JPH0280245U - - Google Patents

Info

Publication number
JPH0280245U
JPH0280245U JP16056788U JP16056788U JPH0280245U JP H0280245 U JPH0280245 U JP H0280245U JP 16056788 U JP16056788 U JP 16056788U JP 16056788 U JP16056788 U JP 16056788U JP H0280245 U JPH0280245 U JP H0280245U
Authority
JP
Japan
Prior art keywords
pulley
slide
idler pulley
screw groove
idler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16056788U
Other languages
Japanese (ja)
Other versions
JPH0452514Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988160567U priority Critical patent/JPH0452514Y2/ja
Priority to US07/431,171 priority patent/US5022619A/en
Publication of JPH0280245U publication Critical patent/JPH0280245U/ja
Application granted granted Critical
Publication of JPH0452514Y2 publication Critical patent/JPH0452514Y2/ja
Expired legal-status Critical Current

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  • Transmission Devices (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、本考案によるワイヤを用いた送り装
置の実施例を示す略図である。第２図は、従来の
ワイヤを用いた送り装置の動作原理を示す略図で
ある。 １……ワイヤ、３……スライドプーリ、３ａ…
…スクリユー溝、４……アイドルプーリ、５……
ストロークベアリング、６……ボール、７……ス
プラインカツプリング、８……モータ、９……駆
動対象物、１１……送りプーリ。 FIG. 1 is a schematic diagram showing an embodiment of a feeding device using a wire according to the present invention. FIG. 2 is a schematic diagram showing the operating principle of a conventional wire-based feeding device. 1...Wire, 3...Slide pulley, 3a...
...Screw groove, 4...Idle pulley, 5...
Stroke bearing, 6...Ball, 7...Spline coupling spring, 8...Motor, 9...Driving object, 11...Feed pulley.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 表面にスクリユー溝が設けられている円筒部を
もつスライドプーリと、前記スライドプーリを軸
方向に移動可能に支持する軸受部と、アイドルプ
ーリと、前記スライドプーリに複数回巻きつけら
れて前記アイドルプーリ間に掛け渡たされている
ワイヤと、固定位置に設けられ前記アイドルプー
リのスクリユー溝に結合させられ前記アイドルプ
ーリを回転進退可能に案内するアイドルプーリ回
転進退案内部と、前記ワイヤに連結されている駆
動対象物と、前記スライドプーリに回転力を伝達
するスライドプーリ駆動機構から構成されている
ワイヤを用いた送り装置。 a slide pulley having a cylindrical part with a screw groove provided on its surface; a bearing part that supports the slide pulley movably in the axial direction; an idler pulley; A wire stretched between the two, an idler pulley rotational advance/retreat guide part provided at a fixed position, coupled to the screw groove of the idler pulley, and guiding the idler pulley in a rotatable manner; A feeding device that uses a wire and includes a driven object and a slide pulley drive mechanism that transmits rotational force to the slide pulley.
JP1988160567U 1988-12-09 1988-12-09 Expired JPH0452514Y2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1988160567U JPH0452514Y2 (en) 1988-12-09 1988-12-09
US07/431,171 US5022619A (en) 1988-12-09 1989-10-26 Positioning device of table for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988160567U JPH0452514Y2 (en) 1988-12-09 1988-12-09

Publications (2)

Publication Number Publication Date
JPH0280245U true JPH0280245U (en) 1990-06-20
JPH0452514Y2 JPH0452514Y2 (en) 1992-12-10

Family

ID=31442743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988160567U Expired JPH0452514Y2 (en) 1988-12-09 1988-12-09

Country Status (1)

Country Link
JP (1) JPH0452514Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347947U (en) * 1986-09-17 1988-03-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347947U (en) * 1986-09-17 1988-03-31

Also Published As

Publication number Publication date
JPH0452514Y2 (en) 1992-12-10

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