JPH036873B2 - - Google Patents

Info

Publication number
JPH036873B2
JPH036873B2 JP59086910A JP8691084A JPH036873B2 JP H036873 B2 JPH036873 B2 JP H036873B2 JP 59086910 A JP59086910 A JP 59086910A JP 8691084 A JP8691084 A JP 8691084A JP H036873 B2 JPH036873 B2 JP H036873B2
Authority
JP
Japan
Prior art keywords
laser
workpiece
concave
ceramics
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59086910A
Other languages
Japanese (ja)
Other versions
JPS60231588A (en
Inventor
Takashi Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAWAMURA KOGYO KK
Original Assignee
KAWAMURA KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAWAMURA KOGYO KK filed Critical KAWAMURA KOGYO KK
Priority to JP59086910A priority Critical patent/JPS60231588A/en
Publication of JPS60231588A publication Critical patent/JPS60231588A/en
Publication of JPH036873B2 publication Critical patent/JPH036873B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/221Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising by thermic methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52Ceramics

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Laser Beam Processing (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明はニユーセラミツクのレーザー切削加工
法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for laser cutting new ceramics.

従来の技術とその問題点 従来、ニユーセラミツクをレーザー加工するこ
とは既に知られているが、それは切削加工や穴あ
け加工にとどまり、切削加工までには至つていな
い。レーザー加工は原理的には、高密度の光エネ
ルギーのレーザスポツトを加工部位に射投するこ
とにより、これを溶解乃至は溶蝕させる加工法で
あり、これをそのまま加工物の切削に応用するこ
とはできない。事実、ニユーセラミツクの切削加
工はダイヤモンドバイトによる方法に依存してい
いるのが現状である。ニユーセラミツクは材質的
機械的特性により加工が非常に困難であり、ダイ
ヤモンドバイトによる切削でもなお能率的でない
し、ダイヤモンドバイトが高価なためコスト面で
も問題が大きい。
Conventional technology and its problems Conventionally, laser processing of new ceramics has been known, but it has been limited to cutting and drilling, and has not yet reached the level of cutting. Laser processing is, in principle, a processing method that melts or erodes the workpiece by projecting a laser spot of high-density light energy onto the workpiece, but it is not possible to directly apply this to cutting the workpiece. Can not. In fact, cutting of new ceramics currently relies on the method using a diamond cutting tool. Neuceramic is extremely difficult to process due to its material and mechanical properties, and cutting with a diamond cutting tool is still inefficient, and since diamond cutting tools are expensive, there is a big problem in terms of cost.

発明の目的 そこで本発明はレーザー加工によりニユーセラ
ミツクのレーザー切削加工法、例えば表面削取
り、肉べらし切削等を工業的に確立し、それも従
来のダイヤモンドバイトによる切削加工より能率
よく行なうことを保証するニユーセラミツクのレ
ーザー切削加工法を提供しようというものであ
る。
Purpose of the Invention Therefore, the present invention aims to industrially establish a laser cutting method for new ceramics, such as surface scraping and meat leveling cutting, etc., using laser processing, and to perform it more efficiently than the conventional cutting process using a diamond cutting tool. The aim is to provide a guaranteed laser cutting method for new ceramics.

発明の構成 本発明のニユーセラミツクのレーザー切削加工
法は、ニユーセラミツクの被加工面にレーザスポ
ツトの射投により左右方向(即ち直角座標におけ
るX軸方向)或いは前後方向(即ち直角座標にお
けるY軸方向)に延びる凹窪条痕をそれが小さな
並列ピツチの分布状態となるよう施し、該凹窪条
痕の施工で上記被加工面に形成される突条を、そ
れにその側方からレーザスポツトを突条沿いに射
投して、切断する加工法であつて、上記凹窪条痕
の施工を行つた後、或いは行いつつ、上記突条切
断を行うことを特徴としている。
Structure of the Invention The laser cutting method for news ceramics of the present invention involves projecting a laser spot onto the processed surface of news ceramics in the left-right direction (i.e., the X-axis direction in rectangular coordinates) or in the front-back direction (i.e., the Y-axis direction in rectangular coordinates). ) are formed so that they are distributed in small parallel pitches, and a laser spot is projected from the side of the protrusion formed on the surface to be machined by forming the concave grooves. It is a processing method of projecting and cutting along the strips, and is characterized by cutting the protrusions after or while constructing the concave stripes.

本明細書において、本発明に関し「ニユーセラ
ミツク」とは、セラミツク工業の分野でいう「ニ
ユーセラミツクス」(或いは「フアインセラミツ
クス」或いは「モダンセラミツクス」ともいう)
のことである。このことは特許請求の範囲の記載
についても同じである。このようなセラミツクス
は、セラミツク工業の分野において、在来からよ
く知られている陶磁器を始めとするセラミツクス
をクラシツクセラミツクスまたは伝統的セラミツ
クスと呼ぶのに対し、前記にように呼んでいる。
In this specification, "new ceramics" in the present invention refers to "new ceramics" (also referred to as "fine ceramics" or "modern ceramics") in the field of ceramic industry.
It is about. This also applies to claims. Such ceramics are called as above in the field of ceramic industry, whereas ceramics including ceramics which are well known from the past are called classical ceramics or traditional ceramics.

本発明において加工するニユーセラミツクとし
ては、アルミナ、ジルコニア、ベリリア等の酸化
物系のセラミツクス、ジルコニア、窒化珪素等の
非酸化物系のセラミツクス等を代表的なものとし
てあげげることができる。レーザーとしては一般
的にはCO2レーザーが適用できる。
Typical examples of the new ceramics processed in the present invention include oxide ceramics such as alumina, zirconia and beryllia, and non-oxide ceramics such as zirconia and silicon nitride. As a laser, a CO 2 laser is generally applicable.

発明の効果 本発明におてはレーザスポツトの射投によりニ
ユーセラミツクの被加工面にX軸方向或いはY軸
方向に延びる凹窪条痕とそれが小さな並列ピツチ
の分布状態となるように施すので、この加工によ
りニユーセラミツクの被加工部位は当初の面から
細い突条と化せられ、従つて該凹窪条痕を施した
後、或いは施しつつ、その細い突条部位にこれの
側方からレーザスポツトを突条沿いに射投するこ
とにより、これを容易に切断することができる。
即ち、本発明によれば、ニユーセラミツクの被加
工面をX軸方向或いはY軸方向と、該方向に対す
る側方からの方向とについてレーザー加工するこ
とになり、これ等両方向の加工の複合の結果、加
工原理的に面削り能を持たたないレーザスポツト
の射投を面削りに寄与させ得るのである。斯くし
て本発明によれば、レーザスポツトの射投に対し
加工物を適当な手段、例えば工作機械におけるよ
うな送り手段で相対的に所要の方向に移動させ
て、レーザー加工によりニユーセラミツクの切削
加工を工業的に確立し得るのである。
Effects of the Invention In the present invention, concave grooves extending in the X-axis direction or Y-axis direction are formed on the processed surface of news ceramic by projecting a laser spot so that the grooves are distributed in small parallel pitches. By this processing, the part to be processed of the news ceramic is turned into a thin protrusion from the original surface, and therefore, after or while making the concave marks, the thin protrusion part is made from the side of this. This can be easily cut by projecting a laser spot along the protrusion.
That is, according to the present invention, the surface to be processed of the new ceramic is laser processed in the X-axis direction or Y-axis direction and in a direction from the side of the direction, and the combined result of processing in both directions is Therefore, the projection of a laser spot, which does not have surface cutting ability due to the processing principle, can contribute to surface cutting. Thus, according to the present invention, the workpiece is moved in a desired direction relative to the projection of the laser spot by a suitable means, for example, a feeding means such as in a machine tool, and the new ceramic is cut by laser processing. Processing can be established industrially.

また、本発明の加工法はレーザー加工であるか
ら、それが二方向の複合加工であるにかかわらず
高速加工が可能であり、従来のダイヤモンドバイ
トによる切削加工より、ほぼ倍以上の能率が得ら
れるし、経済面でも好ましい。レーザー加工装置
はダイヤモンドバイトのような消耗品ではなく、
半永久的な耐用性のものであり、或る期間を経過
すればレーザー加工の方がダイヤモンドバイトに
よる加工より経済的である。
In addition, since the processing method of the present invention is laser processing, high-speed processing is possible regardless of whether it is a two-way composite processing, and the efficiency is almost twice as high as that of conventional cutting processing using a diamond cutting tool. However, it is also preferable from an economic point of view. Laser processing equipment is not a consumable item like a diamond tool, but
It has semi-permanent durability, and after a certain period of time, laser processing is more economical than processing with a diamond tool.

本発明に係る工法が、ニユーセラミツクの被加
工面にレーザー加工による前記凹窪条痕入れを施
した後、その条痕入れに基づく突条をレーザー加
工で切断する方式の場合は、一基のレーザーヘツ
ドをそれらの加工に使用することができ、従つて
所要の表面削り取り或いは肉べらし切削等の加工
が装置上、経済的であり、前記凹窪条痕入れを施
しつつ、前記突条切断を行う方式では条痕入れ及
び突条切断が同時進行であるため所要の加工が能
率的である。
If the construction method according to the present invention is a method in which the concave grooves are formed on the processed surface of the news ceramic by laser processing, and then the protrusions based on the grooves are cut by laser processing, one A laser head can be used for these processes, and therefore, the necessary processes such as surface scraping or flattening are economical in terms of equipment, and while making the concave groove marks, it is possible to cut the protrusions. In this method, the required processing is efficient because the grooves are made and the protrusions are cut at the same time.

実施例 以下、本発明の実施例を図面について説明す
る。第1,2図に実施例1を、第3,4図に実施
例2を、第5,6図に実施例3を示した。
Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. Example 1 is shown in FIGS. 1 and 2, Example 2 is shown in FIGS. 3 and 4, and Example 3 is shown in FIGS. 5 and 6.

実施例 1 レーザー発振器(図示せず)よりのレーザビー
ムをレーザーヘツド1における集光レンズ2で集
光し、ニユーセラミツクの板(或いはブロツク)
状加工物3の被加工面にレーザスポツトを射投
し、加工物3或いはレーザヘツド1をX軸方向に
移動させて、該加工物3の被加工面にX軸方向に
延びる凹窪条痕4を刻み入れる。次いで加工物3
或いはレーザーヘツド1をY軸方向に若干、移動
させ、その移動させた位置で再び加工物3あるい
はレーザーヘツド1をX軸方向に移動させて、上
記凹窪条痕4に近接してX軸方向に延びる凹窪条
痕4を施す。以下、同様にして、レーザスポツト
の射投により凹窪条痕4を加工物3の被加工面に
全面的に施す。ここに加工物3の被加工面に凹窪
条痕が小さな並列ピツチの分布状態で施工され
る。次いで、上記凹窪条痕4の施工で加工物3の
被加工面に形成された突条5にレーザーヘツド1
の集光レンズ2よりのレーザービームを反射鏡6
を経て側方から集光し、加工物3或いはレーザー
ヘツド1を反射鏡6と共にX軸方向に移動させ、
斯くして突条5の側方から突条5沿いに射投され
るレーザスポツトにより突条5を切断する。同様
にして突条5を順次切断する。
Example 1 A laser beam from a laser oscillator (not shown) is focused by a condensing lens 2 in a laser head 1, and is focused onto a news ceramic plate (or block).
A laser spot is projected onto the workpiece surface of the shaped workpiece 3, and the workpiece 3 or the laser head 1 is moved in the X-axis direction to create concave groove marks 4 extending in the X-axis direction on the workpiece surface of the workpiece 3. Insert. Next, workpiece 3
Alternatively, move the laser head 1 slightly in the Y-axis direction, move the workpiece 3 or the laser head 1 again in the X-axis direction at the moved position, and place the laser head 1 in the X-axis direction close to the concave groove 4. A concave groove 4 extending from the top to the bottom is formed. Thereafter, in the same manner, concave groove marks 4 are formed entirely on the surface of the workpiece 3 by projecting the laser spot. Here, concave grooves are formed on the surface of the workpiece 3 in a distribution of small parallel pitches. Next, the laser head 1 is attached to the protrusion 5 formed on the surface of the workpiece 3 by forming the recessed groove 4.
The laser beam from the condenser lens 2 is reflected by the mirror 6.
, the workpiece 3 or the laser head 1 is moved in the X-axis direction together with the reflecting mirror 6,
In this way, the protrusion 5 is cut by a laser spot projected along the protrusion 5 from the side of the protrusion 5. Similarly, the protrusions 5 are sequentially cut.

上記レーザー切削加工において、必要に応じレ
ーザーヘツド1の集光レンズ2をアシストガスの
吹付けにより冷却してもよい。該アシストガスは
レーザービームの出射側に流出しないようにす
る。凹窪条痕4はY軸方向に施してもよい。
In the above laser cutting process, the condensing lens 2 of the laser head 1 may be cooled by spraying assist gas, if necessary. The assist gas is prevented from flowing out to the exit side of the laser beam. The concave grooves 4 may be formed in the Y-axis direction.

実施例 2 ニユーセラミツクの円筒型の加工物3′の内空
に、内部に反射鏡7,8を備えた筒状バー9を差
込み、レーザー発振器よりのレーザービームをレ
ーザーヘツド1の集光レンズ2により上記反射鏡
7,8を経て加工物3′の内面に集光し、加工物
3′を軸線の周りの方向へ回転させながら、加工
物3′をレーザーヘツド1の側に送込んで行き、
或いは加工物3′に対しレーザーヘツド1及び筒
状バー9を移動させて行く。すると、円筒型の加
工物3′の内周面にX軸方向に延びる凹窪条痕
4′がスパイラルの形として小さな並列ピツチの
分布状態で施される。然る後、反射鏡10を内蔵
した筒状バー11を加工物3′の内空に差入れて、
レーザービームを集集光レンズ2により反射鏡1
0を経て上記凹窪条痕4′の施工で形された加工
物3′内周面の突条5′にその側方から集光し、前
記と同様な加工物3′の回転、ならびに加工物
3′とレーザーヘツド1及び筒状バー11組合せ
体との相対的な移動を行ない、上記加工物3′内
周面の突条5′を切断する。
Example 2 A cylindrical bar 9 equipped with reflecting mirrors 7 and 8 inside is inserted into the interior of a cylindrical workpiece 3' made of new ceramic, and a laser beam from a laser oscillator is directed to the condensing lens 2 of the laser head 1. The light is focused on the inner surface of the workpiece 3' through the reflecting mirrors 7 and 8, and the workpiece 3' is sent toward the laser head 1 while rotating the workpiece 3' in the direction around the axis. ,
Alternatively, the laser head 1 and the cylindrical bar 9 are moved relative to the workpiece 3'. Then, concave grooves 4' extending in the X-axis direction are formed in a spiral shape in a distribution of small parallel pitches on the inner peripheral surface of the cylindrical workpiece 3'. After that, a cylindrical bar 11 with a built-in reflector 10 is inserted into the interior of the workpiece 3',
The laser beam is focused on the reflecting mirror 1 by the condensing lens 2.
0, the light is focused from the side onto the protrusion 5' on the inner circumferential surface of the workpiece 3' formed by creating the concave streaks 4', and is rotated and processed in the same manner as described above. The object 3' and the combination of the laser head 1 and the cylindrical bar 11 are moved relative to each other to cut the protrusion 5' on the inner peripheral surface of the workpiece 3'.

実施例 3 ニユーセラミツクの円筒或いは丸棒状の加工物
3″を軸線の周りの方向へ回転させながら前進さ
せ(或いは加工物3″に対しレーザーヘツド1を
移動させ)、レーザーヘツド1の集光レンズ2に
より加工物3″の外面にレーザービームを集光す
る。斯くして、加工物3″の外周面にX軸方向に
延びる凹窪条痕4″がスパイラルの形として小さ
な並列ピツチの分布状態で施され、それにより突
条5″が加工物3″の外周面に形成される。次いで
加工物3″外周面の突条5″にレーザーヘツド1の
集光レンズ2により反射鏡12を経てレーザービ
ームを側方から集光し、加工物3″の上記と同様
な回転、ならびに加工物3″とレーザーヘツド1
の相対的前進を行ない、加工物3″外周面の突条
5″を切断する。
Example 3 A cylindrical or round bar-shaped workpiece 3'' of news ceramic is advanced while rotating in a direction around the axis (or the laser head 1 is moved relative to the workpiece 3''), and the condensing lens of the laser head 1 is moved forward. 2, the laser beam is focused on the outer surface of the workpiece 3''.In this way, the concave grooves 4'' extending in the X-axis direction on the outer peripheral surface of the workpiece 3'' are distributed in a spiral shape with small parallel pitches. As a result, a protrusion 5'' is formed on the outer circumferential surface of the workpiece 3''. Next, the protrusion 5'' on the outer circumference of the workpiece 3'' is exposed to the condenser lens 2 of the laser head 1 via the reflecting mirror 12. The laser beam is focused from the side, and the workpiece 3'' is rotated in the same manner as described above, and the workpiece 3'' and the laser head 1 are
, and cut the protrusion 5'' on the outer circumferential surface of the workpiece 3''.

以上に述べた実施例は何れも凹窪条痕の施工に
次いで、それによる突条を切断するものである
が、突条の切断加工を凹窪条痕の施工と同時に行
なつても構わない。
In all of the embodiments described above, the protrusions are cut after the concave grooves are formed, but the process of cutting the protrusions may be carried out at the same time as the concave and concave lines. .

加工物の加工された面はダイヤモンド砥石で仕
上げ研削を施してもよい。
The machined surface of the workpiece may be finished ground with a diamond grindstone.

【図面の簡単な説明】[Brief explanation of the drawing]

第1,2図は本発明の一実施例を、第3,4図
は本発明の実施例の他例を、第5,6図は本発明
の更に他の実施例を示し、第1,3,5図がそれ
ぞれ凹窪条痕の施工工程であり、第2,4,6図
がそれぞれ突条の切断工程を示している。 1はレーザーヘツド1、2は集光レンズ、3,
3′,3″は加工物、4,4′,4″は凹窪条痕、
5,5′,5″は突条、6,7,8,10,12は
反射鏡、9,11は筒状バー。
Figures 1 and 2 show one embodiment of the present invention, Figures 3 and 4 show other embodiments of the invention, and Figures 5 and 6 show still other embodiments of the invention. Figures 3 and 5 respectively show the construction process of the concave groove marks, and Figures 2, 4, and 6 respectively show the cutting process of the protrusions. 1 is a laser head 1, 2 is a condensing lens, 3,
3′, 3″ are processed products, 4, 4′, 4″ are concave grooves,
5, 5', 5'' are protrusions, 6, 7, 8, 10, 12 are reflectors, and 9, 11 are cylindrical bars.

Claims (1)

【特許請求の範囲】 1 ニユーセラミツクの被加工面に、レーザスポ
ツトの射投により左右方向或いは前後方向に延び
る凹窪条痕を、それが小さな並列ピツチの分布状
態となるよう施した後、該凹窪条痕の施工で上記
被加工面に形成される突条を、それにその側方か
らレーザスポツトを突条沿いに射投して、切断す
ることを特徴とするニユーセラミツクのレーザー
切削加工法。 2 ニユーセラミツクの被加工面に、レーザスポ
ツトの射投により左右方向或いは前後方向に延び
る凹窪条痕を、それが小さな並列ピツチの分布状
態となるよう施し、該凹窪条痕の施工で上記被加
工面に形成される突条を、それにその側方からレ
ーザスポツトを突条沿いに射投して、切断するニ
ユーセラミツクのレーザー切削加工法であつて、
上記凹窪条痕の施工を行いつつ、上記突条切断を
行うことを特徴とするニユーセラミツクのレーザ
ー切削加工法。
[Claims] 1. After making concave marks extending in the left-right direction or front-back direction by projecting a laser spot on the processed surface of news ceramic so that the marks are distributed in small parallel pitches, A laser cutting method for new ceramics, characterized in that the protrusions formed on the surface to be machined by creating concave grooves are cut by projecting a laser spot along the protrusions from the side thereof. . 2. On the processed surface of the new ceramic, concave lines extending in the left-right direction or front-back direction are made by projecting a laser spot so that the concave lines are distributed in small parallel pitches. A laser cutting method for new ceramics in which a protrusion formed on a surface to be processed is cut by projecting a laser spot along the protrusion from the side thereof,
A laser cutting method for new ceramics, characterized in that the protruding stripes are cut while the concave stripes are being constructed.
JP59086910A 1984-04-27 1984-04-27 Method of laser cutting of new ceramic Granted JPS60231588A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59086910A JPS60231588A (en) 1984-04-27 1984-04-27 Method of laser cutting of new ceramic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59086910A JPS60231588A (en) 1984-04-27 1984-04-27 Method of laser cutting of new ceramic

Publications (2)

Publication Number Publication Date
JPS60231588A JPS60231588A (en) 1985-11-18
JPH036873B2 true JPH036873B2 (en) 1991-01-31

Family

ID=13899993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59086910A Granted JPS60231588A (en) 1984-04-27 1984-04-27 Method of laser cutting of new ceramic

Country Status (1)

Country Link
JP (1) JPS60231588A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142694A (en) * 1988-11-19 1990-05-31 Nippon Steel Corp Laser beam machining method for fine ceramics
JP2001263521A (en) * 2000-03-17 2001-09-26 Denso Corp Electromagnetic drive, fluid control valve using it, and manufacturing method for electromagnetic drive
JP5902069B2 (en) * 2012-08-23 2016-04-13 Ntn株式会社 Workpiece processing method and processing apparatus

Also Published As

Publication number Publication date
JPS60231588A (en) 1985-11-18

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