JPH03291508A - X-ray inspection instrument - Google Patents

Abstract

PURPOSE:To detect a defect of a sample speedily by irradiating a sample with X rays from two X-ray sources and observing fluoroscopic image projected on a TV monitor through spectacles which have visual fields opened and closed alternately in synchronism with the rotation of rotary anodes. CONSTITUTION:Electrons emitted by cathodes 13a and 13b of an X-ray tube are accelerated with a high voltage applied between the rotary anodes 15(15a and 15b) to becomes electron beams 14a and 14b, which strike on the anodes 15. Consequently, X rays 6a which are generated by the anodes 15 first is transmitted through the sample 5 and converted by a scintillator plate 2 into visible light, which is projected on the TV monitor as a fluorosopic image photographed by a video camera 3. Further, the rotational position of the anodes 15 is detected by a sensor 17 through a motor 16 and the right-side visual field of the spectacles 18 is cut off according to the position information. Further, the anodes 15 are rotated and the sample 6 is irradiated with X rays 16b so that the image is viewed from the other position. At this time, the respective fluoroscopic images seem to be observed by an observer 19 at the same time, so the defect in the sample can be accurately detected.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は例えば樹脂中に封止され、を子部品を薪束状
に組立てた電子回路のような立体構造を有するモジー−
ル中にあって欠陥を有する電子部品を非破壊で検出する
Ｘ線検査装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a module that is sealed in a resin and has a three-dimensional structure like an electronic circuit in which child parts are assembled into a bundle of wood.
The present invention relates to an X-ray inspection device that non-destructively detects defective electronic components in a cell.

〔従来の技術〕[Conventional technology]

第３図は従来のＸ線検査装置を示す図であり、図におい
て（１）はＸ線管、（２）はシンチレータ。FIG. 3 is a diagram showing a conventional X-ray inspection apparatus, in which (1) is an X-ray tube and (2) is a scintillator.

（３）はビデオカメラ、（４）はＴＶモニタ、　（５１
１ｆｉ試料（６）はＸ線である。(3) is a video camera, (4) is a TV monitor, (51
1fi sample (6) is an X-ray.

また、第４図は試料（５）の詳細構造模型と透視画偉で
あシ、（７）は欠陥部品を含む不透明な封止樹脂、（８
）は電子部品、（９）は欠陥のある電子部品α〔はＡ面
から見たＸ線像、０はＢ面から見たＸ５ｉｌ儂である。In addition, Fig. 4 shows a detailed structure model and a perspective view of sample (5), (7) shows the opaque sealing resin containing defective parts, and (8)
) is an electronic component, (9) is a defective electronic component α [is an X-ray image seen from the A side, and 0 is an X5il image seen from the B side.

従来のＸ線検査装置は上記のように構成されたとえば試
料（５）をシンチレータ板（２）の上に置き、　　Ｘ、
Ｖｉｉ！１ｉｒ（１１よシ発生し７’ｈＸＭ（６１をｔ
ｌ（５１に照射することＫよシ、試料（５）の内部を透
過したＸ線はシンチレータ板（２）によシ、第４図の−
のよう表可視光の映倫に変換される。この映倫はビデオ
カメラ（３）で撮影され、ＴＶモニタ（４）に映し出さ
れ、試料（５）の内部の欠陥の有無等を観察によシ検出
するものであるっ なお、ここで言う欠陥とは電子部品の割れ。A conventional X-ray inspection apparatus is configured as described above, and for example, a sample (5) is placed on a scintillator plate (2),
Vii! 1ir (occurs from 11 and 7'hXM (61 from t)
The X-rays transmitted through the sample (5) pass through the scintillator plate (2), as shown in Figure 4.
The table is converted into visible light. This film is photographed with a video camera (3) and displayed on a TV monitor (4) to detect the presence or absence of defects inside the sample (5) through observation. is a crack in an electronic component.

欠け９曲シ等あるいは封止樹脂（７）の中の巣等の機械
的欠陥である。This is a mechanical defect such as a chipped corner or a cavity in the sealing resin (7).

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記のような従来のＸ線検査装置では、第５図に示すよ
うに複数の電子部品が束ねである試料（５）の場合、欠
陥のある部品（８）が他の電子部品（９）と１９合って
しまい第６図のｘｙｔａｃ＊ａａｕのように２前後どち
らの部品に欠陥を有しているのか分からないため、試料
（５）の位置を外部から回転あるいは傾斜させ欠陥を有
する部品（８）の位置を検出するため多大な゛時間を費
してしまう欠点があった。In the conventional X-ray inspection apparatus as described above, when the sample (5) is a bundle of multiple electronic components as shown in Fig. 5, the defective component (8) is separated from other electronic components (9). 19, as in xytac*aau in FIG. ) has the disadvantage that it takes a lot of time to detect the position.

この発明はかかる課題を解消するためになされたもので
試料（５）の位置を外部から変化させることなく、かつ
立体的に観察するここのできるＸ線検査装置を得ること
を目的とする。The present invention has been made to solve this problem, and aims to provide an X-ray inspection apparatus capable of three-dimensionally observing a sample (5) without changing the position of the sample (5) from the outside.

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係るＸ線検査装置はＸ線管内に切れ込みを交
互に有する２個の回転陽極を有し。The X-ray inspection apparatus according to the present invention has two rotating anodes having alternating cuts in the X-ray tube.

これら回転陽極は回転することで、その焦点に電子線を
交互に照射し、その焦点から左右交互ＫＸ線を発生させ
るとともに、このＸ線によるＸａ像をビデオカメラで撮
影し、この映像をＷモニタに映し出すと同時に、焦点の
切シ換えに同期して、左右の視野が交互に開閉するｗ＆
鋼を通してＴＶモニタを観察するものである。By rotating these rotating anodes, electron beams are alternately irradiated to the focal point, and left and right KX-rays are generated alternately from the focal point.The Xa image of this X-ray is photographed with a video camera, and this image is displayed on the W monitor. At the same time, the left and right fields of view alternately open and close in synchronization with the switching of the focus.
The TV monitor is viewed through steel.

〔作用〕[Effect]

この発明においては、適度に接近させた２つのＸ線源か
ら試料にＸ線を左右交互に照射させることにより、外部
から試料を回転あるいけ傾斜することなく即座に樹脂封
止モジュール中にある欠陥部品の位置を検出することが
できろうまた従来できなかったＸ線ＴＶ画偉の立体視も
可能である。In this invention, by irradiating the sample with X-rays alternately on the left and right sides from two X-ray sources placed appropriately close to each other, defects in the resin-sealed module can be detected immediately without rotating or tilting the sample from the outside. It is possible to detect the position of parts, and it is also possible to perform stereoscopic viewing using X-ray TV images, which was not possible in the past.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第１図において（２）〜（６）は上記従来装置と全く同
一のものであり、（２）はこの発明で用いるＸ線管、Ｑ
３はＸ線管■の中にあって電子を発生するフィラメント
を有する陰極、α４は陰極υから発生する電子線、Ｑ１
０はＸ線管四の外部よ多回転することができる左右交互
に切れ込みのある２つの回転陽極１ａＢは回転陽極（至
）を回転させるモータ、いは回転陽極（至）の回転位置
を検出するセンサ、（２）は回転陽極（至）の位置に同
期して左右の視野が交互に遮られる眼伊、α９け眼伊（
至）をかけてモニタ（４）を見る観察者である。また、
第２図は回転陽極（至）の回転と電子線が照射されＸ線
を発生する点（以下焦点という。）と＠ｇ＃、（至）の
動作時の関係を示す図であシ、■はＸ線（６ａ）（６ｂ
）の各々に対応した焦点である。また、第３図（ａ）は
第２図（、）の動作時における眼＃（至）の状態を示し
、同様に第３図（ｂ）は第２図（ｂ）の動作に対応して
いる。In FIG. 1, (2) to (6) are completely the same as the conventional device described above, and (2) is the X-ray tube used in this invention, Q
3 is a cathode located inside the X-ray tube ■ and has a filament that generates electrons, α4 is an electron beam generated from the cathode υ, Q1
0 is the two rotating anodes 1aB that can be rotated many times from the outside of the X-ray tube 4 and has notches on the left and right alternately. 1aB is a motor that rotates the rotating anode (to), or detects the rotational position of the rotating anode (to). The sensor (2) is an eye lens whose left and right visual fields are alternately blocked in synchronization with the position of the rotating anode (to), and an α9 eye eye (
This is an observer who looks at the monitor (4) with the monitor (4) on. Also,
Figure 2 is a diagram showing the relationship between the rotation of the rotating anode (to), the point where the electron beam is irradiated and generates X-rays (hereinafter referred to as the focal point), and @g#, (to) during operation. are X-rays (6a) (6b
). Also, Fig. 3(a) shows the state of eye #(to) during the operation of Fig. 2(,), and similarly, Fig. 3(b) corresponds to the operation of Fig. 2(b). There is.

以下、動作について説明する。陰極（至）から発生した
電子は回転陽極（至）この間に印加された高電圧により
加速され電子線α４となって回転陽極Ｑ５に障突する。The operation will be explained below. Electrons generated from the cathode (to) are accelerated by a high voltage applied between the rotating anode (to), become an electron beam α4, and impinge on the rotating anode Q5.

この結果、最初に回転陽極（至）の焦点（２０ａ）から
発生したＸ線（６ａ）が試料（５）に照射され、試料（
５）の内部を透過しＸ線（６ａ）はシンチレータ板（２
）により可視光に変換され、ビデオカメラ（３）によっ
て撮影されＸ線透視画像となってＴＶモニタ（４）に映
し出される。一方モータ（至）に接続され回転する回転
陽極Ｑ５はモータ（至）の回転位置をセンサα７１によ
り検出され、この位置情報信号は眼伊（至）に送られる
。＠ｆｉｌ（至）は観察者α９の眼にかけられ、第２図
（ａ）のようにセンサ０からの信号に従って観察者（至
）の右側の視野を遮る。この時、観察者Ｑ９は従来のよ
うな試料（５）に対して垂直下で見ていたＸ線画像より
若干試料（５）を傾けた画像を左眼で見ていることにな
る。さらに回転陽極ａｓＶｉ回転し１次に第２図（ｂ）
に示すように焦点（２０ｂ）から発生したＸ線（ｘｓｂ
）が試料（５）に照射され同様に観察者（至）は試料（
５）をもう一方の位置から傾けた画偉を見ることになる
。上記の動作は比較的短時間に繰シ返される。この時、
観察者（至）には各々のＸ線透視画像が両眼で同時に観
察しているように見えるためステレオ算真による立体視
と同等の効果が生じＸ線画偉は立体映倫として観察され
る。As a result, the sample (5) is first irradiated with the X-rays (6a) generated from the focal point (20a) of the rotating anode (total), and the sample (5) is
5), the X-rays (6a) pass through the scintillator plate (2
) is converted into visible light, which is photographed by a video camera (3) and displayed as an X-ray fluoroscopic image on a TV monitor (4). On the other hand, the rotational position of the rotating anode Q5 connected to the motor (to) is detected by a sensor α71, and this position information signal is sent to the eye (to). @fil (to) is applied to the eye of the observer α9, and as shown in FIG. 2(a), the right field of view of the observer (to) is blocked in accordance with the signal from the sensor 0. At this time, the observer Q9 is viewing with his left eye an image with the sample (5) slightly tilted, compared to the conventional X-ray image viewed perpendicular to the sample (5). Furthermore, the rotating anode asVi rotates to the first position as shown in Fig. 2(b).
As shown in the figure, the X-rays (xsb) generated from the focal point (20b)
) is irradiated onto the sample (5), and the observer (to) similarly irradiates the sample (
5) will be seen tilted from the other position. The above operations are repeated in a relatively short period of time. At this time,
Since each X-ray fluoroscopic image appears to the observer to be viewed simultaneously with both eyes, the effect is equivalent to stereoscopic vision using Stereo Sanshin, and the X-ray image is observed as a stereoscopic image.

上記のように構成されたＸ線検査装置はＸ線透視画像を
遠近感のある画儂として観察できるため、複数の電子部
品が束ねてあり不透明な樹脂で封止されたモジュール中
にある欠陥部品の発見あるいはその位置の検出を即座に
行うことが可能となる。The X-ray inspection device configured as described above can observe X-ray fluoroscopic images as paintings with a sense of perspective, so it is possible to detect defective parts in a module that is made up of multiple electronic components and sealed with opaque resin. It becomes possible to discover or detect the location immediately.

なお、上記実施例では１回転陽極（至）を左右交互に切
れ込みのある２対の笠歯車状の金属を用いたが、陰極（
至）からの電子線α４を交互に受けるものであればよく
、またセンサ０はモータ（至）に接続されたものを用い
たが１回転陽極（至）の回転位置が検出されればどの場
所にあってよく、ま７’ｊＴＶモニタ（４）はビデオカ
メラ（３）と一体となっていてもよく、またモータ（至
）はＸ線管（至）の外部に設けたがＸ線管（至）の中に
あってもよい。In the above example, two pairs of metal gears in the shape of a hat gear with cuts alternately on the left and right were used as the anode (to) for one rotation, but the cathode (to)
It is sufficient that the sensor 0 alternately receives the electron beam α4 from the motor (to), and sensor 0 is connected to the motor (to), but if the rotation position of the anode (to) is detected once The TV monitor (4) may be integrated with the video camera (3), and the motor (to) may be installed outside the X-ray tube (to), but the (to) may be included.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば適度に接近させた２つ
のＸ線源から回転陽極を回転させ試料にＸ線を左右交互
に照射し、かつＴＶモニタに映し出したそのＸ線透視偉
を回転陽極の回転に同期させ左右交互に視野を開閉する
眼鏡を通して観察するように構成したので、観察者はそ
のＸ線像を立体的に見ることができ、即座に試料内の欠
陥を発見しその位置を正確に把握できる効果がある。As described above, according to the present invention, a rotating anode is rotated from two X-ray sources placed appropriately close to each other to irradiate a sample with X-rays alternately on the left and right, and the X-ray fluoroscope displayed on a TV monitor is rotated. The X-ray image is viewed through glasses that alternately open and close the left and right fields of view in synchronization with the rotation of the anode, allowing the observer to view the X-ray image three-dimensionally, instantly spotting defects in the sample, and determining their location. This has the effect of accurately understanding the

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの発明による一実施例によるＸ線検査装置を
示す図、第２図は回転陽極の回転と焦点と眼鏡の動作時
の関係を示す図、第３図は第２図の動作に対応したＴＶ
モニタと眼鏡と観察者の関係を示す図、第４図は従来の
Ｘ線検査装置を示す図、第５図は試料の詳細構造を示す
図、第６図は試料の透視画像を示す図である。 図において、（１）は従来のＸ線管、（２）はシンチレ
ータ＆、　（３１はビデオカメラ、（４）はＴＶモニタ
、（５）は試料、（６）はＸ線、（７）は封止樹脂、（
８）は欠陥のある電子部品、（９）は他の正常な電子部
品。 αｌはＡ面から見たＸ！！傷、■は８面から見たＸ線像
、０３は本発明のＸ線管、Ｑ３は陰極、α４は電子線、
Ｑ５は回転陽極、＠はモータ、αηはセンサ、鰺は眼鏡
、α９は観察者、（至）はＸ線源の焦点である。 なお、各図中同一符号は同−又は相当部分を示す。Fig. 1 is a diagram showing an X-ray inspection apparatus according to an embodiment of the present invention, Fig. 2 is a diagram showing the relationship between the rotation of the rotating anode, the focus, and the operation of the glasses, and Fig. 3 is a diagram showing the operation of Fig. 2. Compatible TV
Figure 4 is a diagram showing the relationship between the monitor, glasses, and the observer, Figure 4 is a diagram showing a conventional X-ray inspection device, Figure 5 is a diagram showing the detailed structure of the sample, and Figure 6 is a diagram showing a fluoroscopic image of the specimen. be. In the figure, (1) is a conventional X-ray tube, (2) is a scintillator, (31 is a video camera, (4) is a TV monitor, (5) is a sample, (6) is an X-ray tube, and (7) is a Sealing resin, (
8) is a defective electronic component, and (9) is another normal electronic component. αl is X seen from side A! ! Scratches, ■ are X-ray images seen from 8 sides, 03 is the X-ray tube of the present invention, Q3 is the cathode, α4 is the electron beam,
Q5 is a rotating anode, @ is a motor, αη is a sensor, Saba is a pair of glasses, α9 is an observer, and (to) is a focal point of an X-ray source. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】 電子部品の内部構造をＸ線を用い査する装 置において、２つの焦点をもつＸ線管の中にあって、電
子を発生するフィラメントを有する２つの陰極と、これ
ら陰極から照射される電子線を受けてＸ線を発生する切
れ込みを交互に有する２個の回転陽極と、これら回転陽
極を回転させるモータと、このモータに接続され回転陽
極の回転位置を検出するセンサと、Ｘ線管の下にあって
Ｘ線を可視光に変換するシンチレータ板と、このシンチ
レータ板の下にあってＸ線像を撮影するビデオカメラと
このビデオカメラに接続されＸ線像を映し出すＴＶモニ
タと、このＴＶモニタを見る観察者の眼の前にあって回
転陽極の回転位置を検出するセンサに接続されセンサか
らの信号によって観察者の左右の視野を交互に遮る眼鏡
とを備えたＸ線検査装置。[Claims] A device for inspecting the internal structure of an electronic component using X-rays, which includes two cathodes having a filament that generates electrons in an X-ray tube with two focal points, and Two rotating anodes having alternating notches that receive irradiated electron beams and generate X-rays, a motor that rotates these rotating anodes, and a sensor connected to this motor that detects the rotational position of the rotating anodes. A scintillator plate located below the X-ray tube that converts X-rays into visible light, a video camera located below this scintillator plate that photographs the X-ray image, and a TV monitor connected to the video camera that displays the X-ray image. and glasses that are connected to a sensor that detects the rotational position of the rotating anode and that are placed in front of the eyes of the observer viewing the TV monitor, and that alternately block the left and right visual fields of the observer based on the signals from the sensor. Inspection equipment.