JPH0239871B2 - - Google Patents
Info
- Publication number
- JPH0239871B2 JPH0239871B2 JP59099974A JP9997484A JPH0239871B2 JP H0239871 B2 JPH0239871 B2 JP H0239871B2 JP 59099974 A JP59099974 A JP 59099974A JP 9997484 A JP9997484 A JP 9997484A JP H0239871 B2 JPH0239871 B2 JP H0239871B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- laser oscillator
- glow discharge
- tube
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003989 dielectric material Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 230000010355 oscillation Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は、同軸型レーザ発振器の放電管内に
おける放電特性の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to improvement of discharge characteristics within a discharge tube of a coaxial laser oscillator.
従来この種の同軸型レーザ発振器としては、第
１図に示すものがあつた。第１図は従来の同軸型
レーザ発振器の構成を示す断面図である。図に示
す様に、ガラス管等の誘電体で構成される放電管
１内にレーザ媒質ガス２を流し、放電管１内に設
けた１対の電極３Ａ，３Ｂ間には交流高電圧電源
４を接続してグロー放電５を生成し、このグロー
放電５によりレーザ媒質ガス２を励起する。ま
た、グロー放電５の中心軸上に全反射鏡６と部分
透過鏡７を対向して配設することによりレーザ発
振を発生し、このレーザ発振を部分透過鏡７側よ
りレーザ光８として外部に出力する。
A conventional coaxial laser oscillator of this type is shown in FIG. FIG. 1 is a sectional view showing the configuration of a conventional coaxial laser oscillator. As shown in the figure, a laser medium gas 2 is passed through a discharge tube 1 made of a dielectric material such as a glass tube, and an AC high voltage power source 4 is connected between a pair of electrodes 3A and 3B provided inside the discharge tube 1. is connected to generate a glow discharge 5, and this glow discharge 5 excites the laser medium gas 2. In addition, laser oscillation is generated by arranging a total reflection mirror 6 and a partial transmission mirror 7 facing each other on the central axis of the glow discharge 5, and this laser oscillation is emitted from the partial transmission mirror 7 side as a laser beam 8 to the outside. Output.
従来の同軸型レーザ発振器は以上の様に構成さ
れており、１対の電極３Ａ，３Ｂ間の間隔が比較
的に離れているため、上記したグロー放電５を初
期に発生することは非常に困難である。そして、
グロー放電５による放電電流が少ない時にはグロ
ー放電５が不安定となり、時には消失してしまう
ことがあり、このため、放電電流の可変範囲が狭
い等の欠点があつた。また、交流高電圧電源４は
約20〜35KVという非常に高い電圧であるため、
グロー放電５の放電電流を高速度で制御すること
は極めて困難であるなどの欠点があつた。 The conventional coaxial laser oscillator is configured as described above, and because the distance between the pair of electrodes 3A and 3B is relatively large, it is very difficult to generate the glow discharge 5 described above at the initial stage. It is. and,
When the discharge current caused by the glow discharge 5 is small, the glow discharge 5 becomes unstable and sometimes disappears, which has the disadvantage that the variable range of the discharge current is narrow. In addition, since the AC high voltage power supply 4 has a very high voltage of approximately 20 to 35 KV,
There were drawbacks such as that it was extremely difficult to control the discharge current of the glow discharge 5 at a high speed.
この発明は、上記の様な従来のものの欠点を改
善する目的でなされたもので、ガラス管等の誘電
体で構成される放電管内に、レーザ媒質ガスを流
し、前記放電管内に設けた１対の電極間に交流高
電圧を印加し、グロー放電を生成することにより
前記レーザ媒質ガスを励起し、レーザ発振を行う
同軸型レーザ発振器において、前記放電管の外側
に１対の補助電極を前記放電管に密着して設け、
この補助電極と前記電極との間に交流電圧を印加
し、無声放電を生成する様にして成る構成を有
し、グロー放電の初期の発生を容易となし、安定
な放電をするための放電電流の可変範囲が広いグ
ロー放電を生成することができる同軸型レーザ発
振器を提供するものである。
This invention was made with the aim of improving the above-mentioned drawbacks of the conventional ones, and it involves flowing a laser medium gas into a discharge tube made of a dielectric material such as a glass tube. In a coaxial laser oscillator that excites the laser medium gas by applying an AC high voltage between the electrodes to generate a glow discharge and oscillate the laser, a pair of auxiliary electrodes are provided outside the discharge tube. Installed in close contact with the pipe,
It has a configuration in which an alternating current voltage is applied between the auxiliary electrode and the electrode to generate silent discharge, and the discharge current facilitates the initial generation of glow discharge and provides stable discharge. The present invention provides a coaxial laser oscillator that can generate glow discharge with a wide variable range.
以下、この発明の実施例を図について説明す
る。第２図はこの発明の一実施例である同軸型レ
ーザ発振器の構成を示す断面図で、第１図と同一
部分は同一符号を用いて表示してあり、その詳細
な説明は省略する。図に示す様に、９Ａ，９Ｂは
補助電極であり、この補助電極９Ａ，９Ｂは、放
電管１の外側に密着して設けられる。補助電極９
Ａ，９Ｂとの間に、交流電源１０より交流高電圧
を印加することにより無声放電１１を生成する。
この無声放電１１は、レーザ媒質ガス２を予備励
起する作用がある。グロー放電５は、予備励起さ
れたレーザ媒質ガス２内では放電電圧が下り、グ
ロー放電５の初期の発生も容易であり、これによ
り、安定したグロー放電５が得られる。また、グ
ロー放電５の放電電流を少なくしても、不安定に
なる電流はこの種の従来側のものに比べると約1/
２〜1/3以下であり、広範囲にわたりグロー放電５
の放電電流を変化させることができる。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 2 is a cross-sectional view showing the configuration of a coaxial laser oscillator according to an embodiment of the present invention. The same parts as in FIG. 1 are designated by the same reference numerals, and detailed explanation thereof will be omitted. As shown in the figure, 9A and 9B are auxiliary electrodes, and these auxiliary electrodes 9A and 9B are provided in close contact with the outside of the discharge tube 1. Auxiliary electrode 9
A silent discharge 11 is generated by applying an AC high voltage from an AC power source 10 between A and 9B.
This silent discharge 11 has the effect of pre-exciting the laser medium gas 2. In the glow discharge 5, the discharge voltage decreases in the pre-excited laser medium gas 2, and the initial generation of the glow discharge 5 is also easy, thereby providing a stable glow discharge 5. Also, even if the discharge current of the glow discharge 5 is reduced, the current that becomes unstable is about 1/1 compared to this type of conventional one.
2 to 1/3 or less, and glow discharge over a wide range5
The discharge current can be changed.
一方、交流電源１０が出力する無声放電１１の
電流を、第３図ａに示す様に変調することによ
り、第３図ｂに示す様に、グロー放電５の放電電
流を高速度で制御することができ、また、第３図
ｃに示す様に、レーザ光８の出力は、グロー放電
５の強度に応じたパルスレーザ出力とすることが
できる。また、第４図及び第５図に示すように交
流高電圧電源４を電極３Ａ，３Ｂと、補助電極９
Ａ，９Ｂに共通に印加してもよい。 On the other hand, by modulating the current of the silent discharge 11 outputted by the AC power supply 10 as shown in FIG. 3a, the discharge current of the glow discharge 5 can be controlled at high speed as shown in FIG. 3b. Further, as shown in FIG. 3c, the output of the laser beam 8 can be made into a pulsed laser output according to the intensity of the glow discharge 5. In addition, as shown in FIGS. 4 and 5, the AC high voltage power source 4 is connected to the electrodes 3A, 3B and the auxiliary electrode 9.
It may be applied in common to A and 9B.
また、上記実施例において、無声放電１１によ
つて予備励起することにより、レーザ媒質ガス２
の圧力を高めても安定なグロー放電５を維持する
ことができる。このため、同一の管長を有する放
電管１において、この発明の上記実施例によれ
ば、大きな放電電力を投入することができ、小型
で大出力の同軸型レーザ発振器を構成することが
可能となる。 Further, in the above embodiment, the laser medium gas 2 is pre-excited by the silent discharge 11.
Even if the pressure is increased, stable glow discharge 5 can be maintained. Therefore, in the discharge tubes 1 having the same tube length, according to the above-described embodiment of the present invention, a large discharge power can be input, and it is possible to construct a small-sized, high-output coaxial laser oscillator. .
また交流放電は直流放電のように高圧整流回路
平滑回路が不要であり電源が安価にできる特徴が
ある。 Also, unlike DC discharge, AC discharge does not require a high-voltage rectifier or smoothing circuit, and has the characteristic that the power source can be inexpensive.
この発明は以上説明した様に、同軸型レーザ発
振器において、放電管の外側に１対の補助電極を
前記放電管に密着して設け、この補助電極の間に
生成する無声放電により、レーザ媒質ガスを予備
励起する様に構成したので、グロー放電の初期の
発生を容易となし、安定性をもつて広範囲にグロ
ー放電の放電電流を変化することができ、また、
無声放電の強度を変調することにより、レーザ光
出力の高速度の応答ができる様にした同軸型レー
ザ発振器が得られるという優れた効果を奏するも
のである。
As explained above, the present invention provides a coaxial laser oscillator in which a pair of auxiliary electrodes are provided on the outside of the discharge tube in close contact with the discharge tube, and the silent discharge generated between the auxiliary electrodes causes the laser medium to be Since the structure is configured to pre-excite, the initial generation of glow discharge is facilitated, and the discharge current of glow discharge can be varied over a wide range with stability.
By modulating the intensity of the silent discharge, it is possible to obtain a coaxial laser oscillator that can respond at high speed to the laser light output, which is an excellent effect.
第１図は従来の同軸型レーザ発振器の構成を示
す断面図、第２図はこの発明の一実施例である同
軸型レーザ発振器の構成を示す断面図、第３図ａ
ないしｃは、この発明の実施例である同軸型レー
ザ発振器の動作態様を説明するための各部の波形
を示すタイムチヤート図、第４図はこの発明の他
の実施例を示す図、第５図は第４図の−断面
図である。
図中、１は放電管、２はレーザ媒質ガス、３
Ａ，３Ｂは１対の電極、４は交流高電圧電源、５
はグロー放電、６は全反射鏡、７は部分透過鏡、
８はレーザ光、９Ａ，９Ｂは補助電極、１０は交
流電源、１１は無声放電である。なお、図中、同
一符号は同一、又は相当部分を示す。
FIG. 1 is a sectional view showing the configuration of a conventional coaxial laser oscillator, FIG. 2 is a sectional view showing the configuration of a coaxial laser oscillator according to an embodiment of the present invention, and FIG.
Figures 4 to 5 c are time charts showing waveforms of various parts for explaining the operating mode of a coaxial laser oscillator which is an embodiment of the present invention, Figure 4 is a diagram showing another embodiment of the invention, and Figure 5 is a diagram showing waveforms of various parts. is a - sectional view of FIG. In the figure, 1 is a discharge tube, 2 is a laser medium gas, and 3 is a discharge tube.
A and 3B are a pair of electrodes, 4 is an AC high voltage power supply, and 5
is a glow discharge, 6 is a total reflection mirror, 7 is a partial transmission mirror,
8 is a laser beam, 9A and 9B are auxiliary electrodes, 10 is an AC power supply, and 11 is a silent discharge. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
レーザ媒質ガスを流すと共に、前記放電管内に設
けた１対の電極間に交流高電圧を印加し、グロー
放電を生成することにより前記レーザ媒質ガスを
励起してレーザ発振を行う同軸型レーザ発振器に
おいて、前記放電管の外側にこの放電管と密着し
て１対の補助電極を設け、この補助電極と前記電
極との間に交流電圧を印加し、無声放電を生成す
ることを特徴とする同軸型レーザ発振器。 ２ 無声放電は、その強度を変調することにより
グロー放電の強度を制御することを特徴とする特
許請求の範囲第１項記載の同軸型レーザ発振器。[Claims] 1. A glow discharge is generated by flowing a laser medium gas into a discharge tube made of a dielectric material such as a glass tube, and applying an AC high voltage between a pair of electrodes provided in the discharge tube. In a coaxial laser oscillator that excites the laser medium gas to generate laser oscillation, a pair of auxiliary electrodes is provided on the outside of the discharge tube in close contact with the discharge tube, and the auxiliary electrode and the electrode are connected to each other. A coaxial laser oscillator that generates a silent discharge by applying an alternating current voltage between the oscillators. 2. The coaxial laser oscillator according to claim 1, wherein the intensity of the glow discharge is controlled by modulating the intensity of the silent discharge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9997484A JPS60244086A (en) | 1984-05-18 | 1984-05-18 | Coaxial type laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9997484A JPS60244086A (en) | 1984-05-18 | 1984-05-18 | Coaxial type laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60244086A JPS60244086A (en) | 1985-12-03 |
| JPH0239871B2 true JPH0239871B2 (en) | 1990-09-07 |
Family
ID=14261634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9997484A Granted JPS60244086A (en) | 1984-05-18 | 1984-05-18 | Coaxial type laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60244086A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0787255B2 (en) * | 1986-12-23 | 1995-09-20 | フアナツク株式会社 | High frequency discharge excitation laser device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3777279A (en) * | 1972-03-30 | 1973-12-04 | United Aircraft Corp | Deposition of power in a moving gas stream by electric discharge means |
| JPS56131985A (en) * | 1980-03-19 | 1981-10-15 | Mitsubishi Electric Corp | Amplifying device for laser beam |
-
1984
- 1984-05-18 JP JP9997484A patent/JPS60244086A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3777279A (en) * | 1972-03-30 | 1973-12-04 | United Aircraft Corp | Deposition of power in a moving gas stream by electric discharge means |
| JPS56131985A (en) * | 1980-03-19 | 1981-10-15 | Mitsubishi Electric Corp | Amplifying device for laser beam |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60244086A (en) | 1985-12-03 |
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