JPH0247045U - - Google Patents

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Publication number
JPH0247045U
JPH0247045U JP12600988U JP12600988U JPH0247045U JP H0247045 U JPH0247045 U JP H0247045U JP 12600988 U JP12600988 U JP 12600988U JP 12600988 U JP12600988 U JP 12600988U JP H0247045 U JPH0247045 U JP H0247045U
Authority
JP
Japan
Prior art keywords
horizontal
view
section
manufacturing equipment
arm part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12600988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12600988U priority Critical patent/JPH0247045U/ja
Publication of JPH0247045U publication Critical patent/JPH0247045U/ja
Pending legal-status Critical Current

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  • Specific Conveyance Elements (AREA)
JP12600988U 1988-09-27 1988-09-27 Pending JPH0247045U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12600988U JPH0247045U (de) 1988-09-27 1988-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12600988U JPH0247045U (de) 1988-09-27 1988-09-27

Publications (1)

Publication Number Publication Date
JPH0247045U true JPH0247045U (de) 1990-03-30

Family

ID=31377129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12600988U Pending JPH0247045U (de) 1988-09-27 1988-09-27

Country Status (1)

Country Link
JP (1) JPH0247045U (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08288358A (ja) * 1995-04-20 1996-11-01 Rohm Co Ltd 半導体基板入りマガジンのクランプ搬送装置
JPH11222121A (ja) * 1997-07-10 1999-08-17 Shinko Electric Co Ltd 無人搬送車
JP2000003894A (ja) * 1999-05-10 2000-01-07 Tokyo Electron Ltd 洗浄装置及びその方法
JP2002362737A (ja) * 2001-06-07 2002-12-18 Semiconductor Leading Edge Technologies Inc マスク搬送装置、マスク搬送システム及びマスク搬送方法
JP2006240884A (ja) * 2005-03-03 2006-09-14 Keuro Besitz Gmbh & Co Edv Dienstleistungs Kg 長尺物品用荷役装置
WO2018146740A1 (ja) * 2017-02-08 2018-08-16 株式会社Ｆｕｊｉ 作業機

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62198113A (ja) * 1986-02-26 1987-09-01 Shimizu Constr Co Ltd ウエハの自動移送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62198113A (ja) * 1986-02-26 1987-09-01 Shimizu Constr Co Ltd ウエハの自動移送装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08288358A (ja) * 1995-04-20 1996-11-01 Rohm Co Ltd 半導体基板入りマガジンのクランプ搬送装置
JPH11222121A (ja) * 1997-07-10 1999-08-17 Shinko Electric Co Ltd 無人搬送車
JP2000003894A (ja) * 1999-05-10 2000-01-07 Tokyo Electron Ltd 洗浄装置及びその方法
JP2002362737A (ja) * 2001-06-07 2002-12-18 Semiconductor Leading Edge Technologies Inc マスク搬送装置、マスク搬送システム及びマスク搬送方法
JP2006240884A (ja) * 2005-03-03 2006-09-14 Keuro Besitz Gmbh & Co Edv Dienstleistungs Kg 長尺物品用荷役装置
WO2018146740A1 (ja) * 2017-02-08 2018-08-16 株式会社Ｆｕｊｉ 作業機
CN110248777A (zh) * 2017-02-08 2019-09-17 株式会社富士 作业机
JPWO2018146740A1 (ja) * 2017-02-08 2019-11-07 株式会社Ｆｕｊｉ 作業機
CN110248777B (zh) * 2017-02-08 2022-09-16 株式会社富士 作业机

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