JPH0293353A - X-ray inspection apparatus - Google Patents
X-ray inspection apparatusInfo
- Publication number
- JPH0293353A JPH0293353A JP63246353A JP24635388A JPH0293353A JP H0293353 A JPH0293353 A JP H0293353A JP 63246353 A JP63246353 A JP 63246353A JP 24635388 A JP24635388 A JP 24635388A JP H0293353 A JPH0293353 A JP H0293353A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- shutter
- rays
- image
- glasses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title claims description 11
- 239000011521 glass Substances 0.000 claims abstract description 11
- 230000000007 visual effect Effects 0.000 claims description 3
- 230000002950 deficient Effects 0.000 abstract description 9
- 230000001360 synchronised effect Effects 0.000 abstract description 2
- 230000000903 blocking effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は９例えば樹脂中に封止され、電子部品を薪束
状に組立てた電子回路のような立体構造を有するモジュ
ール中にあって欠陥を有する電子部品を非破壊で検出す
るＸ線検査装置に関するものである。Detailed Description of the Invention [Industrial Application Field] The present invention is directed to a module that is sealed in a resin and has a three-dimensional structure such as an electronic circuit in which electronic components are assembled like a bundle of firewood. The present invention relates to an X-ray inspection device that non-destructively detects electronic components having
第３図は従来のＸ線検査装置を示す図であり。 FIG. 3 is a diagram showing a conventional X-ray inspection device.
図において＋１１はＸ線管、（２）はシンチレータ、（
３）はビデオカメラ、（４）はＴＶモニタ、（５）は試
料、（６）はＸ線である。In the figure, +11 is an X-ray tube, (2) is a scintillator, (
3) is a video camera, (4) is a TV monitor, (5) is a sample, and (6) is an X-ray.
また、第４図は試料（５）の詳細構造模型と透視画像で
あり、（７）は欠陥部品を含む不透明な封止樹脂。Moreover, FIG. 4 shows a detailed structural model and perspective image of sample (5), and (7) shows an opaque sealing resin containing defective parts.
（８）は電子部品、（９）は欠陥のある電子部品、ＱＩ
Ｖｉ、Ａ面から見たＸ線像、（ｌυはＢ面から見たＸ線
像である。(8) is an electronic component, (9) is a defective electronic component, QI
Vi is an X-ray image seen from the A plane, (lυ is an X-ray image seen from the B plane.
従来のＸ線検査装置は上記のように構成され。A conventional X-ray inspection apparatus is configured as described above.
たとえば試料（５）をシンチレータ板（２）の上に置き
。For example, a sample (5) is placed on a scintillator plate (2).
Ｘ線管（りより発生したＸ線（６）を試料（５）に照射
することによシ、試料（５）の内部を透過したＸ線（６
）はシンチレータ板（２）により、第４図のＱＧのよう
な可視光の映像に変換され、この映像はビデオカメラ（
３）で撮影されＴＶモニタ（４）に撮し出され、試料（
５）の内部の欠陥の有無等を観察により検出するもので
ある。By irradiating the sample (5) with X-rays (6) generated from the X-ray tube, the X-rays (6) that have passed through the inside of the sample (5) are
) is converted by the scintillator plate (2) into a visible light image like QG in Figure 4, and this image is captured by a video camera (
3), the image is displayed on the TV monitor (4), and the sample (
5) The presence or absence of internal defects is detected by observation.
なお、ここで言う欠陥とは電子部品の割れ、欠け９曲り
等あるいけ封と樹脂（７）中の巣等の機械的欠陥である
。Note that the defects referred to here include mechanical defects such as cracks in electronic parts, chips, bends, etc., and cavities in the seal and resin (7).
上記のような従来のＸ線検査装置では９図に示すように
複数の電子部品が束ねである試料（５）では。In the conventional X-ray inspection apparatus as described above, as shown in FIG. 9, a sample (5) in which a plurality of electronic components are bundled.
欠陥のある部品（８）が他の電子部品（９）と重り合っ
てしまいＸ線源ｎｏ ｕのように０前後どちらの部品に
欠陥を有しているのか分からないため試料（５）の位置
を外部から回転あるいは傾斜させ欠陥を有する部品（８
）の位置を検出するため多大な時間を費してしまう欠点
があった。The defective component (8) overlaps with another electronic component (9), and it is not known which component is defective, such as the X-ray source no u, so the position of the sample (5) is Rotate or tilt the part from the outside to remove the defective part (8
) has the disadvantage that it takes a lot of time to detect the position.
この発明はかかる欠点を解消するためになされたもので
試料（５）の位置を外部から変化させることなく、かつ
立体的Ｋｍ察することの出来るＸ線検査装置を得ること
を目的とする。The present invention has been made to eliminate such drawbacks, and an object of the present invention is to provide an X-ray inspection apparatus that can detect three-dimensional Km without changing the position of the sample (5) from the outside.
この発明に係るＸ線検査装置は、Ｘ＠源を２個有しこの
Ｘ線源からのＸ線をシャッタによって左右交互に遮ると
ともに、 ｘａＩ像をビデオカメラで撮影し、この映傭
をＴＶモニタに映し出すと同時に、シャッタの開閉に同
期して左右の視野が交互に開閉する［１１１鏡を通して
ＴＶモニタを観察するものである。The X-ray inspection apparatus according to the present invention has two X-ray sources, and uses a shutter to alternately block the X-rays from the X-ray sources on the left and right sides, and shoots an xaI image with a video camera, which is then displayed on a TV monitor. At the same time, the left and right visual fields open and close alternately in synchronization with the opening and closing of the shutter.[111] The TV monitor is viewed through a mirror.
この発明においては、適度に接近させた２つのＸ線源か
ら試料にＸ線を左右交互に照射させることにより、外部
から試料を回転あるいは傾斜することなく、即座にモジ
ュール中にある欠陥部品の位置を検出することができる
。かつまた従来出来なかったＸｌＴＶ画像の立体視も可
能である。In this invention, by irradiating the sample with X-rays alternately on the left and right sides from two X-ray sources placed appropriately close to each other, defective parts in the module can be immediately located without rotating or tilting the sample from the outside. can be detected. Furthermore, stereoscopic viewing of XlTV images, which has not been possible in the past, is also possible.
以下、この発明の一実施例を図について説明する。第１
図において、（１）から＋ｅ＋は上記従来装置と全く同
一のものであり、０３はモータ、 （１３はモータαり
で回転しＸ線を遮へいする金属性のシャッタ。An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, (1) to +e+ are exactly the same as the conventional device described above, 03 is a motor, and (13 is a metal shutter that rotates with the motor α and shields X-rays.
＋１４１はシャッタ０の回転位置を検出するセンサ、α
９はシャッタ（８１の位置に同期して左右の視野が交互
に遮られる眼鏡である。また、第２図はシャッタα３の
回転とこれに遮られるＸ線管１１＋のＸ線発生点（以下
焦点という）と眼鏡ａりの動作時の関係を示す図であり
、 ａｅはＸ線？１？ （１ａ’）（１ｂ）の各々の焦
点。+141 is a sensor that detects the rotational position of shutter 0, α
9 is a pair of glasses that alternately blocks the left and right visual fields in synchronization with the position of the shutter (81). Fig. 2 also shows the rotation of the shutter α3 and the X-ray generation point of the 1) is a diagram showing the relationship between the glasses (1) and (1b) during operation, and ae is the focus of each of the X-rays (1a') and (1b).
αηは観察者である。αη is the observer.
以下動作について説明する。最初にＸ線管（１）から発
生したＸ線（６）はモータ（７）により回転するシャッ
タ０３により遮られ、第２図（ａ）に示すように焦点（
１６ａ）から発生したＸ線（６ａ）が試料（５）に照射
され。The operation will be explained below. First, the X-rays (6) generated from the X-ray tube (1) are blocked by the shutter 03 rotated by the motor (7), and are brought to the focal point (
X-rays (6a) generated from 16a) are irradiated onto the sample (5).
試料（５）の内部を透過したＸ線（６ａ）はシンチレー
タ板（２）により可視光に変換され、ビデオカメラ＋３
１によって撮影されＸ線透視画像となってＴＶモニタ（
４）に映し出される。一方モータ０ｚに接続されたセン
サＱ４１によってモータ（８）の回転位置が検出され。The X-rays (6a) that have passed through the sample (5) are converted into visible light by the scintillator plate (2), and the video camera +3
1, the image is taken as an X-ray fluoroscopic image and displayed on the TV monitor (
4). On the other hand, the rotational position of the motor (8) is detected by a sensor Q41 connected to the motor 0z.
この信号は眼鏡ａＳに送られる。眼鏡（Ｉ９は観察者α
ηの眼にかけられ、第２図（ａ）のようにセンサ（９）
からの信号に従って観察者αＤの片側の眼を遮る。この
時、観察者αＤは従来のような試料（５）Ｋ対して垂直
下で見ていたＸ線画像より若干試料（５）を傾けた画像
を片眼で見ている事になる。This signal is sent to the glasses aS. Glasses (I9 is observer α)
The sensor (9) is placed on the eye of η, as shown in Fig. 2(a).
One eye of the observer αD is blocked according to the signal from the observer αD. At this time, the observer αD is viewing an image of the sample (5) slightly tilted with one eye, rather than the conventional X-ray image viewed perpendicular to the sample (5) K.
さらにシャッタ０３は回転し１次に第２図（ｂ）に示す
よりに焦点（１６ｂ）から発生したＸ線（６ｂ）が試料
（５）に照射され同様に観察者αηは試料（５）をもう
一方の位置から傾けた画像を見ることになる。上記の動
作は比較的短時間に繰シ返される。この時、観察者α力
には各々のＸ線透視画ＩＩ！が両眼で同時に観察してい
るように見えるためステレオ写真による立体視と同等の
効果によ）Ｘａ両画像立体映像として観察される。Further, the shutter 03 rotates, and as shown in FIG. 2(b), the X-ray (6b) generated from the focal point (16b) is irradiated onto the sample (5), and the observer αη similarly sees the sample (5). You will see the image tilted from the other position. The above operations are repeated in a relatively short period of time. At this time, each X-ray fluoroscopic image II! Since it appears as if the images are being observed with both eyes at the same time, both Xa and A images are observed as a stereoscopic image (with an effect equivalent to stereoscopic vision through stereo photography).
上記のように溝底されたＸ線検査装置はＸ線透視画ｆ象
を遠近感のある画像として観察できるため。This is because the X-ray inspection device with the groove bottom as described above can observe the X-ray fluoroscopic image f as an image with a sense of perspective.
複数の電子部品が束ねてあり不透明な樹脂で封止された
モジュール中にある欠陥部品の発見あるいはその位置の
検出を即座に行うことが可能となる。It becomes possible to immediately find a defective component or detect its position in a module in which a plurality of electronic components are bundled and sealed with an opaque resin.
なお、上記実施例では、シャッタ（８）をモータ（７）
により回転する半円形の金属を用いたが、Ｘ線管ｉｌ＋
からのＸ線（６）を交互に遮るものであればよく。In the above embodiment, the shutter (8) is connected to the motor (7).
The X-ray tube il+
It suffices if it alternately blocks the X-rays (6) from the outside.
またセンサ（９）はモータ（７）【接続されたものを用
いたが、シャッタ（８）の回転位置が検出されればどの
場所にあってもよく、またＴＶモニタ（４）はビデオカ
メラ（３）と一体になっていてもよく、またＸ線管＋１
）を２本用いているが一つの管内に２つの焦点をもった
１本のＸ線管でもよく、またシャッタ（８）はＸ線管の
外部において用いたが、Ｘ線管内にあってもよい。In addition, the sensor (9) is connected to the motor (7), but it can be placed anywhere as long as the rotational position of the shutter (8) is detected, and the TV monitor (4) is connected to the video camera ( 3), or an X-ray tube +1
) are used, but a single X-ray tube with two focal points within one tube may also be used. Also, although the shutter (8) is used outside the X-ray tube, it can also be placed inside the X-ray tube. good.
以上のように、この発明によれば、適度に接近させた２
つのＸ線源からＸ；ｌｉｌをシャッタによって試料に交
互照射し、かつまたＴＶモニタに映し出したそのＸ線像
をシャッタと同期させ左右交互に視野を開閉する眼鏡を
通して観察するように構成したので、Ｒ察者はそのＸ線
像を立体的に見ることができ、即座に試料内の欠陥を発
見しその位置を正確把掴できる効果がある。As described above, according to the present invention, two
The X-ray image was alternately irradiated onto the sample from two X-ray sources using a shutter, and the X-ray image displayed on a TV monitor was synchronized with the shutter and observed through glasses that alternately opened and closed the left and right fields of view. The R observer can view the X-ray image three-dimensionally, which has the effect of instantly discovering defects in the sample and accurately determining their locations.
第１図はこの発明罠よる一実施例によるＸ線検査装置を
示す図、第２図（ａ）（ｂ）はシャッタの回転とこれに
よって遮れるＸ線管の焦点と眼鏡の動作時の関係を示す
図、第３図は従来のＸ線検査装置を示す図、第４図は試
料の詳細構造と透視画像を示す図である。
図において１１）はＸ線管、（２）はシンチレータ板。
（３）はビデオカメラ、（４）はＴＶモニタ、（５）は
試料。
（６）はＸｉ！！、 ＋７１は封止樹脂、（８］は欠陥
のある電子部品、（９）は他の電子部品、αａはＡ面か
ら見たＸ線像。
６１１はＢ面から見たＸ線像、α２はモータ、０はシャ
ッタ、α（はセンサ、α９は眼鏡、αＧはＸｓ管の焦点
。
側は観察者である。
なお、各図中同一符号は同一または相当部分を示す。FIG. 1 is a diagram showing an X-ray inspection apparatus according to an embodiment of the invention, and FIGS. 2(a) and 2(b) show the relationship between the rotation of the shutter, the focal point of the X-ray tube blocked thereby, and the operation of the glasses. FIG. 3 is a diagram showing a conventional X-ray inspection apparatus, and FIG. 4 is a diagram showing a detailed structure of a sample and a fluoroscopic image. In the figure, 11) is an X-ray tube, and (2) is a scintillator plate. (3) is a video camera, (4) is a TV monitor, and (5) is a sample. (6) is Xi! ! , +71 is the sealing resin, (8) is the defective electronic component, (9) is another electronic component, αa is the X-ray image seen from the A side, 611 is the X-ray image seen from the B side, α2 is the The motor, 0 is the shutter, α( is the sensor, α9 is the glasses, and αG is the focal point of the Xs tube. The side is the observer. The same reference numerals in each figure indicate the same or equivalent parts.
Claims (1)
つのＸ線源の下にあつて、これらＸ線源からのＸ線を交
互に遮るシャッタと、このシャッタを回転させるモータ
と、このモータに接続されシャッタの回転位置を検出す
るセンサと、シャッタの下にあつてＸ線を可視光に変換
するシンチレータ板と、このシンチレータ板の下にあつ
てＸ線像を撮影するビデオカメラと、このビデオカメラ
に接続されＸ線像を映し出すＴＶモニタと、このＴＶモ
ニタを見る観察者の眼の前にあつてシャッタの回転位置
を検出するセンサに接続されセンサからの信号によつて
観察者の左右の視野を交互に遮る眼鏡とを備えたＸ線検
査装置。In a device that inspects the internal structure of electronic components using X-rays, 2
A shutter located under two X-ray sources that alternately blocks X-rays from these X-ray sources, a motor that rotates the shutter, a sensor connected to the motor that detects the rotational position of the shutter, and a shutter that rotates the shutter. There is a scintillator plate located below that converts X-rays into visible light, a video camera located below this scintillator plate that takes X-ray images, a TV monitor connected to this video camera that displays the X-ray image, and An X-ray inspection device equipped with glasses that are placed in front of the eyes of an observer watching a TV monitor, are connected to a sensor that detects the rotational position of a shutter, and alternately block the left and right visual fields of the observer based on signals from the sensor. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63246353A JPH0293353A (en) | 1988-09-30 | 1988-09-30 | X-ray inspection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63246353A JPH0293353A (en) | 1988-09-30 | 1988-09-30 | X-ray inspection apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0293353A true JPH0293353A (en) | 1990-04-04 |
Family
ID=17147296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63246353A Pending JPH0293353A (en) | 1988-09-30 | 1988-09-30 | X-ray inspection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0293353A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004086017A1 (en) * | 2003-03-26 | 2004-10-07 | Matsushita Electric Industrial Co. Ltd. | X-ray imaging device |
| JP2009200166A (en) * | 2008-02-20 | 2009-09-03 | Tdk Corp | Manufacturing method of ceramic electronic component |
| JP2014204875A (en) * | 2013-04-15 | 2014-10-30 | 株式会社東芝 | X-ray shutter and x-ray tube device |
| WO2019082596A1 (en) * | 2017-10-23 | 2019-05-02 | 東レ株式会社 | Inspection method and manufacturing method for molded resin product as well as inspection device and manufacturing device for molded resin product |
-
1988
- 1988-09-30 JP JP63246353A patent/JPH0293353A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004086017A1 (en) * | 2003-03-26 | 2004-10-07 | Matsushita Electric Industrial Co. Ltd. | X-ray imaging device |
| JP2009200166A (en) * | 2008-02-20 | 2009-09-03 | Tdk Corp | Manufacturing method of ceramic electronic component |
| JP2014204875A (en) * | 2013-04-15 | 2014-10-30 | 株式会社東芝 | X-ray shutter and x-ray tube device |
| WO2019082596A1 (en) * | 2017-10-23 | 2019-05-02 | 東レ株式会社 | Inspection method and manufacturing method for molded resin product as well as inspection device and manufacturing device for molded resin product |
| JP6508435B1 (en) * | 2017-10-23 | 2019-05-08 | 東レ株式会社 | Inspection method and manufacturing method for resin molded article, inspection apparatus and manufacturing apparatus for resin molded article |
| CN111033245A (en) * | 2017-10-23 | 2020-04-17 | 东丽株式会社 | Method for inspecting resin molded product, method for manufacturing resin molded product, and apparatus for inspecting resin molded product and apparatus for manufacturing resin molded product |
| US11493459B2 (en) | 2017-10-23 | 2022-11-08 | Toray Industries, Inc. | Inspection method and manufacturing method for molded resin product as well as inspection device and manufacturing device for molded resin product |
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