JPH0340511B2 - - Google Patents
Info
- Publication number
- JPH0340511B2 JPH0340511B2 JP60214570A JP21457085A JPH0340511B2 JP H0340511 B2 JPH0340511 B2 JP H0340511B2 JP 60214570 A JP60214570 A JP 60214570A JP 21457085 A JP21457085 A JP 21457085A JP H0340511 B2 JPH0340511 B2 JP H0340511B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin film
- address
- address line
- lines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 56
- 239000010409 thin film Substances 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000010407 anodic oxide Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 7
- 239000011229 interlayer Substances 0.000 claims description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Liquid Crystal (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60214570A JPS6276545A (ja) | 1985-09-30 | 1985-09-30 | 表示装置用駆動回路基板 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60214570A JPS6276545A (ja) | 1985-09-30 | 1985-09-30 | 表示装置用駆動回路基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6276545A JPS6276545A (ja) | 1987-04-08 |
JPH0340511B2 true JPH0340511B2 (ko) | 1991-06-19 |
Family
ID=16657900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60214570A Granted JPS6276545A (ja) | 1985-09-30 | 1985-09-30 | 表示装置用駆動回路基板 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6276545A (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2620240B2 (ja) | 1987-06-10 | 1997-06-11 | 株式会社日立製作所 | 液晶表示装置 |
JP2786628B2 (ja) * | 1987-10-15 | 1998-08-13 | シャープ株式会社 | 液晶パネルの電極構造 |
JPH0816758B2 (ja) * | 1989-02-17 | 1996-02-21 | 松下電器産業株式会社 | 液晶画像表示装置およびその製造方法 |
US5485019A (en) | 1992-02-05 | 1996-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for forming the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54154289A (en) * | 1978-05-26 | 1979-12-05 | Matsushita Electric Ind Co Ltd | Manufacture of thin-film transistor array |
-
1985
- 1985-09-30 JP JP60214570A patent/JPS6276545A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54154289A (en) * | 1978-05-26 | 1979-12-05 | Matsushita Electric Ind Co Ltd | Manufacture of thin-film transistor array |
Also Published As
Publication number | Publication date |
---|---|
JPS6276545A (ja) | 1987-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |