectional view of a magnetic recording medium, and (B) is a cross-sectional view of a recording magnetic drum. In the figure, a perpendicularly magnetized film with a thickness of several tens to several hundred microns is formed on a bendable stainless steel substrate 8 with a thickness of several tens to several hundred microns using an RF magnetron sputtering method using a mixed gas of argon and oxygen. A magnetic recording medium 14 is formed by stacking oxygen-Co/Pd superlattice films 13 having the following. The magnetic recording medium 14 is formed into a sheet shape and is wound onto the recording magnetic drum core material 12.
【００２３】上記構成の酸素−Ｃｏ／Ｐｄ人工格子膜１
３は、図３に示す製造装置及び製造方法によって形成さ
れる。また、スパッタリングの条件も同じである。上記
酸素−Ｃｏ／Ｐｄ人工格子膜１３のＣｏ層厚ｄＣｏは１
Å≦ｄＣｏ≦１５Åであり、Ｐｄ層厚ｄＰｄは２Å≦ｄ
Ｐｄ≦３０Åである。また、酸素−Ｃｏ／Ｐｄ人工格子
膜１３は（Ｃｏ／Ｐｄ）１００−Ｘ ＯＸ なる組成式
で示され、その組成範囲は、１≦Ｘ≦３０である。ただ
し、（Ｃｏ／Ｐｄ）はＣｏ／Ｐｄ人工格子膜、Ｘは原子
％とする。膜中における酸素濃度とスパッタリング時の
酸素分圧ＰＯＸの関係は、上記の酸素−Ｃｏ／Ｐｔ人工
格子膜１０と同様なものである。Oxygen-Co/Pd superlattice film 1 having the above structure
3 is formed by the manufacturing apparatus and manufacturing method shown in FIG. Moreover, the sputtering conditions are also the same. The Co layer thickness dCo of the oxygen-Co/Pd superlattice film 13 is 1
Å≦dCo≦15Å, and the Pd layer thickness dPd is 2Å≦d
Pd≦30Å. Further, the oxygen-Co/Pd superlattice film 13 is represented by the composition formula (Co/Pd)100-X OX , and the composition range is 1≦X≦30. However, (Co/Pd) is a Co/Pd superlattice film, and X is atomic %. The relationship between the oxygen concentration in the film and the oxygen partial pressure POX during sputtering is the same as that of the oxygen-Co/Pt superlattice film 10 described above.
【００２４】次に、上記構成の磁気記録媒体１４を用い
て熱磁気記録による磁気特性評価を行った結果について
説明する。この実験には、酸素−Ｃｏ／Ｐｄ人工格子膜
１３として組成が（Ｃｏ／Ｐｄ）９０Ｏ１０の垂直磁化
膜を使用し、Ｃｏ層厚ｄＣｏが５Å、Ｐｄ層厚ｄＰｄが
１５Åとなるように周期的に積層したものを用いた。こ
の磁気記録媒体１４を評価したところ、保磁力は２００
０Ｏｅ程度で残留磁束密度は３０００Ｇａｕｓｓ程度で
あり、磁性体であるトナーを吸収するのに十分な磁気力
を有する。また、キューリ温度は２００°Ｃ程度以下で
ある。Next, the results of evaluating the magnetic properties by thermomagnetic recording using the magnetic recording medium 14 having the above configuration will be explained. In this experiment, a perpendicularly magnetized film with a composition of (Co/Pd) 90O10 was used as the oxygen-Co/Pd superlattice film 13, and the film was periodically A layered material was used. When this magnetic recording medium 14 was evaluated, the coercive force was 200.
At about 0 Oe, the residual magnetic flux density is about 3000 Gauss, and has sufficient magnetic force to absorb toner, which is a magnetic substance. Further, the curie temperature is about 200°C or less.
【００２５】次に、上記条件で作成した磁気記録媒体１
４の特性について図９及び図１０に基づき説明する。図
９は他の磁気記録媒体において膜中の酸素濃度を０％と
した時の磁化曲線を示す図、図１０は他の磁気記録媒体
において膜中の酸素濃度を１０％とした時の磁化曲線を
示す図である。Next, magnetic recording medium 1 prepared under the above conditions
The characteristics of No. 4 will be explained based on FIGS. 9 and 10. Figure 9 shows the magnetization curve when the oxygen concentration in the film is set to 0% in another magnetic recording medium, and Figure 10 shows the magnetization curve when the oxygen concentration in the film is set to 10% in another magnetic recording medium. FIG.
【００２６】保磁力及び残留磁束密度が著しく増加して
いるのが分かる。図１１はスパッタリングによる膜作成
時の酸素分圧と磁気特性の関係図である。酸素分圧ＰＯ
Ｘが５×１０−６Ｔｏｒｒ以上になると磁気特性の向上
が見られ、１００×１０−６Ｔｏｒｒにおいて保磁力及
び残留磁束密度が最大となっているのが分かる。It can be seen that the coercive force and residual magnetic flux density are significantly increased. FIG. 11 is a diagram showing the relationship between oxygen partial pressure and magnetic properties during film formation by sputtering. Oxygen partial pressure PO
It can be seen that the magnetic properties are improved when X is 5 x 10-6 Torr or more, and the coercive force and residual magnetic flux density are maximum at 100 x 10-6 Torr.
【００２７】なお、本発明は上記実施例に限定されるも
のではなく、本発明の趣旨に基づいて種々変形すること
が可能であり、これらを本発明の範囲から排除するもの
ではない。例えば、上記実施例においては、磁気記録媒
体１１，１４を応用した例として熱磁気プリンタを示し
ているが、熱及び光の照射によって記録を行う他の記録
装置にも応用することができる。It should be noted that the present invention is not limited to the above-mentioned embodiments, and various modifications can be made based on the spirit of the present invention, and these are not excluded from the scope of the present invention. For example, in the embodiment described above, a thermomagnetic printer is shown as an example to which the magnetic recording media 11 and 14 are applied, but the present invention can also be applied to other recording devices that perform recording by irradiation of heat and light.
【００２８】また、垂直磁化膜の全膜厚を数十〜数百ミ
クロンとし、ステンレス基板８の板厚を数十〜数百ミク
ロンとしているが、これらの厚さは用途に応じて変化さ
せることができる。Further, the total film thickness of the perpendicular magnetization film is set to several tens to several hundred microns, and the plate thickness of the stainless steel substrate 8 is set to several tens to several hundred microns, but these thicknesses may be changed depending on the application. Can be done.
【００２９】[0029]
【発明の効果】以上詳細に説明したように、本発明によ
れば、基板と間隔をおいてＣｏターゲット及びＰｔター
ゲット（又はＰｄターゲット）を配設し、少なくとも酸
素を含む混合ガスの雰囲気でスパッタリングが施される
。このようにして、基板上に酸素−Ｃｏ／Ｐｔ人工格子
膜（又は酸素−Ｃｏ／Ｐｄ人工格子膜）が形成されるが
、該膜は、Ｘを原子％とした時、組成式（Ｃｏ／Ｐｔ）
１００−Ｘ ＯＸ 又は（Ｃｏ／Ｐｄ）１００−Ｘ Ｏ
Ｘ で示されるものとし、組成範囲は１≦Ｘ≦３０とな
るように設定され、また、Ｃｏ層厚ｄＣｏが１Å≦ｄＣ
ｏ≦１５Åとなるように、Ｐｔ層厚ｄＰｔ又はＰｄ層厚
ｄＰｄが２Å≦ｄＰｔ≦３０Å又は２Å≦ｄＰｄ≦３０
Åになるように設定されるので、垂直記録を行う熱磁気
記録法において、高い磁気記録密度を得ることができる
だけでなく、保磁力が大きく、残留磁束密度が大きくな
る。 また、膜を形成する時に少なくとも酸素を含む
混合ガスを使用するだけでよいので、膜の製造方法が簡
素化される。As described in detail above, according to the present invention, a Co target and a Pt target (or Pd target) are arranged at a distance from a substrate, and sputtering is performed in an atmosphere of a mixed gas containing at least oxygen. will be applied. In this way, an oxygen-Co/Pt superlattice film (or an oxygen-Co/Pd superlattice film) is formed on the substrate, and the film has a composition formula (Co/ Pt)
100-X OX or (Co/Pd)100-X O
The composition range is set to be 1≦X≦30, and the Co layer thickness dCo is 1 Å≦dC.
Pt layer thickness dPt or Pd layer thickness dPd is 2 Å≦dPt≦30 Å or 2 Å≦dPd≦30 so that o≦15 Å.
Å, in thermomagnetic recording that performs perpendicular recording, it is possible not only to obtain a high magnetic recording density, but also to have a large coercive force and a large residual magnetic flux density. Furthermore, since it is only necessary to use a mixed gas containing at least oxygen when forming the film, the method for manufacturing the film is simplified.
【００３０】そして、例えば熱磁気プリンタにこれを用
いた場合、解像度を高くし消費電力を小さくすることが
できる。For example, when this is used in a thermomagnetic printer, resolution can be increased and power consumption can be reduced.
【図１】本発明の磁気記録媒体を示す図である。FIG. 1 is a diagram showing a magnetic recording medium of the present invention.
【図２】従来の熱磁気プリンタの印刷プロセス図である
。FIG. 2 is a printing process diagram of a conventional thermomagnetic printer.
【図３】本発明の磁気記録媒体の製造方法が適用される
製造装置の概略図である。FIG. 3 is a schematic diagram of a manufacturing apparatus to which the method of manufacturing a magnetic recording medium of the present invention is applied.
【図４】酸素−Ｃｏ／Ｐｔ人工格子膜中における酸素濃
度とスパッタリング時の酸素分圧の関係を示す図である
。FIG. 4 is a diagram showing the relationship between oxygen concentration in an oxygen-Co/Pt superlattice film and oxygen partial pressure during sputtering.
【図５】磁気記録媒体において膜中の酸素濃度を０％と
した時の磁化曲線を示す図である。FIG. 5 is a diagram showing a magnetization curve when the oxygen concentration in the film is 0% in a magnetic recording medium.
【図６】磁気記録媒体において膜中の酸素濃度を１０％
とした時の磁化曲線を示す図である。[Figure 6] Oxygen concentration in the film of magnetic recording media is 10%
It is a figure which shows the magnetization curve when it is.
【図７】スパッタリングによる膜作成時の酸素分圧と磁
気特性の関係図である。FIG. 7 is a diagram showing the relationship between oxygen partial pressure and magnetic properties during film formation by sputtering.
【図８】本発明の他の磁気記録媒体を示す図である。FIG. 8 is a diagram showing another magnetic recording medium of the present invention.
【図９】他の磁気記録媒体において膜中の酸素濃度を０
％とした時の磁化曲線を示す図である。[Figure 9] In other magnetic recording media, the oxygen concentration in the film is set to 0.
It is a figure which shows the magnetization curve when expressed as %.
【図１０】他の磁気記録媒体において膜中の酸素濃度を
１０％とした時の磁化曲線を示す図である。FIG. 10 is a diagram showing magnetization curves when the oxygen concentration in the film is 10% in other magnetic recording media.
【図１１】スパッタリングによる膜作成時の酸素分圧と
磁気特性の関係図である。FIG. 11 is a diagram showing the relationship between oxygen partial pressure and magnetic properties during film formation by sputtering.
８ ステンレス基板１０
酸素−Ｃｏ／Ｐｔ人工格子膜１１，１４ 磁気
記録媒体
１２ 記録用磁気ドラム芯材１３
酸素−Ｃｏ／Ｐｄ人工格子膜２１
基板
２２ 回転板
２４ Ｃｏターゲット
２５ Ｐｔ （又はＰｄ） ターゲット
２６，２７ 高周波（ＲＦ）電源
２８ しきり板8 Stainless steel substrate 10
Oxygen-Co/Pt superlattice films 11, 14 Magnetic recording medium 12 Recording magnetic drum core material 13
Oxygen-Co/Pd superlattice film 21
Substrate 22 Rotating plate 24 Co target 25 Pt (or Pd) Targets 26, 27 High frequency (RF) power source 28 Shikiri plate
Claims (6)
た酸素−Ｃｏ／Ｐｔ人工格子膜とから成り、（ｃ）上記
酸素−Ｃｏ／Ｐｔ人工格子膜は、 （Ｃｏ／Ｐｔ）１００−Ｘ ＯＸ （Ｃｏ／Ｐｔ）：Ｃｏ／Ｐｔ人工格子膜Ｘ
：原子％ なる組成式で示され、その組成範囲が １≦Ｘ≦３０ であることを特徴とする磁気記録媒体。[Claim 1] Consists of (a) a substrate; (b) an oxygen-Co/Pt superlattice film formed on the substrate; (c) the oxygen-Co/Pt superlattice film comprises (Co/ Pt) 100-X OX (Co/Pt): Co/Pt superlattice film
A magnetic recording medium characterized in that it is represented by the composition formula: : atomic % and has a composition range of 1≦X≦30.
厚ｄＣｏを １Å≦ｄＣｏ≦１５Å とし、Ｐｔ層厚ｄＰｔを ２Å≦ｄＰｔ≦３０Å とした請求項１記載の磁気記録媒体。2. The magnetic recording medium according to claim 1, wherein the Co layer thickness dCo of the oxygen-Co/Pt superlattice film is 1 Å≦dCo≦15 Å, and the Pt layer thickness dPt is 2 Å≦dPt≦30 Å.
及びＰｔターゲットを配設し、（ｂ）基板を周期的に移
動させ、上記両ターゲットに交互に対向する位置に置き
、（ｃ）少なくとも酸素を含む混合ガスの雰囲気におい
て、スパッタリングを施し、基板上に酸素−Ｃｏ／Ｐｔ
人工格子膜を形成する磁気記録媒体の製造方法。3. (a) disposing a Co target and a Pt target at a distance from the substrate; (b) periodically moving the substrate and placing it in a position alternately facing both of the targets; (c) In an atmosphere of a mixed gas containing at least oxygen, sputtering is performed to deposit oxygen-Co/Pt on the substrate.
A method for manufacturing a magnetic recording medium forming an artificial lattice film.
た酸素−Ｃｏ／Ｐｄ人工格子膜とから成り、（ｃ）上記
酸素−Ｃｏ／Ｐｄ人工格子膜は、 （Ｃｏ／Ｐｄ）１００−Ｘ ＯＸ （Ｃｏ／Ｐｄ）：Ｃｏ／Ｐｄ人工格子膜Ｘ
：原子％ なる組成式で示され、その組成範囲が １≦Ｘ≦３０ であることを特徴とする磁気記録媒体。4. (a) a substrate; (b) an oxygen-Co/Pd superlattice film formed on the substrate, (c) the oxygen-Co/Pd superlattice film comprising (Co/Pd superlattice film); Pd) 100-X OX (Co/Pd): Co/Pd superlattice film
A magnetic recording medium characterized in that it is represented by the composition formula: : atomic % and has a composition range of 1≦X≦30.
厚ｄＣｏを １Å≦ｄＣｏ≦１５Å とし、Ｐｄ層厚ｄＰｄを ２Å≦ｄＰｄ≦３０Å とする請求項４記載の磁気記録媒体。5. The magnetic recording medium according to claim 4, wherein the Co layer thickness dCo of the oxygen-Co/Pd superlattice film is 1 Å≦dCo≦15 Å, and the Pd layer thickness dPd is 2 Å≦dPd≦30 Å.
及びＰｄターゲットを配設し、（ｂ）基板を周期的に移
動させ、上記両ターゲットに交互に対向する位置に置き
、（ｃ）少なくとも酸素を含む混合ガスの雰囲気におい
て、スパッタリングを施し、基板上に酸素−Ｃｏ／Ｐｄ
人工格子膜を形成する磁気記録媒体の製造方法。6. (a) disposing a Co target and a Pd target at a distance from the substrate; (b) periodically moving the substrate and placing it in a position alternately facing both of the targets; (c) In an atmosphere of a mixed gas containing at least oxygen, sputtering is performed to deposit oxygen-Co/Pd on the substrate.
A method for manufacturing a magnetic recording medium forming an artificial lattice film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3017625A JP2699312B2 (en) | 1991-02-08 | 1991-02-08 | Magnetic recording medium and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3017625A JP2699312B2 (en) | 1991-02-08 | 1991-02-08 | Magnetic recording medium and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04255864A true JPH04255864A (en) | 1992-09-10 |
| JP2699312B2 JP2699312B2 (en) | 1998-01-19 |
Family
ID=11949053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3017625A Expired - Fee Related JP2699312B2 (en) | 1991-02-08 | 1991-02-08 | Magnetic recording medium and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2699312B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999052101A1 (en) * | 1998-04-06 | 1999-10-14 | Sharp Kabushiki Kaisha | Magnetic recording medium and method of recording |
-
1991
- 1991-02-08 JP JP3017625A patent/JP2699312B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999052101A1 (en) * | 1998-04-06 | 1999-10-14 | Sharp Kabushiki Kaisha | Magnetic recording medium and method of recording |
| US6882617B1 (en) | 1998-04-06 | 2005-04-19 | Sharp Kabushiki Kaisha | Magnetic recording medium and method of recording |
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| Publication number | Publication date |
|---|---|
| JP2699312B2 (en) | 1998-01-19 |
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