JPS63190413A - Piezoelectric resonator - Google Patents
Piezoelectric resonatorInfo
- Publication number
- JPS63190413A JPS63190413A JP2331887A JP2331887A JPS63190413A JP S63190413 A JPS63190413 A JP S63190413A JP 2331887 A JP2331887 A JP 2331887A JP 2331887 A JP2331887 A JP 2331887A JP S63190413 A JPS63190413 A JP S63190413A
- Authority
- JP
- Japan
- Prior art keywords
- conductive
- vibration
- piezoelectric resonator
- spurious
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 230000003071 parasitic effect Effects 0.000 abstract description 13
- 239000011248 coating agent Substances 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 abstract 3
- 238000010586 diagram Methods 0.000 description 5
- 238000010304 firing Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
(a)産業上の利用分野
この発明は、フィルタなどに用いられる広がり振動モー
ドの圧電共振子に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Industrial Application Field The present invention relates to a piezoelectric resonator in a spread vibration mode used in filters and the like.
(b)従来の技術
IQOKHz〜数MHzの周波数帯域で用いられる圧電
共振子として、従来より面積振動モードや径方向振動モ
ードなどいわゆる広がり振動モードを利用した圧電共振
子が用いられている。・(C)発明が解決しようとする
問題点
ところが、この種の圧電共振子においては、基本波の周
波数以外に多数の寄生振動が励振され、フィルタや発振
子を構成した場合にスプリアス特性を劣化させる要因と
なっていた。第4図は従来の圧電共振子のスプリアスレ
ベルの特性を表す図である。基本波の共振周波数は約4
00 Hzであるが、高次側、たとえば4 M Hz以
上に大きな寄生振動が発生し、フィルタや発振子として
用いる際、このスプリアス特性が問題となる。このため
、従来は基本波の振動を大きくし、かつ寄生振動をなる
べく低減させるように圧電基板と振動電極の面積や形状
を工夫している。また、回路上でのスプリアス対策とし
て、中間周波トランスと併用したり、LCのローパスま
たはバイパスフィルタを設けてスプリアスを抑圧するこ
とや、2個の圧電共振子を用いてスプリアスを互いに打
ち消すように回路を構成することが行われているが、ス
プリアスの問題を根本から解消するためには圧電共振子
自体の寄生振動を低減させなければならないこの発明の
目的は圧電共振子自体の寄生振動を低減させて、スプリ
アス特性の良好な圧電共振子を提供することにある。(b) Prior Art As a piezoelectric resonator used in a frequency band from IQOKHz to several MHz, piezoelectric resonators utilizing so-called spread vibration modes such as area vibration mode and radial vibration mode have been used.・(C) Problems to be solved by the invention However, in this type of piezoelectric resonator, a large number of parasitic vibrations are excited in addition to the frequency of the fundamental wave, and when a filter or oscillator is configured, the spurious characteristics deteriorate. This was a contributing factor. FIG. 4 is a diagram showing spurious level characteristics of a conventional piezoelectric resonator. The resonant frequency of the fundamental wave is approximately 4
00 Hz, but a large parasitic vibration occurs on the higher side, for example, 4 MHz or higher, and this spurious characteristic becomes a problem when used as a filter or an oscillator. For this reason, conventionally, the areas and shapes of the piezoelectric substrate and the vibrating electrode have been designed to increase the vibration of the fundamental wave and reduce the parasitic vibration as much as possible. In addition, as a countermeasure against spurious noise on the circuit, it is possible to suppress spurious noise by using an intermediate frequency transformer together with an LC low-pass or bypass filter, or by using two piezoelectric resonators to cancel out spurious waves. However, in order to fundamentally eliminate the spurious problem, it is necessary to reduce the parasitic vibration of the piezoelectric resonator itself.The purpose of this invention is to reduce the parasitic vibration of the piezoelectric resonator itself. Therefore, it is an object of the present invention to provide a piezoelectric resonator with good spurious characteristics.
(d1問題点を解決するための手段
この発明の圧電共振子は、圧電基板の両主表面に導電性
被膜からなる振動電極を形成し、広がり振動モードで使
用する圧電共振子において、前記導電性被膜の少なくと
もいずれか一方の表面に4電性または絶縁性ペーストを
塗布したことを特徴としている。(Means for Solving Problem d1) The piezoelectric resonator of the present invention has vibrating electrodes made of conductive films formed on both main surfaces of a piezoelectric substrate, and is used in a spread vibration mode. It is characterized in that a tetraelectric or insulating paste is applied to at least one surface of the coating.
(ill)作用
この発明の圧電共振子においては、導電性被膜からなる
振動電極の表面に導電性または絶縁性ペーストが付着さ
れるため、振動電極に質量が付加される。このため、特
に高次側の寄生振動はこの付加質量によって抑圧され、
スプリアスレベルが大幅に低減される。しかも、振動電
極上に付着さくr)実施例
第1図はこの発明の実施例である圧電共振子の構造を表
す断面図である。図において1はPb(Ti、Zr)O
s・などの圧電セラミクスからなる基板であり、この両
主表面に銀ペーストの塗布。(ill) Function In the piezoelectric resonator of the present invention, since a conductive or insulating paste is adhered to the surface of the vibrating electrode made of a conductive film, mass is added to the vibrating electrode. Therefore, parasitic vibrations, especially on the higher order side, are suppressed by this additional mass,
Spurious levels are significantly reduced. In addition, the piezoelectric resonator is attached onto the vibrating electrode (r) Embodiment FIG. 1 is a sectional view showing the structure of a piezoelectric resonator according to an embodiment of the present invention. In the figure, 1 is Pb(Ti, Zr)O
It is a substrate made of piezoelectric ceramics such as s., and silver paste is applied to both main surfaces.
焼成により振動電極2a、2bが形成されている、これ
らの振動電極は圧電基板1を広がり振動させるようにパ
ターン化されている。振動電極2aの表面にさらに、た
とえばエポキシ系樹脂中にAg粉末が分散されてなる導
電性ペース)3aが塗布され乾燥固化されている。この
導電性ペースト3aは振動電極2aに対して付加質量と
して作用し、寄生振動を抑圧する。特に、厚み振動モー
ドの寄生振動が効率よく抑圧され、高次のスプリアスレ
ベルが十分低減される。Vibrating electrodes 2a and 2b are formed by firing, and these vibrating electrodes are patterned so as to spread and vibrate the piezoelectric substrate 1. Further, a conductive paste (3a) made of, for example, Ag powder dispersed in an epoxy resin is applied to the surface of the vibrating electrode 2a and dried and solidified. This conductive paste 3a acts as an additional mass to the vibrating electrode 2a, suppressing parasitic vibrations. In particular, parasitic vibrations in the thickness vibration mode are efficiently suppressed, and high-order spurious levels are sufficiently reduced.
第2図は同圧電共振子のスプリアスレベルの特性を表す
図である。第4図に示した従来の圧電共振子のスプリア
ス特性と比較して明らかなように% 4 M Hz以上
の厚み振動モードによる寄生振動は十分低減されている
。FIG. 2 is a diagram showing spurious level characteristics of the same piezoelectric resonator. As is clear from the comparison with the spurious characteristics of the conventional piezoelectric resonator shown in FIG. 4, the parasitic vibration due to the thickness vibration mode of % 4 MHz or higher is sufficiently reduced.
なお、実施例は圧電基板の両主表面に形成された振動電
極のうち、一方の振動電極にのみ導電性ペーストを塗布
した例であったが、両方の振動電極に導電性ペーストを
塗布してもよい、第3図はその場合の圧電共振子の構造
を表す断面図である。図に示すように、振動電極2a、
2bの両方に感電性ペースト3a、3bが塗布されてい
る。この場合にも、導電性ペース)3a、3bの付加質
量の作用によって寄生振動が抑圧される。Although the example was an example in which conductive paste was applied to only one of the vibrating electrodes formed on both main surfaces of the piezoelectric substrate, it is possible to apply conductive paste to both vibrating electrodes. FIG. 3 is a sectional view showing the structure of the piezoelectric resonator in that case. As shown in the figure, a vibrating electrode 2a,
Electrosensitive pastes 3a and 3b are applied to both of the electrodes 2b. Also in this case, parasitic vibrations are suppressed by the action of the additional mass of the conductive pastes 3a and 3b.
上記いずれの実施例も振動電極に導電性ペーストを塗布
した例であったが、導電性ペーストを介さず、振動電極
に直接信号を入出力するように構成すれば、絶縁性のペ
ーストを用いることも可能である。さらに、振動電極を
厚膜焼成以外に蒸着やスパッタリングによって形成して
もよい。In all of the above embodiments, a conductive paste was applied to the vibrating electrode, but if the configuration is such that signals are directly input/output to the vibrating electrode without going through the conductive paste, an insulating paste can be used. is also possible. Furthermore, the vibrating electrode may be formed by vapor deposition or sputtering instead of thick film firing.
(&1発明の効果
以上のようにこの発明によれば、圧電共振子の寄生振動
が効率よく抑圧され、この圧電共振子をフィルタや発振
子として用いる際、不要周波数帯域の通過やスプリアス
発振などを大幅に低減することができる。(&1 Effects of the Invention As described above, according to the present invention, the parasitic vibrations of the piezoelectric resonator are efficiently suppressed, and when this piezoelectric resonator is used as a filter or oscillator, the passage of unnecessary frequency bands and spurious oscillations are avoided. can be significantly reduced.
第1図はこの発明の実施例である圧電共振子の構造を表
す断面図、第2図は同圧電共振子のスプリアス特性を表
す図、第3図は他の実施例にかかる圧電共振子の構造を
表す断面図、第4図は従来の圧電共振子のスプリアス特
性を表す図である。
1−圧電基板、2a、2b−振動電極、3a、3b−導
電性ペースト。FIG. 1 is a cross-sectional view showing the structure of a piezoelectric resonator according to an embodiment of the present invention, FIG. 2 is a diagram showing spurious characteristics of the same piezoelectric resonator, and FIG. 3 is a diagram showing a piezoelectric resonator according to another embodiment. FIG. 4, a cross-sectional view showing the structure, is a diagram showing spurious characteristics of a conventional piezoelectric resonator. 1 - piezoelectric substrate, 2a, 2b - vibrating electrode, 3a, 3b - conductive paste.
Claims (1)
極を形成し、広がり振動モードで使用する圧電共振子に
おいて、前記導電性被膜の少なくともいずれか一方の表
面に導電性または絶縁性ペーストを塗布したことを特徴
とする圧電共振子。(1) In a piezoelectric resonator that is used in a spread vibration mode with vibrating electrodes made of conductive films formed on both main surfaces of a piezoelectric substrate, conductive or insulating paste is applied to at least one surface of the conductive film. A piezoelectric resonator characterized by being coated with.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2331887A JPS63190413A (en) | 1987-02-02 | 1987-02-02 | Piezoelectric resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2331887A JPS63190413A (en) | 1987-02-02 | 1987-02-02 | Piezoelectric resonator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63190413A true JPS63190413A (en) | 1988-08-08 |
Family
ID=12107235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2331887A Pending JPS63190413A (en) | 1987-02-02 | 1987-02-02 | Piezoelectric resonator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63190413A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04112521U (en) * | 1991-03-14 | 1992-09-30 | 株式会社村田製作所 | piezoelectric resonator |
US20100158283A1 (en) * | 2008-12-22 | 2010-06-24 | Electronics And Telecommunications Research Institute | Piezoelectric speaker and method of manufacturing the same |
USRE42009E1 (en) | 2003-09-17 | 2010-12-28 | Panasonic Corporation | Piezoelectric resonator having a spurious component control layer, filter using the piezoelectric resonator, and duplexer using the piezoelectric resonator |
-
1987
- 1987-02-02 JP JP2331887A patent/JPS63190413A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04112521U (en) * | 1991-03-14 | 1992-09-30 | 株式会社村田製作所 | piezoelectric resonator |
USRE42009E1 (en) | 2003-09-17 | 2010-12-28 | Panasonic Corporation | Piezoelectric resonator having a spurious component control layer, filter using the piezoelectric resonator, and duplexer using the piezoelectric resonator |
US20100158283A1 (en) * | 2008-12-22 | 2010-06-24 | Electronics And Telecommunications Research Institute | Piezoelectric speaker and method of manufacturing the same |
US8712079B2 (en) * | 2008-12-22 | 2014-04-29 | Electronics And Telecommunications Research Institute | Piezoelectric speaker and method of manufacturing the same |
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