JPH0313510A - Manufacture of fine powder by laser beam - Google Patents
Manufacture of fine powder by laser beamInfo
- Publication number
- JPH0313510A JPH0313510A JP15001389A JP15001389A JPH0313510A JP H0313510 A JPH0313510 A JP H0313510A JP 15001389 A JP15001389 A JP 15001389A JP 15001389 A JP15001389 A JP 15001389A JP H0313510 A JPH0313510 A JP H0313510A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- laser
- fine powder
- laser beam
- plume
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title claims abstract description 51
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 43
- 239000002184 metal Substances 0.000 claims abstract description 43
- 239000007789 gas Substances 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 24
- 229910052755 nonmetal Inorganic materials 0.000 claims abstract description 10
- 238000001816 cooling Methods 0.000 claims abstract description 4
- 239000011261 inert gas Substances 0.000 claims abstract description 4
- 230000001678 irradiating effect Effects 0.000 claims abstract description 4
- 239000000203 mixture Substances 0.000 claims description 11
- 230000006698 induction Effects 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 28
- 239000002245 particle Substances 0.000 abstract description 7
- 230000008018 melting Effects 0.000 abstract description 3
- 238000002844 melting Methods 0.000 abstract description 3
- 239000002994 raw material Substances 0.000 abstract 2
- 150000002739 metals Chemical class 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910001111 Fine metal Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 239000011882 ultra-fine particle Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 150000002843 nonmetals Chemical class 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- QVYYOKWPCQYKEY-UHFFFAOYSA-N [Fe].[Co] Chemical compound [Fe].[Co] QVYYOKWPCQYKEY-UHFFFAOYSA-N 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- -1 methane is used Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はレーザ光線による微粉末の新規な製造方法に関
するものである。さらに詳しくいえば、本発明は、高エ
ネルギー密度ビームのレーザ光線の照射によって生じる
レーザプルームを利用して、溶射材料をはじめ、粉体粉
末関連分野における素材として有用な、ザブミクロンオ
ーダ以下の大きさの金属系微粉末を効率よく製造する方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to a novel method for producing fine powder using laser beams. More specifically, the present invention utilizes a laser plume generated by irradiation with a high-energy-density laser beam to create a material with a size of submicron order or less that is useful as a material in fields related to powder, including thermal spray materials. The present invention relates to a method for efficiently producing metal-based fine powder.
従来の技術
従来、粉体粉末冶金工業をはじめとする各種工業分野に
おいて用いられる金属系微粉末は、粒子径が数μｍない
し数十μｍの範囲のものが主流を占めていｔ；が、近年
、高機能化や高性能化などへのニーズにこたえるものと
してサブミクロンオーダ以下の大きさの金属系超微粉末
が注目されるようになってきた。Conventional technology Traditionally, metal-based fine powders used in various industrial fields including the powder metallurgy industry have mainly had particle diameters in the range of several μm to several tens of μm; however, in recent years, Ultrafine metal powders with a size of submicron order or less have been attracting attention as a means of meeting the needs for higher functionality and performance.
一般に、粉末の粒径が小さくなるに伴い、粉末を構成し
ている全原子数に対する表面原子数の比が大きくなるた
め、超微粉末においては、元の素材にない新しい特性が
、例えば磁性、光物性、熱抵抗、融点、電気伝導、焼結
性などにおいて、発渾されることが知られている。この
ような特性の応用としては、例えば鉄−コバルト合金な
どの超微粒子は、１個の粒子が永久磁石となるため、金
属の塊よりも極めて高い磁性を示すことから、ビデオテ
ープなどの磁性材料として、従来から用いられており、
またファインセラミックス用焼結材料として、優れた焼
結性を示す炭化ケイ素や窒化ケイ素などの超微粉末が開
発されている。さらに最近では、次世代の大容量記録方
式として期待されている光ディスクに超微粒子を利用す
る研究、あるいは超微粒子を利用するガス・デポジショ
ン法による薄膜化の研究が盛んに行われている。Generally, as the particle size of a powder decreases, the ratio of the number of surface atoms to the total number of atoms constituting the powder increases, so ultrafine powders can have new properties not found in the original material, such as magnetism, It is known to have significant effects on optical properties, thermal resistance, melting point, electrical conductivity, sinterability, etc. For example, ultrafine particles such as iron-cobalt alloys can be used in magnetic materials such as video tapes because each particle acts as a permanent magnet and exhibits extremely higher magnetism than a lump of metal. It has been traditionally used as
Furthermore, ultrafine powders such as silicon carbide and silicon nitride, which exhibit excellent sinterability, have been developed as sintering materials for fine ceramics. Furthermore, recently, research has been actively conducted on the use of ultrafine particles in optical disks, which are expected to be a next-generation high-capacity recording method, and on the use of gas deposition methods to make thin films using ultrafine particles.
このように、金属系超微粉末は新しい機能性材料として
注目され、その応用開発が積極的になされている。As described above, ultrafine metal powders are attracting attention as new functional materials, and their applications are being actively developed.
従来、金属系の超微粉末を含めた微粉末の製造方法とし
ては、例えば高速度衝撃粉砕機、ボールミル、気流粉砕
機、媒体かくはんミルなどを用いる機械的粉砕分級法、
及び原子、イオンからの核発生や成長の過程で微粒子を
形成させる化学的方法などが知られている。しかしなが
ら、機械的粉砕分級法においては、エネルギー効率が悪
い、異物が混入しやすい、分級操作が必要で、プロセス
が煩雑であるなどの欠点を有し、−力比学的方法におい
て、微粒子の形成に長時間を要し、実用的でないという
欠点がある。Conventionally, methods for producing fine powders, including metal-based ultrafine powders, include mechanical crushing and classification methods using, for example, high-speed impact crushers, ball mills, air flow crushers, media agitation mills, etc.
Also known are chemical methods in which fine particles are formed through the process of nuclear generation and growth from atoms and ions. However, the mechanical crushing and classification method has drawbacks such as poor energy efficiency, easy contamination of foreign substances, the need for classification operations, and a complicated process. The drawback is that it takes a long time and is not practical.
このような欠点を改良した金属系微粉末の製造方法とし
て、連続供給される金属ワイヤの先端をレーザ光線によ
り溶融するとともに、前記ワイヤ先端の溶融金属をガス
流でワイヤから分離し、放出して微粉末を形成させる方
法が提案されている（特開昭５１−５６７６２号公報、
特開昭６１−２６４１０８号公報、特開昭６３−６１３
６４号公報）。As a method for manufacturing fine metal powder that improves these drawbacks, the tip of a continuously supplied metal wire is melted by a laser beam, and the molten metal at the tip of the wire is separated from the wire by a gas flow and released. A method of forming fine powder has been proposed (Japanese Unexamined Patent Publication No. 51-56762,
JP-A-61-264108, JP-A-63-613
Publication No. 64).
しかしながら、前記方法においては、ガス流による溶融
金属の物理的ａｍ化手法であるので、サブミクロンオー
ダ以下の大きさの超微粒子の製造は困難であり、また、
溶融から凝固までの時間が短いために、反応を利用する
場合には適正条件領域が狭いなどの問題があり、必ずし
も十分に満足しうるものではない。However, since the method is a physical atomization method of molten metal using a gas flow, it is difficult to produce ultrafine particles with a size of submicron order or less.
Since the time from melting to solidification is short, there are problems such as a narrow range of appropriate conditions when using a reaction, and it is not always fully satisfactory.
発明が解決しようとする課題
本発明は、このような従来の金属系微粉末の製造方法が
有する欠点を克服し、サブミクロンオーダ以下の大きさ
の金属系微粉末を簡単な操作で効率よく製造するための
方法を提供することを目的としてなされたものである。Problems to be Solved by the Invention The present invention overcomes the drawbacks of such conventional methods for producing fine metal powder, and enables efficient production of fine metal powder with a size of submicron order or less using simple operations. This was done with the purpose of providing a method for doing so.
課題を解決するための手段
本発明者らは、前記目的を達成するＩ；めに鋭意研究を
重ねた結果、１種の金属又は金属同士や金属と非金属と
の混合物に高エネルギー密度ビームのレーザ光線を照射
して得られたレーザプルームをガス流により冷却するこ
とにより、サブミクロンオーダ以下の大きさの金属系微
粉末が容易に得られること、また、該レーザプルーム内
で反応を伴う場合には、このレーザプルームを高周波誘
導加熱することにより、該反応を容易に促進しうろこと
を見い出し、この知見に基づいて本発明を完成するに至
った。Means for Solving the Problems As a result of intensive research aimed at achieving the above object, the present inventors have discovered that high energy density beams can be applied to one type of metal, a mixture of metals, or a mixture of metals and non-metals. By cooling the laser plume obtained by irradiating a laser beam with a gas flow, metal-based fine powder with a size of submicron order or less can be easily obtained, and if a reaction occurs within the laser plume. The inventors discovered that the reaction could be easily promoted by heating the laser plume by high-frequency induction, and based on this knowledge, the present invention was completed.
すなわち、本発明は、高エネルギー密度ビームのレーザ
光線を、少なくとも１種の金属又は少なくとも１種の金
属と少なくとも１種の非金属との混合物に照射し、これ
を溶融させてレーザプルームを発生させ、次いでこのレ
ーザプルームをそのままで、あるいは高周波誘導加熱し
たのち、ガス流により冷却することを特徴とするレーザ
光線による微粉末の製造方法を提供するものである。That is, the present invention irradiates a high energy density laser beam onto at least one metal or a mixture of at least one metal and at least one non-metal to melt the metal and generate a laser plume. Then, the present invention provides a method for producing fine powder using a laser beam, which is characterized in that the laser plume is cooled as is or after high-frequency induction heating and then cooled by a gas flow.
以下、本発明の詳細な説明する。The present invention will be explained in detail below.
本発明方法においては、素材の金属や非金属を溶融させ
てレーザプルームを発生させるために、高エネルギー密
度ビームのレーザ光線が用いられる。この高エネルギー
密度ビームのレーザ光線は、例えばレーザ光線を集光レ
ンズにより収れんさせることにより得ることができる。In the method of the present invention, a high energy density laser beam is used to melt the metal or nonmetal material and generate a laser plume. This high-energy-density laser beam can be obtained, for example, by converging the laser beam with a condenser lens.
本発明方法においては、金属系微粉末の素材として、少
なくとも１種の金属又は少なくとも１種の金属と少なく
とも１種の非金属との混合物が用いられる。該金属の種
類については、高エネルギー密度ビームのレーザ光線に
より溶融して、レーザプルームを発生するものであれば
よく、特に制限されず、例えば金、銀、鉄、コバルト、
クロム、ニッケル、マンガン、銅、ビスマス、チタン、
ジルコニウム、ニオブ、イツトリウム、テルビウム、ガ
ドリニウム、スズ、鉛、亜鉛、アルミニウム、ケイ素、
バリウムなどが挙げられるが、もちろんこれらに限定さ
れるものではない。また、これらの金属は１種用いても
よいし、２種以上を組み合わせて用いてもよい。In the method of the present invention, at least one metal or a mixture of at least one metal and at least one non-metal is used as the material for the metal-based fine powder. The type of metal is not particularly limited as long as it can be melted by a high energy density laser beam to generate a laser plume, and examples include gold, silver, iron, cobalt,
Chromium, nickel, manganese, copper, bismuth, titanium,
Zirconium, niobium, yttrium, terbium, gadolinium, tin, lead, zinc, aluminum, silicon,
Examples include barium, but are of course not limited to these. Further, these metals may be used alone or in combination of two or more.
一方、非金属については、前記の条件を満たし、かつ併
用する前記金属と反応しうるものであればよく特に制限
はない。このようなものとしては、例えば炭素、ホウ素
、リンなどが挙げられるが、もちろんこれらに限定され
るものではない。これらの非金属は前記金属と混合して
用いられるが、この場合それぞれ１種用いてもよいし、
２種以上を用いてもよい。On the other hand, the non-metal is not particularly limited as long as it satisfies the above conditions and can react with the metal used in combination. Examples of such materials include carbon, boron, phosphorus, etc., but of course the material is not limited to these. These non-metals are used in combination with the above-mentioned metals, but in this case, one type of each may be used,
Two or more types may be used.
本発明方法においては、これらの素材に高エネルギー密
度ビームのレーザ光線を照射し、該素材を溶融させてレ
ーザプルームを発生させ、次いでこのレーザプルームを
ガス流で冷却することにより所望の微粉末が得られるが
、該レーザプルーム内において、金属蒸気間又は金属と
非金属との蒸気間、あるいは金属蒸気と雰囲気ガスとの
間で反応が伴う場合には、該レーザプルームを、所望に
より高周波誘導加熱してその反応を促進させたのち、ガ
ス流により該レーザプルームを冷却してもよい。In the method of the present invention, these materials are irradiated with a high-energy-density laser beam to melt the materials and generate a laser plume, and then this laser plume is cooled with a gas flow to form the desired fine powder. However, if a reaction occurs within the laser plume between metal vapors, between metal and nonmetal vapors, or between metal vapors and atmospheric gas, the laser plume may be heated by high-frequency induction heating if desired. After the reaction is accelerated, the laser plume may be cooled by a gas flow.
また、このガス流としては、アルゴンやヘリウムなどの
不活性ガスを用いてもよいし、素材と雰囲気ガスとの反
応を所望する場合には、目的に応じて酸素、窒素、炭化
水素などの反応性ガスを適宜用いてもよい。例えば該ガ
ス流として酸素を用いる場合には金属酸化物の微粉末が
、窒素を用いる場合には金属窒化物の微粉末が、メタン
などの炭化水素を用いる場合には金属炭化物の微粉末が
得られる。In addition, as this gas flow, an inert gas such as argon or helium may be used, or if a reaction between the material and the atmospheric gas is desired, a reaction gas such as oxygen, nitrogen, or hydrocarbon may be used depending on the purpose. A toxic gas may be used as appropriate. For example, when oxygen is used as the gas stream, fine powder of metal oxide is obtained, when nitrogen is used, fine powder of metal nitride is obtained, and when hydrocarbon such as methane is used, fine powder of metal carbide is obtained. It will be done.
このようにして、金属単体微粉末、金属合金微粉末、金
属と非金属との化合物の微粉末金属と雰囲気ガスとの化
合物の微粉末、あるいはこれらの混合物から成る複合微
粉末などが効率よく得られる。これらの微粉末の平均粒
子径は、通常０．２〜１．０μｍの範囲である。In this way, fine metal powders, fine metal alloy powders, fine powders of compounds of metals and non-metals, fine powders of compounds of metals and atmospheric gas, and composite fine powders made of mixtures thereof can be efficiently obtained. It will be done. The average particle diameter of these fine powders is usually in the range of 0.2 to 1.0 μm.
次に、添付図面に従って、本発明のレーザ光線による微
粉末の製造方法の好適な１例について説明する。Next, a preferred example of the method for producing fine powder using a laser beam according to the present invention will be described with reference to the accompanying drawings.
第１図は本発明方法を実施するための装置の１例の説明
図であって、レーザ発生装置からのレーザ光線を集光レ
ンズで収れんさせて得られた高エネルギー密度ビームの
レーザ光線ｌを保持台７上の微粉未形成用素材２に照射
し、該素材２を溶融させて、その直上にレーザプルーム
３を発生させる。次に、レーザプルーム３をシールド（
保護）するように、ノズル４から不活性ガス５を、アル
ミニウムのような金属製の回収板６の方向に流すことに
より、該プルーム３はガスと共に流れ、かつ冷却されて
回収板６の表面に、所望の微粉末が集積される。FIG. 1 is an explanatory diagram of one example of an apparatus for implementing the method of the present invention, in which a laser beam l of a high energy density beam obtained by converging a laser beam from a laser generator with a condensing lens is shown. The laser beam irradiates the material 2 on which no fine powder is formed on the holding table 7, melts the material 2, and generates a laser plume 3 directly above it. Next, shield the laser plume 3 (
By flowing an inert gas 5 from a nozzle 4 in the direction of a collection plate 6 made of metal such as aluminum so as to protect the plume 3, the plume 3 flows with the gas and is cooled to the surface of the collection plate 6. , the desired fine powder is accumulated.
また、第２図は同じように本発明方法を実施するための
装置の別の例を示す説明図であって、レーザ光線ｌは反
射鏡８で方向を変えられ、素材支持台７の上の微粉未形
成用素材２に照射される。Similarly, FIG. 2 is an explanatory view showing another example of the apparatus for implementing the method of the present invention, in which the direction of the laser beam l is changed by a reflecting mirror 8, and the laser beam l is placed on the material support stand 7. The material 2 for non-fine powder formation is irradiated.
これにより素材２は溶融され、レーザプルーム３を発生
する。As a result, the material 2 is melted and a laser plume 3 is generated.
次に、このレーザプルーム３は高周波コイル辱により高
周波誘導棒加熱され、ノズル４からの反応性ガス５′と
反応しながら回収板６の方向へ流れ、この上に捕集され
る。Next, this laser plume 3 is heated by a high-frequency induction rod by a high-frequency coil, flows toward a collection plate 6 while reacting with the reactive gas 5' from the nozzle 4, and is collected thereon.
発明の効果
本発明によると、高エネルギー密度ビームのレーザ光線
を素材に照射して発生するレーザプルームを利用するこ
とにより、サブミクロンオーダ以下の大きさの金属系微
粉末を極めて効率よく製造することができる。また、レ
ーザプルーム内で反応を伴う場合には、該レーザプルー
ムを高周波誘導加熱することにより、その反応を促進す
ることが可能である。Effects of the Invention According to the present invention, by using a laser plume generated by irradiating a material with a high-energy density laser beam, metal-based fine powder with a size of submicron order or less can be manufactured extremely efficiently. I can do it. Furthermore, if a reaction occurs within the laser plume, the reaction can be promoted by high-frequency induction heating of the laser plume.
本発明方法で得られた金属系微粉末は、サブミクロンオ
ーダ以下の大きさを有し、かつ異物の混入もなく、例え
ば溶射材料、ファインセラミックス用焼結材料、金属と
セラミックスとの接合用バインダー、ビデオテープ用磁
性材料、光デイスク用材料、耐熱、耐食性皮膜の構造と
して重要な傾斜組成膜用材料、ガス・デポジション法に
よる薄膜形成用材料、金属の射出成形用材料、粉末冶金
用材料などとして極めて有用である。The metal-based fine powder obtained by the method of the present invention has a size of submicron order or less and is free of foreign matter, and can be used, for example, as a thermal spray material, a sintered material for fine ceramics, or a binder for joining metals and ceramics. , magnetic materials for video tapes, materials for optical disks, materials for gradient composition films important for the structure of heat-resistant and corrosion-resistant films, materials for forming thin films by gas deposition methods, materials for metal injection molding, materials for powder metallurgy, etc. It is extremely useful as a
実施例
次に、実施例により本発明をさらに詳細に説明するが、
本発明はこれらの例によってなんら限定されるものでは
ない。Examples Next, the present invention will be explained in more detail with reference to examples.
The present invention is not limited in any way by these examples.
実施例１
第１図に示す装置を用い、以下の条件で炭化ケイ素の微
粉末を調製した。Example 1 Using the apparatus shown in FIG. 1, fine powder of silicon carbide was prepared under the following conditions.
レーザ出カニ３ｋＷ
焦点はずし：＋１００ｍｍ
使 用 ガ ス：アルゴン
試 料：ケイ素とカーボンとの混合物
レンズ焦点距離： ２５０Ｔ１１
第３図及び第４図にそれぞれ、得られた微粉末の走査電
子顕微鏡写真及びＸ線回折チャートを示す。Laser output 3kW Defocus: +100mm Gas used: Argon Sample: Silicon and carbon mixture Lens focal length: 250T11 Figures 3 and 4 show scanning electron micrographs and X-rays of the obtained fine powder, respectively. A line diffraction chart is shown.
この第３図及び第４図から、該微粉末はケイ素とカーボ
ンとが反応して成る炭化ケイ素を含んでいることが分か
る。なお、得られた微粉末の平均粒径は０．５μｍであ
った。It can be seen from FIGS. 3 and 4 that the fine powder contains silicon carbide formed by reacting silicon and carbon. Note that the average particle size of the obtained fine powder was 0.5 μm.
実施例２
第２図に示す装置を用い、以下の条件下でアルミニウム
とチタニウムとの混合物の微粉末を調製しｔ二。Example 2 Using the apparatus shown in FIG. 2, a fine powder of a mixture of aluminum and titanium was prepared under the following conditions.
レーザ出カニ２ｋＷ 焦点はずしニー５抛履 使 用 ガ ス：アルゴン 試 料ニアルミニウムとチタニウムとの混合物 第５図に得られた微粉末のＸ線回折チャートを示す。Laser output crab 2kW 5 out of focus knees Gas used: Argon Sample Mixture of Nialuminum and Titanium FIG. 5 shows an X-ray diffraction chart of the obtained fine powder.
この第５図から該微粉末は、通常の方法では生成し難い
アルミニウムとチタニウムとが反応して成る金属間化合
物を含んでいることが分かる。It can be seen from FIG. 5 that the fine powder contains an intermetallic compound formed by the reaction of aluminum and titanium, which is difficult to produce by normal methods.
第１図及び第２図は、本発明方法を実施するための装置
のそれぞれ異なった例の説明図であって、図中符号ｌは
レーザ光線、２は微粉未形成用素材、３はレーザブルー
ム、４はノズル、５．５’はガス流、６は回収板、７は
微粉未形成用素材保持台である。
第３図は、本発明方法で得られｔ；微粉末走査電子顕微
鏡写真図、第４図及び第５図はＸ線回折チャートである
。
第２ｆｌｌｊ1 and 2 are explanatory diagrams of different examples of the apparatus for carrying out the method of the present invention, in which reference numeral 1 indicates a laser beam, 2 indicates a material for non-fine powder formation, and 3 indicates a laser bloom. , 4 is a nozzle, 5.5' is a gas flow, 6 is a collection plate, and 7 is a material holder for unformed fine powder. FIG. 3 is a scanning electron micrograph of fine powder obtained by the method of the present invention, and FIGS. 4 and 5 are X-ray diffraction charts. 2nd flj
Claims (1)
も１種の金属又は少なくとも１種の金属と少なくとも１
種の非金属との混合物に照射し、これを溶融させてレー
ザプルームを発生させ、次いでこのレーザプルームをそ
のままで、あるいは高周波誘導加熱したのち、ガス流に
より冷却することを特徴とするレーザ光線による微粉末
の製造方法。 ２ ガス流が不活性ガス流又は反応性ガス流である請求
項１記載の製造方法。[Scope of Claims] 1. A laser beam of a high energy density beam is combined with at least one metal or at least one metal and at least one metal.
A method using a laser beam characterized by irradiating a mixture of seeds and a nonmetal to melt the mixture to generate a laser plume, and then cooling the laser plume as it is or after heating it by high-frequency induction and cooling it with a gas flow. Method for producing fine powder. 2. The method of claim 1, wherein the gas stream is an inert gas stream or a reactive gas stream.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1150013A JPH07122085B2 (en) | 1989-06-12 | 1989-06-12 | Method for producing fine powder by laser beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1150013A JPH07122085B2 (en) | 1989-06-12 | 1989-06-12 | Method for producing fine powder by laser beam |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0313510A true JPH0313510A (en) | 1991-01-22 |
| JPH07122085B2 JPH07122085B2 (en) | 1995-12-25 |
Family
ID=15487571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1150013A Expired - Lifetime JPH07122085B2 (en) | 1989-06-12 | 1989-06-12 | Method for producing fine powder by laser beam |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07122085B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH101767A (en) * | 1996-06-12 | 1998-01-06 | Takao Araki | Formation of titanium-aluminum intermetallic compound powder and formation of titanium-aluminum sprayed coating film |
| JP2005334782A (en) * | 2004-05-27 | 2005-12-08 | Hamamatsu Photonics Kk | Device and method for preparing particulate |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101448594B1 (en) * | 2007-12-20 | 2014-10-13 | 재단법인 포항산업과학연구원 | Apparatus for manufacturing amorphous particle and method thereof |
| KR101400901B1 (en) * | 2011-10-20 | 2014-05-29 | 한국기계연구원 | Method for preparing ５００ ㎚-１０ ㎛ sized fine spherical powder using high temperature source |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6254005A (en) * | 1985-09-02 | 1987-03-09 | Hitachi Ltd | Production of hyperfine particles |
| JPS6397226A (en) * | 1986-10-13 | 1988-04-27 | Nkk Corp | Producing apparatus for hyperfine particle |
-
1989
- 1989-06-12 JP JP1150013A patent/JPH07122085B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6254005A (en) * | 1985-09-02 | 1987-03-09 | Hitachi Ltd | Production of hyperfine particles |
| JPS6397226A (en) * | 1986-10-13 | 1988-04-27 | Nkk Corp | Producing apparatus for hyperfine particle |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH101767A (en) * | 1996-06-12 | 1998-01-06 | Takao Araki | Formation of titanium-aluminum intermetallic compound powder and formation of titanium-aluminum sprayed coating film |
| JP2005334782A (en) * | 2004-05-27 | 2005-12-08 | Hamamatsu Photonics Kk | Device and method for preparing particulate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07122085B2 (en) | 1995-12-25 |
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