JPH03218957A - Production of ceramic sintered body - Google Patents
Production of ceramic sintered bodyInfo
- Publication number
- JPH03218957A JPH03218957A JP2012340A JP1234090A JPH03218957A JP H03218957 A JPH03218957 A JP H03218957A JP 2012340 A JP2012340 A JP 2012340A JP 1234090 A JP1234090 A JP 1234090A JP H03218957 A JPH03218957 A JP H03218957A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- powder
- hydroxide
- soln
- sintered body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000843 powder Substances 0.000 claims abstract description 38
- 238000005245 sintering Methods 0.000 claims abstract description 31
- 229910002651 NO3 Inorganic materials 0.000 claims abstract description 9
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims abstract description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims abstract description 5
- 150000005622 tetraalkylammonium hydroxides Chemical class 0.000 claims abstract description 5
- 239000002245 particle Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000010304 firing Methods 0.000 claims description 4
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 claims description 2
- NGDQQLAVJWUYSF-UHFFFAOYSA-N 4-methyl-2-phenyl-1,3-thiazole-5-sulfonyl chloride Chemical group S1C(S(Cl)(=O)=O)=C(C)N=C1C1=CC=CC=C1 NGDQQLAVJWUYSF-UHFFFAOYSA-N 0.000 claims description 2
- 125000000217 alkyl group Chemical group 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 238000000975 co-precipitation Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 229910009454 Y(OH)3 Inorganic materials 0.000 abstract description 4
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 abstract description 4
- 229910021502 aluminium hydroxide Inorganic materials 0.000 abstract 3
- 229910001679 gibbsite Inorganic materials 0.000 abstract 3
- JLDSOYXADOWAKB-UHFFFAOYSA-N aluminium nitrate Chemical compound [Al+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O JLDSOYXADOWAKB-UHFFFAOYSA-N 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 229910009253 Y(NO3)3 Inorganic materials 0.000 abstract 1
- 239000002671 adjuvant Substances 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 238000005336 cracking Methods 0.000 abstract 1
- 150000004679 hydroxides Chemical class 0.000 abstract 1
- 239000012299 nitrogen atmosphere Substances 0.000 abstract 1
- 125000005207 tetraalkylammonium group Chemical group 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- BXJPTTGFESFXJU-UHFFFAOYSA-N yttrium(3+);trinitrate Chemical compound [Y+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O BXJPTTGFESFXJU-UHFFFAOYSA-N 0.000 abstract 1
- 239000007864 aqueous solution Substances 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- -1 aluminum ion Chemical class 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910005091 Si3N Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- DEXZEPDUSNRVTN-UHFFFAOYSA-K yttrium(3+);trihydroxide Chemical compound [OH-].[OH-].[OH-].[Y+3] DEXZEPDUSNRVTN-UHFFFAOYSA-K 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、粒界相か均一な焼結助剤にて形成されている
セラミック焼結体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for producing a ceramic sintered body in which the grain boundary phase is formed of a uniform sintering aid.
（従来の技術）
従来のセラミック焼結体、例えば窒化珪素（以下Ｓ ｉ
３Ｎ４ ）の焼結体の製造方法は、焼結母材であるＳｉ
３Ｎ４の粉末に焼結助剤として作用する酸化アルミニウ
ム（以下Ａｎ２ｏ３）や酸化イットリウム（以下Ｙ２
０ｐｓ ）の粉末と少量のバインダとを混合し、乾燥造
粒して混合粉末を生成し、該混合粉末を成形した後、焼
結炉内にて加熱焼成している。(Prior Art) Conventional ceramic sintered bodies, such as silicon nitride (hereinafter referred to as Si
3N4) is a method for producing a sintered body using Si as a sintering base material.
Aluminum oxide (hereinafter referred to as An2o3) and yttrium oxide (hereinafter referred to as Y2) act as sintering aids for the 3N4 powder.
0 ps) and a small amount of binder are mixed, dried and granulated to produce a mixed powder, and after the mixed powder is shaped, it is heated and fired in a sintering furnace.
このような従来の製造方法により製造されるセラミック
焼結体は、焼成前の混合時に、各粉末の粒径や比重が異
なるため完全に均一には混合されす焼結助剤や焼結母材
が偏在する。Ceramic sintered bodies manufactured by such conventional manufacturing methods are not completely uniformly mixed during mixing before firing because each powder has a different particle size and specific gravity. are unevenly distributed.
すると、焼成時において、焼結体内部が均一に焼成され
ず、Ｓｉ３Ｎ４粒子が異常成長し、また気孔も偏析する
ため、粒界相が不均一となる。Then, during firing, the inside of the sintered body is not fired uniformly, Si3N4 particles grow abnormally, and pores also segregate, resulting in non-uniform grain boundary phases.
よって、外部からの応力が均等に分散されず集中するた
め、セラミック焼結体の強度が低下し、かつ該強度のバ
ラツキも増大し品質が一定しない。Therefore, the stress from the outside is not evenly distributed but concentrated, which reduces the strength of the ceramic sintered body and increases the variation in the strength, resulting in inconsistent quality.
そこで、焼結助剤の金属元素、すなわちアルミニウムや
イットリウムの硝酸塩水溶液を焼結母材のセラミック粉
末が分散されているアンモニア水溶液中に滴下し、該セ
ラミック粉末表面に焼結助剤を水酸化物として共沈させ
、該水酸化物を熱分解させることにより焼結助剤と焼結
母材との分散を良好にする方法や、上記硝酸塩水溶液中
に焼結母材のセラミック粉末を拡散させスラリー状にし
、該スラリーな噴露乾燥して硝酸塩を酸化物に熱分解し
焼結助剤と焼結母材との分散を良好にする方法が提案さ
れている。Therefore, an aqueous solution of nitrates of metal elements such as aluminum and yttrium as a sintering aid is dropped into an ammonia aqueous solution in which ceramic powder as a sintering base material is dispersed, and the hydroxide of the sintering aid is applied to the surface of the ceramic powder. A method of co-precipitating the hydroxide and thermally decomposing the hydroxide to improve the dispersion of the sintering aid and the sintering base material, and a method of dispersing the ceramic powder of the sintering base material in the nitrate aqueous solution to form a slurry. A method has been proposed in which the slurry is spray-dried to thermally decompose the nitrate into oxides, thereby improving the dispersion of the sintering aid and the sintering base material.
（発明が解決しようとする課題）
しかしながら、上記の焼結助剤と焼結母材との分散を良
好にする方法においても、水を溶媒として用い、更に、
ボールミル等により厳しい条件下にて攪拌が行なわれる
ため、焼結母材であるセラミック粉末の一部が分解酸化
し強度低下の原因となり、また、焼結助剤と焼結母材と
の分散も充分に満足できるものではない。(Problem to be Solved by the Invention) However, even in the method for improving the dispersion of the sintering aid and the sintering base material, water is used as a solvent, and further,
Since stirring is performed under harsh conditions using a ball mill, etc., a part of the ceramic powder, which is the sintering base material, decomposes and oxidizes, causing a decrease in strength, and also causes dispersion of the sintering aid and the sintering base material. It's not completely satisfying.
更には、上記焼結母材表面に焼結助剤を共沈させる方法
では、水酸化アルミニウム（以下Ａλ（ｏＨ）ｇ）と水
酸化イットリウム（以下Ｙ（ｏＨ）ｇ）とでは、水に対
する溶解度が異るため、焼結助剤の混合比率を制御する
ことが困難であるという問題がある。Furthermore, in the method of co-precipitating a sintering aid on the surface of the sintering base material, aluminum hydroxide (hereinafter referred to as Aλ(oH)g) and yttrium hydroxide (hereinafter referred to as Y(oH)g) have different solubility in water. There is a problem in that it is difficult to control the mixing ratio of the sintering aid because of the difference in the sintering aid.
（課題を解決するための手段）
本発明は、上記の点に鑑みてなされたもので、粒子の異
常成長及び気孔の偏析を防止し、粒界相を均一にし、高
強度であるセラミック焼結体の製造方法を提供しようと
するものである。(Means for Solving the Problems) The present invention has been made in view of the above points. The aim is to provide a method for manufacturing the body.
本発明は、セラミック粉末を分散せしめたテトラアルキ
ル水酸化アンモニウム（Ｒ４ ＮＯＨ ： Ｒ＝アルキ
ル基）溶液中に、酸化物が焼結助剤となる金属元素の硝
酸塩溶液を添加攪拌して該金属元素の水酸化物を生成さ
せて該水酸化物を上記セラミック粉末の粉体粒子表面に
均一に共沈せしめ、次に該セラミック粉末を加熱して粉
体粒子表面に共沈した水酸化物を焼結助剤である酸化物
に熱分解して上記粉体粒子表面を焼結助剤である酸化物
で均一に被覆した後、セラミック粉末を成形し焼成する
ことによりセラミック焼結体を製造するものである。In the present invention, a nitrate solution of a metal element whose oxide serves as a sintering aid is added and stirred into a tetraalkyl ammonium hydroxide (R4 NOH: R=alkyl group) solution in which ceramic powder is dispersed. The hydroxide is uniformly coprecipitated on the surface of the powder particles of the ceramic powder, and then the ceramic powder is heated to sinter the hydroxide coprecipitated on the surface of the powder particles. Ceramic sintered bodies are manufactured by thermally decomposing the powder particles into oxides, which are sintering aids, and uniformly coating the surfaces of the powder particles with oxides, which are sintering aids, and then molding and firing the ceramic powder. It is.
（作用）
本発明の製造方法は、セラミック粉末粒子表面に均一に
焼結助剤を分散させることができ、また、分散媒にテト
ラアルキル水酸化アンモニウムを使用しているので、セ
ラミック粒子が分解酸化しない。(Function) The manufacturing method of the present invention can uniformly disperse the sintering aid on the surface of the ceramic powder particles, and since tetraalkyl ammonium hydroxide is used as the dispersion medium, the ceramic particles are decomposed and oxidized. do not.
（実施例）
本発明のセラミック焼結体の製造工程について説明する
。(Example) The manufacturing process of the ceramic sintered body of the present invention will be explained.
図は、本発明の製造工程を示すフロー図である。The figure is a flow diagram showing the manufacturing process of the present invention.
テトラメチル水酸化アンモニウム（以下（ＣＨ３） ４
ＮＯＨ）の溶液中に平均粒径０．６μｍのＳｉ３Ｎ４粉
末を投入し分散攪拌する。Tetramethyl ammonium hydroxide (hereinafter (CH3) 4
Si3N4 powder with an average particle size of 0.6 μm is added to a solution of NOH) and dispersed and stirred.
次に、Ｓｉ３Ｎ４粉末に対してＡ１２０．換算で３ｗｔ
％の硝酸アルミニウムｌｕ下Ａｊｌ！（ＮＯｇ）ｇ）と
、Ｙ２０３換算で５ｗｔ％の硝酸イットリウム（以下Ｙ
（ＮＯＥＳ ）３）を添加する。Next, A120. 3wt in conversion
% aluminum nitrate lu Ajl! (NOg)g) and 5wt% yttrium nitrate (hereinafter Y
(NOES)3) is added.
すると、アルミニウムイオンはＡｉ（ＯＨ）３となり、
イットリウムイオンはＹ （ＯＨ）．となり、Ｓｉ３Ｎ
４粉末表面に共沈する。Then, the aluminum ion becomes Ai(OH)3,
Yttrium ion is Y (OH). So, Si3N
4 Co-precipitate on the powder surface.
次に、表面がＡｕ （ＯＨ）３及びＹ（ＯＨ）３で被覆
されたＳ ｉ５ Ｎ４粉末をろ過水洗した後、スプレー
ドライヤーにて乾燥造粒し、表面を被覆しているＡ℃（
ＯＨ）ｇ及びＹ（ＯＨ）５をＡρ２０３及びＹ２０３に
熱分解する。Next, the S i5 N4 powder whose surface was coated with Au (OH)3 and Y(OH)3 was filtered and washed with water, and then dried and granulated using a spray dryer.
OH)g and Y(OH)5 are thermally decomposed to Aρ203 and Y203.
次に、該造粒された粉体を軸プレスにて成形した後、９
Ｋｇ／ｃｒｎ’のＮ２７囲気にて１８００℃で５時間加
熱し、試料Ａを焼成する。Next, after molding the granulated powder with an axial press,
Sample A is fired by heating at 1800°C for 5 hours in an N27 atmosphere of Kg/crn'.
該試料Ａと比較するため、（ＣＨ− ）４ ＮＯＨ溶液
の代わりにアンモニア水溶液を用いて試料Ｂを作成した
。For comparison with Sample A, Sample B was prepared using an ammonia aqueous solution instead of the (CH-)4 NOH solution.
更に、Ａ文（ＮＯ３）ｇとＹ（ＮＯ３）ｇとの混合水溶
液中にＳｉ３Ｎ４粉末を拡散させスラリーとし、該スラ
リーを噴霧乾燥してＡＩＬ２０３及びＹ２ｏ３に熱分解
した造粒粉体を用いて試料Ｃを作成した。Furthermore, Si3N4 powder was dispersed in a mixed aqueous solution of A (NO3) g and Y (NO3) g to form a slurry, and the slurry was spray-dried and pyrolyzed into AIL203 and Y2o3. Created C.
上記試料Ａ，Ｂ及びＣの各々をＪ Ｉ Ｓ−Ｒ１６０１
に定められた試験片に整形し、４点曲げ強度試験を行な
った。Each of the above samples A, B and C was tested using JIS-R1601.
The specimen was shaped into a test piece specified in 2013, and a four-point bending strength test was conducted.
該強度試験の結果を表に示す。The results of the strength test are shown in the table.
該表より明らかなように、本発明による焼結体である試
料Ａは、従来の焼結体である試料Ｂ及びＣと比較して、
高強度である。As is clear from the table, Sample A, which is a sintered body according to the present invention, has a
High strength.
これは、第１に、焼結助剤がＳｉ３Ｎ４粉末のの粉体粒
子表面に均一にコーティングされ、焼結時において、Ｓ
ｉｇＮ４成型体全体が一様に焼成され、組織が均一にな
るためであると考えられる。First, the sintering aid is uniformly coated on the surface of the Si3N4 powder particles, and during sintering, the S
This is thought to be because the entire ignN4 molded body was fired uniformly, resulting in a uniform structure.
組織の電子顕微鏡観察結果においても、従来方法にて作
成した試料Ｂ及びＣには異常粒子が発達しているのが誌
められるが、本発明による方法にて作成した試料Ａにお
いては、異常粒子の発達は認められず、均一な組織が観
察された。The results of electron microscopy of the tissue also show that abnormal particles have developed in Samples B and C prepared using the conventional method, but abnormal particles have developed in Sample A prepared using the method of the present invention. No development was observed, and a uniform structure was observed.
また、第２に、Ｓｉ３Ｎ４粉末が水によって分解酸化等
されず、粉体粒子表面に変質が起きないため粒界相が強
固になり、よって強度が上がっているものと考えられる
。Secondly, the Si3N4 powder is not decomposed and oxidized by water, and the surface of the powder particles is not altered, so the grain boundary phase becomes stronger, which is thought to increase the strength.
以上、本発明の実施例について説明したが、本発明の精
神から逸れないかぎりで、種々の異なる実施例は容易に
構成できるから、本発明は前記特許請求の範囲において
記載した限定以外、特定の実施例に制約されるものでは
ない。Although the embodiments of the present invention have been described above, various different embodiments can be easily constructed without departing from the spirit of the present invention. The invention is not limited to the examples.
（発明の効果）
以上説明したように、本発明によれば、セラミック焼結
体内部に粒子の異常成長や気孔の偏析か無く、粒界相か
均一であるため、従来の製造方法により製造されたセラ
ミック焼結体に対して高強度であるセラミック焼結体の
製造方法を提供できる。(Effects of the Invention) As explained above, according to the present invention, there is no abnormal growth of particles or segregation of pores inside the ceramic sintered body, and the grain boundary phase is uniform. It is possible to provide a method for manufacturing a ceramic sintered body having higher strength than other ceramic sintered bodies.
４4
図は、 本発明の製造工程を示すフロー図であ る。 The diagram is FIG. 2 is a flow diagram showing the manufacturing process of the present invention. Ru.
Claims (4)
水酸化アンモニウム（Ｒ＿４ＮＯＨ：Ｒ＝アルキル基）
溶液中に、酸化物が焼結助剤となる金属元素の硝酸塩溶
液を添加攪拌して該金属元素の水酸化物を生成させて該
水酸化物を上記セラミック粉末の粉体粒子表面に均一に
共沈せしめ、次に該セラミック粉末を加熱して粉体粒子
表面に共沈した水酸化物を焼結助剤である酸化物に熱分
解して上記粉体粒子表面を焼結助剤である酸化物で均一
に被覆した後、セラミック粉末を成形し焼成することを
特徴とするセラミック焼結体の製造方法。(1) Tetraalkyl ammonium hydroxide (R_4NOH: R = alkyl group) in which ceramic powder is dispersed
A nitrate solution of a metal element whose oxide serves as a sintering aid is added to the solution and stirred to generate a hydroxide of the metal element, and the hydroxide is uniformly distributed on the surface of the powder particles of the ceramic powder. Co-precipitation is carried out, and then the ceramic powder is heated to thermally decompose the hydroxide coprecipitated on the powder particle surface into an oxide which is a sintering aid, thereby converting the powder particle surface into a sintering aid. A method for producing a ceramic sintered body, which comprises forming and firing ceramic powder after uniformly coating it with an oxide.
ラメチル水酸化アンモニウム（（ＣＨ＿３）＿４ＮＯＨ
）であることを特徴とする請求項（１）記載のセラミッ
ク焼結体の製造方法。(2) The above tetraalkyl ammonium hydroxide is tetramethyl ammonium hydroxide ((CH_3)_4NOH
) The method for manufacturing a ceramic sintered body according to claim (1).
４）粉末であることを特徴とする請求項（１）記載のセ
ラミック焼結体の製造方法。(3) The above ceramic powder is silicon nitride (Si_3N_
4) The method for producing a ceramic sintered body according to claim 1, wherein the ceramic sintered body is a powder.
＿３）＿３）及び硝酸アルミニウム（Ａｌ（ＮＯ＿３）
＿３）の内の少なくとも１種であることを特徴とする請
求項（１）記載のセラミック焼結体の製造方法。(4) The above nitrate is yttrium nitrate (Y(NO
_3)_3) and aluminum nitrate (Al(NO_3)
The method for producing a ceramic sintered body according to claim (1), characterized in that the material is at least one of _3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012340A JPH03218957A (en) | 1990-01-22 | 1990-01-22 | Production of ceramic sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012340A JPH03218957A (en) | 1990-01-22 | 1990-01-22 | Production of ceramic sintered body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03218957A true JPH03218957A (en) | 1991-09-26 |
Family
ID=11802562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012340A Pending JPH03218957A (en) | 1990-01-22 | 1990-01-22 | Production of ceramic sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03218957A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11697880B2 (en) | 2016-08-16 | 2023-07-11 | Seram Coatings As | Thermal spraying of ceramic materials comprising metal or metal alloy coating |
-
1990
- 1990-01-22 JP JP2012340A patent/JPH03218957A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11697880B2 (en) | 2016-08-16 | 2023-07-11 | Seram Coatings As | Thermal spraying of ceramic materials comprising metal or metal alloy coating |
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