JPH0226404A - Manufacture of piezoelectric vibrator - Google Patents
Manufacture of piezoelectric vibratorInfo
- Publication number
- JPH0226404A JPH0226404A JP17776388A JP17776388A JPH0226404A JP H0226404 A JPH0226404 A JP H0226404A JP 17776388 A JP17776388 A JP 17776388A JP 17776388 A JP17776388 A JP 17776388A JP H0226404 A JPH0226404 A JP H0226404A
- Authority
- JP
- Japan
- Prior art keywords
- resonance
- layer
- conductor
- piezoelectric
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000004020 conductor Substances 0.000 claims abstract description 11
- 239000012212 insulator Substances 0.000 claims abstract description 11
- 239000013078 crystal Substances 0.000 claims abstract description 9
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000009191 jumping Effects 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要〕
リチウムナイオベートの単結晶を使用した圧電振動子の
製造方法、特に２〜３ＭＨｚ程度の低周波数帯で使用す
る圧電振動子の新規製造方法に関し、
動作を安定化するため、主振動に対し高調波のスプリア
スを低減させることを目的とし、リチウムナイオベート
単結晶から切り出した圧電体の対向主面に形成された対
向電極の少なくとも一方に、導電体または絶縁体の層を
被着し、該対向電極に所定の電流を印加した共振レベル
を、該導電体または絶縁体の層によって適当に低減させ
たことを特徴とし構成する。[Detailed Description of the Invention] [Summary] A method for manufacturing a piezoelectric vibrator using a single crystal of lithium niobate, especially a new method for manufacturing a piezoelectric vibrator used in a low frequency band of about 2 to 3 MHz, which provides stable operation. In order to reduce spurious harmonics with respect to the main vibration, at least one of the opposing electrodes formed on the opposing main surfaces of a piezoelectric material cut from a lithium niobate single crystal is coated with a conductor or an insulator. The structure is characterized in that the resonance level when a predetermined current is applied to the counter electrode is appropriately reduced by the conductor or insulator layer.
本発明はリチウムナイオベートの単結晶を使用した圧電
振動子の製造方法、特に３ Ｍ Ｈｚ以下程度の低周波
数帯で使用する圧電振動子において、高調波のスプリア
スを抑制する新規製造方法に関する。The present invention relates to a method for manufacturing a piezoelectric vibrator using a single crystal of lithium niobate, and particularly to a new manufacturing method for suppressing spurious harmonics in a piezoelectric vibrator used in a low frequency band of approximately 3 MHz or less.
リチウムナイオベートの単結晶を使用した圧電振動子を
量産する従来方法は、リチウムナイオベート単結晶より
所望厚さのウェーハを作成し、該ウェーハの表面と裏面
とに多数の素子電極を形成し、次いで酸ウェーハを所定
の寸法に割断したのち、通常は対向電極の質Ｉｙ４整（
一般に質量の低減）および、対向電極の対向長さの調整
によって、発振周波数を調整する方法であった。The conventional method for mass producing piezoelectric vibrators using a single crystal of lithium niobate is to create a wafer of a desired thickness from a single crystal of lithium niobate, form a large number of element electrodes on the front and back surfaces of the wafer, Next, after cutting the acid wafer into predetermined dimensions, the quality of the counter electrode is usually adjusted to Iy4 (
In general, the oscillation frequency was adjusted by reducing the mass (generally speaking) and adjusting the opposing length of the opposing electrodes.
第４図は従来方法で製造された圧電振動素子の斜視図で
あり、圧電振動素子１は、リチウムナイオベートの単結
晶より切り出した圧電体２の対向主面（上面と下面）に
電極３．４を形成してなる。FIG. 4 is a perspective view of a piezoelectric vibrating element manufactured by a conventional method. The piezoelectric vibrating element 1 includes electrodes 3 and 3 on opposing main surfaces (upper and lower surfaces) of a piezoelectric body 2 cut from a single crystal of lithium niobate. It forms 4.
電極３からは、圧電体２の長さ方向の一端に向けて延在
するリード部３ａを具え、電極４からは圧電体２の長さ
方向の他端に向けてリード部４ａが延在する。A lead portion 3a extends from the electrode 3 toward one end in the length direction of the piezoelectric body 2, and a lead portion 4a extends from the electrode 4 toward the other end in the length direction of the piezoelectric body 2. .
かかる圧電振動子１において、共振周波数特性は第５図
に示すように、主振動ａ、と共に高調波のスプリアスａ
３． ａｓ、 ａｑ、 ａ、・・・・が発生する。そし
て、スプリアスａ３は主振動の共振レベルより低くなる
が、スプリアスａ３． ａｓ＋ ａ７． ａｑ・・・・
は高次になるに従って高レベルとなり、２ＭＨｚの圧電
振動素子１ではスプリアスａ、のレベルが主振動ａ、の
レベルとほぼ同程度であり、スプリアスａ７＋ ａＱ・
・・・では主振動ａ、のレベルより高くなる。In this piezoelectric vibrator 1, as shown in FIG.
3. as, aq, a,... occur. Although the spurious a3 becomes lower than the resonance level of the main vibration, the spurious a3. as+ a7. aq...
becomes higher as the order increases, and in the 2 MHz piezoelectric vibrating element 1, the level of spurious a is almost the same as the level of main vibration a, and spurious a7+ aQ・
. . . becomes higher than the level of the main vibration a.
〔発明が解決しようとする課題〕
２〜３ＭＨｚ程度の低周波数帯の前記圧電振動素子にお
いて、５〜９次の高調波のスプリアスレベルは、主振動
レベルと同程度ないし高レベルとなり、かかる圧電振動
素子をパ・ノケージに組み込んだ圧電振動子の共振周波
数は、主振動共振から主振動共振より高レベルの高調波
共振に飛ぶことがあり、動作が不安定であるという問題
点があった。[Problem to be solved by the invention] In the piezoelectric vibrating element in a low frequency band of about 2 to 3 MHz, the spurious level of the 5th to 9th harmonics is comparable to or higher than the main vibration level, and such piezoelectric vibration The resonant frequency of a piezoelectric vibrator in which the element is assembled into a piezoelectric cage sometimes jumps from main vibration resonance to harmonic resonance at a higher level than the main vibration resonance, resulting in unstable operation.
本発明の目的は、圧電振動素子のかかる問題点をなくし
、安定に動作する圧電振動子を提供することである。An object of the present invention is to eliminate such problems with piezoelectric vibrators and provide a piezoelectric vibrator that operates stably.
本発明方法は第１図によれば、リチウムナイオベート単
結晶から切り出した圧電体２の対向主面に形成された対
向電極３．４の一方の電極３に、導電体または絶縁体の
層５を被着し、
対向電極３．４に所定の電流を印加して発生する高調波
の共振レベルを、導電体または絶縁体の層５によって適
当に低減させることを特徴とするものである。According to FIG. 1, the method of the present invention is to apply a conductor or insulator layer 5 to one electrode 3 of a counter electrode 3.4 formed on the opposite main surface of a piezoelectric body 2 cut out from a lithium niobate single crystal. It is characterized in that the resonance level of harmonics generated by applying a predetermined current to the counter electrode 3.4 is appropriately reduced by the conductor or insulator layer 5.
本発明方法は、導電体または絶縁体の層を対向電極の少
なくとも一方に被着することにより、主振動の共振レベ
ルの低下より高調波の共振レベルが大きく低下すること
を利用したものであり、高調波の共振レベルを主振動の
共振レベルより低減可能となる。このような方法で高調
波の共振レベルを抑制する圧電振動子は、主振動共振か
らその高調波共振に周波数が飛ぶ従来の問題点を解決し
、動作が安定化することになる。The method of the present invention takes advantage of the fact that by depositing a layer of a conductor or an insulator on at least one of the opposing electrodes, the resonance level of harmonics is reduced more than the resonance level of the main vibration, The resonance level of harmonics can be lowered than the resonance level of main vibration. A piezoelectric vibrator that suppresses the resonance level of harmonics using such a method solves the conventional problem of the frequency jumping from the main vibration resonance to its harmonic resonance, resulting in stable operation.
以下に、図面を用いて本発明方法による圧電振動子を説
明する。A piezoelectric vibrator according to the method of the present invention will be described below with reference to the drawings.
第１図は本発明方法の一実施例による圧電振動素子の斜
視図、第２図は第１図に示す圧電振動素子の共振周波数
特性図、第３図は対向電極の一方に被着した金属（金）
層の厚さと５次共振抵抗の減衰量との関係を示す図であ
る。Fig. 1 is a perspective view of a piezoelectric vibrating element according to an embodiment of the method of the present invention, Fig. 2 is a resonance frequency characteristic diagram of the piezoelectric vibrating element shown in Fig. 1, and Fig. 3 is a metal coated on one side of the counter electrode. (Money)
FIG. 6 is a diagram showing the relationship between the layer thickness and the attenuation amount of the fifth-order resonance resistance.
第４図と共通部分に同一符号を使用した第１図において
、圧電振動素子１１は、圧電体２の対向主面（上面と下
面）に、例えばニクロム−金にてなる対向電極３．４を
形成し、電極３の上に金、半田等の金属や、導電性樹脂
または、エポキシ樹脂等の絶縁性樹脂にてなる層５を積
層してなる。金属を被着した層５はめっきまたは蒸着等
によって形成可能であり、導電性樹脂や絶縁性樹脂を被
着した層５はスクリーン印刷等によって形成可能である
。In FIG. 1, in which the same reference numerals are used for parts common to those in FIG. A layer 5 made of a metal such as gold or solder, a conductive resin, or an insulating resin such as an epoxy resin is laminated on the electrode 3. The layer 5 coated with metal can be formed by plating or vapor deposition, and the layer 5 coated with conductive resin or insulating resin can be formed by screen printing or the like.
第１図および第２図において、エポキシ系樹脂の層５を
被着した圧電振動素子１１の周波数特性は、第２図に示
す如く、主振動共振す、と共に高調波のスプリアスｂｔ
、 ｂ５． ｂ７． ｂｑ・・・・・・が発生する。そ
して、主振動す、の共振レベルは樹脂層５の被着に依っ
て多少低下するが、高調波スプリアスｂ、、 ｂ、。In FIGS. 1 and 2, the frequency characteristics of the piezoelectric vibrating element 11 coated with the epoxy resin layer 5 are as shown in FIG.
, b5. b7. bq... is generated. The resonance level of the main vibration S is somewhat lowered by the attachment of the resin layer 5, but the harmonic spurious waves b,, b,.
ｂ、、 ｂ、・・・９．・の共振レベルは、主振動ｂ１
のそれより大きく低減するようになる。即ち、主振動す
、の共振レベルが従来素子の主振動ａ１の共振レベルよ
り３ｄＢ程度低下するとき、高調波スプリアスｂ。b,, b,...9. The resonance level of ・is the main vibration b1
The reduction will be greater than that of . That is, when the resonance level of the main vibration S is lowered by about 3 dB than the resonance level of the main vibration A1 of the conventional element, the harmonic spurious b.
ｂＳ、 ｂ７． ｂｑ・・・・・・の共振レベルは、例
えば高調波共振す、が主振動す、の共振レベルより１０
ｄＢ程度低くなる。bS, b7. The resonance level of bq... is, for example, 10 times higher than the resonance level of the harmonic resonance and the main vibration.
It will be about dB lower.
そのため、圧電振動素子１１を組み込んだ圧電振動子の
共振周波数は、主振動共振から９次以下の高調波共振に
飛ぶことがなく、安定に動作するようになる。Therefore, the resonant frequency of the piezoelectric vibrator incorporating the piezoelectric vibrating element 11 does not jump from the main vibration resonance to the harmonic resonance of the ninth order or lower, and operates stably.
かかる圧電振動素子１１において、電極３の上に被着す
る層５が樹脂をベースにしたものであるとき、被着層５
の厚さは圧電振動素子１１の共振周波数特性にあまり関
与しないが、被着層５に金属を使用したときは、その厚
さによって共振抵抗の減衰量が変化する。In such a piezoelectric vibrating element 11, when the layer 5 deposited on the electrode 3 is based on resin, the deposited layer 5
Although the thickness of the piezoelectric vibrating element 11 does not have much influence on the resonant frequency characteristics of the piezoelectric vibrating element 11, when a metal is used for the adhesion layer 5, the amount of attenuation of the resonant resistance changes depending on the thickness.
第１図および第３図において、電極３に金層５を被着し
た圧電振動素子１１０５次スプリアスｂ、の共振抵抗の
減衰量は、金層５の厚さ増に比例して第５図に示す如く
増加する。1 and 3, the amount of attenuation of the resonance resistance of the piezoelectric vibrating element 1105-order spurious b, in which the gold layer 5 is coated on the electrode 3, is proportional to the increase in the thickness of the gold layer 5, as shown in FIG. It increases as shown.
かかる共振抵抗の減衰量と金層５の厚さとの関係は、他
の高調波についても同様であり、主振動の共振レベルよ
り低く抑制すべき高調波の次数を、金層５被着前の圧電
振動素子１１の共振周波数特性および、圧電振動素子１
１を使用する電気回路によって決めたならば、該次数の
高調波について第３図と同様な図またはデータを使用し
、共振レベルの低下を最小限とした金層５の厚さが決定
できる。The relationship between the amount of attenuation of the resonance resistance and the thickness of the gold layer 5 is the same for other harmonics, and the order of the harmonics that should be suppressed below the resonance level of the main vibration is determined by Resonant frequency characteristics of piezoelectric vibrating element 11 and piezoelectric vibrating element 1
1, the thickness of the gold layer 5 that minimizes the reduction in the resonance level can be determined by using diagrams or data similar to FIG. 3 for the harmonics of that order.
なお、前記実施例において共振周波数調整は従来のもの
と同様に必要であり、金属または樹脂の層５の被着は、
該周波数調整と連続または同時に実施することが、その
製造工程上有利である。In addition, in the above embodiment, resonance frequency adjustment is necessary as in the conventional one, and the deposition of the metal or resin layer 5 is as follows.
It is advantageous in terms of the manufacturing process to carry out the frequency adjustment continuously or simultaneously.
以上説明したように本発明方法によれば、高調波の共振
レベルを主振動の共振レベルより低減可能となる。この
ような方法で高調波の共振レベルを抑制する圧電振動子
は、主振動共振からその高調波共振に周波数が飛ぶ従来
の問題点を解決し、動作が安定化するという効果がある
。As explained above, according to the method of the present invention, the resonance level of harmonics can be lowered from the resonance level of main vibration. A piezoelectric vibrator that suppresses the resonance level of harmonics in this manner solves the conventional problem of the frequency jumping from the main vibration resonance to its harmonic resonance, and has the effect of stabilizing its operation.
ｂ、は主振動、
ｂ：＋、 ｂｓ、 ｂｔ、 ｂｑは高調波スプリアス、
を示す。b is the main vibration, b: +, bs, bt, bq are harmonic spurious,
shows.
第１図は本発明方法の一実施例による圧電振動素子の斜
視図、
第２図は第１図に示す圧電振動素子の共振周波数特性図
、
第３図は対向電極の一方に被着した金属層の厚さと５次
共振抵抗の減衰量との関係図、第４図は従来方法で製造
された圧電振動素子の斜視図、
第５図は従来の圧電振動子の共振周波数特性図、である
。
図中において、
２は圧電体、
３．４は対向電極、
５は導電体または絶縁体の層、
１１は圧電振動素子、
宍
↑灰
ンプ；１Ｐヌ；
第１［２１に洋Ｔ圧電攻ｔ１）め云猟瀾漬程特′ぽ図第
２［２］
第Fig. 1 is a perspective view of a piezoelectric vibrating element according to an embodiment of the method of the present invention, Fig. 2 is a resonance frequency characteristic diagram of the piezoelectric vibrating element shown in Fig. 1, and Fig. 3 is a metal coated on one side of the counter electrode. Fig. 4 is a perspective view of a piezoelectric vibrating element manufactured by a conventional method; Fig. 5 is a diagram of resonance frequency characteristics of a conventional piezoelectric vibrator. . In the figure, 2 is a piezoelectric body, 3.4 is a counter electrode, 5 is a conductive or insulating layer, 11 is a piezoelectric vibrating element, Shishi↑hyampu; 1Pnu; ) Meun Hunting and Pickling Process Part 2 [2] Part 2
Claims (1)
２）の対向主面に形成された対向電極（３，４）の少な
くとも一方に、導電体または絶縁体の層（５）を被着し
、 該対向電極（３，４）に所定の電流を印加した共振レベ
ルを、該導電体または絶縁体の層（５）によって適当に
低減させたことを特徴とする圧電振動子の製造方法。[Claims] A piezoelectric material cut from a lithium niobate single crystal (
A conductor or insulator layer (5) is applied to at least one of the opposing electrodes (3, 4) formed on the opposing main surfaces of 2), and a predetermined current is applied to the opposing electrode (3, 4). A method for manufacturing a piezoelectric vibrator, characterized in that the applied resonance level is appropriately reduced by the conductor or insulator layer (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17776388A JPH0226404A (en) | 1988-07-15 | 1988-07-15 | Manufacture of piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17776388A JPH0226404A (en) | 1988-07-15 | 1988-07-15 | Manufacture of piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226404A true JPH0226404A (en) | 1990-01-29 |
Family
ID=16036702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17776388A Pending JPH0226404A (en) | 1988-07-15 | 1988-07-15 | Manufacture of piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226404A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06140861A (en) * | 1992-10-26 | 1994-05-20 | Katsuo Kanamaru | Frequency adjusting method for piezoelectric filter |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56154813A (en) * | 1980-04-30 | 1981-11-30 | Murata Mfg Co Ltd | Fine adjusting method for resonance frequency of energy shut-in type piezoelectric oscillator and its products |
| JPS59127413A (en) * | 1983-01-11 | 1984-07-23 | Nippon Dempa Kogyo Co Ltd | Lithium tantalate oscillator |
| JPS59141809A (en) * | 1983-02-02 | 1984-08-14 | Kinseki Kk | Control method of piezoelectric oscillator |
| JPS62220012A (en) * | 1986-03-20 | 1987-09-28 | Fujitsu Ltd | Piezoelectric vibration element |
| JPS63117507A (en) * | 1986-11-05 | 1988-05-21 | Fujitsu Ltd | Piezoelectric vibrating element |
-
1988
- 1988-07-15 JP JP17776388A patent/JPH0226404A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56154813A (en) * | 1980-04-30 | 1981-11-30 | Murata Mfg Co Ltd | Fine adjusting method for resonance frequency of energy shut-in type piezoelectric oscillator and its products |
| JPS59127413A (en) * | 1983-01-11 | 1984-07-23 | Nippon Dempa Kogyo Co Ltd | Lithium tantalate oscillator |
| JPS59141809A (en) * | 1983-02-02 | 1984-08-14 | Kinseki Kk | Control method of piezoelectric oscillator |
| JPS62220012A (en) * | 1986-03-20 | 1987-09-28 | Fujitsu Ltd | Piezoelectric vibration element |
| JPS63117507A (en) * | 1986-11-05 | 1988-05-21 | Fujitsu Ltd | Piezoelectric vibrating element |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06140861A (en) * | 1992-10-26 | 1994-05-20 | Katsuo Kanamaru | Frequency adjusting method for piezoelectric filter |
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