JPH03192810A - H type bending crystal resonator - Google Patents
H type bending crystal resonatorInfo
- Publication number
- JPH03192810A JPH03192810A JP33356089A JP33356089A JPH03192810A JP H03192810 A JPH03192810 A JP H03192810A JP 33356089 A JP33356089 A JP 33356089A JP 33356089 A JP33356089 A JP 33356089A JP H03192810 A JPH03192810 A JP H03192810A
- Authority
- JP
- Japan
- Prior art keywords
- support
- tuning fork
- bridge
- crystal resonator
- rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 20
- 238000005452 bending Methods 0.000 title abstract description 9
- 238000005530 etching Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 2
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野１
本発明は周波数が５０ＫＨｚ〜５００ＫＨｚと低周波数
を有する新形状の屈曲水晶振動子に関する。特に、超薄
型の要求が強いＩＣカードやポケットベル等の携帯機器
の基準信号源として最適なＨ型屈曲水晶振動子に関する
。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to a new-shaped bent crystal resonator having a low frequency of 50 KHz to 500 KHz. In particular, the present invention relates to an H-shaped bent crystal resonator that is optimal as a reference signal source for portable devices such as IC cards and pagers, which are required to be ultra-thin.
〔発明の概要］
本発明は周波数が５０ＫＨｚ〜５００ＫＨｚと低周波数
を有し、振動モレが非常に小さく、且つ、等個直列抵抗
Ｒ１の小さい新形状の屈曲水晶振動子を提供することに
ある１本発明の目的を達成するために、振動部の形状を
棒の形にし、さらに、棒の中央部で２つの棒は接続され
るように構成されている。すなわち、振動部は音叉型形
状が２つあるＨ型振動子を成している。また、各棒の中
央部の両端部には振動部の振動を抑圧しない支持部が形
成されていて、振動部と支持部はエツチング法によって
一体に形成されている新形状の屈曲水晶振動子である。[Summary of the Invention] The object of the present invention is to provide a bent crystal resonator with a new shape, which has a low frequency of 50 KHz to 500 KHz, has very little vibration leakage, and has a small equal series resistance R1. In order to achieve the object of the present invention, the vibrating section is shaped like a rod, and the two rods are connected at the center of the rod. That is, the vibrating section forms an H-shaped vibrator having two tuning fork shapes. In addition, a support part that does not suppress the vibration of the vibrating part is formed at both ends of the central part of each rod, and the vibrating part and the support part are integrally formed using an etching method. be.
［従来の技術］
低周波数の振動子としては音叉型屈曲水晶振動子が挙げ
られるが、更に周波数を高（するには、高調波振動を使
用しなければならない、そのため、励振電極配置が複雑
となり、また電気的特性の一つである容量比が大きくな
る等の不具合が生じる。又、高調波振動を使用すると音
叉基部でマウントした場合、振動モレが大きく等価直列
抵抗Ｒ１の小さい振動子を得ることが非常に難しかった
。更に、音叉型屈曲水晶振動子の周波数は量産レベルで
考えた場合、２００ＫＨｚ位が最高で、本発明の５００
ＫＨｚの屈曲水晶振動子は未だ実用化されていないのが
実状である。[Prior art] A tuning fork type bent crystal resonator is an example of a low frequency resonator, but in order to further increase the frequency, harmonic vibration must be used, which makes the excitation electrode arrangement complicated. In addition, problems such as an increase in the capacitance ratio, which is one of the electrical characteristics, occur.Also, when using harmonic vibration, when mounted at the base of the tuning fork, vibration leakage is large and a vibrator with a small equivalent series resistance R1 can be obtained. Furthermore, when considering the frequency of a tuning fork type bent crystal resonator at a mass production level, the highest frequency is around 200 KHz, and the frequency of the present invention's 500 KHz is extremely difficult.
The reality is that KHz bent crystal resonators have not yet been put into practical use.
［発明が解決しようとする課題１
以上述べたように、従来の音叉型屈曲水晶振動子では高
周波数化には限界があり、それと同時に、等個直列抵抗
Ｒ，の上昇、容量比が大きくなる等の多くの問題があっ
た。[Problem to be Solved by the Invention 1] As stated above, there is a limit to increasing the frequency with the conventional tuning fork type bent crystal resonator, and at the same time, the equal series resistance R, increases and the capacitance ratio increases. There were many problems such as.
［課題を解決するための手段１
本発明では以下の方法により、従来の間頌点を解決する
ものである。すなわち、２本の棒形状の中央部で互いに
接続されたＨ型音叉形状で、この音叉形状の接続部から
直交する方向に延びるブリッジ部と、その端部に支持部
が形成され、この支持部はＨ型音叉の一方を囲むように
形成されている構造に振動子を構成することによって、
本発明の目的を達成している０本振動子の形状は大変に
複雑な形状をしているが、半導体製造方法を応用したエ
ツチング技術によって容易に作ることができる。[Means for Solving the Problems 1] The present invention solves the conventional problems by the following method. In other words, it has an H-shaped tuning fork shape in which two rod shapes are connected to each other at the center, and a bridge part extending in a direction orthogonal to the connecting part of the tuning fork shape, and a support part are formed at the ends of the bridge part. By configuring the vibrator in a structure that surrounds one side of the H-shaped tuning fork,
Although the zero-wire vibrator that achieves the object of the present invention has a very complex shape, it can be easily manufactured using etching technology applied to semiconductor manufacturing methods.
〔作用１
このように、本発明の屈曲水晶振動子は振動部が２本の
棒形状を成し、さらに、その両端部に振動を抑圧しない
支持部が設けられ、しかも、これらはエツチング法によ
って一体に形成されるので、振動モレがなく、小型化が
可能であると同時に等個直列抵抗Ｒ８の小さい、Ｑ値の
高い、且つ、容量比の小さい、比較的高い周波数を屈曲
モードで実現できる。[Operation 1] As described above, in the bending crystal resonator of the present invention, the vibrating section has the shape of two rods, and furthermore, support sections that do not suppress vibration are provided at both ends, and these are etched by the etching method. Since it is integrally formed, there is no vibration leakage, and it is possible to downsize, and at the same time, it has a small equal series resistance R8, a high Q value, a small capacitance ratio, and a relatively high frequency can be achieved in the bending mode. .
［実施例］
次に、本発明にて得られた結果を具体的に述べる。第１
図は本発明のＨ型屈曲水晶振動子の一実施例の平面図と
、その振動部２の励振電極の配置法を示す第１図のＡ−
Ａ’部の断面図が第２図である。振動子ｌは振動部２と
支持部３からブリッジ部４を介して構成され、エツチン
グ法によって体に形成されている。尚、振動部２は第１
図の平面図の実線（ａ）と破線（ｂ）の矢印で示すごと
く、屈曲モードで振動する。また、振動部２つの棒の中
央部の接続部７で２つの棒は接続されるので、実質的に
は２つの音叉形状が形成されたものと等価となる。すな
わち、本振動子は音叉型屈曲水晶振動子と同じ周波数を
得る時には、棒の長さが２倍となり、従来の音叉形状よ
り長くとれる。換言するならば、振動部２を短くして周
波数を高くする場合、音叉形状より振動部２を長くでき
るので、等個直列抵抗Ｒ１の劣化をまねくことなく高周
波数化が図れるという特徴を有する。また、屈曲モード
の励振は第２図に示すごとく、方の振動棒の上下面と他
方の振動棒の側面とが同極となるように各々励振電極が
配置されていて、両端子（ｃ）、（ｄ）に交番電圧を印
加することにより屈曲モードを励振させている。次に、
本発明の振動子は振動モレが非常に小さくなる理由につ
いて述べる。２本の棒形状からなる振動部２の両端部は
ブリッジ部４を介して支持部３（フレーム５とマウント
部６から成る）と接続され、一体にエツチング法によっ
て形成されている。このとき、ブリッジ部４は棒形状の
中央部の接続部７と同じ位置で音叉形状に直交する方向
に構成されている。それ故、変位がほとんど零となる位
置で振動部と接続されているので、支持部へのエネルギ
ー伝達が非常に小さくなり、支持部３の端部に構成され
ているマウント部６でリード線等に支持固定しても全く
振動モレのない屈曲水晶振動子が得られる。[Example] Next, the results obtained in the present invention will be specifically described. 1st
The figure is a plan view of one embodiment of the H-type bent crystal resonator of the present invention, and A-A in FIG.
FIG. 2 is a cross-sectional view of part A'. The vibrator 1 is composed of a vibrating part 2 and a support part 3 via a bridge part 4, and is formed on the body by an etching method. Note that the vibrating section 2 is
As shown by solid line (a) and broken line (b) arrows in the plan view of the figure, it vibrates in the bending mode. Furthermore, since the two rods of the vibrating section are connected at the connecting portion 7 at the center of the two rods, it is substantially equivalent to forming two tuning fork shapes. That is, when this resonator obtains the same frequency as a tuning fork type bent crystal resonator, the rod length is twice as long, and it can be made longer than the conventional tuning fork shape. In other words, when the frequency is increased by shortening the vibrating section 2, the vibrating section 2 can be made longer than the tuning fork shape, so it has the characteristic that the frequency can be increased without causing deterioration of the equal series resistor R1. As shown in Figure 2, for bending mode excitation, the excitation electrodes are arranged so that the upper and lower surfaces of one vibrating rod and the side surfaces of the other vibrating rod have the same polarity, and both terminals (c) , (d), the bending mode is excited by applying an alternating voltage. next,
The reason why the vibration leakage of the vibrator of the present invention is extremely small will be explained. Both ends of the vibrating section 2, which has the shape of two rods, are connected to a support section 3 (consisting of a frame 5 and a mount section 6) via a bridge section 4, and are integrally formed by etching. At this time, the bridge portion 4 is arranged in a direction perpendicular to the tuning fork shape at the same position as the connecting portion 7 at the center of the rod shape. Therefore, since it is connected to the vibrating part at a position where the displacement is almost zero, the energy transmission to the support part is extremely small, and the lead wire etc. A bent crystal resonator with no vibration leakage can be obtained even if it is supported and fixed on the quartz crystal resonator.
［発明の効果］
以上述べたように、本発明の振動子は振動部と支持部を
エツチング法によって一体に形成するＨ型屈曲水晶振動
子に於いて、２本の振動部形状から成る、すなわち、新
形状の屈曲水晶振動子を提案することにより、次の著し
い効果を有する。[Effects of the Invention] As described above, the vibrator of the present invention is an H-shaped bent crystal vibrator in which the vibrating part and the support part are integrally formed by etching, and has two vibrating part shapes. By proposing a new-shaped bent crystal resonator, we have the following remarkable effects.
■振動部の振動腕を２本にすることにより、電界効率が
向上し、等個直列抵抗Ｒ１の小さい、Ｑ値の高い、かつ
、容量比の小さい屈曲水晶振動子が得られる。(2) By using two vibrating arms in the vibrating section, the electric field efficiency is improved, and a bent crystal resonator with a small equal series resistance R1, a high Q value, and a small capacitance ratio can be obtained.
■支持部の形状を工夫改善することにより、振動部の振
動を抑圧せず、自由にさせることができるので、等個直
列抵抗Ｒ３が小さくなる。(2) By improving the shape of the support part, the vibration of the vibrating part can be made free without being suppressed, so that the equal series resistance R3 is reduced.
■振幅の非常に小さい位置でブリッジ部を介して支持部
は構成されるので、屈曲部のエネルギーはほとんどフレ
ームに伝わらないので、振動モレが小さく、マウント部
で固定しても、等個直列抵抗Ｒ１の小さい屈曲水晶振動
子が得られる。■Since the support part is configured via the bridge part at a position with very small amplitude, almost no energy from the bending part is transmitted to the frame, so vibration leakage is small, and even if fixed with the mount part, there will be equal series resistance. A bent crystal resonator with a small R1 can be obtained.
■片側でマウントするので、製造が容易、且つ、小型化
できる。■Since it is mounted on one side, it is easy to manufacture and can be made smaller.
第１図は本発明の屈曲水晶振動子の形状を示す平面図。
第２図は、第１図のＡ−Ａ′部の電極を示す断面図であ
る。
ｌ・・・・・振動子
２・・・・・振動部
３・・・・・支持部
・ブリッジ部
・フレーム
・マウント部
・接続部
・電極端子FIG. 1 is a plan view showing the shape of the bending crystal resonator of the present invention. FIG. 2 is a sectional view showing the electrode along line AA' in FIG. l... Vibrator 2... Vibrating part 3... Support part, bridge part, frame, mount part, connection part, electrode terminal
Claims (1)
で、該音叉形状の接続部から直交する方向に延びるブリ
ッジ部と、その端部に支持部が形成され、該支持部はＨ
型音叉の一方を囲むように形成されていることを特徴と
するＨ型屈曲水晶振動子。It has an H-shaped tuning fork shape in which two rods are connected to each other at the center, and has a bridge part extending in a direction orthogonal to the connecting part of the tuning fork shape, and a support part formed at the end of the bridge part, and the support part has an H-shaped tuning fork shape.
An H-shaped bent crystal resonator characterized by being formed so as to surround one side of a tuning fork.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33356089A JPH03192810A (en) | 1989-12-21 | 1989-12-21 | H type bending crystal resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33356089A JPH03192810A (en) | 1989-12-21 | 1989-12-21 | H type bending crystal resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03192810A true JPH03192810A (en) | 1991-08-22 |
Family
ID=18267411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33356089A Pending JPH03192810A (en) | 1989-12-21 | 1989-12-21 | H type bending crystal resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03192810A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005168066A (en) * | 2002-01-11 | 2005-06-23 | Piedekku Gijutsu Kenkyusho:Kk | Electronic equipment |
| CN101521494A (en) * | 2008-02-26 | 2009-09-02 | 精工电子有限公司 | Piezoelectric vibrating piece and method of fabricating piezoelectric vibrating piece |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS539913A (en) * | 1976-07-15 | 1978-01-28 | Kubota Ltd | Low noise engine |
| JPS5521679A (en) * | 1978-08-04 | 1980-02-15 | Seiko Epson Corp | Crystal oscillator of composite mode h type |
| JPS5937722A (en) * | 1982-08-26 | 1984-03-01 | Matsushima Kogyo Co Ltd | Longitudinal oscillation type piezoelectric oscillator |
| JPS6422105A (en) * | 1987-07-17 | 1989-01-25 | Seiko Electronic Components | Longitudinal crystal vibrator |
-
1989
- 1989-12-21 JP JP33356089A patent/JPH03192810A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS539913A (en) * | 1976-07-15 | 1978-01-28 | Kubota Ltd | Low noise engine |
| JPS5521679A (en) * | 1978-08-04 | 1980-02-15 | Seiko Epson Corp | Crystal oscillator of composite mode h type |
| JPS5937722A (en) * | 1982-08-26 | 1984-03-01 | Matsushima Kogyo Co Ltd | Longitudinal oscillation type piezoelectric oscillator |
| JPS6422105A (en) * | 1987-07-17 | 1989-01-25 | Seiko Electronic Components | Longitudinal crystal vibrator |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005168066A (en) * | 2002-01-11 | 2005-06-23 | Piedekku Gijutsu Kenkyusho:Kk | Electronic equipment |
| CN101521494A (en) * | 2008-02-26 | 2009-09-02 | 精工电子有限公司 | Piezoelectric vibrating piece and method of fabricating piezoelectric vibrating piece |
| JP2009206590A (en) * | 2008-02-26 | 2009-09-10 | Seiko Instruments Inc | Piezoelectric vibration chip, piezoelectric vibrator, oscillator, electronic apparatus, radio wave clock, and method of manufacturing piezoelectric vibration chip |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2003204240A5 (en) | ||
| JPH06112760A (en) | Tortion crystal vibrator | |
| US6545394B2 (en) | Lame mode quartz crystal resonator | |
| JPH03192810A (en) | H type bending crystal resonator | |
| JP6263719B2 (en) | Piezoelectric vibrator, piezoelectric unit, piezoelectric oscillator and electronic device | |
| JPH0821828B2 (en) | Vertical crystal unit | |
| JP5130502B2 (en) | Piezoelectric vibrator and piezoelectric oscillator | |
| JPH0124368B2 (en) | ||
| JP6131445B2 (en) | Piezoelectric vibrator and piezoelectric unit | |
| JPH0310507A (en) | Bending crystal resonator | |
| JPS60226205A (en) | Long side longitudinal vibrator | |
| JP5526312B2 (en) | Piezoelectric vibrator, piezoelectric unit, piezoelectric oscillator and electronic equipment | |
| JP5756983B2 (en) | Piezoelectric vibrator, piezoelectric unit, piezoelectric oscillator and electronic equipment | |
| JPH0310509A (en) | Longitudinal crystal resonator | |
| JP6454894B2 (en) | Piezoelectric vibrator, piezoelectric unit, piezoelectric oscillator and electronic device | |
| JPH03192913A (en) | Tuning fork type bending crystal resonator | |
| JPH04242311A (en) | Twisted vibration mode crystal resonator | |
| JPH0310511A (en) | Tuning fork type bending crystal resonator | |
| JPH03195111A (en) | Longitudinal crystal resonator | |
| JPH04217109A (en) | Torsional crystal resonator | |
| JPH0310510A (en) | Bending crystal resonator | |
| JPH03192912A (en) | Both end free type bending crystal resonator | |
| JPH02186815A (en) | Short side crystal resonator | |
| JP2003115747A (en) | Lame mode crystal oscillator | |
| JP2531308Y2 (en) | Crystal oscillator |