JPH03233378A - Method and system for measuring performance of magnetic shield room - Google Patents

Method and system for measuring performance of magnetic shield room

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Publication number
JPH03233378A
JPH03233378A JP2869890A JP2869890A JPH03233378A JP H03233378 A JPH03233378 A JP H03233378A JP 2869890 A JP2869890 A JP 2869890A JP 2869890 A JP2869890 A JP 2869890A JP H03233378 A JPH03233378 A JP H03233378A
Authority
JP
Japan
Prior art keywords
magnetically shielded
magnetic
shielded room
flux density
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2869890A
Other languages
Japanese (ja)
Other versions
JP2916692B2 (en
Inventor
Koji Osada
耕治 長田
Tsutomu Yamamoto
力 山本
Takashi Yuda
貴司 湯田
Noboru Ishikawa
登 石川
Masanobu Nishiyama
西山 允宜
Sumio Mukoyama
向山 澄夫
Toshiyuki Ishikawa
石川 敏行
Kichiji Yabana
矢花 吉治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimizu Construction Co Ltd
Shimizu Corp
Original Assignee
Shimizu Construction Co Ltd
Shimizu Corp
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Application filed by Shimizu Construction Co Ltd, Shimizu Corp filed Critical Shimizu Construction Co Ltd
Priority to JP2869890A priority Critical patent/JP2916692B2/en
Publication of JPH03233378A publication Critical patent/JPH03233378A/en
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Abstract

PURPOSE:To perform performance evaluation with high accuracy by generating a prescribed magnetic field by arranging a magnetic field generation source outside a magnetic shield room, and measuring flux density distribution in the neighborhood of a position where the magnetic shield room is installed with a triaxial magnetic sensor. CONSTITUTION:An excitation coil 3 is arranged at a prescribed position outside the position where the magnetic shield room is installed, and the prescribed magnetic field is generated with an excitation power source 1 and an adjusting circuit 2, and the flux density distribution B0 is measured at respective position before installing the shield room. In such a case, the magnetic sensor (for example, flux gate type) 4 is placed on a sensor receiver supported with bearings on a post provided at a movable carriage which performs position detection 5, and performs the positioning of an X-Y plane (floor) by moving the carriage, and performs the positioning in a direction of Z (height) by elevating the receiver along the post, and performs the flux measurement in three-dimensional space. After that, the shield room is installed, and the measurement of the flux density distribution B1 at respective position is performed similarly. A data processor 6 finds a shielding effect S by performing the arithmetic operation of B0/B1=S.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、磁気シールドルームの遮蔽効果を測定する磁
気シールドルームの性能測定法及び測定システムに関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method and system for measuring the performance of a magnetically shielded room for measuring the shielding effect of a magnetically shielded room.

〔従来の技術〕[Conventional technology]

医療分野において、生体の微弱な磁場を検出する場合に
は、外部の磁場を遮蔽した磁気シールドルームが必要に
なる。また、物理計測分野において高性能な測定を行う
ために外部の磁場による測定への影響を排除する場合や
、電子顕微鏡その他荷電粒子のビームを扱う分野におい
て外部の磁場によるビームへの影響を排除する場合には
、磁気シールドルームが必要になる。このように種々の
分野で磁気シールドルームが必要とされるが、実際に磁
気シールドルームを設置する場合には、まず、その磁気
シールドルームが要求されるシールド性能を満足するも
のであるか否かの評価を行うことが必要になる。
In the medical field, when detecting the weak magnetic field of a living body, a magnetically shielded room that shields external magnetic fields is required. Also, in order to perform high-performance measurements in the field of physical measurement, it is necessary to eliminate the influence of external magnetic fields on measurements, and in fields that handle beams of charged particles such as electron microscopes, it is necessary to eliminate the influence of external magnetic fields on beams. In this case, a magnetically shielded room will be required. As described above, magnetically shielded rooms are required in various fields, but when actually installing a magnetically shielded room, the first thing to consider is whether or not the magnetically shielded room satisfies the required shielding performance. It is necessary to evaluate the

磁気シールドルームのシールド性能を評価するための従
来の磁束密度分布等の測定法は、1軸だけの磁気センサ
ーを用いて磁気シールドルーム内で地磁気の磁束密度分
布の測定を行い、シールド性能の評価を行っている。
The conventional method of measuring magnetic flux density distribution, etc. to evaluate the shielding performance of a magnetically shielded room is to measure the geomagnetic flux density distribution in a magnetically shielded room using a magnetic sensor with only one axis, and evaluate the shielding performance. It is carried out.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、従来の磁気シールドルームの性能測定法
では、磁気シールドルーム内で1軸の磁気センサーを用
いて磁束密度を測定しているため、磁束密度分布を把握
するための正確な磁束密度の測定ができなかった。
However, in the conventional method for measuring the performance of magnetically shielded rooms, magnetic flux density is measured using a uniaxial magnetic sensor inside the magnetically shielded room, making it difficult to accurately measure magnetic flux density to understand the magnetic flux density distribution. could not.

また、磁場の発生源を特に用いず、直流(地磁気〉によ
る遮蔽性能しか測定していないため、周波数に依存した
信頼性の高い評価を得ることができなかった。
Furthermore, since only the shielding performance of direct current (earth magnetism) was measured without using a particular magnetic field source, it was not possible to obtain highly reliable evaluations that depended on frequency.

本発明は、上記の課題を解決するものであって、高精度
で磁気シールドルームの性能評価を行うことができる磁
気シールドルームの性能測定法及び測定システムの提供
を目的とする。
The present invention solves the above-mentioned problems, and aims to provide a method and system for measuring the performance of a magnetically shielded room, which can evaluate the performance of a magnetically shielded room with high accuracy.

〔課題を解決するための手段〕[Means to solve the problem]

そのために本発明の磁気シールドルームの性能測定法は
、磁気シールドルームの設置位置にメツシュ状に測定位
置を設定し磁気シールドルームの外側に磁界発生源を配
置して所定の磁界を発生させ、各測定位置において3軸
磁気センサーにより磁気シールドルームの設置前後の磁
束密度分布を測定すると共に測定位置を検出し、磁束密
度分布の測定値を比較することにより磁気シールドルー
ムの性能を評価することを特徴とする。また、性能測定
システムは、磁気シールドルームの外側の位置に配置さ
れる磁界発生源、及び内側に3軸磁気センサーを設置し
磁気シールドルームの設置位置床面にメツシュ状に設定
された測定位置に磁気センサーを移動させる機構を備え
ると共に測定値と測定位置のデータを蓄積処理するデー
タ処理装置を備えた測定手段からなることを特徴とする
To this end, the method for measuring the performance of a magnetically shielded room according to the present invention is to set measurement positions in a mesh pattern at the installation position of the magnetically shielded room, place a magnetic field generation source outside the magnetically shielded room, and generate a predetermined magnetic field. The feature is that the performance of the magnetically shielded room is evaluated by measuring the magnetic flux density distribution before and after the installation of the magnetically shielded room using a 3-axis magnetic sensor at the measurement position, detecting the measurement position, and comparing the measured values of the magnetic flux density distribution. shall be. In addition, the performance measurement system consists of a magnetic field generation source placed outside the magnetically shielded room, and a 3-axis magnetic sensor installed inside the magnetically shielded room. It is characterized by comprising a measuring means that is equipped with a mechanism for moving the magnetic sensor and a data processing device that accumulates and processes data on measured values and measured positions.

〔作用〕[Effect]

本発明の磁気シールドルームの性能測定法及び測定シス
テムでは、磁気シールドルームの外側の位置に配置され
る磁界発生源と3軸の磁気センサーを設置し磁気センサ
ーを移動させ測定位置を検出する機構や磁束密度分布の
測定値と測定位置のデータを蓄積処理するデータ処理装
置を備えた測定手段により磁気シールドルームの設置前
後の磁束密度分布を測定するので、それらの測定値の比
較により磁気シールドルームの性能を評価することがで
きる。また、測定位置の検出機構を有するので、磁束密
度分布の正確な位置対応で比較を行うことができる。
The method and system for measuring the performance of a magnetically shielded room of the present invention includes a mechanism for installing a magnetic field generation source and a three-axis magnetic sensor located outside the magnetically shielding room, and moving the magnetic sensor to detect the measurement position. The magnetic flux density distribution before and after the installation of the magnetically shielded room is measured using a measuring means equipped with a data processing device that accumulates and processes the measured value of the magnetic flux density distribution and the data of the measurement position. Performance can be evaluated. Furthermore, since it has a measurement position detection mechanism, it is possible to perform comparisons based on accurate positional correspondence of magnetic flux density distributions.

〔実施例〕〔Example〕

以下、図面を参照しつつ実施例を説明する。 Examples will be described below with reference to the drawings.

第1図は本発明に係る磁気シールドルームの性能測定シ
ステムの1実施例を示す図、第2図は性能測定装置の1
実施例を示す図、第3図は本発明に係るtXシールドル
ームの測定法の1実施例を説明するための図である。図
中、1は励磁コイル、2は調整回路、3は励磁電源、4
は磁気センサー5は位置検出器、6はデータ処理装置、
11はセンサー受は台、12は台固定用フランジ、13
は支柱、14は移動台車、15は座標読取孔、16は車
輪を示す。
FIG. 1 is a diagram showing one embodiment of the performance measurement system for a magnetically shielded room according to the present invention, and FIG.
Embodiment FIG. 3 is a diagram for explaining an embodiment of the tX shield room measurement method according to the present invention. In the figure, 1 is an excitation coil, 2 is an adjustment circuit, 3 is an excitation power supply, and 4
, magnetic sensor 5 is a position detector, 6 is a data processing device,
11 is the sensor receiver stand, 12 is the flange for fixing the stand, 13
14 is a support column, 14 is a moving cart, 15 is a coordinate reading hole, and 16 is a wheel.

本発明の磁気シールドルームの性能計測システムは、磁
気シールドルームの外側に配置される磁界発生部と内側
に配置される性能計測部からなり、その構成例を示した
のが第1図である。第1図において、励磁コイル1は、
磁気シールドルームの外側の位置において交番磁界を発
生するものであり、調整回路2は、交流の励磁電源3か
ら励磁コイル1に供給する電流を調整し、発生する磁界
の強さを調整するものである。したがって、これらによ
り外側から磁気シールドルームに対する磁界発生部を構
成する。他方、磁気センサー4は、磁束密度を計測する
ものであり、xYZの3軸で同時に計測することができ
る例えばフラックスゲートタイプや倍周波共振型、ホー
ル素子型の磁気センサーを用いたものである。位置検出
器5は、その計測位置を検出するものであり、データ処
理装置(CPU)6は、記憶手段を有し磁気センサー4
と位置検出器5のデータを蓄積、処理するものである。
The performance measuring system for a magnetically shielded room according to the present invention includes a magnetic field generating section disposed outside the magnetically shielded room and a performance measuring section disposed inside the magnetically shielded room, and FIG. 1 shows an example of its configuration. In FIG. 1, the excitation coil 1 is
It generates an alternating magnetic field at a position outside the magnetically shielded room, and the adjustment circuit 2 adjusts the current supplied from the AC excitation power source 3 to the excitation coil 1 to adjust the strength of the generated magnetic field. be. Therefore, these constitute a magnetic field generating section for the magnetically shielded room from the outside. On the other hand, the magnetic sensor 4 measures magnetic flux density, and uses, for example, a flux gate type, double frequency resonance type, or Hall element type magnetic sensor that can simultaneously measure the three axes of xYZ. The position detector 5 detects the measured position, and the data processing unit (CPU) 6 has a storage means and stores the magnetic sensor 4.
and data from the position detector 5 are stored and processed.

したがって、これらにより性能測定部を構成する。Therefore, these constitute a performance measuring section.

磁気センサー、位置検出器を含む性能測定装置は、例え
ば第2図に示すものであり、センサー受は台11は、台
固定用フランジ12で支柱13に昇降自在に軸支され、
座標読取孔15の真上で磁気センサー4を受けるもので
ある。移動台車14は、底部に車輪16が、上面に支柱
13がそれぞれ取り付けられている。したがって、移動
台車14を移動することによりXY平面(床面)の位置
決めを行い、台固定用7ランジ12を支柱13に沿って
昇降させることによりZ(高さ)方向の位置決めを行い
、3次元空間での磁束測定を行うことができる。そして
、XY平面の位置は、例えば第3図に示すように磁気シ
ールドルームの床面に一定間隔で目盛りを書いておき、
その目盛りを座標読取孔15から読み取り、また、高さ
方向の位置は、支柱3における台固定用7ランジ12の
移動長さを測定し、その位置での磁気センサーによる磁
束の測定を行う。目盛りの読取は、目盛り線を検知して
カウントし、そのカウント値から位置を求めればよいが
、計測者が目読してキー人力するように構成してもよい
A performance measuring device including a magnetic sensor and a position detector is, for example, shown in FIG.
The magnetic sensor 4 is received directly above the coordinate reading hole 15. The moving trolley 14 has wheels 16 attached to its bottom and supports 13 attached to its upper surface. Therefore, by moving the movable cart 14, positioning is performed on the XY plane (floor surface), and by raising and lowering the 7 flange 12 for fixing the table along the support column 13, positioning is performed in the Z (height) direction. It is possible to measure magnetic flux in space. Then, the position of the XY plane can be determined by writing scales at regular intervals on the floor of the magnetically shielded room, as shown in Figure 3, for example.
The scale is read through the coordinate reading hole 15, and the position in the height direction is measured by the moving length of the seven table fixing flange 12 on the column 3, and the magnetic flux at that position is measured by a magnetic sensor. The scale may be read by detecting and counting the scale lines and determining the position from the counted value, but it may also be configured such that the measurer reads the scale visually and manually inputs the keys.

また、xY平面での移動台車14の移動は、その底部に
爪(図示省略)を設けると共に、床面に爪が噛み合うガ
イドレール(図示省略)を敷き、このガイドレールと平
行に移動台車14を移動させると、床面の目盛りに位置
決めする精度を高めることができる。また、パソコンに
用いられるマウスのように回転方向及び回転量を計測で
きる車輪を移動台車14の底部に取り付けると、基準位
置を決めて初期設定した後、回転方向及び回転量を計測
することにより床面での位置を求めることができる。ま
た、これにガイドレールを組み合わせ、回転量だけで位
置を求めるようにしてもよい。
In addition, to move the movable trolley 14 on the xY plane, a claw (not shown) is provided at the bottom, and a guide rail (not shown) with which the claw engages is laid on the floor, and the movable trolley 14 is moved parallel to this guide rail. By moving it, you can increase the accuracy of positioning on the scale on the floor. In addition, if wheels that can measure the direction and amount of rotation, such as a mouse used in a computer, are attached to the bottom of the moving trolley 14, after determining and initializing the reference position, the wheels that can measure the direction and amount of rotation can be used to measure the direction and amount of rotation. You can find the position on the surface. Alternatively, a guide rail may be combined with this to determine the position based only on the amount of rotation.

したがって、これらの場合には、座標読取孔15が不要
になることはいうまでもない。
Therefore, it goes without saying that in these cases, the coordinate reading hole 15 becomes unnecessary.

本発明の磁気計測システムは、上記計測装置の他、コイ
ル、励磁電源等からなる磁束発生手段を組み合わせて磁
気シールドルームの性能計測を行うものである。
The magnetic measurement system of the present invention measures the performance of a magnetically shielded room by combining the above-mentioned measurement device with magnetic flux generation means consisting of a coil, an excitation power source, and the like.

次に性能計測法について説明する。Next, the performance measurement method will be explained.

■ まず、第3図に示すように磁気シールドルームの設
置位置の外側に励磁コイルを配置して磁界を発生させ、
磁気シールドルームの設置前に各位置でのレファレンス
データを測定する。
■ First, as shown in Figure 3, an excitation coil is placed outside the installation location of the magnetically shielded room to generate a magnetic field.
Measure reference data at each location before installing the magnetically shielded room.

つまり、磁気シールドルームの遮蔽効果の測定のため、
予め磁気シールドルームのない環境での磁束密度分布の
測定を行う。
In other words, to measure the shielding effect of a magnetically shielded room,
The magnetic flux density distribution will be measured in advance in an environment without a magnetically shielded room.

■ 次に磁気シールドルームを設置してのと同様に各位
置での磁束密度分布の測定を行う。
■ Next, measure the magnetic flux density distribution at each location in the same way as when setting up a magnetically shielded room.

第4図は励磁コイルの位置を変えて測定した磁束密度分
布グラフの例を示す図である。X軸の図示上の方を出入
口扉のある位置とし、同図(a)は出入口扉のある方と
反対側に励磁コイルを配置した場合の測定例であり、同
図(ロ)は出入口扉のある方に励磁コイルを配置した場
合の測定例である。これらの例から扉の有無によって磁
束密度の分布が偏っていることがわかる。
FIG. 4 is a diagram showing an example of a magnetic flux density distribution graph measured by changing the position of the excitation coil. The upper part of the X-axis is the position where the entrance/exit door is located, and Figure (a) is a measurement example where the excitation coil is placed on the opposite side of the entrance/exit door, and Figure (B) is the position where the entrance/exit door is located. This is an example of measurement when the excitation coil is placed on the side with . These examples show that the distribution of magnetic flux density is biased depending on the presence or absence of a door.

このようにして測定した磁束密度分布から、遮蔽性能の
評価では、例えば遮蔽効果を測定したい対象(磁気シー
ルドルーム)があるときとないときの信号レベルの比を
用いて行う。その信号レベルとしては、例えば最大値或
いは最大値から所定点数の平均値、最小値或いは最小値
から所定点数の平均値、全体の平均値等を採用すること
ができる。まず、遮蔽対象がないときの磁束密度をBo
としてその測定を行い、次に遮蔽対象があるときの遮蔽
密度をB1としてその測定を行ったとすると、この場合
の遮蔽効果Sは、 0 S= B。
Based on the magnetic flux density distribution measured in this way, the shielding performance is evaluated using, for example, the ratio of the signal level when there is an object (magnetic shield room) whose shielding effect is to be measured and when there is no object (magnetic shield room). As the signal level, for example, the maximum value or the average value of a predetermined number of points from the maximum value, the minimum value or the average value of a predetermined number of points from the minimum value, the overall average value, etc. can be adopted. First, the magnetic flux density when there is no shielding target is Bo
If the measurement is made with the shielding density when there is a shielding target as B1, then the shielding effect S in this case is 0 S=B.

となる。このように低周波磁界の遮蔽効果の測定では、
磁気シールドルームの形状などのファクターが影響を及
ぼすことが多いため、予め測定しておいた磁束密度分布
(レファレンスデータ)との比較が必要になる。
becomes. In this way, when measuring the shielding effect of low frequency magnetic fields,
Since factors such as the shape of the magnetically shielded room often have an effect, it is necessary to compare the magnetic flux density distribution (reference data) measured in advance.

なお、本発明は、上記の実施例に限定されtものではな
く、種々の変形が可能である。例えば上記の実施例では
、交流の励磁電源と調整回路とを組み合わせた構成を示
したが、調整回路として周波数を変換、調整できる直流
−交流、或いは交流−交流変換回路を用いてもよい。ま
た、上記のような励磁コイルによる交流磁界の測定では
シールド性能が評価できない場合、例えばシールド性能
が高く励磁コイルに大電流を流しても磁気シールドルー
ム内での磁束密度分布の測定ができない場合には、信号
源を地磁気として同様の測定を行うようにしてもよいこ
とはいうまでもない。
Note that the present invention is not limited to the above-described embodiments, and various modifications are possible. For example, in the above embodiment, a configuration is shown in which an AC excitation power source and an adjustment circuit are combined, but a DC-AC or AC-AC conversion circuit that can convert and adjust the frequency may be used as the adjustment circuit. In addition, when the shielding performance cannot be evaluated by measuring the alternating current magnetic field using the excitation coil as described above, for example, when the shielding performance is high and the magnetic flux density distribution in the magnetically shielded room cannot be measured even if a large current is passed through the excitation coil. Needless to say, similar measurements may be performed using the earth's magnetic field as the signal source.

〔発明の効果〕〔Effect of the invention〕

以上の説明から明らかなように、本発明によれば、磁界
発生手段により磁気シールドルームの外側から磁界を発
生させ、予め設定した各測定位置での磁気シールドルー
ムがある場合とない場合の磁束密度分布を測定するので
、それらの比較により高い精度で外部磁場の遮蔽性能を
評価することができる。しかも、測定手段に位置検出で
きる移動機構を設けるので、測定値の比較精度を上官る
ことができる。
As is clear from the above description, according to the present invention, a magnetic field is generated from outside a magnetically shielded room by a magnetic field generating means, and the magnetic flux density at each preset measurement position is determined with or without a magnetically shielded room. Since the distribution is measured, the external magnetic field shielding performance can be evaluated with high accuracy by comparing them. Furthermore, since the measuring means is provided with a moving mechanism capable of position detection, the accuracy of comparison of measured values can be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る磁気シールドルームの性能測定シ
ステムの1実施例を示す図、第2図は性能測定装置の1
実施例を示す図、第3図は本発明に係る磁気シールドル
ームの測定法の1実施例を説明するための図、第4図は
励磁コイルの位置を変えて測定した磁束密度分布グラフ
の例を示す図である。 1・・・励磁コイル、2・・・調整回路、3・・・励磁
電源、4・・・磁気センサー、5・・・位置検出器、6
・・・データ処理装置、11・・・センサー受は台、1
2・・・台固定用7ランジ、13・・・支柱、14・・
・移動台車、15・・・座標読取孔、16・・・車輪。 出 願 人   清水建設株式会社 復代理人 弁理士 阿 部 龍 吉(外6名)第 図 第2図 (a) (b) 第3 図 シールドルーム
FIG. 1 is a diagram showing one embodiment of the performance measurement system for a magnetically shielded room according to the present invention, and FIG.
Figure 3 is a diagram illustrating an example of the measurement method for a magnetically shielded room according to the present invention. Figure 4 is an example of a magnetic flux density distribution graph measured by changing the position of the excitation coil. FIG. DESCRIPTION OF SYMBOLS 1... Excitation coil, 2... Adjustment circuit, 3... Excitation power supply, 4... Magnetic sensor, 5... Position detector, 6
...Data processing device, 11...Sensor receiver is stand, 1
2...7 lunges for fixing the stand, 13...pillars, 14...
- Moving trolley, 15... Coordinate reading hole, 16... Wheels. Applicant Shimizu Corporation Sub-agent Patent attorney Ryukichi Abe (6 others) Figure 2 (a) (b) Figure 3 Shield room

Claims (2)

【特許請求の範囲】[Claims] (1)磁気シールドルームの設置位置にメッシュ状に測
定位置を設定し磁気シールドルームの外側に磁界発生源
を配置して所定の磁界を発生させ、各測定位置において
3軸磁気センサーを用いた磁気測定手段により磁気シー
ルドルームの設置前後の磁束密度分布を測定すると共に
測定位置を検出し、磁束密度分布の測定値を比較するこ
とにより磁気シールドルームの性能を評価することを特
徴とする磁気シールドルームの性能測定法。
(1) Measurement positions are set in a mesh pattern at the installation location of the magnetically shielded room, a magnetic field source is placed outside the magnetically shielded room to generate a predetermined magnetic field, and the magnetic field is measured using a 3-axis magnetic sensor at each measurement position. A magnetically shielded room characterized in that the performance of the magnetically shielded room is evaluated by measuring the magnetic flux density distribution before and after installation of the magnetically shielded room by a measuring means, detecting the measurement position, and comparing the measured values of the magnetic flux density distribution. performance measurement method.
(2)磁気シールドルームの外側の位置に配置される磁
界発生源、及び3軸磁気センサーを搭載し磁気シールド
ルーム内にメッシュ状に設定された測定位置に磁気セン
サーを移動させ測定位置を検出する機構を備えると共に
磁気センサーによる磁束密度分布の測定値と測定位置の
検出データを蓄積処理するデータ処理装置を備えた測定
手段からなることを特徴とする磁気シールドルームの性
能測定システム。
(2) Equipped with a magnetic field source placed outside the magnetically shielded room and a 3-axis magnetic sensor, the magnetic sensor is moved to a measurement position set in a mesh pattern inside the magnetically shielded room to detect the measurement position. 1. A performance measuring system for a magnetically shielded room, comprising a measuring means equipped with a mechanism and a data processing device that accumulates and processes measured values of magnetic flux density distribution by a magnetic sensor and detected data of measurement positions.
JP2869890A 1990-02-07 1990-02-07 Magnetic shield room performance measurement method and measurement system Expired - Lifetime JP2916692B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2869890A JP2916692B2 (en) 1990-02-07 1990-02-07 Magnetic shield room performance measurement method and measurement system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2869890A JP2916692B2 (en) 1990-02-07 1990-02-07 Magnetic shield room performance measurement method and measurement system

Publications (2)

Publication Number Publication Date
JPH03233378A true JPH03233378A (en) 1991-10-17
JP2916692B2 JP2916692B2 (en) 1999-07-05

Family

ID=12255694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2869890A Expired - Lifetime JP2916692B2 (en) 1990-02-07 1990-02-07 Magnetic shield room performance measurement method and measurement system

Country Status (1)

Country Link
JP (1) JP2916692B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011022040A (en) * 2009-07-16 2011-02-03 Tsubakimoto Chain Co Magnetic field distribution measuring device and magnetic field distribution measurement method
KR20200112914A (en) * 2018-03-01 2020-10-05 요코가와 덴키 가부시키가이샤 Current measuring device, current measuring method, and computer-readable non-transitory recording medium
CN113009242A (en) * 2021-02-25 2021-06-22 西安理工大学 Device and method for measuring surface potential distribution and attenuation of array fluxgate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011022040A (en) * 2009-07-16 2011-02-03 Tsubakimoto Chain Co Magnetic field distribution measuring device and magnetic field distribution measurement method
KR20200112914A (en) * 2018-03-01 2020-10-05 요코가와 덴키 가부시키가이샤 Current measuring device, current measuring method, and computer-readable non-transitory recording medium
CN113009242A (en) * 2021-02-25 2021-06-22 西安理工大学 Device and method for measuring surface potential distribution and attenuation of array fluxgate
CN113009242B (en) * 2021-02-25 2022-10-04 西安理工大学 Device and method for measuring surface potential distribution and attenuation of array fluxgate

Also Published As

Publication number Publication date
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