JPS59127413A - Lithium tantalate oscillator - Google Patents
Lithium tantalate oscillatorInfo
- Publication number
- JPS59127413A JPS59127413A JP254983A JP254983A JPS59127413A JP S59127413 A JPS59127413 A JP S59127413A JP 254983 A JP254983 A JP 254983A JP 254983 A JP254983 A JP 254983A JP S59127413 A JPS59127413 A JP S59127413A
- Authority
- JP
- Japan
- Prior art keywords
- lithium tantalate
- main surface
- axis
- width
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 239000013078 crystal Substances 0.000 claims abstract description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims 1
- 230000010355 oscillation Effects 0.000 abstract 4
- 238000010586 diagram Methods 0.000 description 5
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229910012463 LiTaO3 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は圧電体のタンタル酸リチウムを用いたタンタル
酸リチウム振動子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a lithium tantalate vibrator using piezoelectric lithium tantalate.
一般にタンタル酸リチウム（ＬｉＴａＯ３） 、ニオブ
酸リチウム（ＬｔＮｂｏ３）等の圧電素子は電気機械結
合係数が大きいため、広帯域フィルター、広い可変幅の
電圧制御発振器用の圧電材料として有用である。特にタ
ンタル酸リチウムを用いた厚みすベカ振動子は加工が容
易で温度特性も比較的良好なために実用化への努力がな
されている。しかしながらこのようなタンタル酸リチウ
ムを用いた振動子は、変位方向が互いに直交し、電気機
械結合係数の異なる２つの厚みすベシ振動が同時に励振
される。このため、一方の振動を主振動とすると他方の
振動は副振動となシこの副振動によるスゲリアスの発生
等の種々の不都合がある。In general, piezoelectric elements such as lithium tantalate (LiTaO3) and lithium niobate (LtNbo3) have a large electromechanical coupling coefficient, so they are useful as piezoelectric materials for broadband filters and wide variable width voltage-controlled oscillators. In particular, efforts are being made to put a thick-walled resonator using lithium tantalate into practical use because it is easy to process and has relatively good temperature characteristics. However, in such a vibrator using lithium tantalate, the displacement directions are perpendicular to each other, and two thickness-beam vibrations having different electromechanical coupling coefficients are simultaneously excited. For this reason, if one vibration is the main vibration, the other vibration is the sub-vibration, and this sub-vibration causes various inconveniences such as the occurrence of swagger.
本発明は上記の事情に鑑みてなされたもので簡単な構成
で副振動によるスプリアス成分を大幅に抑圧することが
でき、しかも形状が小型で高性能のタンタル酸すチウム
糸動子を提供することを目的とするものである。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a high-performance lithium tantalate thread mover that is capable of greatly suppressing spurious components due to secondary vibrations with a simple configuration, is compact in shape, and has high performance. The purpose is to
以下本発明の一実施例を図面を参照して詳細に説明する
。第１図は平面図で１はタンタル酸リチウムからなる振
動子である。この振動子はタンタル酸リチウムの互いに
直交する結晶軸、ｘ、ｙ、ｚＯＸ軸に直角なＹ、Ｚ平面
に沿って切シ出した主面を有する板体を矩形に成形し板
面に図示しない電極を形成してここに高周波信号を印加
して厚みすベシ振動を励振するようにしている。そして
このようなタンタル酸リチウムのＸ板における永年方程
式は次のように与えられる。An embodiment of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a plan view, and numeral 1 indicates a vibrator made of lithium tantalate. This resonator is made by molding a plate into a rectangular shape with main surfaces cut along Y and Z planes perpendicular to the mutually orthogonal crystal axes of lithium tantalate and the x, y, and zOX axes, and is not shown on the plate surface. Electrodes are formed and a high frequency signal is applied thereto to excite the thickness vibration. The secular equation for the X-plate of lithium tantalate is given as follows.
化されたスチラネスであシ、この屏としてＣは３個求め
ることができる。しかしそのうちの１個の解は圧電的に
励振されず、残る２個の解が圧電的に励振可能な解とし
て求められる。またこの２個の解は、音速の速い横波の
振動ｖ１と、遅い横波の振動ｖ２である。また一般にタ
ンタル酸リチウムのＸ極では速い横波の振動ｖ１を主振
動として利用するが同時に遅い横波の振動ｖ２による副
振動によ多スプリアスを生じる。It is a stilanes that has been transformed into a styrene, and three Cs can be obtained from this screen. However, one of the solutions is not piezoelectrically excited, and the remaining two solutions are found to be piezoelectrically excitationable. Furthermore, these two solutions are a transverse wave vibration v1 with a high sound speed and a transverse wave vibration v2 with a slow sound speed. Generally, in the X-electrode of lithium tantalate, the fast transverse wave vibration v1 is used as the main vibration, but at the same time, the secondary vibration caused by the slow transverse wave vibration v2 causes a lot of spurious.
したがって、円板状、正方形状等の振動子では主振動ｖ
１に対して副振動ｖ２も略等しいレベルまで励振されて
しまう。そこで第１図に示すように主面を主振動ｖｌの
方向に細長い矩形状に成形することによシ副振動Ｖ２の
レベルを、たとえば第２図に示す周波数応答特性図のよ
うに抑圧することができる。ここで幅２２１１１、厚み
が略Ｑ、 ５ ｍｒｘ 、長さ５ ｖｒｘのＸ板で共振
周波数３．５ＭＨｚのものでは主振動■ｌと副振動ｖ２
とのレベル差りは、振動子の主面の長辺をＹ軸から時計
方向に回転した回転角θに対して第３図に示すように変
化した。Therefore, in a disc-shaped, square-shaped oscillator, etc., the main vibration v
1, the sub-vibration v2 is also excited to approximately the same level. Therefore, by forming the main surface into a rectangular shape elongated in the direction of the main vibration vl as shown in Fig. 1, the level of the sub-vibration V2 can be suppressed as shown in the frequency response characteristic diagram shown in Fig. 2, for example. Can be done. Here, for an X plate with a width of 22111, a thickness of approximately Q, 5 mrx, and a length of 5 vrx and a resonance frequency of 3.5 MHz, the main vibration ■l and the secondary vibration v2
The level difference between the two changes as shown in FIG. 3 with respect to the rotation angle θ when the long side of the main surface of the vibrator is rotated clockwise from the Y axis.
この結果から明らかなように、最大のレベル差りは２０
ｄＢで回転角θ＝５３°で得られた。また上記レベル差
りを１９ ｄＢで許容するならば回転角θ＝５３°±４
°、すなわち４９°乃至５７゜とすればよい。さらにレ
ベル差］） ヲ１７ ｄＢ Ｔ ヨければ回転角θ＝５
３°±１０’、すなわち４３゜乃至６３°とすればよい
。さらに長辺をＹ軸から時計方向へ５０’回転した幅１
．５ ｍｙｔｈ厚みが略０．７騙のＸ板において長辺の
長さｔとＣ１値との関係は第４図に示すようになった。As is clear from this result, the maximum level difference is 20
dB and a rotation angle θ=53°. Also, if the above level difference is allowed at 19 dB, the rotation angle θ = 53° ± 4
49° to 57°. Furthermore, the level difference]) 17 dB T If it rolls, the rotation angle θ = 5
The angle may be 3°±10', that is, 43° to 63°. Width 1 with the long side further rotated 50' clockwise from the Y axis
．． The relationship between the length t of the long side and the C1 value for the X plate with a thickness of approximately 0.7 mm is shown in FIG.
なお上記振動子の共振周波数は３．５ ＭＨｚのもので
ある。この結果から明らかなように長辺ｔの長さを幅の
２倍よシも長くすることによジＣ■値は低い一定の値に
なる。Note that the resonant frequency of the above vibrator is 3.5 MHz. As is clear from this result, by making the length of the long side t twice as long as the width, the C value becomes a constant low value.
さらに副振動を抑圧するためにＸ板の主面の長辺方向の
幅Ｗに対して該主面に形成する電極の長辺方向の幅Ｗを
変化させたところ特性を改善することができた。Furthermore, in order to suppress secondary vibrations, the characteristics were improved by changing the width W in the long side direction of the electrode formed on the main surface with respect to the width W in the long side direction of the main surface of the X plate. .
すなわち第５図は本発明のタンタル酸リチウム振動子を
示す斜視図である。表裏主面Ｍ１ 。That is, FIG. 5 is a perspective view showing the lithium tantalate vibrator of the present invention. Front and back main surfaces M1.
Ｍ２に垂直に結晶のＸ軸が位置する。そして全体を矩形
に形成し、長辺の軸方向を結晶のＹ。The X axis of the crystal is located perpendicular to M2. Then, the whole is formed into a rectangle, and the axis direction of the long side is the Y of the crystal.
２平面に沿ってかつＹ軸から時計方向にθ度、すなわち
略５３°回転した方向に定め、この方向に主振動ｖｌを
励振するようにしている。The direction is set along two planes and rotated clockwise from the Y axis by θ degrees, that is, approximately 53 degrees, and the main vibration vl is excited in this direction.
そこで、Ｘ板の主面の幅Ｗに対して表裏板面の中央に長
手方向の全長にわたって形成した電極の幅Ｗを変化させ
たときの主振動ｖ１、副振動ｖ２に対するＣ１値を測定
し、測定結果を第６図に示す。なおこのＸ板の寸法は幅
２ｍ３１１厚みが略０．５ｖｒｔｘ、長さ５ ｍｒｎで
蒸着によって種々の幅の電極を形成し、共振周波数３．
５ ＭＨｚのものを用いた。Therefore, the C1 value for the main vibration v1 and the sub-vibration v2 was measured when the width W of the electrode formed at the center of the front and back plate surfaces over the entire length in the longitudinal direction was changed with respect to the width W of the main surface of the X plate. The measurement results are shown in Figure 6. The dimensions of this X-plate are 2m wide, 311cm thick, approximately 0.5vrtx thick, and 5mrn long. Electrodes of various widths are formed by vapor deposition, and the resonance frequency is 3.
5 MHz was used.
この結果から明らかなようにＸ板の主面の長辺方向の幅
Ｗに対して電極の長辺方向の幅Ｗの比ｗ／Ｗを０．６以
下とすることにより主振動ｖ１に対するＣＩ値も上昇す
るが、よシ以上に副振動ｖ２に対するＣＩ値を上昇させ
ることができスプリアスを抑圧することができる。なお
上記主面と電極の幅の比ｗ／Ｗをあま）小感くすると電
極の励振効率が低下するので下限は０．２とする。As is clear from this result, by setting the ratio w/W of the width W in the long side direction of the electrode to the width W in the long side direction of the main surface of the X plate to be 0.6 or less, the CI value for the main vibration v1 is However, the CI value for the sub-vibration v2 can be increased more than Yoshi, and the spurious can be suppressed. Note that if the ratio w/W of the width of the main surface and the electrode is made too small, the excitation efficiency of the electrode will decrease, so the lower limit is set to 0.2.
なお第７図、第８図はＸ板２の主面に形成した電極３の
各別の一例を示す図で第７図に示すものではＸ板２の主
面中央に長手方向の２／３にわたって電極３を形成し、
かつこの電極３の端部を導出部４によシ主面、角隅へ導
出している。7 and 8 are views showing different examples of the electrodes 3 formed on the main surface of the X-plate 2. In the one shown in FIG. forming an electrode 3 over
In addition, the end portion of the electrode 3 is led out through the lead-out portion 4 to the main surface and the corner.
また第８図に示すものでは電極３を同一幅で長手方向の
全長にわたって形成している。特に、第８図に示す電極
形状は、たとえば第９図に示すようにペース５に一対の
リード端子６，６を植設し、このリード端子６，６に振
動子の長手方向端部で電極３を−・ンダ、導電性接着剤
等で接続し、電気的な接続を行なうとともに機械的に保
持することができる利点がある。Further, in the case shown in FIG. 8, the electrode 3 is formed with the same width over the entire length in the longitudinal direction. In particular, in the electrode shape shown in FIG. 8, a pair of lead terminals 6, 6 are implanted in the pace 5 as shown in FIG. There is an advantage that the parts 3 can be electrically connected and mechanically held by connecting them with a conductive adhesive or the like.
したがって、タンタル酸リチウムのＸ板の主面の長辺を
Ｙ軸から時計方向に４３°乃至６３°回転した矩形の振
動子において、主面の長手方向の幅に対して電極の長手
方向の幅を０．２〜０．６とすることによシ副振動を充
分に抑圧できしかも寸法が小さくＣＩ値の低い振動子を
得ることができる。Therefore, in a rectangular vibrator in which the long side of the main surface of the X plate of lithium tantalate is rotated 43° to 63° clockwise from the Y axis, the width of the electrode in the longitudinal direction is By setting 0.2 to 0.6, secondary vibrations can be sufficiently suppressed, and a vibrator with small dimensions and a low CI value can be obtained.
以上詳述したように本発明は、タンタル酸リチウムのＸ
板を矩形に成形し、かつ長辺をＹ。As detailed above, the present invention provides lithium tantalate with
Form the board into a rectangle, and the long side is Y.
２平面内でＹ軸から時計方向に４３°乃至６３″回転し
、かつ主面の長手方向の幅に対して電極の長手方向の幅
の比を０．２〜０．６にしたので副振動によるスジリア
ス成分を大幅に抑圧し、しかも形状が小型でＣ７値の低
いタンタル酸リチウム振動子を提供することができる。It rotates from 43° to 63'' clockwise from the Y-axis within two planes, and the ratio of the longitudinal width of the electrode to the longitudinal width of the main surface is set to 0.2 to 0.6, so secondary vibrations occur. It is possible to provide a lithium tantalate oscillator which has a small size and a low C7 value, and which greatly suppresses the streaky component caused by the oxidation.
第１図は本発明の一実施例を示す平面図、第２図はタン
タル酸リチウム振動子の周波数応答特性を示す図、第３
図は長辺のＹ軸からの回転角とスノリアスの減衰量との
関係を示す図、第４図は長辺と短辺の比に対するＣ７値
の関係を示す図、第５図は上記実施例の振動子を示す斜
視図、第６図は主面の長手方向の幅に対する電極の長手
方向の幅の比とクリスタルインピーダンスとの関係を示
す図、第７図、第８図は電極形状の各別の一例を示す図
、第９図は電極とリード端子の接続の一例を示す図であ
る。
１・・・振動子、２・・・Ｘ板、３・・・電極、５・・
・ベース、６・・・リード端子。
出願人代理人 弁理士 鈴 江 武 彦第５図
第６図
Ｗ〜
第７図
第８図
第９図FIG. 1 is a plan view showing an embodiment of the present invention, FIG. 2 is a diagram showing frequency response characteristics of a lithium tantalate oscillator, and FIG.
The figure shows the relationship between the rotation angle of the long side from the Y axis and the amount of snorias attenuation, Figure 4 shows the relationship between the C7 value and the ratio of the long side to the short side, and Figure 5 shows the above example. FIG. 6 is a diagram showing the relationship between the ratio of the longitudinal width of the electrode to the longitudinal width of the main surface and the crystal impedance, and FIGS. A diagram showing another example, FIG. 9, is a diagram showing an example of the connection between an electrode and a lead terminal. 1... Vibrator, 2... X plate, 3... Electrode, 5...
・Base, 6...Lead terminal. Applicant's representative Patent attorney Takehiko Suzue Figure 5 Figure 6 W - Figure 7 Figure 8 Figure 9
Claims (1)
るＹ、Ｚ平面に沿う主面を有しかつ矩形に成形するとと
もに、長辺を上記Ｙ、Ｚ平面内でＹ軸から時計方向に４
３°乃至６３°回転したＸ板と、このＸ板の表裏主面に
長辺方向の幅の０．２〜０．６の幅で形成した電極とを
具備することを特徴とするタンタル酸リチウム振動子。 （２、特許請求の範囲第１項記載のものにおいて、電極
の長辺方向の片端部をリード線に直接接続して保持した
ことを特徴とするタンタル酸リチウム振動子。(1) It is formed into a rectangular shape with a main surface along the Y and Z planes perpendicular to the Y axis of the crystal axis of lithium tantalate, and the long sides are oriented 4 clockwise from the Y axis in the Y and Z planes.
Lithium tantalate characterized by comprising an X plate rotated by 3° to 63° and electrodes formed on the front and back main surfaces of the X plate with a width of 0.2 to 0.6 of the width in the long side direction. vibrator. (2. The lithium tantalate vibrator according to claim 1, characterized in that one end of the electrode in the long side direction is directly connected to and held by a lead wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP254983A JPS59127413A (en) | 1983-01-11 | 1983-01-11 | Lithium tantalate oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP254983A JPS59127413A (en) | 1983-01-11 | 1983-01-11 | Lithium tantalate oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59127413A true JPS59127413A (en) | 1984-07-23 |
Family
ID=11532458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP254983A Pending JPS59127413A (en) | 1983-01-11 | 1983-01-11 | Lithium tantalate oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59127413A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0226404A (en) * | 1988-07-15 | 1990-01-29 | Fujitsu Ltd | Manufacture of piezoelectric vibrator |
| JPH02301312A (en) * | 1989-05-16 | 1990-12-13 | Fujitsu Ltd | Piezoelectric vibrator |
| JPH05243889A (en) * | 1992-02-27 | 1993-09-21 | Kyocera Corp | Thickness-shear piezoelectric oscillator |
| WO2002067424A1 (en) * | 2001-02-19 | 2002-08-29 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator, ladder-type filter using this piezoelectric vibrator and double-mode piezoelectric filter |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59114909A (en) * | 1982-12-21 | 1984-07-03 | Fujitsu Ltd | High coupling piezoelectric oscillator |
-
1983
- 1983-01-11 JP JP254983A patent/JPS59127413A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59114909A (en) * | 1982-12-21 | 1984-07-03 | Fujitsu Ltd | High coupling piezoelectric oscillator |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0226404A (en) * | 1988-07-15 | 1990-01-29 | Fujitsu Ltd | Manufacture of piezoelectric vibrator |
| JPH02301312A (en) * | 1989-05-16 | 1990-12-13 | Fujitsu Ltd | Piezoelectric vibrator |
| JPH05243889A (en) * | 1992-02-27 | 1993-09-21 | Kyocera Corp | Thickness-shear piezoelectric oscillator |
| WO2002067424A1 (en) * | 2001-02-19 | 2002-08-29 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator, ladder-type filter using this piezoelectric vibrator and double-mode piezoelectric filter |
| US6992424B2 (en) | 2001-02-19 | 2006-01-31 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator ladder-type filter using piezoeletric vibrator and double-mode piezolectric filter |
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