JPH04217109A - Torsional crystal resonator - Google Patents

Abstract

PURPOSE:To improve electric field efficiency and to obtain the torsional crystal resonator having no oscillation leakage by arranging adjacent exciting electrodes on the upper and lower faces of an oscillation part so as to be different and integrally forming the oscillation part and a supporting part. CONSTITUTION:A crystal resonator 1 is composed of an oscillation part 2, which is equipped with exciting electrodes 7 and 8 (11 and 12) and connecting electrode 9 (10), and a supporting part 3 connected through a bridge part 4. The supporting part 3 is composed of a frame 5, which is connected to the bridge part 4, provided at the almost center of the oscillation part 2 and a mount part 6. The exciting electrode 7 arranged on an upper face 2b of the oscillation part 2 is connected through the connecting electrode (10) provided on an etching face 2a to the exciting electrode (11) provided on the counter face of the exciting electrode 8. These electrodes 7 and 8 to be different poises are arranged while being extended through the frame 5 up to the amount part 6 for connection with an external terminal. Then, by impressing an alternative current between both terminals, torsional oscillation can be easily generated.

Description

【発明の詳細な説明】[Detailed description of the invention]

【０００１】0001

【産業上の利用分野】本発明は振動部と支持部を化学的
エッチング法によって、一体に形成した棒状捩り水晶振
動子の形状と励振電極構成に関する。特に、超薄型、小
型化の要求の強いＩＣカード、ポケットベルや移動無線
等の携帯機器の基準信号源として最適な捩り水晶振動子
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the shape and excitation electrode structure of a rod-shaped torsion quartz crystal resonator in which a vibrating part and a support part are integrally formed by chemical etching. In particular, the present invention relates to a twisted crystal resonator that is most suitable as a reference signal source for portable devices such as IC cards, pagers, and mobile radios, which have strong demands for ultra-thin and compact design.

【０００２】0002

【従来の技術】従来の捩り水晶振動子は、一般的に機械
加工による方法がとられ、丸棒形状をしている。そして
、その丸棒の中心で対向する２本のリード線で支持固定
されていた。それ故、このようにして作られる振動子の
周波数は高くしても数十ＫＨｚであった。又、周波数を
高めるために、エッチング法によって形成する音叉形状
が提案されている。しかし、２次元振動の屈曲モードの
振動と異なり、３次元振動の捩りモードの振動であるが
故に、リード線等に支持、固定した場合に、振動エネル
ギーがリード線に伝わり、振動漏れを起こし、新しい形
状の捩り水晶振動子が切望されていた。2. Description of the Related Art Conventional torsion crystal resonators are generally machined and have a round bar shape. It was supported and fixed by two lead wires facing each other at the center of the round bar. Therefore, the frequency of the vibrator produced in this way was several tens of KHz at most. Further, in order to increase the frequency, a tuning fork shape formed by an etching method has been proposed. However, unlike the bending mode vibration of two-dimensional vibration, the vibration is a torsional mode of three-dimensional vibration, so when it is supported or fixed to a lead wire, vibration energy is transmitted to the lead wire, causing vibration leakage. There was a strong need for a new type of twisted crystal oscillator.

【０００３】0003

【発明が解決しようとする課題】機械加工による振動子
では、高周波数化すると支持方法が難しく、一方、音叉
形状では３次元振動であるために、支持、固定部での振
動漏れが多く、振動子として十分な特性が得られず、極
めて根本的な課題が残されていた。同時に音叉形状では
音叉腕の４面に励振電極を配置するので、電界効率が小
さく、Ｒ１　が比較的大きかった。このように高周波数
化に伴う、振動漏れの拡大とＲ１　が大きいという課題
が残されていた。[Problems to be solved by the invention] With machined vibrators, supporting methods become difficult as the frequency increases.On the other hand, since tuning fork-shaped vibrators generate three-dimensional vibrations, there is a lot of vibration leakage at the supporting and fixing parts, which causes vibrations. As a child, he was not able to obtain sufficient characteristics, and extremely fundamental issues remained. At the same time, in the tuning fork shape, the excitation electrodes are arranged on the four sides of the tuning fork arm, so the electric field efficiency is low and R1 is relatively large. As described above, problems remain such as increased vibration leakage and increased R1 due to higher frequencies.

【０００４】0004

【課題を解決するための手段】従って、本発明は以下の
方法で従来の課題を解決するものである。すなわち、振
動部と支持部を化学的エッチング法にて一体に形成した
棒状の捩り水晶振動子で、振動部の中央部でブリッジ部
を介して支持部に接続され、該支持部は一体的にマウン
ト部を形成し、前記振動部の上下面に配置され、隣接す
る励振電極は互いに異極をなし、前記振動部のエッチン
グ面には上下面の同極電極を接続する接続電極を配置し
た振動子により、従来の課題を解決することができる。SUMMARY OF THE INVENTION Accordingly, the present invention solves the conventional problems in the following manner. That is, it is a rod-shaped twisted crystal resonator in which a vibrating part and a supporting part are integrally formed by chemical etching, and the central part of the vibrating part is connected to the supporting part via a bridge part, and the supporting part is integrally formed. A vibration device forming a mount portion, arranged on the upper and lower surfaces of the vibrating portion, adjacent excitation electrodes having different polarities, and connecting electrodes connecting the same polarity electrodes on the upper and lower surfaces on the etched surface of the vibrating portion. With children, traditional problems can be solved.

【０００５】[0005]

【作用】このように本発明の捩り水晶振動子は、棒状励
振部、ブリッジ部と支持部から構成されている。特に支
持部の端部は一体的にマウント部を形成しているので、
高周波数化を計っても、振動部の振動エネルギーがマウ
ント部まで伝わらない。それ故、支持、固定による振動
漏れがなくなる。又、励振電極は振動部の上下面に配置
され、隣接する電極は異極であるので、Ｒ１　の小さい
、高いＱ値を持った捩り水晶振動子が得られる。[Operation] As described above, the torsion crystal resonator of the present invention is composed of a rod-shaped excitation section, a bridge section, and a support section. In particular, the end of the support part integrally forms the mount part, so
Even if the frequency is increased, the vibration energy of the vibrating part is not transmitted to the mount part. Therefore, vibration leakage due to support and fixation is eliminated. Furthermore, since the excitation electrodes are arranged on the upper and lower surfaces of the vibrating section, and adjacent electrodes have different polarities, a twisted crystal resonator with a small R1 and a high Q value can be obtained.

【０００６】[0006]

【実施例】次に、本発明を実施例に基づいて具体的に説
明する。図１は本発明の捩り水晶振動子形状と励振電極
配置の一実施例を示す斜視図である。振動子１は、励振
電極７、８、１１、１２（但し、１１、１２は図示され
ていない）と接続電極９、１０（接続電極１０は図示さ
れていない）を有する振動部２とブリッジ部４を介して
接続されている支持部３から構成されている。又、支持
部３は振動部２のほぼ中央部に設けたブリッジ部４と接
続されるフレーム５とマウント部６から構成されている
。更に、振動部２の上面２ｂに配置された励振電極７は
エッチング面２ａに設けられた接続電極１０を介して励
振電極８の対向面（下面２ｃ）に設けた励振電極１１（
図示されていない）に接続されている。全く同様に他方
の上面２ｂの励振電極８はエッチング面２ｃに設けられ
た接続電極９を介して励振電極７の対向面（下面２ｃ）
に設けた励振電極１２（図示されてない）接続されてい
る。これら異極となる励振電極７、８は、外部端子との
接続を図るために、フレーム５を介してマウント部６ま
で延びて配置されている。それ故、この両端子間に交番
電圧を印加することにより、容易に捩り振動を引き起こ
すことができる。このように振動子を構成することによ
り、Ｒ１　の低減が図れるとともに、振動エネルギーを
振動部内部に閉じ込めることがさらにできるので、振動
漏れのない優れた捩り水晶振動子が得られる。又、本発
明の振動子は複雑な形状をしているが、化学的エッチン
グ法によって、容易にかつ１枚の水晶ウェハから多数個
同時に形成できる。EXAMPLES Next, the present invention will be specifically explained based on examples. FIG. 1 is a perspective view showing an embodiment of the twisted crystal resonator shape and excitation electrode arrangement of the present invention. The vibrator 1 includes a vibrating part 2 having excitation electrodes 7, 8, 11, and 12 (however, 11 and 12 are not shown) and connection electrodes 9 and 10 (the connection electrode 10 is not shown), and a bridge part. It consists of a support part 3 connected via 4. Further, the support section 3 is composed of a frame 5 and a mount section 6, which are connected to a bridge section 4 provided approximately at the center of the vibrating section 2. Furthermore, the excitation electrode 7 arranged on the upper surface 2b of the vibrating section 2 connects to the excitation electrode 11 (provided on the opposite surface (lower surface 2c) of the excitation electrode 8 via the connection electrode 10 provided on the etched surface 2a).
(not shown). In exactly the same way, the excitation electrode 8 on the other upper surface 2b connects to the opposite surface (lower surface 2c) of the excitation electrode 7 via the connection electrode 9 provided on the etched surface 2c.
It is connected to an excitation electrode 12 (not shown) provided in the. These excitation electrodes 7 and 8 having different polarities are arranged to extend through the frame 5 to the mount 6 in order to connect with external terminals. Therefore, by applying an alternating voltage between these terminals, torsional vibration can be easily caused. By configuring the vibrator in this manner, it is possible to reduce R1 and further confine the vibration energy inside the vibrating section, so that an excellent torsion crystal vibrator without vibration leakage can be obtained. Further, although the vibrator of the present invention has a complicated shape, a large number of vibrators can be easily formed simultaneously from one crystal wafer by chemical etching.

【０００７】[0007]

【発明の効果】以上述べたように、本発明の振動子は振
動部と支持部から成り、かつエッチング法によって一体
に形成される新たな形状の捩り水晶振動子を提案するこ
とにより、次の著しい効果を有する。■　　振動部の上
下面に隣接する励振電極が異極となるように配置してい
るので、電界効率に優れ、等価直列抵抗Ｒ１　が小さく
なる。[Effects of the Invention] As described above, the resonator of the present invention is composed of a vibrating part and a support part, and by proposing a new-shaped torsion crystal resonator that is integrally formed by an etching method, the resonator achieves the following: It has a remarkable effect. (2) Since the excitation electrodes adjacent to the upper and lower surfaces of the vibrating section are arranged to have different polarities, the electric field efficiency is excellent and the equivalent series resistance R1 is small.

【０００８】■　　本振動子は振動部と支持部をエッチ
ング法によって、一体に形成されているので、小型化、
薄型化ができる。■　　支持部の形状を改善することに
より、振動漏れのない捩り水晶振動子が得られる。それ
故、マウント部でリード線等に支持、固定してもＲ１　
の小さい振動子が得られる。[0008] Since the vibrating part and the supporting part of this vibrator are integrally formed by etching, it is possible to reduce the size and
Can be made thinner. ■ By improving the shape of the support part, a torsion crystal resonator without vibration leakage can be obtained. Therefore, even if the mount section supports and fixes the lead wire, etc., the R1
A small oscillator can be obtained.

【０００９】■　　片側でリード線等にマウントするの
で、製造が容易、安価にできる。■ Since it is mounted on a lead wire or the like on one side, manufacturing is easy and inexpensive.

【図面の簡単な説明】[Brief explanation of the drawing]

【図１】本発明の捩り水晶振動子形状と励振電極配置の
一実施例の斜視図である。FIG. 1 is a perspective view of an embodiment of the twisted crystal resonator shape and excitation electrode arrangement of the present invention.

【符号の説明】[Explanation of symbols]

１　　振動子 ２　　振動部 ２ａ　　振動部のエッチング面 ２ｂ　　振動部の上面 ２ｃ　　振動部の下面 ４　　ブリッジ部 ５　　フレーム ６　　マウント部 ７、８、１１、１２　　励振電極 ９、１０　　接続電極 Ｘ　　電気軸 Ｙ　　機械軸 Ｚ　　光軸 1. Oscillator 2 Vibration part 2a Etched surface of vibrating part 2b Top surface of the vibrating part 2c Bottom surface of the vibrating part 4 Bridge part 5 Frame 6 Mount part 7, 8, 11, 12 Excitation electrode 9, 10 Connection electrode X Electric axis Y Machine axis Z optical axis

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】　　振動部と支持部を化学的エッチング法
にて一体に形成した棒状捩り水晶振動子で、振動部の中
央部でブリッジ部を介して支持部に接続され、該支持部
は一体的にマウント部を形成し、前記振動部の上下面に
配置され、隣接する励振電極は互いに異極をなし、前記
振動部のエッチング面には上下面の同極電極を接続する
接続電極が配置されていることを特徴とする捩り水晶振
動子。Claim 1: A rod-shaped torsion crystal resonator in which a vibrating part and a supporting part are integrally formed by chemical etching, the central part of the vibrating part is connected to the supporting part via a bridge part, and the supporting part is integrally formed. a mount portion is arranged on the upper and lower surfaces of the vibrating portion, adjacent excitation electrodes have different polarities, and a connecting electrode is arranged on the etched surface of the vibrating portion to connect the same polarity electrodes on the upper and lower surfaces. A twisted crystal oscillator characterized by: