JPH0350329U - - Google Patents
Info
- Publication number
- JPH0350329U JPH0350329U JP10972489U JP10972489U JPH0350329U JP H0350329 U JPH0350329 U JP H0350329U JP 10972489 U JP10972489 U JP 10972489U JP 10972489 U JP10972489 U JP 10972489U JP H0350329 U JPH0350329 U JP H0350329U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- water washing
- wafer
- treatment
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000012498 ultrapure water Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 238000012993 chemical processing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10972489U JPH0350329U (zh) | 1989-09-21 | 1989-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10972489U JPH0350329U (zh) | 1989-09-21 | 1989-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0350329U true JPH0350329U (zh) | 1991-05-16 |
Family
ID=31658294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10972489U Pending JPH0350329U (zh) | 1989-09-21 | 1989-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0350329U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170198929A1 (en) * | 2010-06-30 | 2017-07-13 | Koken Ltd. | Air blowing device |
-
1989
- 1989-09-21 JP JP10972489U patent/JPH0350329U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170198929A1 (en) * | 2010-06-30 | 2017-07-13 | Koken Ltd. | Air blowing device |
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