JPH03230039A - Purifying chamber device - Google Patents
Purifying chamber deviceInfo
- Publication number
- JPH03230039A JPH03230039A JP22262090A JP22262090A JPH03230039A JP H03230039 A JPH03230039 A JP H03230039A JP 22262090 A JP22262090 A JP 22262090A JP 22262090 A JP22262090 A JP 22262090A JP H03230039 A JPH03230039 A JP H03230039A
- Authority
- JP
- Japan
- Prior art keywords
- air
- space
- passage space
- main passage
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012423 maintenance Methods 0.000 claims abstract description 27
- 238000004891 communication Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 42
- 238000000034 method Methods 0.000 abstract description 10
- 238000004378 air conditioning Methods 0.000 abstract description 7
- 230000000717 retained effect Effects 0.000 abstract 1
- 230000003749 cleanliness Effects 0.000 description 15
- 238000005286 illumination Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 238000011045 prefiltration Methods 0.000 description 3
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- OVSKIKFHRZPJSS-UHFFFAOYSA-N 2,4-D Chemical compound OC(=O)COC1=CC=C(Cl)C=C1Cl OVSKIKFHRZPJSS-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、半導体の製品などに必要とする清浄な作業環
境を作り出すための清浄室装置（クリーンルーム）に間
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a clean room apparatus (clean room) for creating a clean working environment required for semiconductor products and the like.
従来、半導体製造工程に用いられていた清浄作業室の代
表的な例（全面ダウンフロー式クリーンルーム）を第１
図に示す。（ａ）は製造ラインのレイアウトと共に示し
た切断平面図、（ｂ）は測断面図で１は建屋、２はクリ
ーンルーム室内、３は外部の一般室、４はクリーンルー
ムの出入口に設置されたエアシャワー、５は露光、エツ
チング、拡散、ＣＶ Ｄ、メタライズ、検査等の各製造
ライン用機器、６は水、ガス等の配管類、７は高性能フ
ィルタ、８は照明灯、９は天井部多孔板、１０は床部多
孔板、】】は空調用給気ダクト、１２は空調用戻りダク
トであり、図中矢印で示すように高性能フィルタ７で処
理した清浄空気を天井全面よりＮ流状とし・てクリーン
ルーム室内２に吹き出し、床下を通して室内空気を排出
することにより、製造ライン用機器５が設置されたクリ
ーンルーム室内２をほぼ−様な高清浄度（たとえばクラ
ス１００）に維持し、全工程の作業をこの清浄雰囲気中
で行えるようにしている。A typical example of a clean work room (full-scale downflow clean room) conventionally used in the semiconductor manufacturing process is shown in the first example.
As shown in the figure. (a) is a cutaway plan showing the layout of the production line, (b) is a cross-sectional view showing 1 the building, 2 the interior of the clean room, 3 the general room outside, and 4 the air shower installed at the entrance to the clean room. , 5 is equipment for each production line such as exposure, etching, diffusion, CVD, metallization, inspection, etc., 6 is piping for water, gas, etc., 7 is a high-performance filter, 8 is a lighting lamp, 9 is a perforated ceiling plate , 10 is a floor perforated plate, ]] is an air conditioning supply air duct, and 12 is an air conditioning return duct. As shown by the arrow in the figure, clean air treated with a high-performance filter 7 is passed through the entire ceiling in an N flow.・By blowing air into the clean room interior 2 and discharging the indoor air through under the floor, the clean room interior 2 in which the manufacturing line equipment 5 is installed is maintained at a high level of cleanliness (for example, class 100), and the entire process is maintained. The work can be done in this clean atmosphere.
この全面ダウンフロー式クリーンルームは室全体の清浄
度を高める上からは最良の方式とされているが、清浄化
区域および空調対象区域が広く、高価な高性能フィルタ
を多量に使用しているため、設置ａ費が非常に高い。な
お清浄室の公知例とし・てＬ：、Ｓ、Ｐ３，５７０，３
８５、Ｕ、Ｓ、Ｐ４゜０３０．５１Ｂ、Ｕ、Ｓ、Ｐ３，
７２８，８６６、Ｕ、Ｓ、Ｐ３，６３８，４０４、特開
昭５３−８２０３９、実公昭５５−１４９９０号公報記
載のものがあるが、いずれも全面ダウンフロー式りリー
シルームである。This full-scale downflow clean room is considered to be the best method for improving the cleanliness of the entire room, but it has a large cleaning area and air conditioning area, and uses a large amount of expensive high-performance filters. Installation cost is very high. In addition, known examples of clean rooms include L:, S, P3,570,3
85, U, S, P4゜030.51B, U, S, P3,
No. 728,866, U, S, P3,638,404, Japanese Unexamined Patent Publication No. 53-82039, and Japanese Utility Model Publication No. 14990/1989, all of which are full-surface down-flow reshi rooms.
なお、他に関連するものとして昭和５６年１０月２０日
株式会社オーム社発行の財団法人日本空電清浄協会編「
空気清浄ハンドブック」４７６頁〜４７９頁が挙げられ
るが、これには清浄室内の清浄度の維持、保守作業の容
易性、および清浄室内での作業性の点、主通路空間に上
方から清浄空気を供給する構成および主通路空間を下方
で保全、域と連通させ正圧て保全域へ排気する構成と、
この構成により主通路空間内においても清浄度低下を防
止するという技術的思想が開示されていない。In addition, as for other related information, "Edited by Japan Air Cleaning Association Foundation" published by Ohmsha Co., Ltd. on October 20, 1981.
"Air Cleaning Handbook", pages 476 to 479, includes the following points: maintenance of cleanliness in a clean room, ease of maintenance work, workability in a clean room, and methods for supplying clean air from above into the main passage space. A configuration in which the main passage space is maintained below and communicated with the area and is exhausted to the area under positive pressure;
The technical concept of preventing a decrease in cleanliness even in the main passage space with this configuration is not disclosed.
ざらに他に関連するものとして昭ｆ０５７年１月５日日
本建築設備士協会発行の「建築設備士第１４巻／第１号
」８頁〜１０頁が挙げられるが、これに記載されたもの
は枝通路空間と保全域とにそれぞれ飼料に給１１ｒ気を
？テなう構成であり、これ；こも主通路空間に上方から
清？争空気を供給する構成および主通路空間を下方で（
呆全域と連通させ正圧て保全域へ排気する構成と、この
構成により主通路空間内においても清浄度低下を防止す
るという技術的思想については開示されていない。Other related materials include pages 8 to 10 of ``Architectural Equipment Engineers Vol. 14/No. 1'' published by the Japan Association of Architectural Equipment Engineers on January 5, 1980, and the contents described therein. 11r of feed is supplied to the branch passage space and conservation area respectively? It has a structure that allows air to flow into the main passage space from above. Air supply configuration and main passage space below (
There is no disclosure of a structure in which the entire area of the passageway is communicated with and the positive pressure is exhausted to the maintenance area, and the technical concept of preventing a decrease in cleanliness even in the main passage space by this structure.
本発明の目的は主通路空間および枝通路空間への保全域
からの汚染空気の流入を防止して主通路空間および枝通
路空間内の清浄度の維持をともに図ることが可能な清Ｓ
室装置を提供することにある。An object of the present invention is to provide a cleaning system capable of preventing contaminated air from flowing into the main passage space and branch passage spaces from the conservation area, thereby maintaining the cleanliness of both the main passage space and the branch passage spaces.
Our purpose is to provide room equipment.
本発明は清浄室装置を、主通路空間（１５）と、該主通
路空間（］５）から側方に略直角方向に延びて分岐した
複数本の枝通路空間（７３）と、前記主通路空間（１５
）の天井部に配設されて前記主通路空間（１５）に対し
て上方より清浄空気を供給するよう構成された第１の空
気浄化手段く１３）と、前記枝通路空間（７３）の内部
に設けられて互いに並行して延びる作業空間（１６）お
よび通路空間（］７）と、前記枝通路空間（７３）の天
井部に配設されて前記作業空間（１６）と前記通路空間
（１７）とにそれぞれ上方から清浄空気を供給するよう
構成された第２の空気浄化手段（１４）とを備えており
、前記枝通路空間（７３）の前記主通路空間（１５）の
側面への接続部が常時開口した連通部（８０）によって
連通されており、さらに前記主通路空間（１５）の側方
に設けられて前記枝通路空間（７３）の外側面を囲むよ
う形成された保全域（］８）を備えてなり、前記主通路
空間（１５）および前記枝通路空間（７３）が前記保全
域（１８）に対し正圧となるようそれぞれ下方で前記保
全域（１８）に連通するように構成したことを特徴とす
る。The present invention provides a clean room device including a main passage space (15), a plurality of branch passage spaces (73) extending laterally from the main passage space (5) and branching off in a substantially right angle direction, and the main passage. Space (15
) is arranged on the ceiling of the main passageway space (15) and is configured to supply clean air from above to the main passageway space (15); and the inside of the branch passageway space (73). A work space (16) and a passage space (7) are provided in the branch passage space (73) and extend parallel to each other, and a work space (16) and a passage space (17) are provided in the ceiling of the branch passage space (73). ) and second air purifying means (14) configured to supply clean air from above, respectively, and the branch passage space (73) is connected to a side surface of the main passage space (15). The sections are communicated by a communication section (80) that is always open, and a conservation area ( ]8), such that the main passage space (15) and the branch passage space (73) each communicate with the conservation area (18) downwardly so that a positive pressure is applied to the conservation area (18). It is characterized by being configured as follows.
以下、本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第２図は本発明を半導体製造工程に適用した−実施例の
切断平面図、第３図（ａ）、（ｂ）はそれぞれ第２図の
Ａ−Ａ線およびＢ−Ｂ線にそった側断面図であり、第１
図と同一符号は対応する部分を示している。第２．３図
において、１３は主通路空間１５を覆うよう建屋１内に
設置された主通路用ユニット、１４は主通路空間１５の
両側に略直角方向に分岐して設けられる枝通路空間７３
を覆うよう主通路用ユニット１３に接続された製造ライ
ン用ユニットである。主通路用ユニット１３は、主通路
空間として用いる主空間１５を形成しており、これは第
５図に示すように天板２５、画策１側板２４、画策１端
板７１、開閉口としての扉７２及びエアーシャワー装置
４て主空間１５をトンネル状に覆い構成しである。詳し
くは後て述へるように主通路用ユニット１３はその天井
部に第１の空気浄化手段１５ａを内蔵して、主空間１５
内に天井面から清浄空気を吹き出す機能を有している。Figure 2 is a cutaway plan view of an embodiment in which the present invention is applied to a semiconductor manufacturing process, and Figures 3 (a) and (b) are sides taken along line A-A and line B-B in Figure 2, respectively. It is a sectional view, and the first
The same reference numerals as in the figures indicate corresponding parts. In FIG. 2.3, 13 is a main passage unit installed in the building 1 so as to cover the main passage space 15, and 14 is a branch passage space 73 provided on both sides of the main passage space 15, branching approximately at right angles.
This is a manufacturing line unit connected to the main passage unit 13 so as to cover the main passage unit 13. The main passage unit 13 forms a main space 15 used as a main passage space, and as shown in FIG. 72 and the air shower device 4 cover the main space 15 in the form of a tunnel. As will be described in detail later, the main passage unit 13 has a built-in first air purifying means 15a in its ceiling, and the main space 15
It has the function of blowing out clean air from the ceiling surface.
また、製造ライン用ユニット１４は、製造ライン毎に設
けられ、製造ライン用機器５を設置する作業空間として
の第２帯域１６と、これに並行して延ひる通路空間とし
ての第１帯域１７とよりなり、枝通路空間を形成する枝
空間７３を覆うよう設けられる。枝通路空間の主通路空
間への接続部分は常時開口した連通部８０によって連通
され、この連通部８０を介して主通路空間と枝通路空間
の出入りが自由に行なえるよう構成される。枝空間７３
は、第６図に示すように天板３７、両第２側板３６及び
第２端板１９で枝空間７３をトンネル状に覆い、構成し
である。製造ライン用ユニット１４は詳しくは後で述べ
るようにその天井部に第２の空気浄化手段７３ａを内蔵
して、第２帯域１６と第１帯域１７にそれぞれの天井面
から清浄空気を吹き出し、清浄化する機能を有しており
、この製造ライン用ユニット１４の空気吸込み口に空調
用給気ダクト１１を接続することにより製造ライン別の
空調温度制御を可能にしている。Further, the manufacturing line unit 14 is provided for each manufacturing line, and has a second zone 16 as a work space in which the manufacturing line equipment 5 is installed, and a first zone 17 as a passage space extending in parallel thereto. It is provided so as to cover the branch space 73 forming the branch passage space. The connecting portion of the branch passage space to the main passage space is communicated by a communication part 80 which is always open, and the main passage space and the branch passage space are configured to be able to freely go in and out through this communication part 80. Branch space 73
As shown in FIG. 6, the branch space 73 is covered in a tunnel shape with a top plate 37, both second side plates 36, and a second end plate 19. As will be described in detail later, the production line unit 14 has a built-in second air purifying means 73a in its ceiling, and blows clean air into the second zone 16 and first zone 17 from the respective ceiling surfaces, thereby cleaning the air. By connecting the air conditioning air supply duct 11 to the air suction port of this production line unit 14, it is possible to control the air conditioning temperature for each production line.
隣り合った製造ライン用ユニット１４の間および製造ラ
イン用ユニット１４と建家１の壁面との間には保全域と
しての保全用スペース１８が設けられている。第２端板
１９には図示してないが扉がついておリュニッ）１４で
覆われた室内と１呆全用スペ一ス１日内とを往復できる
ようになっている。A maintenance space 18 as a maintenance area is provided between adjacent production line units 14 and between the production line units 14 and the wall surface of the building 1. The second end plate 19 has a door (not shown) so that the user can go back and forth between the room covered by the door 14 and the one-room space within one day.
また、主通路用ユニット１３の両端は建家１の壁面で仕
切り、−船室３から主空間１５へはエアシャワー装置４
を通って出入させる。In addition, both ends of the main passage unit 13 are partitioned by the walls of the building 1, and an air shower device 4 is provided from the cabin 3 to the main space 15.
to enter and exit through.
保全用スペース１８と一船室３との間には扉２０を設け
、保全用スペース１８には清浄室内を通過せずに一船室
３から出入りできるようにしている。A door 20 is provided between the maintenance space 18 and one cabin 3, so that the maintenance space 18 can be accessed from one cabin 3 without passing through the clean room.
製造ライン用ユニット１４の天井面から吹き出した清浄
空気は第２帯域１６および第１帯域１７を下向に流れ、
製造ライン用ユニット１４の第２側板３６の下部に設け
られた流出口２１から排出される。同様に、主通路用ユ
ニッ）１３の天井面から吹き出した清浄空気も主空間１
５内を下向に流れ、主通路用ユニッ）１３の第１側板２
４の下部に設けられた流出口３３から排出される。した
がって、保全用スペース１８は主通路ユニット１３と製
造ライン用ユニット１４から排出される清浄空気によフ
である程度清浄化されるが、ユニット１３．１４で覆わ
れた室内よりは清浄度が低い。製造ラインで使用する水
、カス等の配管類や電線等の動力伝達手段６は保全用ス
ペース１８に設置され、製造ライン用ユニッ）１４の流
出口２１を通して製造ライン用機器５へ引き込まれる。The clean air blown from the ceiling of the production line unit 14 flows downward through the second zone 16 and the first zone 17,
It is discharged from the outlet 21 provided at the lower part of the second side plate 36 of the production line unit 14. Similarly, the clean air blown from the ceiling of the main passage unit 13 also flows into the main space 1.
5, and the first side plate 2 of the main passage unit) 13.
The water is discharged from an outlet 33 provided at the bottom of 4. Therefore, although the maintenance space 18 is cleaned to some extent by the clean air discharged from the main passage unit 13 and the production line unit 14, it is less clean than the room covered by the units 13, 14. Power transmission means 6 such as piping, electric wires, etc. for water and waste used in the production line are installed in the maintenance space 18, and are drawn into the production line equipment 5 through the outlet 21 of the production line unit 14.
こうすることによって、配管類や電線等のメンテナンス
は保全用スペース１８で行うことができる。また、製造
ライン用ユニット１４の第２側板３６を部分的に取りは
ずすことによって製造ライン用機器５の補修もそのほと
んどが保全用スペース１日から行なえる。しかも、前述
のように保全用スペース１８には清浄室内を通過せずに
一船室３がら出入りできるので、メンテナンス作業にょ
る発塵が他の製造ラインに影響を及ぼすことはほとんど
ない。By doing so, maintenance of piping, electric wires, etc. can be performed in the maintenance space 18. Further, by partially removing the second side plate 36 of the production line unit 14, most of the repairs to the production line equipment 5 can be carried out within one day in the maintenance space. Moreover, as described above, since the maintenance space 18 can be entered and exited from one cabin 3 without passing through the clean room, dust generated during maintenance work hardly affects other production lines.
また、ある工程の製造装置−式を補修するような場合に
も、その工程の清浄室内でのみ処理でき、他の製造ライ
ンへの影響を防止できる。Further, even when repairing manufacturing equipment in a certain process, the repair can be performed only in the clean room of that process, thereby preventing any influence on other manufacturing lines.
半導体、ＩＣ等の製造工程は第４図にその一例を示すよ
うに、拡散、露光、エツチング、ＣＶＤ。The manufacturing process for semiconductors, ICs, etc. includes diffusion, exposure, etching, and CVD, as shown in FIG.
メタライズ等の諸工程をランダムにくり返して行なわれ
る。そのため、第２図に示すように主空間ｌ５の両側に
枝状に製造ライン用ユニット１４を配し、各工程別にレ
イアウトを組めは、主空間１５を通して次の工程へ最短
距離で製品の移送ができ、非常に便利が良い。しかし、
建家の制約なとて主空間１５の片側にしか製造ライン用
ユニットを配置できない場合でも、後述する本発明の効
果は十分ある。Processes such as metallization are repeated randomly. Therefore, as shown in FIG. 2, by arranging the manufacturing line units 14 in a branch shape on both sides of the main space 15 and arranging the layout for each process, products can be transferred through the main space 15 to the next process in the shortest distance. Yes, it is very convenient. but,
Even if the manufacturing line unit can only be placed on one side of the main space 15 due to building restrictions, the effects of the present invention described later can be sufficiently achieved.
次とこ、主通路用ユニット１３、製品ライン用ユニソＩ
・１４の具体的構成について説明する。Next, unit 13 for main passage, Uniso I for product line
- The specific configuration of No. 14 will be explained.
第５図は主通路用ユニット１３の長手方向に直角な断面
を示す。この図に示すように、支柱２２と横梁２３とて
門形フレームを朝み、これに両側の第１側板２４と天板
２５を張って主空間１５を覆う覆いを構成し、主通路用
清浄空気吹出し口１００と天板２５との間に第１の空気
浄化手段１５ａを構成する送風機２６、送風チャンバ２
７、高性能フィルタ２８それに主通路照明灯２９を収納
する。３０は照明灯２９の下に設置した格子状の散光板
である。主空間１５の空気吹出し口高さは作業者が立っ
て通行できる程度の高さ（たとえば２２００ｍｍンとす
る。FIG. 5 shows a cross section of the main passage unit 13 perpendicular to the longitudinal direction. As shown in this figure, the pillars 22 and cross beams 23 form a gate-shaped frame, and the first side plates 24 and top plate 25 on both sides are stretched to form a cover that covers the main space 15. A blower 26 and a blower chamber 2 constitute the first air purifying means 15a between the air outlet 100 and the top plate 25.
7. A high-performance filter 28 and a main passage illumination light 29 are housed. 30 is a lattice-shaped light scattering plate installed under the illumination light 29. The height of the air outlet in the main space 15 is set to a height (for example, 2200 mm) that allows a worker to stand and pass through.
送風機２６の運転ζこより、外部空電はプレフィルタ３
２を通して空気吸込み口３１から吸込まれる。送風機２
６から送り出された空気は送風チャンバ２７を通って高
性能フィルタ２８により清浄化された後、天井面の清浄
空気吹出し口１００から０．２ｍ／ｓ程度の風速で主空
間１５へ下向に吹き出す。図中の矢印はこの空気の流れ
を示している。散光板３０は、照明の散光と清浄気流の
整流のために設けられたものである。主空間１５内に吹
き出した清浄気流は図の矢印で示すように流れて、第１
側板２４の下部に設けた流出口３３から外部へ排出され
、流出口３３ての圧力損失分だけ、主空間１５内は保全
スペース１８に対して正圧となる。これによって、主空
間１５内は製造ライン間の製品の移送および作業者の通
行中の汚染防止に必要な清浄度に維持される。この主通
路用ユニットＩ３は、製造ライン用ユニット１４および
エアシャワー装置４との接続口に当る部分のみ第１側板
２４を取り除き開放されている。Due to the operation of the blower 26, external static electricity is removed by the pre-filter 3.
2 and is sucked in from the air suction port 31. Blower 2
The air sent out from 6 passes through a blow chamber 27 and is purified by a high-performance filter 28, and then is blown downward into the main space 15 from a clean air outlet 100 on the ceiling surface at a wind speed of about 0.2 m/s. . The arrows in the figure indicate this air flow. The light scattering plate 30 is provided for scattering illumination and rectifying clean air. The clean airflow blown into the main space 15 flows as shown by the arrow in the figure, and
It is discharged to the outside from an outlet 33 provided at the lower part of the side plate 24, and the pressure inside the main space 15 becomes positive with respect to the maintenance space 18 by the amount of pressure loss at the outlet 33. As a result, the interior of the main space 15 is maintained at a level of cleanliness necessary to prevent contamination during the transfer of products between production lines and during the passage of workers. This main passage unit I3 is opened by removing the first side plate 24 only in the portion corresponding to the connection port with the manufacturing line unit 14 and the air shower device 4.
第６〜８図は製造ライン用ユニットの一例を示す図で、
第６図は長手方向に直角な断面図、第７図はその要部拡
大図、第８図は外観を示す斜視図である。第６図におい
て、製造ライン要機器δは向い合せに配列され、２ライ
ンを１組としている。Figures 6 to 8 are diagrams showing an example of a unit for a production line,
6 is a cross-sectional view perpendicular to the longitudinal direction, FIG. 7 is an enlarged view of the main part, and FIG. 8 is a perspective view showing the external appearance. In FIG. 6, the production line equipment δ is arranged facing each other, and two lines form one set.
支柱３４と横梁３５とて門形フレームを組み、これに両
側の第２側板３６と天板３７を張って製造ライン部を覆
う覆いを構成し、この覆いとそれを設置する床面とて囲
まれた清浄室内に製造ライン用機器５を設置する第２帯
域１６と作業者が通行する第１帯域１７を第２側板３６
と平行に設ける。The pillars 34 and the cross beams 35 form a gate-shaped frame, and the second side plates 36 and top plate 37 on both sides are stretched to form a cover that covers the production line section, and this cover and the floor surface on which it is installed are enclosed. A second side plate 36 separates the second zone 16 in which the production line equipment 5 is installed and the first zone 17 through which workers pass in the clean room.
installed parallel to the
１０１．１０２はそれぞれ作業用清浄空気吹出し口およ
び通路部用清浄空気吹出し口である。作業部用清浄空気
吹出し口１０１と天板３７との間には第２の空気浄化手
段７３ａを構成する送風機４０．４１、送風チャンバ４
２，４３、高性能フィルタ４４．４５それに作業部照明
灯４６を収納し、照明灯４６の下に格子状の作業部用散
光板３８を設置する。これらの機材は図示しない支持部
材を介して横＃：３５から吊り下げ支持されている。４
７は空電吸込み口、４８はプレフィルタ、４９は作業部
用清浄空気吹出し口１０１と通路部用清浄空気吹出し口
１０２との間の仕切用化粧板である。101 and 102 are a working clean air outlet and a passage part clean air outlet, respectively. Between the clean air outlet 101 for the work section and the top plate 37, there are a blower 40, 41 and a blower chamber 4 constituting the second air purifying means 73a.
2, 43, a high-performance filter 44, 45 and a work section illumination light 46 are housed therein, and a lattice-shaped work section light diffusion plate 38 is installed below the illumination light 46. These equipments are suspended and supported from the side #35 via support members (not shown). 4
7 is a static electricity suction port, 48 is a pre-filter, and 49 is a decorative plate for partitioning between the clean air outlet 101 for the working section and the clean air outlet 102 for the passage section.
通路部用清浄空気吹出し口１０２と天板３７との間には
空気通路５０を設けて、通路部照明灯５１を収納し、そ
の下に格子状の通路部用散光板３９を設置する。通路部
１７の空気吹出し口高さは作業者が立）て通行できる程
度に高くし、作業部１６の空気吹出し口高さは作業に支
障がない限り低くする（−例を示せば、通路部空気吹出
し口高さ２２００ｍｍ、作業部空気吹出し口高さ１８０
０ｍ ｍ ）。作業部空気吹出し口高さ（よできるだけ
低くした方が、作業部空間の気流の乱れが少なく、清浄
度保持性能が良くなるからである。An air passage 50 is provided between the clean air outlet 102 for the passage and the top plate 37, and a passage illumination lamp 51 is housed therein, and a lattice-shaped passage diffusion plate 39 is installed below it. The height of the air outlet in the passage section 17 is set high enough for workers to stand up and pass through, and the height of the air outlet in the working section 16 is set low as long as it does not hinder work (for example, Air outlet height 2200mm, working part air outlet height 180mm
0mm). This is because the lower the height of the air outlet in the working area (as low as possible), the less turbulence in the airflow in the working area and the better the cleanliness maintenance performance.
送風機４０．４１の運転により、外部空気はプレフィル
タ４８を通して空気吸込み口４７から吸込まれる。作業
部用送風機４０から送り出された空気は送風チャンバ４
２を通って作業部用高性能フィルタ４４により清浄化さ
れた後、作業部用清浄空気吹出し口１０１から室内の第
２帯域１６へ下向きに吹き出し、一方、通路部用送風１
４１カ）・う送り出された空気は送風チャンバ４３を通
って通路部用高性能フィルタ４５により清浄化された後
、空気通路５０へ入り、通路部用清浄空気吹出し口１０
２から室内の第１帯域１７へ下向に吹き出す。図中の矢
印はこの空気の流れを示している。By operating the blower 40 , 41 , external air is drawn through the pre-filter 48 from the air inlet 47 . The air sent out from the working section blower 40 is sent to the blow chamber 4.
2 and is purified by the high-performance filter 44 for the working area, the air is blown downward from the working area clean air outlet 101 to the second zone 16 in the room.
41 F) - The discharged air passes through the ventilation chamber 43 and is purified by the high-performance filter 45 for the passage, and then enters the air passage 50 and passes through the clean air outlet 10 for the passage.
2 and blows out downward to the first zone 17 in the room. The arrows in the figure indicate this air flow.
散光板３８．３９は第５図の散光板３０と同様に！１ｇ
明の散光と清浄気流の整流のために設けたものであり、
第７図の５２は第１帯域１７の風速分布を調整するため
のパンチング板である。清浄気流の風速は、たとえば第
２帯域１６で０．４ｍ／ｓ、第１帯域１７て０．２ｍ／
ｓというように、各部の必要清浄度に応して設定する。The diffuser plates 38 and 39 are the same as the diffuser plate 30 in Fig. 5! 1g
It was installed for the purpose of dispersing light and rectifying clean air currents.
Reference numeral 52 in FIG. 7 is a punching plate for adjusting the wind speed distribution in the first zone 17. The wind speed of the clean airflow is, for example, 0.4 m/s in the second zone 16 and 0.2 m/s in the first zone 17.
Set according to the required cleanliness of each part, such as s.
こうすることによって、第２帯域１６の清浄度を第１帯
域１７の清浄度よりも高くすることができる。By doing so, the cleanliness of the second zone 16 can be made higher than the cleanliness of the first zone 17.
室内に吹き出された清浄気流は図の矢印で示すように流
れ、第２側板３６の下部に設けられた流出口２１から外
部へ排出される。室内圧力は流出口２１ての圧力損失分
だけ保全スペース】８に対し正圧となるので、室外から
の汚染空気の流入を防止てきる。また、本実施例では（
呆全スペース１８が枝空間７３の外周面を囲むよう設け
られているので外部の汚染空気が枝空間７３に侵入する
のを防止できる。The clean airflow blown into the room flows as shown by the arrow in the figure, and is discharged to the outside from the outlet 21 provided at the lower part of the second side plate 36. Since the indoor pressure becomes a positive pressure with respect to the preservation space 8 corresponding to the pressure loss at the outlet 21, the inflow of contaminated air from outside can be prevented. In addition, in this example (
Since the exhaust space 18 is provided so as to surround the outer peripheral surface of the branch space 73, it is possible to prevent contaminated air from outside from entering the branch space 73.
上記のよう：こ本実施例て：ｉ主主通路開開１５、枝通
路空間７３とが保全域］８に対して正圧となるようそれ
ぞれ下方て保全域１８に連通しているので、主通路空間
１５並ひに枝通路空間７３への保全域１８からの汚染空
気の流入を防止して、主通路空間１５およＵ枝通路空間
７３内の清浄度維持をともに図ることができる。As described above: This embodiment: i The main passage opening 15 and the branch passage space 73 are connected downwardly to the maintenance area 18 so that a positive pressure is applied to the maintenance area 8. By preventing contaminated air from flowing into the passage space 15 and the branch passage space 73 from the conservation area 18, the cleanliness of both the main passage space 15 and the U-branch passage space 73 can be maintained.
主通路空間と枝通路空間の接続部は、本実施例において
は、主通路用ユニット１３の第１側板２４を取り除いて
開放することにより常時開口した連通部８０を形成して
いる。これにより第４図に示されるような各枝通路空間
への出入りが頻繁に行なわれるような工程であっても出
入りの度に扉の開閉を行なう必要がなく作業性が向上す
るとともに、扉の開閉に伴う気流の乱れや圧力の変動を
防止できて室内の清浄度を維持てきる。In this embodiment, the connecting portion between the main passage space and the branch passage space is formed by removing and opening the first side plate 24 of the main passage unit 13 to form a communication portion 80 that is always open. As a result, even in processes where entry and exit to each branch passage space are frequently performed as shown in Fig. 4, there is no need to open and close the door each time entry and exit is performed, improving work efficiency and improving the workability of the door. It prevents airflow turbulence and pressure fluctuations caused by opening and closing, and maintains the cleanliness of the room.
流出口２１は、製造ライン用機器５への水、カス等の配
管や電ｉｇｉの引き込みにも利用される。The outflow port 21 is also used for piping for water, waste, etc., and for drawing electricity into the manufacturing line equipment 5.
第２側板３Ｇは、配管や機器の補（者なとのため、ねし
止めあるいは引掛金具などを用いて部分的に取りはずせ
るようにしておく。また、室内の作業環境の改善と外部
からの作業管理の必要上、第２側板３６の一部を透明板
とすることがある。The second side plate 3G is designed to be partially removable using screws or hooks for the purpose of repairing piping and equipment.Also, the second side plate 3G is designed to be partially removable by using screws or hooks. Due to the necessity of work management, a part of the second side plate 36 may be made of a transparent plate.
第８図にはモジュール化した覆いを多数連結してなる本
実施例による製造ライン用ユニットの外観を示す。FIG. 8 shows the appearance of a manufacturing line unit according to this embodiment, which is constructed by connecting a large number of modular covers.
第６〜８図には室内空気を第１．第２側板の下部に設け
た流出口から流出させる例を示したが、第１図の従来方
式と同様に清浄室の床部に多孔板を用いて、室内空気の
一部または全部を床下より流出させるようにすれば、室
内の清浄気流が完全な下向流となり、作業部である第２
帯域１６の清浄度をざらに高めることができる。In Figures 6 to 8, indoor air is shown in 1. Although we have shown an example in which the air flows out from the outlet provided at the bottom of the second side plate, similar to the conventional method shown in Figure 1, a perforated plate is used on the floor of the clean room to direct some or all of the indoor air from under the floor. If it is allowed to flow out, the clean airflow inside the room becomes a complete downward flow, and the second working part
The cleanliness of the zone 16 can be greatly improved.
本発明によれば主通路空間および枝通路空間への保全域
からの汚染空気の流入を防止して、主通路空間および枝
通路空間内の清浄度の維持をともに図ることか可能な清
浄室装置を得る二とができる。According to the present invention, a clean room device is capable of preventing contaminated air from flowing into the main passage space and the branch passage space from the conservation area, thereby maintaining the cleanliness of both the main passage space and the branch passage space. You can get two.
第１図は先行技術である全面ダウンフロー式クリーンル
ームのレイアウトの一例を示す図で、（ａ）は切断平面
図、（ｂ）は側断面図、第２図は本発明による清浄室装
置のレイアウトの一例を示す切断平面図、第３図（ａ）
、（ｂ）はそれぞれ第２図のＡ−Ａ線およびＢ−Ｂ線に
そった側断面図、第４図は参考のために示した半導体Ｉ
Ｃの製造工程図、第５図は主通路用ユニットの具体的構
成を示す長手方向に直角な断面図、第６図は製造ライン
用ユニットの具体的構成を示す長手方向に直角な断面図
、第７図はその要部拡大図、第８図は製造ライン用ユニ
ットの外観を示す斜視図である。
４：開閉口の一例としてのエアーシャワー装置、５：製
造ライン用機器、６：動力伝達手段、１３：主通路用ユ
ニット、１４：製造ライン用ユニット、１５：主通路空
間、１５ａ：第１の空気／争１ヒ手段、１６：作業空間
、１７：通路空間、１８：保全域、１９：第２瑞板、２
０：保全用スペースの出入り用扉、２１，３３：流出口
、２４．３６：第１及び第２側板、２５．３７：天板、
２６．４０，４１ ：送風機、２８゜４４．４５：高性
能フィルタ、７１：第１端板、７２：開閉口としての扉
、７３：枝通路空間、７３ａ：第２の空気ン争化手段、
８０：連通部、］ （ｌ ｏ ：主通路用清浄空気吹出
し口、１０１：作業部用清浄空気吹出し口、１０２：通
路部用清ａ空気吹出し口。
第
図
第
図
第
図
（ｄ）
（ｂ）
第
４
区
物ム゛Ｊび年−業の流れ４斤・Ｊ。
第
図
３
５
３
第
凹
第
凹FIG. 1 is a diagram showing an example of the layout of a full-scale downflow clean room according to the prior art, in which (a) is a cutaway plan view, (b) is a side sectional view, and FIG. 2 is a layout of a clean room apparatus according to the present invention. A cutaway plan view showing an example of FIG. 3(a)
, (b) are side sectional views taken along lines A-A and B-B in FIG. 2, respectively, and FIG.
FIG. 5 is a sectional view perpendicular to the longitudinal direction showing the specific configuration of the main passage unit, FIG. 6 is a sectional view perpendicular to the longitudinal direction showing the specific configuration of the manufacturing line unit, FIG. 7 is an enlarged view of the main part thereof, and FIG. 8 is a perspective view showing the appearance of the manufacturing line unit. 4: Air shower device as an example of opening/closing opening, 5: Manufacturing line equipment, 6: Power transmission means, 13: Main passage unit, 14: Manufacturing line unit, 15: Main passage space, 15a: First Air/fighting means, 16: Work space, 17: Passage space, 18: Conservation area, 19: Second board, 2
0: Door for access to maintenance space, 21, 33: Outlet, 24.36: First and second side plates, 25.37: Top plate,
26.40, 41: Air blower, 28°44.45: High performance filter, 71: First end plate, 72: Door as opening/closing opening, 73: Branch passage space, 73a: Second air contention means,
80: Communication section,] (l o: Clean air outlet for main passage, 101: Clean air outlet for working section, 102: Clean air outlet for passage section. ) 4th Ward Item ゛J Year - Flow of Work 4 柿・J. Figure 3 5 3rd Concave
Claims (1)
側方に略直角方向に延びて分岐した複数本の枝通路空間
（７３）と、前記主通路空間（１５）の天井部に配設さ
れて前記主通路空間（１５）に対して上方より清浄空気
を供給するよう構成された第１の空気浄化手段（１５ａ
）と、前記枝通路空間（７３）の内部に設けられて互い
に並行して延びる作業空間（１６）および通路空間（１
７）と、前記枝通路空間（７３）の天井部に配設されて
前記作業空間（１６）と前記通路空間（１７）とにそれ
ぞれ上方から清浄空気を供給するよう構成された第２の
空気浄化手段（７３ａ）とを備えており、前記枝通路空
間（７３）の前記主通路空間（１５）の側面への接続部
が常時開口した連通部（８０）によって連通されており
、さらに前記主通路空間（１５）の側方に設けられて前
記枝通路空間（７３）の外側面を囲むよう形成された保
全域（１８）を備えてなり、前記主通路空間（１５）お
よび前記枝通路空間（７３）が前記保全域（１８）に対
し正圧となるようそれぞれ下方で前記保全域（１８）に
連通していることを特徴とする清浄室装置。 ２、前記保全域（１８）は少なくとも前記枝通路空間（
７３）の外側面を囲む部分が連続するよう形成されてな
ることを特徴とする特許請求の範囲第１項記載の清浄室
装置。[Scope of Claims] 1. A main passage space (15), a plurality of branch passage spaces (73) extending laterally from the main passage space (15) in a substantially perpendicular direction and branching off, and the main passage space The first air purifying means (15a) is arranged on the ceiling of the main passage space (15) and is configured to supply clean air from above to the main passage space (15).
), a work space (16) and a passage space (1) provided inside the branch passage space (73) and extending in parallel with each other.
7), and second air arranged on the ceiling of the branch passage space (73) and configured to supply clean air from above to the work space (16) and the passage space (17), respectively. A connecting portion of the branch passage space (73) to the side surface of the main passage space (15) is in communication with the side surface of the main passage space (15) through a communication portion (80) that is always open, and A conservation area (18) is provided on the side of the passage space (15) and formed to surround the outer surface of the branch passage space (73), and the protection area (18) is provided on the side of the passage space (15) and is formed to surround the outer surface of the branch passage space (73). (73) are connected to the maintenance area (18) at the lower part so as to provide a positive pressure to the maintenance area (18). 2. The conservation area (18) includes at least the branch passage space (
73) The clean room device according to claim 1, wherein the portion surrounding the outer surface of the cleaning room device 73) is formed to be continuous.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22262090A JPH03230039A (en) | 1990-08-27 | 1990-08-27 | Purifying chamber device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22262090A JPH03230039A (en) | 1990-08-27 | 1990-08-27 | Purifying chamber device |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57008853A Division JPS58127035A (en) | 1982-01-25 | 1982-01-25 | Clean working room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03230039A true JPH03230039A (en) | 1991-10-14 |
Family
ID=16785309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22262090A Pending JPH03230039A (en) | 1990-08-27 | 1990-08-27 | Purifying chamber device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03230039A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2399776R1 (en) * | 2010-10-11 | 2013-04-17 | Tecnica En Instalaciones De Fluidos S L | AIR CONDITIONING SYSTEM FOR REDUCED DIMENSIONS ENCLOSURES |
-
1990
- 1990-08-27 JP JP22262090A patent/JPH03230039A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2399776R1 (en) * | 2010-10-11 | 2013-04-17 | Tecnica En Instalaciones De Fluidos S L | AIR CONDITIONING SYSTEM FOR REDUCED DIMENSIONS ENCLOSURES |
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