JPH0310510A - Bending crystal resonator - Google Patents
Bending crystal resonatorInfo
- Publication number
- JPH0310510A JPH0310510A JP14606689A JP14606689A JPH0310510A JP H0310510 A JPH0310510 A JP H0310510A JP 14606689 A JP14606689 A JP 14606689A JP 14606689 A JP14606689 A JP 14606689A JP H0310510 A JPH0310510 A JP H0310510A
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- crystal resonator
- frame
- bending
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 27
- 238000005452 bending Methods 0.000 title abstract description 13
- 230000005284 excitation Effects 0.000 claims description 10
- 238000005530 etching Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 4
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は周波数が１００ＫＨｚ〜５００ＫＨｚと低周波
数を有する屈曲水晶振動子に関する。特に、その振動子
形状と励振電極配置に関するもので、最近開発が積重的
に行われている、ポケットベル、ＩＣカード等の携帯機
器の基準信号源として最適な屈曲水晶振動子に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a bent crystal resonator having a low frequency of 100 KHz to 500 KHz. In particular, the present invention relates to the shape of the vibrator and the arrangement of excitation electrodes, and it relates to a bent quartz crystal vibrator that is most suitable as a reference signal source for portable devices such as pagers and IC cards, which has been extensively developed in recent years.
（発明の概要〕
（本発明の背景）
水晶は物理的、および化学的に極めて安定した物質であ
り、従って、これから形成されるいわゆる水晶振動子は
損失抵抗Ｒ，の小さい、高いＱ値を持った振動子を得る
ことができる。そのため、各種機器の時間あるいは周波
数基準源として多用されてきた。特に、最近は各種機器
の小型化及び新商品の開発が積極的に行われている。例
えば、ＩＣカードのように超薄型の水晶振動子が要求さ
れると同時に、周波数基準源として数百Ｋｌ（ｚの要求
が強くなっている。本発明はこれらに鑑み行われた。(Summary of the Invention) (Background of the Invention) Quartz is a physically and chemically extremely stable substance, and therefore, so-called crystal resonators formed from it have a low loss resistance R, and a high Q value. Therefore, it has been widely used as a time or frequency reference source for various devices.In particular, recently, various devices have been miniaturized and new products have been actively developed.For example, At the same time as ultra-thin crystal oscillators are required for use in IC cards, there is also an increasing demand for several hundred kiloliters (z) as a frequency reference source.The present invention was made in view of these circumstances.
（本発明の目的）
すなわち、本発明の目的は周波数が１００ＫＨｚ〜５０
０Ｋｔｌｚで振動モレが非常に少なく、損失抵抗Ｒ１の
小さい、Ｑ値の高い超薄型の屈曲水晶振動子を提供する
ことにある。(Objective of the present invention) That is, the object of the present invention is to
The object of the present invention is to provide an ultra-thin bent crystal resonator with very little vibration leakage at 0 Ktlz, a small loss resistance R1, and a high Q value.
（本発明の要旨）
すでに述べたように、水晶は大変に安定した物質である
から優れた水晶振動子が得られる。しかしながら、この
ように優れた特性が得られるのは、振動モレの小さい振
動子形状が得られて初めて可能となる。本発明では屈曲
振動する振動部と支持部がエツチング法によって一体に
形成された屈曲水晶振動子の振動部が節となる位置にブ
リッジ部を介して支持部と接続する形状にし、更に、支
持部の形状を新規にすることにより振動部のエネルギー
を振動部内部に閉じ込める形状にしている。(Summary of the Present Invention) As already mentioned, quartz is a very stable substance, so an excellent quartz crystal resonator can be obtained. However, such excellent characteristics can only be obtained if a vibrator shape with small vibration leakage is obtained. In the present invention, a bending crystal resonator in which a vibrating part that bends and vibrates and a support part are integrally formed by an etching method is connected to the support part through a bridge part at a node position, and further, the support part By creating a new shape, the energy of the vibrating part is confined within the vibrating part.
その結果、損失抵抗Ｒ１の小さい、且つ、Ｑ債の高い屈
曲水晶振動子を得ることができる。又、数百ＫＨｚの周
波数を得るために本発明では、振動子の振動部の中心部
で支持部に接続されているから、片持ち梁が２本長手方
向にあると考えることができる。それ故、振動部の幅と
長さの比（辺比と呼ぶ）を大きくして周波数を高くして
も、振動部の長さは音叉型振動子と比較して長く取れる
ので、損失抵抗Ｒ１を劣化させずに周波数を高くするこ
とができる。As a result, a bent crystal resonator with a small loss resistance R1 and a high Q bond can be obtained. Furthermore, in the present invention, in order to obtain a frequency of several hundred KHz, the center of the vibrating section of the vibrator is connected to the support section, so it can be considered that there are two cantilevers in the longitudinal direction. Therefore, even if the frequency is increased by increasing the ratio of the width and length of the vibrating part (referred to as the side ratio), the length of the vibrating part can be made longer than that of a tuning fork type vibrator, so the loss resistance R1 It is possible to increase the frequency without degrading the
低い周波数の振動子としては音叉型屈曲水晶振動子が挙
げられるが、更に周波数を高くするには、高調波振動を
使用しなければならない。そのため、励振電極配置が複
雑となり、また電気的特性の一つである容量比が大きく
なる等の不具合が生じる。A tuning fork type bent crystal resonator is an example of a low frequency resonator, but harmonic vibration must be used to further increase the frequency. Therefore, the arrangement of the excitation electrodes becomes complicated, and problems such as an increase in the capacitance ratio, which is one of the electrical characteristics, occur.
同時に、高調波振動を使用すると、音叉基部でマウント
した場合、励動モレが太きく、を置火抵抗Ｒ６の小さい
振動子を得ることが非常に難しい。更に、音叉型屈曲水
晶振動子の周波数は量産レヘルで考えた場合、２００に
ｌｌｚが最高で、本発明の５００にｌｌｚの屈曲水晶振
動子は未だ実用化されていない。At the same time, when harmonic vibration is used, when mounted at the base of a tuning fork, excitation leakage is large and it is very difficult to obtain a vibrator with small firing resistance R6. Furthermore, when considering the frequency of a tuning fork type bent crystal resonator, the highest frequency is 200 to 100 Hz when considered at a mass production level, and the 500 to 100 to 10 z bent crystal resonator of the present invention has not yet been put into practical use.
以上述べたように、従来の音叉型屈曲水晶振動子では高
周波数化には限界があり、それと同時に損失抵抗Ｒ＋
の上昇、容量比が大きくなる等の多くの問題があった。As mentioned above, the conventional tuning fork type bent crystal resonator has a limit in increasing the frequency, and at the same time, the loss resistance R +
There were many problems such as an increase in the capacity ratio and an increase in the capacity ratio.
〔課題を解決するための手段］
それ故、本発明では棒状の振動部を有する屈曲水晶振動
子の上下側面の４面に励振電極を配置し、前記振動子の
上下面と２側面はそれぞれ同極の励振電極を形成し、前
記棒の中心部でブリッジ部を介して支持部に接続される
ように振動子を構成することにより、振動子の周波数定
数が音叉型屈曲水晶振動子の約６．５倍になり本発明の
目的とする５００にＨｚという高い周波数の振動子を得
ることができる。[Means for Solving the Problems] Therefore, in the present invention, excitation electrodes are arranged on four upper and lower side surfaces of a bent crystal resonator having a rod-shaped vibrating section, and the upper and lower surfaces and two side surfaces of the vibrator are the same. By forming the excitation electrode of the pole and configuring the vibrator so that it is connected to the support part through the bridge part at the center of the rod, the frequency constant of the vibrator is approximately 6 .5 times, and it is possible to obtain a vibrator with a high frequency of 500 Hz, which is the object of the present invention.
本発明の振動子は振動部の中心で支持部と接続され、し
かも、エツチング法によって一体に形成されているので
、小型で、振動モレの小さい、かつ、比較的高い周波数
を屈曲モードで実現できる。The vibrator of the present invention is connected to the support part at the center of the vibrating part, and is integrally formed by etching, so it is small, has little vibration leakage, and can achieve relatively high frequencies in bending mode. .
更に、材料として水晶を用いるので、物理的、化学的に
安定していて、そのために高い周波数安定性を有する水
晶振動子が得られる。Furthermore, since quartz is used as a material, it is physically and chemically stable, and therefore a crystal resonator with high frequency stability can be obtained.
次に、本発明を具体的に述べる。 Next, the present invention will be specifically described.
第１図は本発明の屈曲水晶振動子の一実施例を示す平面
図で、振動子ｌは振動部２と支持部３からブリッジ部４
を介して構成され、エツチング法によって一体に形成さ
れている。尚、支持部３は屈曲部５、穴７、フレーム６
とマウント部８から成り、フレーム６の上には電極１１
と１２が配置されている。また、振動部２にはｌ１ｉＩ
Ｉ振電穫９と１０が対向する側面と対向する上下面に配
置されている。FIG. 1 is a plan view showing an embodiment of the bending crystal resonator of the present invention.
, and are integrally formed by an etching method. Note that the support part 3 includes a bent part 5, a hole 7, and a frame 6.
and a mount part 8, and an electrode 11 is mounted on the frame 6.
and 12 are arranged. Also, in the vibrating part 2, l1iI
I-vibrator 9 and 10 are arranged on opposing side surfaces and opposing upper and lower surfaces.
即ち、第２図の上面図で示すごとく、２つの側面電極は
同極に（Ａ）また、２つの上下面電極も同様に同極にな
るように（Ｂ）形成し、それらの電極は異極になるよう
に形成されている。更に詳述すると、励振電極９と１０
はフレーム上の電極１１と１２に各々接続され、マウン
ト部８で同一平面上に異極となるように配置されている
。そして、図示されていないが各電極は２本の外部端子
のリード線に半田あるいは導電性接着剤等によって支持
固定と電気的接続を兼ねている。従って、２本のリード
端子に交番電圧を印加することによって、振動部２はｘ
ｙ平面内（ｘ：水晶の電気軸、ｙ：水晶の機械軸）で屈
曲振動をする。それに伴ってブリッジ部４の位置でも若
干の振動をする。従って、ブリッジ部４の方向の振動を
十分に自由にすることが大切で、そのために、本発明で
は支持部３の屈曲部５が十分に自由に振動できるように
、穴７が設けられている。That is, as shown in the top view of FIG. 2, the two side electrodes are formed to have the same polarity (A), and the two upper and lower surface electrodes are also formed to have the same polarity (B), and these electrodes are formed to have different polarities. It is shaped like a pole. To explain in more detail, the excitation electrodes 9 and 10
are connected to electrodes 11 and 12 on the frame, respectively, and are arranged on the same plane at the mount portion 8 so as to have different polarities. Although not shown, each electrode is supported and fixed and electrically connected to two external terminal lead wires using solder, conductive adhesive, or the like. Therefore, by applying an alternating voltage to the two lead terminals, the vibrating section 2
Bending vibration occurs in the y-plane (x: electric axis of the crystal, y: mechanical axis of the crystal). Accordingly, the position of the bridge portion 4 also vibrates slightly. Therefore, it is important to allow sufficient vibration in the direction of the bridge portion 4, and for this reason, in the present invention, holes 7 are provided so that the bent portion 5 of the support portion 3 can vibrate sufficiently freely. .
次に、本発明の振動子は振動モレが非常に小さくなる理
由について述べる。振動子１は振動部２からブリッジ部
４を介して屈曲部５へと一体にエツチング法によって形
成され、屈曲部５の振動を十分に自由にさせるために穴
７が設けられている。Next, the reason why the vibration leakage of the vibrator of the present invention is extremely small will be described. The vibrator 1 is integrally formed from the vibrating part 2 to the bending part 5 via the bridge part 4 by etching, and holes 7 are provided to allow the bending part 5 to vibrate sufficiently.
更に、穴フの両端部はフレーム６に接続され、マウント
部８まで延びている。それ故、振動部２のブリッジ部４
の方向の振動は屈曲モードで振動し、且つ、穴フの両端
部を介してフレーム６に接続、マウント部８まで延びて
いるので、振動部のエネルギーはフレーム６まで伝わら
ず、マウント部８で支持固定しても全（振動モレのない
屈曲水晶振動子が得られる。Further, both ends of the hole are connected to the frame 6 and extend to the mount section 8. Therefore, the bridge section 4 of the vibrating section 2
The vibration in the direction vibrates in the bending mode and is connected to the frame 6 through both ends of the hole and extends to the mount section 8, so the energy of the vibrating section is not transmitted to the frame 6 and is transmitted at the mount section 8. Even if it is supported and fixed, a bent crystal resonator with no vibration leakage can be obtained.
以上述べたように、本発明は振動部と支持部をエツチン
グ法によって一体に形成する屈曲水晶振動子に於いて、
新形状の屈曲水晶振動子を提案することにより、次の著
しい効果を有する。As described above, the present invention provides a bent crystal resonator in which the vibrating part and the supporting part are integrally formed by etching.
By proposing a new-shaped bent crystal resonator, we have the following remarkable effects.
■ 支持部の形状を工夫改善することにより、振動部の
振動を抑圧せず、自由にさせることができるので、損失
抵抗Ｒ１が小さくなる。(2) By improving the shape of the support part, the vibration of the vibrating part can be made free without being suppressed, so that the loss resistance R1 can be reduced.
■ 振動部の中央部でブリッジ部を介して支持部に接続
する形状であるので、周波数定数が従来の音叉型屈曲水
晶振動子より太き（なり、高い周波数の屈曲水晶振動子
が得られる。(2) Since the central part of the vibrating part is connected to the support part via the bridge part, the frequency constant is thicker than that of a conventional tuning fork type bent crystal resonator, and a high frequency bent crystal resonator can be obtained.
■ 屈曲部とフレームの間に穴を設けているので、振動
部の振動を自由にさせることができるとともに、屈曲部
のエネルギーはフレームに伝わらないので、振動モレが
なくなり、マウント部で固定しても、損失抵抗Ｒ５の小
さい振動子が得られる。■ Since there is a hole between the bent part and the frame, the vibrating part can vibrate freely, and the energy of the bent part is not transmitted to the frame, eliminating vibration leakage and fixing it with the mount part. Also, a vibrator with a small loss resistance R5 can be obtained.
■ 片側でマウントするので、製造が容易、且つ、小型
化できる。■ Since it is mounted on one side, it is easy to manufacture and can be made smaller.
第１図は本発明の屈曲水晶振動子の形状を示す平面図、
第２図は本発明の励振電極の一実施例を示す上面図であ
る。
■・・・振動子
２・・・振動部
３・・・支持部
４・・・ブリッジ部
５・・・屈曲部
６・・・フレーム
７・・・穴
８・・・マウント部
９．１０・・・励振電極
１１、１２・・・電極
ｘ、ｙ、ｚ・・・電気軸９機械軸、光軸本鉋哨ハ根勧子
と示１平面図
′＄１図
以上FIG. 1 is a plan view showing the shape of the bending crystal resonator of the present invention;
FIG. 2 is a top view showing one embodiment of the excitation electrode of the present invention. ■... Vibrator 2... Vibrating part 3... Support part 4... Bridge part 5... Bent part 6... Frame 7... Hole 8... Mount part 9.10. ...Excitation electrodes 11, 12...Electrodes x, y, z...Electric axis 9 Mechanical axis, optical axis Main axis
Claims (1)
面に励振電極を配置し、前記振動子の上下面と２側面は
それぞれ同極の励振電極を形成し、前記棒の中心部でブ
リッジ部を介して支持部に接続されていることを特徴と
する屈曲水晶振動子。4 of the upper and lower sides of a bent crystal resonator having a rod-shaped vibrating part
An excitation electrode is arranged on the surface, the upper and lower surfaces and two side surfaces of the vibrator form excitation electrodes of the same polarity, and the center of the rod is connected to a support section via a bridge section. A bent crystal oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14606689A JPH0310510A (en) | 1989-06-08 | 1989-06-08 | Bending crystal resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14606689A JPH0310510A (en) | 1989-06-08 | 1989-06-08 | Bending crystal resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0310510A true JPH0310510A (en) | 1991-01-18 |
Family
ID=15399316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14606689A Pending JPH0310510A (en) | 1989-06-08 | 1989-06-08 | Bending crystal resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0310510A (en) |
-
1989
- 1989-06-08 JP JP14606689A patent/JPH0310510A/en active Pending
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