JPH0419521U - - Google Patents

Info

Publication number
JPH0419521U
JPH0419521U JP6037190U JP6037190U JPH0419521U JP H0419521 U JPH0419521 U JP H0419521U JP 6037190 U JP6037190 U JP 6037190U JP 6037190 U JP6037190 U JP 6037190U JP H0419521 U JPH0419521 U JP H0419521U
Authority
JP
Japan
Prior art keywords
ejection part
jetting section
workpiece
pressurized gas
ejection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6037190U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6037190U priority Critical patent/JPH0419521U/ja
Publication of JPH0419521U publication Critical patent/JPH0419521U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の縦断面図、第２図
は従来例の縦断面図である。 １……上方噴出部、２……傾斜噴出部、３……
噴出孔、５……傾斜噴出部用チヤンバー、８……
上方噴出部用チヤンバー。 FIG. 1 is a longitudinal sectional view of an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of a conventional example. 1... Upper spouting part, 2... Inclined spouting part, 3...
Nozzle hole, 5...Chamber for inclined jet section, 8...
Chamber for upper spout.

Claims (1)

【実用新案登録請求の範囲】 加圧気体の噴出部を備え、この噴出部上でワー
クを浮上移動させるようにしたワーク搬送装置に
おいて、 全面に微小通気孔を有する上方噴出部を搬送経
路に沿つて設けるとともに、この上方噴出部の中
途個所に、搬送方向前方に傾斜した噴出孔を有す
る傾斜噴出部を設け、この傾斜噴出部および上方
噴出部の下側にはそれぞれ各部から噴出させる加
圧気体を導入するチヤンバーを設けたことを特徴
とするワーク搬送装置。[Scope of Claim for Utility Model Registration] In a workpiece conveyance device that is equipped with a pressurized gas jetting section and is configured to levitate and move a workpiece above the jetting section, an upper jetting section having micro ventilation holes on the entire surface is provided along the conveying path. At the same time, an inclined ejection part having an ejection hole inclined forward in the conveying direction is provided at a midway point of this upper ejection part, and pressurized gas to be ejected from each part is provided below the inclined ejection part and the upper ejection part. A workpiece transfer device characterized by having a chamber for introducing.
JP6037190U 1990-06-07 1990-06-07 Pending JPH0419521U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6037190U JPH0419521U (en) 1990-06-07 1990-06-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6037190U JPH0419521U (en) 1990-06-07 1990-06-07

Publications (1)

Publication Number Publication Date
JPH0419521U true JPH0419521U (en) 1992-02-19

Family

ID=31587680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6037190U Pending JPH0419521U (en) 1990-06-07 1990-06-07

Country Status (1)

Country Link
JP (1) JPH0419521U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007238288A (en) * 2006-03-09 2007-09-20 Seiko Epson Corp Work conveying device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007238288A (en) * 2006-03-09 2007-09-20 Seiko Epson Corp Work conveying device
JP4595841B2 (en) * 2006-03-09 2010-12-08 セイコーエプソン株式会社 Work transfer device

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